CN104601038B - super-precise magnetostrictive actuator - Google Patents
super-precise magnetostrictive actuator Download PDFInfo
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- CN104601038B CN104601038B CN201510019804.0A CN201510019804A CN104601038B CN 104601038 B CN104601038 B CN 104601038B CN 201510019804 A CN201510019804 A CN 201510019804A CN 104601038 B CN104601038 B CN 104601038B
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Abstract
The invention relates to a precise magnetostrictive actuator. A microprocessor and a digital circuit are connected with a drive coil and are used for controlling the magnetic field intensity of the drive coil and further controlling micro-displacement of the actuator. A detection coil is built in the drive coil and is used for detecting the magnetic field intensity inside the drive coil in real time so as to drive and output delay quantity of the actuator, the detection coil is connected with the microprocessor and the digital circuit and is used for feeding back a detected magnetic field intensity signal to the microprocessor so as to achieve closed-loop control of a system. A heat cycle system is arranged inside the drive coil and is used for achieving heat balance. A pressure sensor is installed in the actuator, is connected with the microprocessor and is used for detecting the stress of a magnetostrictive structure body, accurately calculating structural strain according to the stiffness characteristic of a material and stress situation, conducting corresponding adjustment on the driven magnetic field intensity so as to compensate errors of structural strain to the micro-displacement. The precise magnetostrictive actuator is characterized in that a system adopts four different feedbacks, and nanoscale accurate control can be achieved.
Description
Technical field
The present invention relates to a kind of magnetostrictive actuator, particularly a kind of ultra-magnetic telescopic material of Applied Digitalization control
Material, temperature detection and compensation, the detection of ess-strain and compensation, magnetic field intensity detection and feedback control, thermodynamic equilibrium temperature
Control, the detection of output micrometric displacement and the magnetostrictive actuator for compensating control.
Background technology
As magnetostriction materials are under the action of a magnetic field, its length changes, and can be subjected to displacement and do work or in alternation
The action of a magnetic field can occur to uphold repeatedly and shorten, so as to produce vibration or sound wave, this material can by electromagnetic energy (or electromagnetism letter
Breath) mechanical energy or acoustic energy (or mechanical displacement information or acoustic intelligence) are converted into, on the contrary can also be by mechanical energy (or mechanical displacement
With information) electromagnetic energy (or electromagnetic information) is converted into, it is important energy and information conversion function material.He is in sonar
Underwater acoustic transducer technology, electroacoustic transducer technology, marine exploration and development technique, Micro-displacement Driving, vibration damping and vibrationproof, noise abatement
With noise control system, intelligent wing, robot, automatic technology, fuel injection technic, valve, pump, the high-tech such as oil recovery that fluctuate neck
Domain has wide practical use.
Giant magnetostrictive material has following advantages：The thrust produced during magnetostrictive strain is very big, and diameter is about l0
The bar of the TbDyFe of mm, produces the thrust of about 2000N during magnetostriction；Energy conversion efficiency is up to 70%, its elastic modelling quantity with
Magnetic field and change, controllable；Time needed for response time (producing corresponding strain by being to apply fields) is referred to as response time)
Only microsecond；Frequency characteristic is good, working band width；Good stability, reliability are high, and its Magnetostriction is not at any time
Between and change；Without fatigue, without overheating failure problem.
