CN104723210A - Electromagnetism one-dimensional constant force device and control method thereof - Google Patents
Electromagnetism one-dimensional constant force device and control method thereof Download PDFInfo
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- CN104723210A CN104723210A CN201510083728.XA CN201510083728A CN104723210A CN 104723210 A CN104723210 A CN 104723210A CN 201510083728 A CN201510083728 A CN 201510083728A CN 104723210 A CN104723210 A CN 104723210A
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- 230000001133 acceleration Effects 0.000 claims description 7
- 238000013016 damping Methods 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 6
- 230000004907 flux Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 238000004804 winding Methods 0.000 claims description 5
- 238000005498 polishing Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
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- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
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- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
The invention discloses an electromagnetism one-dimensional constant force device and a control method thereof. The device comprises a base, a voice coil motor, a push rod, an end cover, a seal cover and a controller, the base is of a cylinder-shaped structure which is sealed in the bottom, the voice coil motor is sleeved with the base, the end cover and the seal cover are arranged on the top of the base in sequence, the end cover faces the bottom of the base and recessed inwards, limit space is defined by the end cover and the seal cover, one end of the push rod penetrates through the end cover and is connected with the voice coil motor, the other end of the push rod extends out of the seal end and the tail end of the push rod is provided with a sensor module, and the push rod is driven by the voice coil motor to move in the limit space; the sensor module is used for collecting stress signals and posture signals of the constant force device, the collecting stress signals and the posture signals are sent to the controller, coil current of the voice coil motor can be adjusted by the controller in real time according to the collecting stress signals and posture signals, and constant acting force between the constant force device and processing workpieces can be kept. The electromagnetism one-dimensional constant force device is simple in structure, low in cost, high in responding speed, good in controllability, high in adjustability, and can be suitable for industries using a robot polishing the workpieces widely.
Description
Technical field
The present invention relates to the constant force control field of industrial robot application scenario, particularly relate to electromagnetism one dimension constant force device and control method thereof.
Background technology
In the middle of industrial robot processed and applied occasion, such as polishing grinding process, often requires that robot keeps constant active force that final work pieces process effect is satisfied the demands to processing work in process.At present according to compliance, main robot is divided passive compliance and the large class of active compliance two, passive compliance most is representational for providing the passive compliance device of constant force to be the passive mechanical device that the one of america's MIT Draper experimental design is called the submissive RCC of remote center (Remote Center Compliance).RCC device is a compliant mechanism being obedient to space six-freedom degree be made up of many springs normally, it can be arranged between the wrist of robot arm and end effector, its basic functional principle is the rigidity by regulating spring, obtain the compliance varied in size, realize rotating and translation around compliant control.Active compliance most is representational for providing the device of constant force to be by the Pneumatic constant power apparatus ACF of Austrian FerRobotics Compliant Robot TecnologyGmbH company development & production, keeps constant contact force by adjustable pressure Valve controlling end-of-arm tooling and environment.
But, the submissive device of remote center keeps constant force with modifier when contacting workpiece by regulating spring, this device cannot adjust the size of power as required in real time in workpiece fabrication, and controllability is poor, and also cannot follow the tracks of the fluctuation situation of power in work.And ACF Pneumatic constant power apparatus itself is expensive, and require that outside provides pressure-sustaining gas at work, need configuration air compressor just can carry out work, not only cause operating noise comparatively large, and further increase application cost.Generally speaking, current for providing the device of constant force to exist, real-time modulability is poor, poor controllability or high in cost of production problem, significantly limit applying of industrial robot.
Summary of the invention
In order to solve above-mentioned technical problem, the object of this invention is to provide a kind of electromagnetism one dimension constant force device, another object of the present invention is to provide a kind of control method of electromagnetism one dimension constant force device.
