CN104743778A - Vacuum dehydroxylation furnace for semiconductor quartz glass products - Google Patents
Vacuum dehydroxylation furnace for semiconductor quartz glass products Download PDFInfo
- Publication number
- CN104743778A CN104743778A CN201310734377.5A CN201310734377A CN104743778A CN 104743778 A CN104743778 A CN 104743778A CN 201310734377 A CN201310734377 A CN 201310734377A CN 104743778 A CN104743778 A CN 104743778A
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- quartz glass
- heater
- semi
- air outlet
- furnace
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The invention discloses a vacuum dehydroxylation furnace for semiconductor quartz glass products. The furnace comprises a furnace door arranged at one side of the furnace body. A trolley is arranged inside the furnace body. The trolley is fixedly connected with the furnace body. The bottom of the trolley has rollers. A motor is connected with the outside of the trolley. The furnace body has a furnace body bottom opposite to the furnace door. The furnace door and the furnace body bottom are provided with air inlets. Air outlets are respectively arranged above and below the middle part of the furnace body. The furnace door, the furnace door bottom and upper surface, lower surface, front surface and rear surface of the furnace body are respectively provided with a heater. The heater in each direction is individually connected with a temperature controller. According to the invention, the charging difficulty of a large-aperture quartz tube is solved, safety and operability of loading and unloading and charging and discharging are remarkably enhanced, labor intensity and risk are greatly reduced, charging and discharging processes can be finished at a time, repeated turnover problem is avoided, turnover of a material shelf is not required frequently, the operating process is more convenient, and service life is longer.
Description
Technical field
The present invention relates to a kind of vacuum deshydroxy stove, be specifically related to a kind of semi-conductor quartz glass product vacuum deshydroxy stove.
Background technology
Conventional semiconductors quartz glass product with the structure of vacuum deshydroxy stove as shown in Figure 1, semi-conductor quartz glass product, when passing in and out stove, is opened fire door after needing first to unclamp locking latches, is then pulled out from body of heater with the charging tray of fork truck by feeder.And, adopt above-mentioned vacuum deshydroxy stove when cooling, as shown in Figure 2, the upper surface of body of heater is blast inlet, and lower surface is air outlet, wind direction flows in tube surfaces from the top down, cool gradually from outside four circumferential centers, make cooling temperature uneven, cause the tubing defect of preparation more, easily make auxiliary material be oxidized, production efficiency of equipment is very low simultaneously.Therefore, the problems such as it mainly exists charging difficulty for vacuum deshydroxy stove traditional at present, potential safety hazard is large, labour intensity is large, plant efficiency is low, yield poorly, production cost is high.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of semi-conductor quartz glass product vacuum deshydroxy stove, solve the problem for heavy caliber silica tube charging difficulty in the use procedure of traditional vacuum deshydroxy stove, turnover stove process can be completed once, avoid in prior art and repeatedly have enough to meet the need problem.
The invention provides a kind of semi-conductor quartz glass product vacuum deshydroxy stove, comprise fire door, described fire door is arranged at the side of body of heater, described furnace interior is provided with chassis, described chassis is fixedly connected with fire door, and the bottom of described chassis has roller, is connected with motor outside described chassis.
Described fire door is also connected with pneumatics.
Described body of heater has the bottom of furnace body relative with fire door, described fire door is provided with the first blast inlet, bottom of furnace body is provided with the second blast inlet, the top at the middle part of described body of heater is provided with the first air outlet, and the below at the middle part of described body of heater is provided with the second air outlet.
Described first blast inlet connects the first air cooling mechanism, and described second blast inlet connects the second air cooling mechanism, and described first air outlet is all connected the first air cooling mechanism with the second air outlet, and described first air outlet is all connected the second air cooling mechanism with the second air outlet.
Described first air cooling mechanism is connected with the first blast inlet by First Heat Exchanger; Described first air cooling mechanism is connected with the first air outlet, the second air outlet respectively by the second interchanger; Described second air cooling mechanism is connected with the second blast inlet by the 3rd interchanger, and described second air cooling mechanism is connected with the first air outlet, the second air outlet respectively by the 4th interchanger.