With developing rapidly for hard-core technology, Ultraprecision Machining becomes the most important development side of current machine-building
One of to.At present, microstoning cutter mainly adopts electrostriction micromotion device as driver, and electrostriction micrometric displacement
The displacement and output of device is relatively small, and mechanism design in must adopt an effective measure, with prevent impulsive force and
The short circuit problem that high voltage drive is caused, then can well solve above-mentioned ask as micro positioner using giant magnetostrictive material
Topic, therefore, this direction has become the hot subject of both at home and abroad research super hot investment casting technology and nanotechnology, it is following it is inevitable into
To dominate the core technology of association area development.Typical application is such as equipped in the dress of the Fine Feed on large-scale optics diamond lathe
Put, magnetostriction materials are employed as driver.Temperature controller is adopted in system, controls the coolant-temperature gage of cooling coil
Within 0.01 DEG C.The dimensional accuracy and rough surface of the hard brittle materials such as the diamond lathe processing glass using this executor
Within degree can be controlled in several nanometers.It is external extensively this technology be applied to machine tool compensation, be directly used as executor,
Superfine grinding, micro- engraving, ultrasonic wave processing, Ultra-precision positioning etc., it is possible to achieve the manufacture of nano-precision, and China is current
Application, the particularly application in super hot investment casting field is very limited, the domestic product with regard to giant magnetostrictive material commercialization
Only very limited amount of several, the commercial applications in specific area such as super hot investment casting field are more a lack of.
According to the control and compensation for being related to temperature in domestic and international existing progress more, but rarely have and mangneto is stretched
Expansion performance under the strain research of compression material and engineer applied, particularly system operating frequency higher strip part；On this basis
The Digitizing And Control Unit containing four closed loop feedbacks for proposing, is devoted to solving the ultraprecise control under low frequency condition.
The content of the invention
It is an object of the invention to provide a kind of ultraprecise magnetostrictive actuator, the flexible executor can realize nanometer essence
The quick accurate point position control and speed controlling of degree, can effectively reduce manufacturing process requirement using improved method for designing, carry
The performance (response speed, control accuracy etc.) of the system of liter.
For achieving the above object, the present invention adopts following technical solution：
A kind of ultraprecise magnetostrictive actuator, with a driving coil, a giant magnetostrictive rod, a microprocessor
Device and digital circuit, the microprocessor and digital circuit connection driving coil, for controlling the curtage of driving coil
Size, realizes controlling the magnetic field intensity of driving coil, and then controls the micrometric displacement of executor；The driving coil is built-in with inspection
Test coil, for the magnetic field intensity inside real-time detection driving coil, detects the driving of executor and the hysteresis of output, inspection
Test coil connects microprocessor and digital circuit, and for feeding back the magnetic field intensity signal of detection to microprocessor, the system of realization is closed
Ring is controlled；Cycle cooling system is provided with inside the driving coil, for dispersing the heat of driving coil generation in time, is reduced
The impact that driving coil is generated heat to magnetostriction materials；The cycle cooling system connects temperature control system, follows for control
The temperature constant of ring cooling system；Pressure transducer, pressure transducer connection microprocessor, for examining are installed in the executor
A giant magnetostrictive rod structure body stress is surveyed, and structure is accurately calculated according to the stiffness characteristics and stressing conditions of material should
Become size, the magnetic field intensity to driving makes the error that corresponding adjustment is caused to micrometric displacement with collocation structure strain.
The microprocessor connects controllable current by the digital-to-analogue conversion filter circuit and amplifying circuit in digital circuit
Source and driving coil, export corresponding digital quantity by microprocessor, and pass through D/A converting circuit and amplifying circuit and filter
Ripple process, the voltage required for being ultimately converted to.
The cycle cooling system includes heat dissipating copper pipe, digital temperature sensor, and the heat dissipating copper pipe is arranged on
Between driving coil and magnetostrictor, in which, cooling fluid is passed through；The embedded heat dissipating copper pipe of the digital temperature sensor
In 7 cylinder of epoxy backbone at two ends, for detecting the temperature of cooling fluid input port and delivery outlet and giant magnetostrictive rod.
The temperature control system includes multiple thermocouple temperature sensors, direct current Micropump, semiconductor chilling plate, Duo Gere
Galvanic couple temperature sensor is placed in cooling fluid storage box body, for detecting cooling fluid storage box body internal temperature field, direct current Micropump
Heat dissipating copper pipe is connected by cooling fluid output pipe, semiconductor chilling plate is placed in storage box body outer wall, direct current Micropump, Duo Gere
Galvanic couple temperature sensor and semiconductor chilling plate connect microprocessor respectively, micro- by microprocessor and Digital Circuit Control direct current
The radiating effect of revolution speed and semiconductor chilling plate, realizes the control of radiating flow velocity and temperature.The cooling fluid storage box body
Built with liquid stirrer, for Homogeneouslly-radiating liquid temp.
