CN104647374B - A kind of Multi-freedom-degreemanipulator manipulator for flexible membrane transfer - Google Patents

Abstract

The invention belongs to the field of equipment related to flexible electronics production, and discloses a multi-degree-of-freedom manipulator for flexible film transfer, including a pick-up unit, an α-rotation module, a γ-rotation module, an XYZ three-axis translation module, an air distribution unit and a vision The positioning unit, in which the pick-up unit has a β rotation degree of freedom around the Y axis, and can adjust the adsorption area in the axial and circumferential directions; the α, γ rotation module and the XYZ three-axis translation module are respectively used to realize the robot around the X The α and γ rotational degrees of freedom for axis and Z axis rotation and the translational degrees of freedom in the three directions of XYZ; the air circuit distribution unit performs the switch control and vacuum degree detection of each vacuum air circuit inside the picking unit; the visual positioning unit is used to realize flexible Position and angle detection of the film in the XY plane and position detection in the Z-axis direction. Through the present invention, the spatial posture, transfer force and adsorption interval of the manipulator can be adjusted independently, and high-precision absorption and transfer of the flexible film can be realized.

Description

A multi-degree-of-freedom manipulator for flexible film transfer

technical field

The invention belongs to the field of equipment related to flexible electronics production, and more specifically relates to a multi-degree-of-freedom manipulator for flexible film transfer.

Background technique

With the improvement of industrial automation technology and the requirements for production efficiency, industrial robots are increasingly used in industrial production, and manipulators, as the earliest industrial robots, have been widely used in industrial manufacturing, medical, military and other fields. . Flexible film is a relatively common processing object in industrial production. It is usually required to perform transfer operations such as picking and placing, and the accuracy of the transfer operation directly affects the processing quality of the final product. However, for many flexible films, such as flexible substrate films in solar cells, RFID electronic smart labels and flexible membrane switches, etc., they have the characteristics of light weight and easy deformation, and the problem of inaccurate picking and placing positions during the transfer process It is more prominent, and it is easy to increase the difficulty of lamination and patching in the later stage, resulting in poor quality of finished products and low productivity; in particular, these flexible films generally carry chips or printed circuits. During the transfer process of flexible films, If you do not pay attention to the contact force on the flexible film during the transfer process, there may be serious problems such as damage to the flexible film due to excessive contact force.

Some devices using manipulators to manipulate flexible membranes have been proposed in the prior art. For example, CN200980104088 discloses a manipulator for substrate transfer, which is provided on the surface of the manipulator with a first seating surface for seating the outer periphery of the lower surface of the substrate and a second seating surface for the lower surface of the substrate when it is bent downward in a concave shape. The seating surface, thereby realizing the bracket and fixation of the substrate; however, this manipulator is more suitable for rigid substrates, and only prevents excessive deformation of the substrate through fixed stepped structures and slopes. In addition, CN20121012316.7 discloses a sheet material vacuum pick-and-place device, which can realize the position adjustment in the three directions of XYZ and the angle adjustment in the Z-axis direction; Active adaptive adjustment, and the degree of freedom of position and attitude adjustment and control accuracy need to be further improved.

Contents of the invention

In view of the above defects or improvement needs of the prior art, the present invention provides a multi-degree-of-freedom manipulator for flexible film transfer, in which by integrating the structure of the flexible film itself and its packaging process characteristics, and its key components such as the pick-up unit , α rotation module, γ rotation module, etc., and the specific structure and their mutual setting relationship are researched and designed, and the supporting air distribution unit and visual positioning unit are improved, so that the positioning can be realized in a high-precision and easy-to-manipulate manner. The attitude adjustment of the manipulator with up to six degrees of freedom, especially the precise detection and control of the adsorption area of the pick-up unit and the contact force during the transfer of the flexible film, is especially suitable for flexible substrate films for solar cells, RFID tags and flexible films. The transfer of flexible electronic components such as membrane switches.