Described fire door is provided with primary heater, is provided with secondary heater on bottom fire door, the upper surface of described body of heater, lower surface, front surface, rear surface are respectively arranged with the 3rd well heater, the 4th well heater, the 5th well heater, the 6th well heater.
Described primary heater connects the first temperature controller; Described secondary heater connects the second temperature controller; Described 3rd well heater connects the 3rd temperature controller; Described 4th well heater connects the 4th temperature controller; Described 5th well heater connects the 5th temperature controller; Described 6th well heater connects the 6th temperature controller.
Described first air cooling mechanism and the second air cooling mechanism alternate cycles use.
Described semi-conductor quartz glass product is semi-conductor quartz glass tube or semi-conductor quartz glass bar.
The advantage that the present invention has is:
The invention provides a kind of semi-conductor quartz glass product vacuum deshydroxy stove, solve the problem for heavy caliber silica tube charging difficulty in the use procedure of traditional vacuum deshydroxy stove, the handling of heavy caliber quartz glass goods, the security passing in and out stove and operability are significantly improved, and make labour intensity and the amplitude decline that has a big risk, turnover stove process can be completed once, avoid the problem repeatedly had enough to meet the need in prior art, do not need to have enough to meet the need bin continually, make that its operating process is more quick, longer service life.The type of cooling of partial vacuum provided by the invention deshydroxy stove changes to some extent relative to conventional art, not only increases production efficiency and the output of equipment, but also reduces production cost, improves the quality of producing product.
Accompanying drawing explanation
Fig. 1 is the structural representation of traditional vacuum deshydroxy stove;
Fig. 2 is the cooling schematic diagram of traditional vacuum deshydroxy stove;
Fig. 3 is the structural representation of vacuum deshydroxy stove provided by the invention;
Fig. 4 is the cooling schematic diagram of vacuum deshydroxy stove provided by the invention.
In figure: 1-fire door; 2-body of heater; 3-chassis; 4-first air cooling mechanism; 5-second air cooling mechanism; 6-First Heat Exchanger; 7-second interchanger; 8-the 3rd interchanger; 9-the 4th interchanger; 10-first blast inlet; 11-second blast inlet; 12-first air outlet; 13-second air outlet.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described, can better understand the present invention and can be implemented, but illustrated embodiment is not as a limitation of the invention to make those skilled in the art.
The invention provides a kind of semi-conductor quartz glass product vacuum deshydroxy stove, as shown in Figure 3, original fixed siege is changed into portable siege with being distinguished as of existing vacuum deshydroxy stove, be specially, the side of body of heater 2 has fire door 1, and this fire door 1 is the structure of front fire door in the empty deshydroxy stove of corresponding existing fidelity, and correspondence no longer has rear fire door, correspondence position and body of heater 2 take shape in one, and are formed as bottom of furnace body.In body of heater 2, be also provided with chassis 3, the feeder of deshydroxy is arranged on this chassis 3 simultaneously.The bottom of described chassis 3 has slip, dilatory roller, so that chassis 3 moves forward and backward.Described chassis 3 is connected with described fire door inwall relative to the side of fire door 1, is namely fixedly welded on one, and chassis 3 is connected with motor outside going back.Like this, described fire door 1 is unclamped locking latches by pneumatics and after opening, is driven by the motor of outer company, can outwards slide by Direct driver fire door 1, so just can directly be pulled out from body of heater by feeder by chassis, so that charging or discharging.Described chassis 3 is integrated with fire door 1 forms L-type structure, the material containing mode of vacuum deshydroxy stove can be made different, do not need to have enough to meet the need bin frequently, motive force can be saved in a large number, reduce labour cost, the advantage such as there is conveniently, safe, quick, and solve the problems such as the handling of heavy caliber silica tube are inconvenient, turnover has a big risk, circulation difficulty, optimize furnace binding simultaneously, improve equipment performance, reduce operational risk.