The technical solution adopted for the present invention to solve the technical problems is:
Electromagnetism one dimension constant force device, comprise pedestal, voice coil motor, push rod, end cap, capping and controller, described pedestal is the tubular structure of sealed bottom, described voice coil motor is sleeved in pedestal, described end cap and capping are arranged on the top of pedestal successively, described end cap towards base bottom indent and and form a spacing space between capping, one end of described push rod is connected with voice coil motor through after end cap, the other end of described push rod stretches out capping and end is provided with sensor assembly, and described push rod moves under the drive of voice coil motor in spacing space;
Described sensor assembly is sent to controller for what gather constant force device by force signal and attitude signal, and described controller regulates the coil current of voice coil motor to make constant force device and processing work keep constant force according to being subject to force signal and attitude signal in real time.
Further, described voice coil motor comprises motor stator and electric mover, described motor stator comprises the contrary coil of two direction of windings, described motor stator is arranged on the bottom of pedestal, described electric mover is set in above motor stator, and one end of described push rod is connected with electric mover through after end cap.
Further, described sensor assembly comprises the one dimension force sensor by force signal for gathering constant force device and the three-axis gyroscope for the attitude signal that gathers constant force device.
Further, damping material is filled with in described spacing space.
Further, described push rod is decussate texture.
The present invention solves another technical scheme that its technical problem adopts:
The control method of described electromagnetism one dimension constant force device, comprising:
Constant force between the constant force device of S1, acquisition user setting and processing work;
S2, obtain the real-time by force signal and attitude signal of the constant force device that sensor assembly gathers;
The target of S3, the constant force of combination setting and the attitude signal calculating sensor module of acquisition is by force signal;
The target of S4, calculating sensor module is subject to the difference be subject between force signal of the constant force device of force signal and collection;
S5, adjust the coil current of voice coil motor in real time according to the difference calculated.
Further, described sensor assembly comprises the one dimension force sensor by force signal for gathering constant force device and the three-axis gyroscope for the attitude signal that gathers constant force device, and described step S3 is specially:
The target of the constant force of setting and the attitude signal calculating one dimension force sensor of acquisition is combined by force signal according to following formula:
F
target=f
connect+ m
2g sin (α)
Wherein, f
targetrepresent the target of one dimension force sensor by force signal, f
connectthe constant force of representative setting, m
2represent the quality of fixture that constant force device uses, g represents acceleration of gravity, α represent the constant force device that three-axis gyroscope gathers with the angle of horizontal plane.
Further, described step S4 is specially:
The difference DELTA f be subject between force signal of the constant force device of force signal and collection is subject to according to the target of following formula calculating one dimension force sensor:
Δ f=f
target-f
pass
Wherein, f
passwhat represent the constant force device of one dimension force sensor collection is subject to force signal.
Further, described step S4 is specially:
Adjust the coil current of voice coil motor according to the difference calculated in real time, if difference is positive number, then tune up the coil current of voice coil motor, otherwise if difference is negative, then turn the coil current of voice coil motor down.
Further, described step S4 is specially:
In conjunction with following formula, adjust the coil current of voice coil motor in real time according to the difference calculated:
Wherein, Δ i represents the adjusted value of electric current, and B represents the magnetic flux density of voice coil motor, and l represents the coil effective length of voice coil motor.
The invention has the beneficial effects as follows: electromagnetism one dimension constant force device of the present invention, comprise pedestal, voice coil motor, push rod, end cap, capping and controller, pedestal is the tubular structure of sealed bottom, voice coil motor is sleeved in pedestal, end cap and capping are arranged on the top of pedestal successively, end cap towards base bottom indent and and form a spacing space between capping, one end of push rod is connected with voice coil motor through after end cap, the other end of push rod stretches out capping and end is provided with sensor assembly, and push rod moves under the drive of voice coil motor in spacing space; Sensor assembly is sent to controller for what gather constant force device by force signal and attitude signal, and controller regulates the coil current of voice coil motor to make constant force device and processing work keep constant force according to being subject to force signal and attitude signal in real time.This constant force device structure is simple, and production cost is low, fast response time, has good controllability, and controllability is strong, can adjust power output in time thus keep the constant force with processing work.