In order to achieve the above object, according to the present invention, a multi-degree-of-freedom manipulator for flexible film transfer is provided, which is characterized in that the multi-degree-of-freedom manipulator includes a pick-up unit, an α rotation module, a γ rotation module, and an XYZ three-axis translation module and air distribution unit, of which:

The pick-up unit is suspended and installed under the α-rotation module through the α-β rotation connection seat, and can realize the freedom of rotation in the β direction, that is, around the Y axis; it includes a pickup head cavity, a right side plate, a left Side plate, β rotating motor, screw synchronous belt assembly, adjusting partition and vacuum pipe joint, wherein the pickup head chamber is a hollow roller structure placed vertically, and along the axial and circumferential Vacuum adsorption holes arranged in an array are processed in the direction; the left side plate and the right side plate are respectively installed in a ring structure on both sides of the pickup head cavity for sealing the interior of the pickup head cavity, and Their inner walls are respectively provided with a plurality of T-shaped slots distributed along the radial direction and a plurality of trapezoidal threaded holes penetrating along the thickness direction; The coupling provides the driving force for the pick-up cavity to rotate in the direction of β; the screw synchronous belt assembly is integrally installed on one side of the pick-up cavity, and includes circumferentially distributed along the side wall of the pick-up cavity A plurality of trapezoidal screw rods, an equal number of synchronous pulleys and matching synchronous belts, wherein the synchronous pulleys are respectively installed on the corresponding trapezoidal screw rods, and the synchronous belt pulleys connect all the synchronous pulleys, and each trapezoidal screw shaft The two ends are respectively installed on the left side plate and the right side plate through the trapezoidal threaded holes, in this way, by rotating the trapezoidal screw, the left side plate and the right side plate can be moved relative to each other along the cavity of the pickup head , and then adjust the adsorption area of the working section on the outer surface of the pickup head cavity in the axial direction; The T-shaped slots distributed in the radial direction are installed inside the pickup head cavity, thereby adjusting the adsorption area of the working section on the outer surface of the pickup cavity in the circumferential direction by arranging these adjustment partitions; The vacuum air pipe joint is connected with the vacuum air path arranged on the side of the pickup head cavity, and is used to realize the communication between the interior of the pickup head cavity and the air path distribution unit;

The α rotation module is installed under the γ rotation module through the α-γ rotation connection seat, and is used to realize the degree of freedom of the pick-up unit to rotate in the α direction, that is, around the X axis;

The γ-rotation module is continuously installed on one end of the XYZ three-axis translation module through the γ-rotation mount, and is used to realize the rotation of the α-rotation module and the pickup unit suspended thereon in the γ-direction, that is, around the Z-axis degrees of freedom;

The XYZ three-axis translation module is assembled by the X-axis translation module, the Y-axis translation module and the Z-axis translation module, and is used to realize the translation of the γ rotation module, the α rotation module and the pick-up unit in the XYZ three-axis direction degrees of freedom;

The air path distribution unit is installed on the α rotating module, and is used to realize the on-off control of the vacuum air path inside the cavity of the pickup head.

As a further preference, the above-mentioned multi-degree-of-freedom manipulator also includes a visual positioning unit, which includes a CCD sensor, a laser displacement sensor, and a sensor bracket, wherein the sensor bracket is a rod-shaped structure that protrudes downwards and is installed in rotation with the γ The seat is fixedly connected, and the CCD sensor is installed on one side of it, and the position of the flexible film in the XY axis direction and the rotation angle around the Z axis are determined by detecting the edge of the flexible film or the pattern feature on the flexible film; its other The laser displacement sensor is installed on one side, and the position of the flexible film relative to the cavity of the pickup head in the Z-axis direction is determined by laser ranging.

As a further preference, the picking unit also includes a pressure sensor and a gravity sensor group, wherein the pressure sensor is installed on the coupling through an extension shaft, and is used to detect the contact force during the flexible film picking process; The gravitational sensor group is composed of two sets of vertically intersecting gravitational sensors, which are installed on the side of the pickup cavity, and are used to detect the rotation angle of the pickup cavity around the X axis and the Y axis.

As a further preference, for the α rotation module, it preferably includes an α rotation motor, a key and an α rotation support base, wherein the α rotation motor is installed at the lower end of the α-γ rotation connection base for providing the The driving force for picking up the rotation of the unit in the α direction; the α rotation support base is distributed on both sides of the horizontal sides of the α rotation motor, and is connected with the α rotation motor through the key.