The type of cooling that in the present invention, vacuum deshydroxy stove adopts in addition also changes, obviously different from the cooling performance that the type of cooling of the prior art produces, and makes the temperature homogeneity of vacuum deshydroxy process more reliable.As shown in Figure 3, the traditional vacuum deshydroxy stove type of cooling is changed in the present invention, adopt two to overlap the circulating cooling system be used alternatingly and carry out circulating cooling, be specially: in fire door 1 position, bottom of furnace body (former rear fire door position) arranges the first blast inlet 10, second blast inlet 11 respectively, top in the middle part of corresponding body of heater 2, below arrange the first air outlet 12, second air outlet 13, be blown into from the blast inlet of fire door 1 or bottom of furnace body like this and enter cold wind, and in the middle part of body of heater above and below air outlet, formed circulation cooling path.First blast inlet 10, second blast inlet 11 of both sides connects the first air cooling mechanism 4, second air cooling mechanism 5 respectively by First Heat Exchanger 6, the 3rd interchanger 8, first air outlet 12, second air outlet 13 connects the first air cooling mechanism 4 respectively by the second interchanger 7, first air outlet 12, second air outlet 13 also connects the second air cooling mechanism 5 respectively by the 4th interchanger 9, and then forms two cover circulating cooling systems respectively by two cover air cooling mechanisms.Two cover system intervals work general interval times were about 30 ~ 60 minutes, and corresponding air cooling mechanism can adopt the blower fan of 25-30KW.Adopt this circulating cooling system that the cooling rate of the quartz glass product of whole furnace interior can be made faster, original upper and lower surface circulating cooling is changed into the cooling of caliber direction, front and back, blow to the other end from one end of pipe.When cooled, first pneumatic a set of cooling system, opens the first blast inlet 10 and the first air outlet 12, second air outlet 13, opens the blower fan of the first corresponding air cooling mechanism 4; After cooling for some time, stop the first air cooling mechanism 4, open another set of cooling system, correspondence opens the second blast inlet 11 and the first air outlet 12, second air outlet 13, the blower fan opening the second corresponding air cooling mechanism 5 cools, and like this, two cover cooling systems are alternately practical.For hollow Glass tubing, blow along tubing caliber hole wind direction fore-and-aft direction, two way alternate circulating cooling, wind is blown into from the first blast inlet 10 or the second blast inlet 11, blow out from the first air outlet 12, second air outlet 13, and then realize cooling from center to surrounding, its cooling temperature is even, makes tubing defect few, and not easily make auxiliary material be oxidized, cooling time is short, and simultaneously obvious energy conservation, plant efficiency are high, make production technique more flexibly, have more controllability.Simultaneously equipment provided by the invention environmental protection more, energy-conservation, recirculated water and cooling gas usage quantity significantly decline.
The type of heating that in the present invention, vacuum deshydroxy stove adopts and traditional vacuum deshydroxy stove are also distinguished to some extent, the heating of 3rd district is adopted in described prior art, namely well heater is set at upper and lower surface three hot faces of front and back fire door and body of heater, and then form three sections before, during and after making whole body of heater transverse direction, utilize three temperature controllers to carry out heated for controlling temperature respectively.But existing type of heating is three sections of temperature controls, every section all exists the temperature difference, and each temperature control section also exists the temperature difference, and temperature is extremely uneven, differs more than 10 degree.Six districts are adopted to heat in the present invention, namely well heater (i.e. primary heater, secondary heater, the 3rd well heater, the 4th well heater, the 5th well heater, the 6th well heater) is set respectively forms six hot faces in the upper surface of fire door, bottom of furnace body and body of heater, lower surface, front surface, rear surface, further, the independent temperature controller (i.e. the first temperature controller, the second temperature controller, the 3rd temperature controller, the 4th temperature controller, the 5th temperature controller, the 6th temperature controller) that adopts respectively of each hot face carries out temperature control.Namely realize up, down, left, right, before and after six orientation and heat separately independent temperature control, the temperature difference is less, can control below 10 degree.
Vacuum deshydroxy stove of the present invention is than traditional vacuum deshydroxy stove type of cooling, due to the change of wind direction guiding, internal circulation can be flowed to along the tubing of design, wind-force dispersion in prior art, pressure and direction are all difficult to control, in the present invention, pressure more easily controls, and inflation pressure can bring up to 1.9MPa by 0.4MPa, and quality product is significantly improved.