Another beneficial effect of the present invention is: the control method of electromagnetism one dimension constant force device of the present invention, comprising: the constant force between the constant force device of S1, acquisition user setting and processing work; S2, obtain the real-time by force signal and attitude signal of the constant force device that sensor assembly gathers; The target of S3, the constant force of combination setting and the attitude signal calculating sensor module of acquisition is by force signal; The target of S4, calculating sensor module is subject to the difference be subject between force signal of the constant force device of force signal and collection; S5, adjust the coil current of voice coil motor in real time according to the difference calculated.This control method fast response time, has good controllability, and controllability is strong, can adjust power output in time thus keep the constant force with processing work.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the invention will be further described.
Fig. 1 is the frame for movement schematic diagram of electromagnetism one dimension constant force device of the present invention;
Fig. 2 is the using state schematic diagram of electromagnetism one dimension constant force device of the present invention.
Detailed description of the invention
With reference to Fig. 1, the invention provides a kind of electromagnetism one dimension constant force device, comprise pedestal 1, voice coil motor, push rod 4, end cap 5, capping 6 and controller, described pedestal 1 is the tubular structure of sealed bottom, described voice coil motor is sleeved in pedestal 1, described end cap 5 and capping 6 are arranged on the top of pedestal 1 successively, described end cap 5 towards indent bottom pedestal 1 and and form a spacing space between capping 6, one end of described push rod 4 is connected with voice coil motor through after end cap 5, the other end of described push rod 4 stretches out capping 6 and end is provided with sensor assembly 7, described push rod 4 moves under the drive of voice coil motor in spacing space,
Described sensor assembly 7 is sent to controller for what gather constant force device by force signal and attitude signal, and described controller regulates the coil current of voice coil motor to make constant force device and processing work keep constant force according to being subject to force signal and attitude signal in real time.
Be further used as preferred embodiment, described voice coil motor comprises motor stator 2 and electric mover 3, described motor stator 2 comprises the contrary coil of two direction of windings, described motor stator 2 is arranged on the bottom of pedestal 1, described electric mover 3 is set in above motor stator 2, and one end of described push rod 4 is connected with electric mover 3 through after end cap 5.
Be further used as preferred embodiment, described sensor assembly 7 comprises the one dimension force sensor by force signal for gathering constant force device and the three-axis gyroscope for the attitude signal that gathers constant force device.
Be further used as preferred embodiment, in described spacing space, be filled with damping material.
Be further used as preferred embodiment, described push rod 4 is decussate texture.
Present invention also offers a kind of control method of electromagnetism one dimension constant force device, comprising:
Constant force between the constant force device of S1, acquisition user setting and processing work;
S2, obtain the real-time by force signal and attitude signal of the constant force device that sensor assembly 7 gathers;
The target of S3, the constant force of combination setting and the attitude signal calculating sensor module 7 of acquisition is by force signal;
The target of S4, calculating sensor module 7 is subject to the difference be subject between force signal of the constant force device of force signal and collection;
S5, adjust the coil current of voice coil motor in real time according to the difference calculated.
Be further used as preferred embodiment, described sensor assembly 7 comprises the one dimension force sensor by force signal for gathering constant force device and the three-axis gyroscope for the attitude signal that gathers constant force device, and described step S3 is specially:
The target of the constant force of setting and the attitude signal calculating one dimension force sensor of acquisition is combined by force signal according to following formula:
F
target=f
connect+ m
2g sin (α)
Wherein, f
targetrepresent the target of one dimension force sensor by force signal, f
connectthe constant force of representative setting, m2 represents the quality of fixture that constant force device uses, and g represents acceleration of gravity, α represent the constant force device that three-axis gyroscope gathers with the angle of horizontal plane.