As a further preference, for the γ-rotating module, it preferably includes a γ-rotating motor, which is directly mounted on the γ-rotating mounting base for providing the α-rotating module and the pick-up unit in the γ-direction driving force for rotation.

As a further preference, for the air path distribution unit, it preferably includes a manifold solenoid valve and an air pressure sensor, wherein the manifold solenoid valve is composed of a plurality of solenoid valves for controlling the pickup The switch of each vacuum air circuit inside the head cavity is controlled correspondingly; the number of the air pressure sensor is the same as that of the solenoid valve, and is used to detect the vacuum degree of each vacuum air circuit inside the pickup head cavity.

As a further preference, the flexible film is preferably a solar cell flexible substrate film, an RFID tag or a flexible film switch.

Generally speaking, compared with the prior art, the above technical solution conceived by the present invention mainly has the following technical advantages:

1. By designing the overall structure and spatial arrangement of the manipulator according to the present invention, it is possible to realize the translational degrees of freedom of the manipulator in the three directions of XYZ and the rotation in the three directions of αβγ in a compact and easy-to-manipulate manner degrees of freedom, and correspondingly obtain a wider range of spatial attitude adjustment of the pickup head cavity, thereby obtaining more accurate flexible film pickup and positioning operations;

2. By cooperating with the cavity, left and right side plates, adjusting partitions and screw synchronous belt components for the pickup unit as a key component, not only the space between the two side plates can be evenly adjusted by the screw synchronous belt component, Then change the adsorption area of the working outer surface area of the pick-up cavity in the axial direction, and also adjust the adsorption area of the working outer surface of the pick-up cavity in the circumferential direction by also adjusting the partition plate installed on the side plate. The area is adjusted; thus the entire pick-up unit can cooperate with each other in two directions to adjust the area, thereby more accurately adapting to flexible films of different sizes, and significantly improving the accuracy of the pick-up operation;

3. By equipping the pick-up unit with a pressure sensor and a gravity sensor group, it can provide real-time feedback and prevent damage to the flexible film caused by excessive contact force, and can further fine-tune the angle of rotation of the pick-up unit around the X and Y axes, which helps Determine the spatial posture of the pickup head cavity and the position of the adsorption working section more accurately; in addition, by improving the arrangement of the above-mentioned sensor components, it is possible to ensure that the transfer of the flexible film will not be adversely affected, and at the same time it is convenient to maintain the compactness and Ease of operation;

4. By adding a CCD sensor and a laser displacement sensor, the position of the flexible film in the three directions of XYZ can be accurately determined; on this basis, through subsequent attitude adjustments, the accurate alignment between the working section of the pickup device and the flexible film can be further improved accordingly adsorption;

5. By improving the internal structure of the gas path distribution unit and its connection with each vacuum air path inside the pickup head cavity, the vacuum state inside the pickup head cavity can be controlled more flexibly and conveniently. And ensure to provide a highly sensitive vacuum that meets the requirements.

Description of drawings

Fig. 1 is a schematic diagram of the main structure of a multi-degree-of-freedom manipulator constructed according to a preferred embodiment of the present invention;

Figure 2a and Figure 2b are schematic structural views obtained by observing the pickup unit shown in Figure 1 from the right and left, respectively;

Fig. 3 is a schematic exploded view of the structure of the pickup unit shown in Fig. 1;

Fig. 4 is a left view of the structure of the pickup unit shown in Fig. 1;

Fig. 5 is a structural cross-sectional view obtained along line A-A of the pickup unit shown in Fig. 4;

Figures 6a and 6b are schematic diagrams of the structure of the internal partition of the pickup unit shown in Figure 1 and before and after the area of the working section is changed, respectively;

Fig. 7 is a half-structure sectional view of the pickup cavity shown in Fig. 5;

Fig. 8 is a schematic structural view of the right panel shown in Fig. 2b;

Fig. 9 is a schematic structural view of the left panel shown in Fig. 2a;

Fig. 10 is a structural schematic diagram of the adjusting partition shown in Fig. 3;

Fig. 11 is a schematic diagram of the overall structure of the α rotating module, the γ rotating module, the air distribution unit and the visual positioning unit shown in Fig. 1;

Fig. 12 is a schematic diagram of the composition and structure of the air distribution unit shown in Fig. 1;

Fig. 13 is a schematic diagram of the gas path control and distribution schematic diagram of the gas path distribution unit shown in Fig. 12;

14a, 14b and 14c are schematic diagrams of the process of picking up a flexible film by a robot constructed according to a preferred embodiment of the present invention.

detailed description

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not constitute a conflict with each other.