Traditional cooling recirculation system is 2 covers and with circulating cooling system, traditional Recycle design is upper entering and lower leaving, wind direction enters heating chamber from the top intake opening of heating chamber, blower fan is returned from the air outlet opening of heating chamber bottom, continuous circulation, two blower fans work simultaneously, and before and after the temperature of heating chamber and up and down, the decline of tubing temperature is very fast, middle due to wind direction guiding problem, lower the temperature very slow.In corresponding the present invention, cooling recirculation system is 2 overlap independently Rapid Circulation system, traditional Recycle design is that both sides enter, heating chamber is entered by fire door section in the present invention, along caliber direction through the circulation of another fire door direction, for front and back air intake, by blower fan, wind enters heating chamber along channelizing line route air door cylinder (the first blast inlet 10), in heating chamber, wind direction along tubing diameter of axle direction forward by blower fan out, the second interchanger 7 is entered again along water conservancy diversion circuit, air-flow returns blower fan by water conservancy diversion circuit again, a set of cooling system is closed through 30-60 minute, open another set of, until reach tapping temperature, stop air-cooled.Before and after the temperature of heating chamber and up and down and center tubing temperature decline very fast, centre, due to wind direction horizontally-guided, lowers the temperature faster.Cease operation between two cover systems are independent, namely improve fast cold efficiency, reduce rapid cooling cost.
The present invention is compared with conventional art, and a whole set of vacuum deshydroxy stove has more hommization, operational safety, and labour intensity alleviates; Equipment performance significantly improves, the improvement of temperature homogeneity, is that quality product is more stable; The change of the type of cooling, plant efficiency is increased substantially, and production cost significantly reduces, and technique adjustment is more flexible.
The above embodiment is only that protection scope of the present invention is not limited thereto in order to absolutely prove the preferred embodiment that the present invention lifts.The equivalent alternative or conversion that those skilled in the art do on basis of the present invention, all within protection scope of the present invention.Protection scope of the present invention is as the criterion with claims.
Claims (9)
1. a semi-conductor quartz glass product vacuum deshydroxy stove, is characterized in that, comprise fire door, described fire door is arranged at the side of body of heater, and described furnace interior is provided with chassis, and described chassis is fixedly connected with fire door, the bottom of described chassis has roller, is connected with motor outside described chassis.
2. semi-conductor quartz glass product vacuum deshydroxy stove according to claim 1, it is characterized in that, described fire door is also connected with pneumatics.
3. semi-conductor quartz glass product vacuum deshydroxy stove according to claim 2, it is characterized in that, described body of heater has the bottom of furnace body relative with fire door, described fire door is provided with the first blast inlet, bottom of furnace body is provided with the second blast inlet, the top at the middle part of described body of heater is provided with the first air outlet, and the below at the middle part of described body of heater is provided with the second air outlet.
4. semi-conductor quartz glass product vacuum deshydroxy stove according to claim 3, it is characterized in that, described first blast inlet connects the first air cooling mechanism, described second blast inlet connects the second air cooling mechanism, described first air outlet is all connected the first air cooling mechanism with the second air outlet, and described first air outlet is all connected the second air cooling mechanism with the second air outlet.
5. semi-conductor quartz glass product vacuum deshydroxy stove according to claim 4, it is characterized in that, described first air cooling mechanism is connected with the first blast inlet by First Heat Exchanger; Described first air cooling mechanism is connected with the first air outlet, the second air outlet respectively by the second interchanger; Described second air cooling mechanism is connected with the second blast inlet by the 3rd interchanger, and described second air cooling mechanism is connected with the first air outlet, the second air outlet respectively by the 4th interchanger.
6. semi-conductor quartz glass product vacuum deshydroxy stove according to claim 5, it is characterized in that, described fire door is provided with primary heater, be provided with secondary heater on bottom fire door, the upper surface of described body of heater, lower surface, front surface, rear surface are respectively arranged with the 3rd well heater, the 4th well heater, the 5th well heater, the 6th well heater.
7. semi-conductor quartz glass product vacuum deshydroxy stove according to claim 6, it is characterized in that, described primary heater connects the first temperature controller; Described secondary heater connects the second temperature controller; Described 3rd well heater connects the 3rd temperature controller; Described 4th well heater connects the 4th temperature controller; Described 5th well heater connects the 5th temperature controller; Described 6th well heater connects the 6th temperature controller.