Be further used as preferred embodiment, described step S4 is specially:
The difference DELTA f be subject between force signal of the constant force device of force signal and collection is subject to according to the target of following formula calculating one dimension force sensor:
Δ f=f
target-f
pass
Wherein, f
passwhat represent the constant force device of one dimension force sensor collection is subject to force signal.
Be further used as preferred embodiment, described step S4 is specially:
Adjust the coil current of voice coil motor according to the difference calculated in real time, if difference is positive number, then tune up the coil current of voice coil motor, otherwise if difference is negative, then turn the coil current of voice coil motor down.
Be further used as preferred embodiment, described step S4 is specially:
In conjunction with following formula, adjust the coil current of voice coil motor in real time according to the difference calculated:
Wherein, Δ i represents the adjusted value of electric current, and B represents the magnetic flux density of voice coil motor, and l represents the coil effective length of voice coil motor.
Below in conjunction with specific embodiment, the invention will be further described.
Embodiment one
With reference to Fig. 1, electromagnetism one dimension constant force device, comprise pedestal 1, voice coil motor, push rod 4, end cap 5, capping 6 and controller, push rod 4 is decussate texture, pedestal 1 is the tubular structure of sealed bottom, voice coil motor is sleeved in pedestal 1, end cap 5 and capping 6 are arranged on the top of pedestal 1 successively, end cap 5 towards indent bottom pedestal 1 and and form a spacing space between capping 6, one end of push rod 4 is connected with voice coil motor through after end cap 5, the other end of push rod 4 stretches out capping 6 and end is provided with sensor assembly 7, push rod 4 moves under the drive of voice coil motor in spacing space, the crossbeam of end cap 5 pairs of push rods 4 plays position-limiting action,
Sensor assembly 7 is sent to controller for what gather constant force device by force signal and attitude signal, and controller regulates the coil current of voice coil motor to make constant force device and processing work keep constant force according to being subject to force signal and attitude signal in real time.
Controller can adopt microprocessor, ARM chip or computer etc.
The displacement of voice coil motor interacts primarily of load, current of electric, electric machine structure size and physical parameter and determined.This constant force device acts on the attitude signal being subject to force signal and device on constant force device by one dimension force sensor and three-axis gyroscope Real-time Collection, by controller computing is carried out to signal and the coil current of voice coil motor is controlled in real time, to reach voice coil motor to keep constant force object at direction of displacement.Voice coil motor is linear motor, and be convenient to the control carrying out one dimension straight line force, and have fast response time, the features such as driving force is large, can change the position of tail house rapidly when sensing that power changes, thus better to the control effects of power.In addition, the cost of voice coil motor is low, realizes constant force and controls, greatly reduce the cost of constant force device by voice coil motor.
Voice coil motor comprises motor stator 2 and electric mover 3, motor stator 2 comprises two and is mutually wound around and the contrary coil of direction of winding, motor stator 2 is arranged on the bottom of pedestal 1, and electric mover 3 is set in above motor stator 2, and one end of push rod 4 is connected with electric mover 4 through after end cap 5.Because the direction of winding of two of motor stator 2 coils is contrary, therefore can remain in the middle part of motor stator 2 bottom electric mover 3 when current lead-through.It is stressed or stressed in the other direction no matter constant force device is forward, and voice coil motor can compensate this power.
Sensor assembly 7 comprises the one dimension force sensor by force signal for gathering constant force device and the three-axis gyroscope for the attitude signal that gathers constant force device.
Damping material is filled with in spacing space, form damping module, damping material can absorb unnecessary kinetic energy, voice coil motor and damping module matched constant force polishing object, make this constant force device can keep constant force with processing work, during for robot buffing work-piece end, constant force effect can be kept.
This device combines robot active compliance and passive compliance method, existing passive compliance device need not carry out the advantage of a large amount of amendment to existing business machine people controller, combining again active compliance algorithm can to the advantage of carrying out real time modifying in the robot course of work and follow the tracks of terminal position.