Fig. 1 is a schematic diagram of the main structure of a multi-degree-of-freedom manipulator constructed according to a preferred embodiment of the present invention. As shown in Figure 1, the multi-degree-of-freedom manipulator mainly includes a pick-up unit 1, an α-rotation module 2, a γ-rotation module 3, an XYZ three-axis translation module 4, an air distribution unit 5, etc., and can be further equipped with a visual positioning unit 6 and other components. The pick-up unit 1 is installed under the α-rotation module 2, and is used to realize the rotation freedom of the pick-up device 1 around the Y-axis, that is, the β-direction, and at the same time provide a vacuum to absorb flexible films of different sizes and detect and feedback the contact force of the flexible film. Function; the α-rotation module 2 is installed under the γ-rotation module 3, for example, through a horizontally arranged α-γ rotation connection seat 21, for realizing the rotation degree of freedom of the manipulator around the X-axis, that is, in the α direction; the γ-rotation module 3, for example, through The drawer-shaped gamma rotation mounting base 31 is installed on one end of the XYZ three-axis translation module 4, which is used to realize the gamma rotation freedom of the manipulator around the Z axis; the XYZ three-axis translation module 4 is connected with the gamma rotation mounting base 31 for Realize the translational freedom of the manipulator along the three directions of XYZ; the air circuit distribution unit 5 is installed on the α rotating module 2, which is used to realize the switch control of each vacuum air circuit inside the pickup head cavity 10, and can provide vacuum degree detection function; the visual positioning unit 6 is installed on the γ-rotation mount 31, and can detect and determine the positions of the flexible film in three directions of XYZ through the CCD sensor 61 and the laser displacement sensor 62.

Each of the above-mentioned components will be specifically described below with reference to FIGS. 2 a to 12 .

Referring first to Figures 2a-5, the main structure of the pick-up unit 1 constructed according to the preferred embodiment of the present invention is shown. As one of the key improvements, the pick-up unit includes a pick-up head cavity 10, a right side plate 11, a left side plate 12, a β rotating motor 13, a screw synchronous belt assembly 14, an adjusting partition 15, and a vacuum pipe joint 16, among which The pick-up cavity 10 is, for example, a hollow roller structure placed vertically, and an array of vacuum adsorption holes 10b is processed on its arc outer surface along the axial and circumferential directions, and one side of it (in the figure Shown as the right side) is processed with a vacuum air passage 10a, and its inner annular chamber is then used as a vacuum chamber and a beta rotating motor 13 is installed; Installed on the left and right sides of the pick-up cavity 10, it is used to seal the inside of the pick-up cavity, and can move axially along the cylinder wall of the pick-up cavity 10 at the same time. T-shaped grooves 12b, 11b distributed along the radial direction and a plurality of trapezoidal threaded holes 12a, 11a penetrating along the thickness direction; the β rotating motor 13 is fixedly installed in the inner center of the pickup cavity 10 by screws, and The driving force for the pick-up cavity 10 to rotate in the direction of β can be provided through the coupling 17; The side plates 12 can move toward each other to realize the function of axially adjusting the adsorption area of the working outer surface of the pickup cavity 10 and control the width of the adsorption working section. The regulating partition 15 is a plate structure with a T-shaped cross-section in this preferred embodiment, that is, a rectangular block perpendicular to it or called a T-shaped characteristic 15a is also processed on the side of the planar plate structure, correspondingly Ground, the T-shaped grooves 12b, 11b opened on the left side plate and the right side plate are fitted with the T-shaped characteristic 15a of the adjustment partition 15, thereby installing a plurality of adjustment partitions 15 on the left and right side panels; In this way, through the arrangement of these adjusting partitions inside the pickup head cavity 10, the adsorption area of the working section on the outer surface of the pickup cavity can be adjusted in the circumferential direction, thereby controlling the length of the adsorption working section; as shown in FIG. 6a and 6b, the size of the adsorption area on the outer surface of the pickup head cavity can be adjusted in both axial and circumferential directions, and the total area of the working section W can be changed, thereby more flexibly adapting to different The size of the flexible membrane, thereby improving the pick-up accuracy. In addition, the vacuum air pipe joint 16 can be fixedly mounted on the vacuum air channel 10 a on the right side of the pickup head cavity 10 , so as to realize the communication between the pickup head cavity 10 and the air distribution unit 5 .