The present invention is had the advantages that due to taking above technical scheme：
1. the action of executor can be quickly accurately controlled as control and communication unit using digital circuit, can be with
Point position control and speed controlling are realized, expands its range of application and the suitability.Module can be realized using Digital Control in addition
Change, directly and device talk can facilitate to be connected with host computer and use and control in the application；
2. system adopts strict Design of Temperature Control, comprising heat-insulated, radiating, temperature detection feedback, forces cooling control
And temperature error compensation, these measures can fast and effectively control shadow of the effect to executor's microbit shift error that expand with heat and contract with cold
Ring, wherein temperature error compensation is to be realized by detecting system and control system and corresponding control program jointly, using closed loop
Control, accelerates response speed, compensate for the not high shortcoming of the slow control accuracy of direct temperature control response speed；
3. the radiating of system is that cooling fluid is passed through between coil and magnetostriction structure and inside driving coil, is led to
The flow velocity and temperature of control cooling fluid are crossed controlling the speed of heat exchange, cooling fluid flow speed control is by microprocessor control
Coutroi velocity is come by the Micropump of DC motor Driver, the temperature control of cooling fluid by the way of cooling is forced, using quasiconductor
Cooling piece realizing, is equally therefore the precise control by microprocessor control；
4. system introduces pressure transducer, to detecting system stress, is strained according to Stress calculation system, by corresponding
Control method compensating in response to the error that causes of change, therefore precision is higher.Generally after strain compensation, stress occurs accordingly again
Change, there is higher stability and reliability the quick anti-of closed-loop control system is realized with this program of system design
Should.
Description of the drawings
Fig. 1 is the system structure diagram of the embodiment of the present invention；
Fig. 2 is the driving of the embodiment of the present invention and detection coil structural representation；
Fig. 3 is the structure chart of the magnetostrictive actuator of the embodiment of the present invention；
Fig. 4 is the design of temperature control system figure of the embodiment of the present invention；
Fig. 5 is the mechanical part general assembly structural representation of the embodiment of the present invention；
Fig. 6 is the control program structure chart of the embodiment of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawings magnetostrictive actuator of the present invention is further described.
As shown in Figures 1 to 6, a kind of ultraprecise magnetostrictive actuator, including driving coil, heat dissipating copper pipe, detection
Coil；Temperature sensor, epoxy resin coil skeleton, microprocessor and digital circuit etc..
Microprocessor and digital circuit connection driving coil, for controlling the curtage size of driving coil, come real
The magnetic field intensity of driving coil is now controlled, and then controls the micrometric displacement of executor；The driving coil is built-in with detection coil, uses
Magnetic field intensity inside real-time detection driving coil, detects the driving of executor and the hysteresis of output, and detection coil connects
Microprocessor and digital circuit are connect, and for the magnetic field intensity signal of detection being fed back to microprocessor, realize system closed loop control；Drive
Cycle cooling system is provided with inside moving winding, for dispersing the heat of driving coil generation in time, reduces driving coil heating
Impact to magnetostriction materials；The cycle cooling system connects temperature control system, for controlling cycle cooling system
Temperature constant；Pressure transducer, pressure transducer connection microprocessor, for detecting a ultra-magnetic telescopic are installed in executor
Rod structure body stress, accurately calculates structural strain size according to the stiffness characteristics and stressing conditions of material, to what is driven
Magnetic field intensity makes the error that corresponding adjustment is caused to micrometric displacement with collocation structure strain.
Microprocessor by the digital-to-analogue conversion filter circuit and amplifying circuit in digital circuit connect controllable current source and
Driving coil, exports corresponding digital quantity by microprocessor, and passes through at D/A converting circuit and amplifying circuit and filtering
Reason, the voltage required for being ultimately converted to.