Embodiment two
The control method of the electromagnetism one dimension constant force device of embodiment one, comprising:
Constant force between the constant force device of S1, acquisition user setting and processing work;
S2, obtain the real-time by force signal and attitude signal of the constant force device that sensor assembly 7 gathers, sensor assembly 7 comprises the one dimension force sensor by force signal for gathering constant force device and the three-axis gyroscope for the attitude signal that gathers constant force device;
The target of S3, the constant force of combination setting and the attitude signal calculating sensor module 7 of acquisition, by force signal, is specially:
The target of the constant force of setting and the attitude signal calculating one dimension force sensor of acquisition is combined by force signal according to following formula:
F
target=f
connect+ m
2g sin (α)
Wherein, f
targetrepresent the target of one dimension force sensor by force signal, f
connectthe constant force of representative setting, m
2represent the quality of fixture that constant force device uses, g represents acceleration of gravity, α represent the constant force device that three-axis gyroscope gathers with the angle of horizontal plane;
The target of S4, calculating sensor module 7 is subject to the difference be subject between force signal of the constant force device of force signal and collection, is specially:
The difference DELTA f be subject between force signal of the constant force device of force signal and collection is subject to according to the target of following formula calculating one dimension force sensor:
Δ f=f
target-f
pass
Wherein, f
passwhat represent the constant force device of one dimension force sensor collection is subject to force signal;
S5, adjust the coil current of voice coil motor in real time according to the difference calculated, if difference is positive number, then tune up the coil current of voice coil motor, otherwise if difference is negative, then turn the coil current of voice coil motor down.
Preferably, step S4 is specially:
In conjunction with following formula, adjust the coil current of voice coil motor in real time according to the difference calculated:
Wherein, Δ i represents the adjusted value of electric current, and B represents the magnetic flux density of voice coil motor, and l represents the coil effective length of voice coil motor.
The control principle of the present embodiment is described below in conjunction with Fig. 2.
As shown in Figure 2, suppose that the constant force of the setting of now constant force device is F
set, because device is subject to Action of Gravity Field, therefore need to compensate gravity G.Suppose that the angle that three-axis gyroscope measures constant force device and horizontal plane is α, now the actual power output F to processing work of constant force device
outshould be:
F
out＝F
set-G×sin(α)
In the middle of the course of work, the attitude of constant force device is constantly changing, therefore the actual power output F to processing work of constant force device
outshould constantly follow α to adjust in real time.
During constant force device work, its kinetic balance equation is as follows:
In above formula, B represents the magnetic flux density of voice coil motor, and l represents the coil effective length of voice coil motor, and i represents the coil current of voice coil motor, m
1represent the quality of constant force device end, a represents the acceleration of constant force device end, and c represents the damped coefficient of constant force device, and v represents the speed of constant force device end, f
passwhat represent the constant force device of one dimension force sensor collection is subject to force signal, and f' represents frictional force, f
connectthe constant force of the constant force device of representative setting, m
2represent the quality of the fixture that constant force device uses, α represents the angle of constant force device and horizontal plane.
According to above-mentioned formula, under the prerequisite that the constant force of constant force device setting is determined, what one dimension force sensor detected is subject to force signal f
passthat the angle α following constant force device end acceleration and constant force device and horizontal plane changes.And the constant force device that the speed v of the coil current i of voice coil motor and constant force device end, acceleration a, one dimension force sensor gather by force signal f
passrelevant with frictional force f'.Because constant force device is applied to thin tail sheep low-speed motion occasion, therefore can think a=0, v=0 approx, the kinetic balance equation therefore obtaining constant force device is as follows:
Therefore, during constant force device work, if the constant force of setting is f
connect, then the target of one dimension force sensor is by force signal f
targetfor:
F
target=f
connect+ m
2g sin (α)
This method is subject to the difference be subject between force signal of the constant force device of force signal and collection by the target calculating one dimension force sensor, and then the coil current of adjustment voice coil motor, thus makes constant force device and processing work keep constant force.