According to a preferred embodiment of the present invention, the above-mentioned pick-up unit can also be equipped with a pressure sensor 18 and a gravity sensor group 19 . As shown in the figure, the pressure sensor 18 is connected with the pick-up device 1 through the coupling 17, and is used to detect the size of the contact force in the process of picking up the flexible film; the gravity sensor group is composed of two sets of gravity sensors that cross vertically and are installed in the cavity of the pick-up head The right side is used to detect and feed back the rotation angle of the pick-up device around the X-axis and Y-axis, and to determine the spatial posture of the pick-up device and the position of the adsorption working section.

According to another preferred embodiment of the present invention, referring to Fig. 2a-Fig. 5, the threaded mandrel timing belt assembly 14 specially designed according to the present invention includes a trapezoidal threaded mandrel 14a, a synchronous pulley 14b, a synchronous belt 14c and a knob 14d, wherein the synchronous The belt pulley 14b is installed on the corresponding trapezoidal screw rod 14a; the timing belt 14c connects several timing pulleys 14b to realize synchronous movement; The opposite trapezoidal threaded hole is mounted thereon; in addition, a knob 14d is mounted on one of the trapezoidal screw rods 14a, such as by hand to turn the trapezoidal screw rod. In this way, by turning the trapezoidal screw, the left side plate and the right side plate can move relative to each other along the cavity of the pickup head, thereby adjusting the adsorption area of the working section on the outer surface of the cavity of the pickup head in the axial direction.

Referring to Fig. 8, there is shown the main structure of the right side plate 11 constructed according to the preferred embodiment of the present invention. As shown in Figure 8, the right side plate is processed with, for example, a right-handed trapezoidal threaded hole 11a and an arrayed right T-shaped slot 11b, wherein the right-handed trapezoidal threaded hole 11a is connected with the trapezoidal screw rod 14a through a trapezoidal thread. Coordination; the right T-shaped slot 11b is used to install the partition 15, and the number and position of the partition 15 can be freely arranged and adjusted according to the size of the required space.

Referring to Fig. 9, there is shown the main structure of the left side panel 12 constructed according to the preferred embodiment of the present invention. As shown in FIG. 9 , the left side plate 12 is processed with, for example, a left-handed trapezoidal threaded hole 12a and an arrayed left T-shaped slot 12b, wherein the left-handed trapezoidal threaded hole 12a is matched with the trapezoidal screw rod 14a through the trapezoidal thread, When the trapezoidal screw 14a rotates, the left side plate 12 and the right side plate 11 move towards each other through the left-handed trapezoidal threaded hole 12a and the right-handed trapezoidal threaded hole 11a respectively; Matching installation can be carried out according to the arrangement of the adjusting partition plate 15 on the right side plate 11.

Referring to Fig. 11, it shows the main structure of the α rotation module 2 according to the preferred embodiment of the present invention. As shown in Fig. 11, the α-rotating module 2 includes an α-γ rotating connection seat 21, an α-rotating motor 22, a key 23, an α-rotating supporting seat 24 and an α-β rotating connecting seat 25, wherein the α-γ rotating connecting seat 21 is used to realize the connection between the α rotation module 2 and the γ rotation module 3; the α rotation motor 22 is installed on the α-γ rotation connection seat 21, and is used to provide the driving force for the rotation of the manipulator in the α direction; the α rotation support base 24 can be distributed in Both sides of the α rotation motor 22 are installed on the α-β rotation connection seat 25, and are connected with the α rotation motor 22 through the key 23; the α-β rotation connection seat 25 is used to realize the connection between the α rotation module 2 and the pick-up unit 1 .