Cycle cooling system includes heat dissipating copper pipe, digital temperature sensor, and heat dissipating copper pipe is arranged on driving coil
Between magnetostrictor, in which, cooling fluid is passed through；The asphalt mixtures modified by epoxy resin at the two ends of the embedded heat dissipating copper pipe of digital temperature sensor
In fat skeleton cylinder, for detecting the temperature of cooling fluid input port and delivery outlet and giant magnetostrictive rod.
Temperature control system includes multiple thermocouple temperature sensors, direct current Micropump, semiconductor chilling plate, multiple thermocouples
Temperature sensor is placed in cooling fluid storage box body, and for detecting cooling fluid storage box body internal temperature field, direct current Micropump passes through
Cooling fluid output pipe connects heat dissipating copper pipe, and semiconductor chilling plate is placed in storage box body outer wall, direct current Micropump, multiple thermocouples
Temperature sensor and semiconductor chilling plate connect microprocessor respectively, are turned by microprocessor and Digital Circuit Control direct current Micropump
The radiating effect of speed and semiconductor chilling plate, realizes the control of radiating flow velocity and temperature.Cooling fluid storage box body 34 built with
Liquid stirrer, for Homogeneouslly-radiating liquid temp.
（1）The ultraprecise magnetostrictive actuator is by speedy carding process digital quantity and by digital-to-analogue conversion by microprocessor
Controlling controllable current source, (coil is connected with fixed value resistance, prevents low-frequency electrical then to carry out driving coil for filtering and amplifying circuit
Flow through big), the size of coil inductance can affect the response speed of system, it is therefore desirable to according to different application scenarios and work frequency
Rate formulates the coil of correspondingly sized inductance and by its seriation.The system is by the quick precise control field coil of external digital circuit
Driving voltage, by the size of control coil electric current come the magnetic field intensity of control system, so control executor micrometric displacement.
（2）Detection coil is introduced in system, can be detected with this and be with the magnetic field intensity inside real-time detection driving coil
The driving of system and the hysteresis of output, and host computer is fed back to, in order to driving adjustment, reduce response speed to precision as far as possible
Impact, particularly in speed controlling.
（3）Ultraprecise magnetostrictive actuator introduces cycle cooling system, and the heat for producing solenoid in time is timely
Disperse, to ensure that magnetostriction materials remain at the temperature of the following relative constancy of Curie temperature, flatulence of heat type is reduced with this cold
Contracting effect is affected and impact of the temperature field to magnetostrictivity on the micrometric displacement precision of executor, by the stream for controlling cooling fluid
Speed and temperature carry out the temperature relative constancy of control system.In system heat circulating system, the method for control radiating flow velocity is that control is straight
Flow the rotating speed of motor-driven Micropump to control thermal balance, in heat circulating system, the temperature of strict control cooling fluid, therefore
The radiating liquid temp of multiple points is detected in whole heat circulating system, the control of heat circulating system radiating liquid temp is that forced refrigeration dissipates
Heat, installs semiconductor chilling plate additional, and controllable by the liquid guarantee cooling fluid uniform temperature fields that quickly flow.Semiconductor chilling plate
Radiating be, according to the control of the voltage and current of input DC power, therefore semiconductor refrigerating to be added in Digital Circuit Control
The close loop control circuit of piece, to ensure the strict control to the liquid temp that radiates.