More than that better enforcement of the present invention is illustrated, but the invention is not limited to embodiment, those of ordinary skill in the art also can make all equivalent variations or replacement under the prerequisite without prejudice to spirit of the present invention, and these equivalent modification or replacement are all included in the application's claim limited range.
Claims (10)
1. electromagnetism one dimension constant force device, it is characterized in that, comprise pedestal, voice coil motor, push rod, end cap, capping and controller, described pedestal is the tubular structure of sealed bottom, described voice coil motor is sleeved in pedestal, described end cap and capping are arranged on the top of pedestal successively, described end cap towards base bottom indent and and form a spacing space between capping, one end of described push rod is connected with voice coil motor through after end cap, the other end of described push rod stretches out capping and end is provided with sensor assembly, described push rod moves under the drive of voice coil motor in spacing space,
Described sensor assembly is sent to controller for what gather constant force device by force signal and attitude signal, and described controller regulates the coil current of voice coil motor to make constant force device and processing work keep constant force according to being subject to force signal and attitude signal in real time.
2. electromagnetism one dimension constant force device according to claim 1, it is characterized in that, described voice coil motor comprises motor stator and electric mover, described motor stator comprises the contrary coil of two direction of windings, described motor stator is arranged on the bottom of pedestal, described electric mover is set in above motor stator, and one end of described push rod is connected with electric mover through after end cap.
3. electromagnetism one dimension constant force device according to claim 1, is characterized in that, described sensor assembly comprises the one dimension force sensor by force signal for gathering constant force device and the three-axis gyroscope for the attitude signal that gathers constant force device.
4. electromagnetism one dimension constant force device according to claim 1, is characterized in that, is filled with damping material in described spacing space.
5. electromagnetism one dimension constant force device according to claim 1, is characterized in that, described push rod is decussate texture.
6. the control method of electromagnetism one dimension constant force device according to claim 1, is characterized in that, comprising:
Constant force between the constant force device of S1, acquisition user setting and processing work;
S2, obtain the real-time by force signal and attitude signal of the constant force device that sensor assembly gathers;
The target of S3, the constant force of combination setting and the attitude signal calculating sensor module of acquisition is by force signal;
The target of S4, calculating sensor module is subject to the difference be subject between force signal of the constant force device of force signal and collection;
S5, adjust the coil current of voice coil motor in real time according to the difference calculated.
7. the control method of electromagnetism one dimension constant force device according to claim 6, it is characterized in that, described sensor assembly comprises the one dimension force sensor by force signal for gathering constant force device and the three-axis gyroscope for the attitude signal that gathers constant force device, and described step S3 is specially:
The target of the constant force of setting and the attitude signal calculating one dimension force sensor of acquisition is combined by force signal according to following formula:
F
target=f
connect+ m
2g sin (α)
Wherein, f
targetrepresent the target of one dimension force sensor by force signal, f
connectthe constant force of representative setting, m
2represent the quality of fixture that constant force device uses, g represents acceleration of gravity, α represent the constant force device that three-axis gyroscope gathers with the angle of horizontal plane.
8. the control method of electromagnetism one dimension constant force device according to claim 7, it is characterized in that, described step S4 is specially:
The difference DELTA f be subject between force signal of the constant force device of force signal and collection is subject to according to the target of following formula calculating one dimension force sensor:
Δ f=f
target-f
pass
Wherein, f
passwhat represent the constant force device of one dimension force sensor collection is subject to force signal.
9. the control method of electromagnetism one dimension constant force device according to claim 8, it is characterized in that, described step S4 is specially:
Adjust the coil current of voice coil motor according to the difference calculated in real time, if difference is positive number, then tune up the coil current of voice coil motor, otherwise if difference is negative, then turn the coil current of voice coil motor down.