8. semi-conductor quartz glass product vacuum deshydroxy stove according to claim 7, is characterized in that, described first air cooling mechanism and the second air cooling mechanism alternate cycles use.
9. semi-conductor quartz glass product vacuum deshydroxy stove as claimed in any of claims 1 to 8, it is characterized in that, described semi-conductor quartz glass product is semi-conductor quartz glass tube or semi-conductor quartz glass bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310734377.5A CN104743778A (en) | 2013-12-27 | 2013-12-27 | Vacuum dehydroxylation furnace for semiconductor quartz glass products |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310734377.5A CN104743778A (en) | 2013-12-27 | 2013-12-27 | Vacuum dehydroxylation furnace for semiconductor quartz glass products |
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| CN104743778A true CN104743778A (en) | 2015-07-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310734377.5A Pending CN104743778A (en) | 2013-12-27 | 2013-12-27 | Vacuum dehydroxylation furnace for semiconductor quartz glass products |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105200196A (en) * | 2015-10-20 | 2015-12-30 | 江苏邦泰炉业有限公司 | Furnace door fixed type car bottom furnace |
| CN108439772A (en) * | 2018-04-10 | 2018-08-24 | 东海县太阳光新能源有限公司 | A kind of vacuum deshydroxy stove of quartz glass product |
| CN109509712A (en) * | 2017-09-14 | 2019-03-22 | 中国电子科技集团公司第四十八研究所 | A kind of Equipment for Heating Processing auxiliary oven door system |
| CN115745427A (en) * | 2022-11-30 | 2023-03-07 | 东海县晶瑞达石英制品有限公司 | Vacuum dehydroxylation furnace for semiconductor quartz glass products |
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| JPH0469570B2 (en) * | 1986-06-12 | 1992-11-06 | Tatsuta Densen Kk | |
| CN201704207U (en) * | 2010-04-21 | 2011-01-12 | 徐胜利 | Quartz tube dehydroxylation furnace access device |
| CN201722274U (en) * | 2010-07-08 | 2011-01-26 | 上海恒热热工设备有限公司 | Trolley type electrical heating glass melting crucible furnace |
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| CN203728704U (en) * | 2013-12-27 | 2014-07-23 | 江苏太平洋石英股份有限公司 | Vacuum dehydroxylation furnace for semiconductor quartz glass product |
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2013
- 2013-12-27 CN CN201310734377.5A patent/CN104743778A/en active Pending
Patent Citations (5)
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| JPH0469570B2 (en) * | 1986-06-12 | 1992-11-06 | Tatsuta Densen Kk | |
| CN201704207U (en) * | 2010-04-21 | 2011-01-12 | 徐胜利 | Quartz tube dehydroxylation furnace access device |
| CN201722274U (en) * | 2010-07-08 | 2011-01-26 | 上海恒热热工设备有限公司 | Trolley type electrical heating glass melting crucible furnace |
| CN203249496U (en) * | 2013-04-27 | 2013-10-23 | 沈阳广泰真空设备有限公司 | Novel vacuum furnace |
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Non-Patent Citations (1)
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| 徐英锋等: "石英脱羟真空炉的机械设计研究", 《真空》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105200196A (en) * | 2015-10-20 | 2015-12-30 | 江苏邦泰炉业有限公司 | Furnace door fixed type car bottom furnace |
| CN109509712A (en) * | 2017-09-14 | 2019-03-22 | 中国电子科技集团公司第四十八研究所 | A kind of Equipment for Heating Processing auxiliary oven door system |
| CN108439772A (en) * | 2018-04-10 | 2018-08-24 | 东海县太阳光新能源有限公司 | A kind of vacuum deshydroxy stove of quartz glass product |
| CN115745427A (en) * | 2022-11-30 | 2023-03-07 | 东海县晶瑞达石英制品有限公司 | Vacuum dehydroxylation furnace for semiconductor quartz glass products |
| CN115745427B (en) * | 2022-11-30 | 2023-10-20 | 东海县晶瑞达石英制品有限公司 | Vacuum dehydroxylation furnace for semiconductor quartz glass products |
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Application publication date: 20150701 |