The ultraprecise magnetostrictive actuator devises strict temperature control system, including heat-insulated and radiating and multiple spot
Detection feedback, the heat-insulated impact for mainly reducing ambient temperature field, the heating of coil is mainly absorbed and is shifted by radiating, with this
The operating temperature of guarantee system is stablized.As control requirement of the system to temperature is higher, the cooling to heat circulating system is needed
Liquid carries out strict temperature detection, and the uniform temperature fields of coolant are ensured, the detection of temperature needs multiple sampled points, right
DS1624 temperature sensors are used in the detection of executor's internal temperature, its installation site is embedded special epoxy resin coil
On skeleton；In addition driving coil adopts special method for winding, i.e., be embedded in radiating micro-pipe per coiling number layer afterwards wherein, to improve
Radiating effect.System needs the radiating effect of the flow and semiconductor chilling plate of strict control Micropump in addition；
The method of the system temperature control can effectively improve the precision of system, but for the executor of superhigh precision needs
Higher requirement is reached to the control of temperature, designed heat-insulated and radiating condition is inadequate to the control accuracy of temperature, while
Control speed is slow, it is impossible to meet high-precision requirement, it is therefore desirable to calculates temperature error by temperature accurate detection, counts accordingly
Influence value of the temperature error to micrometric displacement precision is calculated, small range temperature mistake is compensated by the method in change driving coil magnetic field
The microbit shift error that difference is caused；
（4）Ultraprecise magnetostrictive actuator introduces pressure transducer, can quickly be accurately detected magnetic by sensor
The stress of telescopic material is caused, the strain of system can be accurately calculated according to the rigidity of structure, by the driving current for adjusting coil
Carry out the error that compensation system strain is caused.
（5）High-precision capacitance-type micro-displacement sensor is added during ultraprecise magnetostrictive actuator output micrometric displacement,
Output accuracy is improved by closed-loop feedback control system.
As shown in figure 1, using STM32 microprocessors as system key control unit, frequency is 72MHz, Ke Yiman
The purpose of the quick precise control of pedal system, controls the curtage of driving coil using 16 I/O mouths, another with two groups 8
I/O mouths control the heat exchange of Micropump rotating speed, semiconductor chilling plate respectively.System has used multiple DS1624 digital temperatures to pass in addition
Sensor detects the temperature of cooling fluid input port and delivery outlet and giant magnetostrictive rod, and its detection error is less than 0.03 DEG C, in addition
Cooling fluid storage box body internal temperature field is detected using multiple thermocouple temperature sensors.According to the temperature and setting for detecting
Operating temperature difference temperature as to be compensated, accurately calculates error of the effect to micrometric displacement of expanding with heat and contract with cold according to temperature difference,
The temperature error of small range is compensated by increaseing or decreasing the driving voltage of coil；When the temperature for detecting and design temperature
After difference overruns, system starts the cooling effect for controlling Micropump rotating speed and semiconductor chilling plate, so as to ensure system radiating
The dynamic equilibrium in little range of error is kept with coil heating；It is obtained with surpassing by the integration to detection coil mutual voltage
Magnetic field intensity residing for magnetostrictive rod, and voltage and current phase contrast, i.e. response lag can be calculated according to driving voltage
Measure, and then the control voltage to system is adjusted and corresponding data is fed back to host computer（Under the conditions of referring mainly to high-frequency high-precision
It is delayed）, according to corresponding adjustment is made the lag time of feedback to activation bit, particularly when application speed is controlled, ring
Answer and delayed directly affect system accuracy；Micrometric displacement is exported by micro-displacement sensor detecting system, system is realized by closed loop control
System output error compensation.
The structural representation of driving and detection coil is illustrated in figure 2, is divided into two parts, outer layer is driving coil 8, internal layer
For detection coil 9, on total winding epoxy resin coil skeleton 7；The main pyrotoxin of system is mainly 8 He of driving coil
The vortex of structure, system temperature control requirement are higher, therefore two-layer heat dissipating copper pipe is added in 8 winding process of driving coil
18, cooling fluid is passed through in heat dissipating copper pipe 18, be easy to 8 heat of driving coil is shed in time, the two ends of heat dissipating copper pipe 18
Be connected with the epoxy backbone 7 of specially made structure, cooling fluid runner is designed with 7 annular endplate of epoxy backbone；
DS1624 temperature sensors 25 are embedded in 7 cylinder of epoxy backbone, and DS1624 temperature sensors 25 are done and are electromagnetically shielded and close
Envelope design, output and the digital quantity being input into are drawn by mask bus cable.