10. the control method of electromagnetism one dimension constant force device according to claim 8, it is characterized in that, described step S4 is specially:
In conjunction with following formula, adjust the coil current of voice coil motor in real time according to the difference calculated:
Wherein, Δ i represents the adjusted value of electric current, and B represents the magnetic flux density of voice coil motor, and l represents the coil effective length of voice coil motor.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107544016A (en) * | 2016-06-29 | 2018-01-05 | 大族激光科技产业集团股份有限公司 | A kind of flying probe axle and its method of testing |
| CN109664295A (en) * | 2018-12-13 | 2019-04-23 | 华南理工大学 | Robot belt sanding constant force control method and device based on one-dimensional force snesor |
| CN114425733A (en) * | 2021-12-14 | 2022-05-03 | 上海工程技术大学 | Two-degree-of-freedom force control end effector |
| CN114448320A (en) * | 2021-12-22 | 2022-05-06 | 上海智能制造功能平台有限公司 | Electromagnetic compliance device based on voice coil motor |
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| JPH11245148A (en) * | 1998-03-02 | 1999-09-14 | Okamoto Machine Tool Works Ltd | Wafer polishing machine, and method for polishing wafer using the same |
| WO2008060091A1 (en) * | 2006-11-15 | 2008-05-22 | Korea Basic Science Institute | Automatic constant pressure polishing apparatus for improving surface accuracy of lens |
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| CN103009218A (en) * | 2012-12-17 | 2013-04-03 | 华南理工大学 | Robot polishing device and polishing method thereof |
| JP2014151383A (en) * | 2013-02-06 | 2014-08-25 | Mitsubishi Electric Corp | Holding device for polishing shaft-like member and polishing apparatus using the same |
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2015
- 2015-02-14 CN CN201510083728.XA patent/CN104723210B/en not_active Expired - Fee Related
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| JPH11245148A (en) * | 1998-03-02 | 1999-09-14 | Okamoto Machine Tool Works Ltd | Wafer polishing machine, and method for polishing wafer using the same |
| WO2008060091A1 (en) * | 2006-11-15 | 2008-05-22 | Korea Basic Science Institute | Automatic constant pressure polishing apparatus for improving surface accuracy of lens |
| CN102649258A (en) * | 2012-05-17 | 2012-08-29 | 广东新海岸机械有限公司 | Polishing grinding head for glass edge grinding machine |
| CN103009218A (en) * | 2012-12-17 | 2013-04-03 | 华南理工大学 | Robot polishing device and polishing method thereof |
| JP2014151383A (en) * | 2013-02-06 | 2014-08-25 | Mitsubishi Electric Corp | Holding device for polishing shaft-like member and polishing apparatus using the same |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107544016A (en) * | 2016-06-29 | 2018-01-05 | 大族激光科技产业集团股份有限公司 | A kind of flying probe axle and its method of testing |
| CN109664295A (en) * | 2018-12-13 | 2019-04-23 | 华南理工大学 | Robot belt sanding constant force control method and device based on one-dimensional force snesor |
| CN109664295B (en) * | 2018-12-13 | 2021-12-21 | 华南理工大学 | Robot abrasive belt grinding constant force control method and device based on one-dimensional force sensor |
| CN114425733A (en) * | 2021-12-14 | 2022-05-03 | 上海工程技术大学 | Two-degree-of-freedom force control end effector |
| CN114425733B (en) * | 2021-12-14 | 2022-12-06 | 上海工程技术大学 | Two-degree-of-freedom force control end effector |
| CN114448320A (en) * | 2021-12-22 | 2022-05-06 | 上海智能制造功能平台有限公司 | Electromagnetic compliance device based on voice coil motor |
| CN114448320B (en) * | 2021-12-22 | 2024-05-24 | 上海智能制造功能平台有限公司 | Electromagnetic compliance device based on voice coil motor |
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