Referring to Fig. 11, it shows the main structure of the gamma rotation module 3 according to the preferred embodiment of the present invention. As shown in Figure 11, this gamma rotation module 3 comprises gamma rotation mounting base 31 and gamma rotation motor 32, and wherein gamma rotation motor 32 is installed on the gamma rotation mounting base 31, is used to provide the driving force that manipulator gamma rotates; The rotation mount 31 is used to realize the connection between the γ rotation module 3 and the XYZ three-axis translation module 4 .

Referring to Fig. 11 and Fig. 12, the main structure of the air distribution unit 5 according to the preferred embodiment of the present invention is shown. As shown in Fig. 11 and Fig. 12, the air distribution unit 5 includes a manifold solenoid valve 51 and an air pressure sensor 52, wherein the manifold solenoid valve 51 is composed of a plurality of solenoid valves for controlling the pick-up chamber The switch of each vacuum air circuit inside the body 10, the air pressure sensor 52 has the same number as the electromagnetic valve, and each air pressure sensor 52 is used to detect the vacuum degree of a single vacuum air circuit in the corresponding pickup cavity 10, It is used to confirm whether the vacuum degree is established effectively. In this preferred embodiment, there are 6 vacuum air circuits inside the pickup cavity 10, and there are 6 solenoid valves in the manifold solenoid valve 51. Each of the pickup cavity 10 Each vacuum air circuit is equipped with corresponding electromagnetic valve and air pressure sensor 52, and the output port of each air pressure sensor 52 is all in one-to-one correspondence with the vacuum air pipe joint 16 on the pick-up device 1, such as 52a port corresponds to 16a port, Port 52b corresponds to port 16b, port 52c corresponds to port 16c, port 52d corresponds to port 16d, port 52e corresponds to port 16e, port 52f corresponds to port 16f, etc. As shown in Figure 13, the vacuum is input from the IN port and output from the OUT port. Each vacuum air path reaches the interior of the pickup head cavity 10, and the corresponding solenoid valve and air pressure sensor 52 control the switch of the vacuum air path and detect the degree of vacuum.

Referring to Fig. 11, it shows the main structure of the visual positioning unit 6 according to the preferred embodiment of the present invention. As shown in Figure 11, this visual localization unit comprises CCD sensor 61, laser displacement sensor 62 and sensor support 63, and wherein CCD sensor 61 is installed on one side of sensor support 63, determines flexible film in XY direction by detecting the edge of flexible film The position on the top; the laser displacement sensor 62 is installed on the other side of the sensor bracket 63, and determines the Z-direction position of the flexible film relative to the pick-up device 1 by laser ranging; the two cooperate with each other to complete the positioning of the flexible film; the sensor bracket 63 is in In addition to supporting the CCD sensor 61 and the laser displacement sensor 62 , it is also fixedly connected to the γ-rotation mounting base 31 by screws.

The working process of the above-mentioned manipulator according to the present invention will be explained in detail below.

First of all, before the flexible film is adsorbed and transferred, the arrangement of the partition plate 15 in the pickup head cavity 10 and the distance between the right side plate 11 and the left side plate 12 should be adjusted according to the size of the flexible film, so as to adjust the adsorption of the pickup unit 1. area, adapting the size of the adsorption working section to the size of the flexible membrane. Then make the pick-up unit 1 in the middle position, by adjusting the α-rotational degree of freedom of the α-rotation module 2, the β-rotational degree of freedom of the pickup unit 1, the γ-rotational degree of freedom of the γ-rotation module 3 and the X, Y of the XYZ module 4 The three degrees of freedom of translation in the Z and Z directions align the pick-up unit 1 with the flexible film.