If Fig. 3 is the flexible actuator structure schematic diagram of magnetic hysteresis, it include upper end cover 1, connecting bolt 2, structure housing 3, every
Thermosphere 4, micro-displacement sensor 5, upper magnetic conductor 6, epoxy resin coil skeleton 7, driving coil 8, detection coil 9, super mangneto are stretched
Contracting rod 10, cooling fluid 11, lower magnetic conductor 12, bottom end cover 13, connecting bolt 14, cooling fluid entrance 15, base 16, pressure transducer
17th, heat dissipating copper pipe 18, sealing ring 19, pipeline and connection mouth 20, cooling fluid outlet 21, disk spring 22, precompression is adjusted
Section nut 23, output ejector pin 24.Difference of the cylinder of a length of 150mm of a diameter of 25mm of employing of the embodiment of the present invention as system
Value stretching structure body, is driving coil 8 and detection coil 9 and epoxy resin coil skeleton 7, driving coil 8 and inspection on its surface
Length of the length of test coil 9 more than giant magnetostrictive rod 10, to ensure that field homogeneity residing for giant magnetostrictive rod 10 is stable；It is super
Magnetostrictive rod 10 is infiltrated in cooling fluid, and driving coil 8 and detection coil 9 are in completely isolated dry environment；Super magnetic
One end of extension stem 10 is caused directly to contact with pressure transducer 17, pressure transducer 17 is mounted in the bottom of indoor design cooling fluid runner
In seat；The other end of giant magnetostrictive rod 10 is contacted with output ejector pin 24,24 inside same design cooling fluid runner of output ejector pin；
Whole system is arranged on inside the structure housing 3 of steel, is upper and lower magnetic conductor 6,12 on the inside of structure housing 3, and outside is heat-insulated
Layer 4, structure housing 3 do external electromagnetic shielding simultaneously and use；Disk spring 22 is housed on output ejector pin 24, is adjusted by precompression
Save nut 23 to adjust the precompression of giant magnetostrictive rod 10, the size of precompression is detected by piezoelectric ceramics；In addition defeated
Go out equipped with micro-displacement sensor on push rod 24, for realizing closed loop control.
As shown in figure 4, temperature control system includes cooling fluid reflux pipe 31, the insulation of pipeline heat insulation layer 32, storage box body
Layer 33, cooling fluid storage box body 34, semiconductor chilling plate 35, built-in liquid stirrer 36, thermocouple temperature sensor 37, sealing
Ripple 38, cooling fluid hand-hole sealing bolt 39, direct current Micropump 40, cooling fluid output pipe 41.
31 outer wrap pipeline heat insulation layer 32 of cooling fluid reflux pipe, to ensure temperature stabilization；Flow speed control is by control
Come what is realized, DC MOTOR CONTROL is to export digital quantity by number by microprocessor to the DC motor speed of direct current Micropump processed 40
Mould conversion, the rotating speed for amplifying control Micropump motor later；In the same manner, the semiconductor chilling plate installed on external storage box body 34
35 are realized equally using the schemes of microprocessor control voltage；The rated voltage of selected semiconductor chilling plate 35 is 12V,
Maximum temperature difference can reach 60 DEG C, and can realize freezing and heat double-direction control.
The assembling structure schematic diagram of whole system mechanical part is illustrated in figure 5, Fig. 3 and Fig. 4 two parts are passed through into pipeline
Connection.