Next, the visual positioning unit 6 detects the edge of the flexible film through the CCD sensor 61 to determine the position of the flexible film in the XY direction; detects and determines the Z-direction position of the flexible film relative to the pickup device 1 through the detection of the laser displacement sensor 62, and the two cooperate to complete the alignment. Positioning of the flexible membrane. Then adjust the Z-direction degree of freedom of the XYZ three-axis translation module 4 to drive the pick-up unit 1 down to a suitable working position, and the gravity sensor group 19 detects and feeds back the position of the pick-up device 1 to absorb the working section. By comparing the position of the flexible film with the position of the adsorption working section of the pickup unit 1, the position error of the two is obtained, and the spatial posture and the position of the adsorption working section are adjusted through the α and β rotational degrees of freedom of the pickup device 1 to ensure accurate pickup.

Then, as exemplarily shown in FIG. 13 , the manifold solenoid valve 51 controls the opening of the vacuum air path of the adsorption working section, and when the corresponding air pressure sensor 52 detects that the vacuum is effective, the β-rotational motor 13 starts The pick-up unit 1 is driven to rotate in the beta direction, and its adsorption working section absorbs and picks up the flexible film along the arc surface, and finally makes the flexible film as a whole adsorb on the working section of the outer surface of the pick-up cavity 10 . After that, the drive of the β rotation motor 13 is stopped, and the β rotation motion of the pick-up unit is stopped. After using the XYZ three-axis translation module 4 to transfer the flexible film to the designated position, the β-direction rotation motor 13 continues to drive, so that the adsorption working section is aligned with the flexible film placement position, and then the pick-up device 1 rotates, and the air distribution unit 5 closes the vacuum , and finally place the flexible membrane at the specified position.

During the transfer process of the flexible film, the pressure sensor 18 detects and feeds back the magnitude of the contact force on the flexible film at all times during the picking and placing period.

It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.

Claims (7)

1. the Multi-freedom-degreemanipulator manipulator for flexible membrane transfer, it is characterized in that, this Multi-freedom-degreemanipulator manipulator includes pickup unit (1), α rotating module (2), γ rotating module (3), XYZ tri-axle translation module (4) and gas circuit allocation unit (5), wherein:

Described pickup unit (1) is rotationally connected seat (25) suspension by alpha-beta and is arranged on the lower section of described α rotating module (2), and can realize β direction namely the degree of freedom rotated around Y-axis；This pickup unit (1) includes pick-up head cavity (10), right plate (11), left plate (12), β rotary electric machine (13), screw mandrel Timing Belt assembly (14), regulation dividing plate (15) and vacuum gas-tpe fitting (16), wherein this pick-up head cavity (10) is in the hollow roller structure vertically placed, and is axially machined with the vacuum absorption holes (10b) of array arrangement in its circular arc external surface with circumferential direction；This left plate, right plate are the most supporting both sides being arranged on described pick-up head cavity (10) of circular ring structure, for realizing sealing to this pick-up head inside cavity, and on the inwall of the two side plate, offer multiple T-slot along radial direction distribution and multiple trapezoidal thread hole run through along thickness direction respectively；This β rotary electric machine (13) is arranged on the center of inside of described pick-up head cavity (10), and is that described pick-up head cavity (10) provides the driving force being rotated up in β side by shaft coupling (17)；nullThis screw mandrel Timing Belt assembly (14) integral installation is in described pick-up head cavity (10) side，And include along multiple trapezoidal screws (14a) that this pick-up head cavity wall is circumferentially distributed、The synchronous pulley (14b) equal with described trapezoidal screw quantity and supporting Timing Belt (14c)，Wherein this synchronous pulley (14b) is separately mounted on the trapezoidal screw (14a) of correspondence，All of synchronous pulley (14b) is coupled together by this Timing Belt (14c)，And the two ends of each trapezoidal screw (14a) are arranged on described left plate by described trapezoidal thread hole respectively、On right plate，In this way，By rotating trapezoidal screw，Left plate can be made、Right plate performs relative movement along pick-up head cavity，And then in the axial direction the active section adsorption area of pick-up head chamber outer surface is adjusted；The platy structure of this regulation dividing plate (15) T-shaped cross section, and it is arranged on the inside of described pick-up head cavity (10) by described T-slot along radial direction distribution on described left plate, right plate respectively, from there through the layout to these regulation dividing plates, and then in circumferential direction the active section adsorption area of pick-up head chamber outer surface is adjusted；This vacuum gas-tpe fitting (16) is connected with the vacuum air-channel being arranged on described pick-up head cavity (10) side, and is used for realizing the connection between pick-up head inside cavity and described gas circuit allocation unit (5)；