As shown in fig. 6, for the control program structure chart of whole system.Due between coil current and the micrometric displacement of executor
Relation non-linear, and affected larger by materials variancess, it is not only control program that will reach higher control accuracy, is led to
The corresponding detection back-to-back testing of design is crossed to record the expansion performance data of the specific giant magnetostrictive rod of correspondence, is worked in system
During, host computer data search for the expansion performance tables of data of giant magnetostrictive rod and take quadratic interpolation according to reading, with
Rapidly and efficiently output control voltage data；Temperature-compensating is similar with the ultimate principle of strain compensation, be all according to temperature error and
Then the size of strain error transfers the journey for having recorded calculating corresponding bit shift compensation value according to corresponding error compensation value
Sequence control data, adjusts corresponding control electric current and voltage according to these data；According to the real-time magnetic field intensity and drive that detect
The relation of galvanic electricity pressure is carried out the hysteresis of computing system response and feeds back to host computer, and the control electricity of system is adjusted according to hysteresis
Pressure and driving frequency, while closed loop control is fed back and constituted according to the magnetic field intensity for detecting, magnetic field intensity direct reaction is performed
The micrometric displacement of device；Output displacement of the micro-displacement sensor of system to detecting system, and feed back calculating reality output micrometric displacement
Error, and by adjusting driving voltage electric current compensating error；Above-mentioned feedback control is all finally by adjusting and compensating control
Voltage x current reaching the purpose of control, eventually through the number of output control voltage after the linear superposition of feedback and offset voltage
According to reaching the purpose of high-precision control with this；The control of thermal cycle control system includes two parts, i.e. active control and passive control
The method for combining, first by the caloric value of driving coil voltage and current parameter computing system, further according to coolant input with
The output temperature difference and flow rate calculation heat exchange balance, adjust the temperature of heat circulating system, passively according to caloric value and heat exchange amount
Control adjusts the heat exchanger effectiveness of Micropump output flow and semiconductor chilling plate mainly according to the error of monitoring point temperature.Journey
The temperature detection control of sequence, stress mornitoring, magnetic field intensity detection, micrometric displacement detect side of four parts using interrupt priority level execution
Formula, the characteristic for making a thorough investigation of four kinds of detections determine priority as micrometric displacement detection, stress mornitoring, magnetic field intensity detection, temperature inspection
Observing and controlling system.System final output is digital quantity, becomes the voltage and current signal of control after hardware conversion.
Claims (4)
1. a kind of ultraprecise magnetostrictive actuator, with a driving coil, a giant magnetostrictive rod, a microprocessor
And digital circuit, it is characterised in that：The microprocessor passes sequentially through D/A conversions in digital circuit, amplifying circuit, band logical filter
Ripple device and controlled current source connection driving coil circuit, for controlling the curtage size of driving coil, realize control
The magnetic field intensity of driving coil processed, and then control the micrometric displacement of executor；The driving coil is built-in with detection coil, for reality
When detect magnetic field intensity inside driving coil, detect the driving of executor and the hysteresis of output, the detection coil connects
Microprocessor and digital circuit are connect, and for the magnetic field intensity signal of detection being fed back to microprocessor, realize system closed loop control；Institute
State, for dispersing the heat of driving coil generation in time, reduce driving coil
Impact of the heating to magnetostriction materials；The cycle cooling system connects temperature control system, for controlling circulation cooling system
The temperature constant of system；Pressure transducer, pressure transducer connection microprocessor, for detecting that surpasses are installed in the executor
Magnetostrictive rod structure body stress, accurately calculates structural strain size according to the stiffness characteristics and stressing conditions of material,
Magnetic field intensity to driving makes the error that corresponding adjustment is caused to micrometric displacement with collocation structure strain；The circulation cooling system
System includes heat dissipating copper pipe (18), digital temperature sensor (25), and the heat dissipating copper pipe is arranged on driving coil and mangneto
Between extrusome, in which, cooling fluid is passed through；The two ends of the embedded heat dissipating copper pipe (18) of the digital temperature sensor (25)
Epoxy backbone（7）In cylinder, for detecting the temperature of cooling fluid input port and delivery outlet and giant magnetostrictive rod.
2. ultraprecise magnetostrictive actuator according to claim 1, it is characterised in that：The microprocessor, D/A turn
Change, amplifying circuit, band filter, controlled current source, driving coil circuit are sequentially connected, it is corresponding by microprocessor output
Digital quantity, and pass through D/A converting circuit and amplifying circuit and Filtering Processing, the voltage required for being ultimately converted to.
3. ultraprecise magnetostrictive actuator according to claim 1, it is characterised in that：The temperature control system includes
Multiple thermocouple temperature sensors (37), direct current Micropump (40), semiconductor chilling plate (35), multiple thermocouple temperature sensors
(37) it is placed in cooling fluid storage box body (34), for detecting cooling fluid storage box body (34) internal temperature field, direct current Micropump
(40) heat dissipating copper pipe (18) is connected by cooling fluid output pipe (41), semiconductor chilling plate (35) is placed in storage box body (34)
Outer wall, direct current Micropump (40), semiconductor chilling plate (35) connect micro- by the D/A conversions in digital circuit, amplifying circuit respectively
Processor；Multiple thermocouple temperature sensors (37) connect microprocessor by A/D change-over circuits, by microprocessor and numeral
Circuit controls the radiating effect of direct current Micropump (40) rotating speed and semiconductor chilling plate (35), realizes the control of radiating flow velocity and temperature
System.
4. ultraprecise magnetostrictive actuator according to claim 3, it is characterised in that：The cooling fluid storage box body
(34) built with liquid stirrer (36), for Homogeneouslly-radiating liquid temp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510019804.0A CN104601038B (en) | 2015-01-15 | 2015-01-15 | super-precise magnetostrictive actuator |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510019804.0A CN104601038B (en) | 2015-01-15 | 2015-01-15 | super-precise magnetostrictive actuator |
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| CN104601038A CN104601038A (en) | 2015-05-06 |
| CN104601038B true CN104601038B (en) | 2017-05-03 |
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| CN109751360B (en) * | 2018-12-26 | 2020-07-10 | 山东科技大学 | Magnetostrictive system for wind tower |
| CN109570137B (en) * | 2019-01-18 | 2024-03-29 | 西南交通大学 | Ultrasonic descaling device with self-diagnosis function |
| CN109595789B (en) * | 2019-02-13 | 2024-02-06 | 深圳热鑫能源科技有限公司 | Horizontal water heater |
| CN111390632A (en) * | 2020-04-02 | 2020-07-10 | 上海应用技术大学 | Feedback regulation flutter suppression device based on giant magnetostrictive material |
| CN113155609B (en) * | 2021-04-14 | 2022-11-11 | 北京航空航天大学 | Elastic modulus test and automatic modeling device for giant magnetostrictive material |
| CN113768227B (en) * | 2021-08-10 | 2024-02-09 | 田辉 | Temperature-control internal circulation epidemic prevention suit |
| CN114236438B (en) * | 2021-12-20 | 2023-03-31 | 中国石油大学(华东) | Measuring device and measuring method for magnetic parameters of giant magnetostrictive material |
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| CN202034920U (en) * | 2011-05-13 | 2011-11-09 | 兰州大学 | Electromagnetic micro driver based on magnetic elastic materials |
| CN104184361A (en) * | 2014-09-15 | 2014-12-03 | 河北工业大学 | Micro displacement drive system design based on giant magnetostrictive materials |
| CN203984274U (en) * | 2014-07-15 | 2014-12-03 | 郑州航空工业管理学院 | Super mangneto system in Structure Active Control |
| CN204089637U (en) * | 2013-11-21 | 2015-01-07 | 王军 | The driving power of electrical micro-machine |
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| JP2009153229A (en) * | 2007-12-18 | 2009-07-09 | Sanyo Electric Co Ltd | Piezoelectric actuator control circuit and vibration control circuit |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN202034920U (en) * | 2011-05-13 | 2011-11-09 | 兰州大学 | Electromagnetic micro driver based on magnetic elastic materials |
| CN204089637U (en) * | 2013-11-21 | 2015-01-07 | 王军 | The driving power of electrical micro-machine |
| CN203984274U (en) * | 2014-07-15 | 2014-12-03 | 郑州航空工业管理学院 | Super mangneto system in Structure Active Control |
| CN104184361A (en) * | 2014-09-15 | 2014-12-03 | 河北工业大学 | Micro displacement drive system design based on giant magnetostrictive materials |
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