Described α rotating module (2) is rotationally connected seat (21) by α-γ and is arranged on the lower section of described γ rotating module (3), and is used for realizing described pickup unit (1) at α direction namely the degree of freedom that rotates around X-axis；

Described γ rotating module (3) rotates mounting seat (31) by γ and is arranged on one end of described XYZ tri-axle translation module (4), and is used for realizing described α rotating module (2) and hangs described pickup unit (1) thereon at γ direction namely the degree of freedom that rotates around Z axis；

Described XYZ tri-axle translation module (4) is assembled jointly by X-axis translation module, Y-axis translation module and Z axis translation module, and is used for realizing described γ rotating module (3), α rotating module (2) and the pickup unit (1) translation freedoms on XYZ tri-direction of principal axis；

Described gas circuit allocation unit (5) is arranged on described α rotating module (2), and for realizing the on-off control of the vacuum air-channel internal to described pick-up head cavity (10).

2. Multi-freedom-degreemanipulator manipulator as claimed in claim 1, it is characterized in that, described Multi-freedom-degreemanipulator manipulator also includes vision localization unit (6), this vision localization unit includes ccd sensor (61), laser displacement sensor (62) and sensor stand (63), wherein this sensor stand (63) in the rod-like structure extended downwardly from and with described γ rotate mounting seat (31) be fixedly connected, described ccd sensor (61) is installed in its side, and determine flexible membrane position on XY direction of principal axis and rotational angle about the z axis by the pattern characteristics on the detection edge of flexible membrane or flexible membrane；Its other side then installs described laser displacement sensor (62), and determines that flexible membrane is relative to described pick-up head cavity (10) position in the Z-axis direction by laser ranging.

3. Multi-freedom-degreemanipulator manipulator as claimed in claim 1 or 2, it is characterized in that, described pickup unit (1) also includes pressure transducer (18) and gravity sensor group (19), wherein this pressure transducer (18) is arranged on described shaft coupling (17) by projecting shaft, and for the contact force size in flexible membrane pick process is detected；This gravity sensor group (19) is collectively constituted by two set gravity sensors of square crossing, and they are arranged on the side of described pick-up head cavity (10), and the angle for rotating described pick-up head cavity around X-axis and Y-axis detects.

4. Multi-freedom-degreemanipulator manipulator as claimed in claim 1 or 2, it is characterized in that, described α rotating module (2) includes α rotary electric machine (22), key (23) and α rotational support seat (24), wherein this α rotary electric machine (22) is arranged on described α-γ and is rotationally connected the lower end of seat (21), is used for the driving force providing described pickup unit (1) to rotate in α direction；This α rotational support seat (24) is distributed in the horizontal both sides of described α rotary electric machine (22), and is realized and the coupling of described α rotary electric machine (22) by described key (23).

5. Multi-freedom-degreemanipulator manipulator as claimed in claim 4, it is characterized in that, described γ rotating module (3) includes γ rotary electric machine (32), this γ rotary electric machine (32) is directly installed on described γ and rotates in mounting seat (31), is used for the driving force providing described α rotating module (2) and pickup unit (1) to rotate in γ direction.

6. Multi-freedom-degreemanipulator manipulator as claimed in claim 1 or 2, it is characterized in that, described gas circuit allocation unit (5) includes packaging type electromagnetic valve (51) and air pressure transducer (52), wherein this packaging type electromagnetic valve (51) is collectively constituted by multiple electromagnetic valves, and the switch correspondence for each vacuum air-channel internal to described pick-up head cavity (10) is controlled；The quantity of this air pressure transducer (52) is identical with described electromagnetic valve, vacuum size for each vacuum air-channel internal to described pick-up head cavity (10) detects, and judges that flexible membrane picks up success or not by the situation of setting up judging vacuum.

7. Multi-freedom-degreemanipulator manipulator as claimed in claim 1 or 2, it is characterised in that described flexible membrane is solar cell flexible substrate film, RFID label tag or fexible film switch.