CN104390931A - Device and method for measuring spectral emissivity of infrared sample material at high precision - Google Patents

Abstract

The invention provides a device and a method for measuring spectral emissivity of an infrared sample material at high precision. The test requirements for the emissivity of various sample materials in different sizes can be met by adopting a spectrum comparison measuring method and designing an optical coupling system and a water cooling variable diaphragm, the selective amplification of a signal is realized by virtue of a method for laminating and calculating signals measured on a same wavelength point for multiple times, the noise and system stray light of an environment background can be effectively simulated, the measurement precision can be improved, and the high-precision test on the spectral emissivity of the sample material can be realized. By adopting the method, the high-precision measurement difficulty of the spectral emissivity of the infrared sample materials in different sizes can be solved. The method has advantages of high measurement precision, wide temperature range, applicability to different sample materials in different sizes and the like. By adopting the device and method, not only can the accuracy in testing the spectral emissivity of various infrared materials be satisfied, but also an guiding significance on metering test of an infrared target, the infrared simulator spectral emissivity and infrared target spectral radiance can be realized.

Description

High precision infrared specimen material spectral emittance measurement mechanism and method

Technical field

The invention belongs to optical metrology and field tests, relate generally to a kind of specimen material spectral emittance measuring method, particularly relate to a kind of high precision infrared specimen material spectral emittance measurement mechanism and method.

Background technology

Current material emissivity tests general calorimetry, reflectivity method, radiated energy method and based on infrared fourier spectrometer measurement method, calorimetry, reflectivity method, these three kinds of methods of radiated energy method mainly measure integrated emissivity or the hemispherical emissivity of material, the emissivity of material cannot be measured, with the present invention close be based on infrared fourier spectrometer measurement method, domestic and international technology is being looked into discovery in new and investigation, the NIST of the U.S. and Japanese correlative study institute and Some Domestic colleges and universities all carried out based on the research of infrared fourier spectrometer measurement method, but the method can only measure the emissivity of fixed measure specimen material, but, irregular owing to testing sample scantling at present, after adopting the emissivity of infrared fourier spectrometer measurement method test material can cause entering optical system, light path is asymmetric, and produce a large amount of parasitic light, very big error is brought to test.At present, the relevant report of applicable different size material emissivity high-precision measuring method is not also seen.

Summary of the invention

The object of the invention is the difficult problem for current material spectrum emissivity measurement, a kind of high precision infrared specimen material spectral emittance proving installation and method are proposed, adopt spectrum Comparison Method, by design optics Coupling System and water-cooled iris, complete the high-acruracy survey to different size specimen material spectral emittance.

Technical scheme of the present invention is:

Described a kind of high precision infrared specimen material spectral emittance measurement mechanism, is characterized in that: comprise alternating temperature standard blackbody and temperature control system thereof, sample heating furnace, two water-cooled iris, infrared optics Coupling System, infrared fourier spectrometer, computer testing systems; Infrared optics coupled system is made up of a rotating mirror, an off axis paraboloidal mirror and a plane mirror;

Alternating temperature standard blackbody and sample heating furnace are placed on rotating mirror both sides, and sample furnace outlet center is relative with alternating temperature standard blackbody export center, and sample furnace outlet center is equal to the distance at rotating mirror center with alternating temperature standard blackbody export center; Sample furnace outlet center, alternating temperature standard blackbody export center and rotating mirror center are point-blank;

First water-cooled iris is placed on apart from alternating temperature standard blackbody outlet L place, and the first water-cooled iris bore is less than the output bore of alternating temperature standard blackbody; Second water-cooled iris is placed on sample furnace outlet L place, and the second water-cooled iris bore equals the first water-cooled iris bore;

The infrared radiation signal that alternating temperature standard blackbody sends is after the first water-cooled iris limit bundle, or the infrared radiation signal that sample heating furnace sends is after the second water-cooled iris limit bundle, get on rotating mirror, rotating mirror is by after this signal reflex, received by off axis paraboloidal mirror, this signal is converted to directional light by off axis paraboloidal mirror, then through plane mirror reflection, is received by infrared fourier spectrometer; Infrared fourier spectrometer by signal transmission to computer testing system.

Described a kind of high precision infrared specimen material spectral emittance measuring method, is characterized in that: comprise the following steps:

Step 1: by rotating mirror reflecting surface towards alternating temperature standard blackbody; By alternating temperature standard blackbody temperature control system, alternating temperature standard blackbody is warming up to temperature spot to be measured also to stablize; The infrared signal transmitted by infrared fourier spectrometer measurement infrared optics coupled system, infrared signal start wavelength λ ₁, by wavelength X _m, pendulous frequency n, infrared fourier spectrometer exports one group of output voltage signal V _b1(λ _i), V _b2(λ _i) ..., V _bn(λ _i) to computer testing system, wherein i=1,2 ..., m;

Step 2: by rotating mirror reflecting surface towards sample heating furnace; Test specimen material is arranged on sample heating furnace, opens sample heating furnace and is heated to temperature spot to be measured and stablizes; The infrared signal transmitted by infrared fourier spectrometer measurement infrared optics coupled system, infrared signal start wavelength λ ₁, by wavelength X _m, pendulous frequency n, infrared fourier spectrometer exports one group of output voltage signal V ₁(λ _i), V ₂(λ _i) ..., V _n(λ _i) to computer testing system, wherein i=1,2 ..., m;

Step 3: the emissivity according to following formulae discovery specimen material:

$\left\{\begin{array}{c}{V}_b\left({\mathrm{\λ}}_i\right)=V_{\mathrm{bl}}\left({\mathrm{\λ}}_i\right)+V_{b2}\left({\mathrm{\λ}}_i\right)+......+V_{\mathrm{bn}}\left({\mathrm{\λ}}_i\right)\\ V\left({\mathrm{\λ}}_i\right)=V_1\left({\mathrm{\λ}}_i\right)+V_2\left({\mathrm{\λ}}_i\right)+......+V_n\left({\mathrm{\λ}}_i\right)\\ \mathrm{\ϵ}\left({\mathrm{\λ}}_i\right)=V\left({\mathrm{\λ}}_i\right)/V_b\left({\mathrm{\λ}}_i\right)\·{\mathrm{\ϵ}}_b\end{array}\right.$

Wherein V _b(λ _i) for alternating temperature standard blackbody is in wavelength X _imeasure output voltage signal value sum n time; V (λ _i) for sample heating furnace is in wavelength X _imeasure output voltage signal value sum n time; ε _bfor the emissivity of alternating temperature standard blackbody, ε (λ _i) be the emissivity of testing sample material.

Beneficial effect

Overall technology effect of the present invention is embodied in following two aspects.

1) the invention solves the difficult problem that existing equipment can only measure fixed measure electromagnetic radiation rate, as specimen material size or shape, size change, after the radiation signal then causing sample material and alternating temperature standard blackbody to send enters optical system, light path is asymmetric, and produce a large amount of parasitic light, very large measuring error is brought to measurement, this method makes test flexible by the variable water-cooled light hurdle of design, infrared optics Coupling System, can meet the test request of the different sample of area.

2) high precision of the present invention infrared specimen material emissivity method of testing, adopt and take multiple measurements in identical wavelength points, by the method to the computing of identical wavelength points repetitive measurement Signal averaging, realize signal behavior to amplify, effectively to draw up the noise of environmental background and system parasitic light, improve measuring accuracy.

Accompanying drawing explanation

Fig. 1 is high precision of the present invention infrared specimen material spectral emittance measurement mechanism schematic diagram.

In figure: 1, sample heating furnace; 2, sample is tested; 3, the second water-cooled iris; 4, rotating mirror; 5, the first water-cooled iris; 6, alternating temperature standard blackbody and temperature control system thereof; 7, infrared optics Coupling System; 8, infrared fourier spectrometer; 9, computer testing system.

Embodiment

Below in conjunction with accompanying drawing and preferred embodiment, the present invention is described in further detail.

In order to realize the test of the infrared specimen material spectral emittance of high precision, general plotting of the present invention is, by building high precision infrared specimen material spectral emittance proving installation, design optics Coupling System and water-cooled iris, adopt spectrum Comparison Method, realize the accurate test to different size specimen material spectral emittance.Meanwhile, the present invention is by the method to the computing of identical wavelength points repetitive measurement Signal averaging, and realize signal behavior and amplify, the noise of environmental background of effectively drawing up and system parasitic light, improve measuring accuracy.

High precision infrared specimen material spectral emittance proving installation as shown in Figure 1, primarily of the composition such as alternating temperature standard blackbody and temperature control system thereof, sample heating furnace, two water-cooled iris, infrared optics Coupling System, infrared fourier spectrometer, computer testing system containing Survey Software bag.Wherein, infrared optics coupled system is made up of a rotating mirror, an off axis paraboloidal mirror and a plane mirror, and in infrared optics coupled system, each assembly is placed on optical table by respective adjustable support.

Alternating temperature standard blackbody and sample heating furnace are placed on rotating mirror both sides, and sample furnace outlet center is relative with alternating temperature standard blackbody export center, and sample furnace outlet center is equal to the distance at rotating mirror center with alternating temperature standard blackbody export center; Sample furnace outlet center, alternating temperature standard blackbody export center and rotating mirror center are point-blank.

First water-cooled iris is placed on apart from alternating temperature standard blackbody outlet L place, and regulate the first water-cooled iris bore to be less than the output bore of alternating temperature standard blackbody, like this when rotating mirror reflecting surface is towards alternating temperature standard blackbody, the infrared radiation signal that alternating temperature standard blackbody sends is got on rotating mirror after the first water-cooled iris limit bundle, rotating mirror is by after this signal reflex, received by off axis paraboloidal mirror, this signal is converted to directional light by off axis paraboloidal mirror, reflect through plane mirror again, received by infrared fourier spectrometer, infrared fourier spectrometer by signal transmission to computer testing system.

Second water-cooled iris is placed on sample furnace outlet L place, and the second water-cooled iris bore equals the first water-cooled iris bore.When rotating mirror reflecting surface is towards sample heating furnace, the infrared radiation signal that sample heating furnace sends is after the second water-cooled iris limit bundle, get on rotating mirror, rotating mirror is by after this signal reflex, received by off axis paraboloidal mirror, this signal is converted to directional light by off axis paraboloidal mirror, then through plane mirror reflection, is received by infrared fourier spectrometer; Infrared fourier spectrometer by signal transmission to computer testing system.

The high precision adopting above device to carry out infrared specimen material spectral emittance measuring method, comprises the following steps:

Step 1: by rotating mirror reflecting surface towards alternating temperature standard blackbody; By alternating temperature standard blackbody temperature control system, alternating temperature standard blackbody is warming up to temperature spot to be measured also to stablize; The infrared signal transmitted by infrared fourier spectrometer measurement infrared optics coupled system, infrared signal start wavelength λ ₁, by wavelength X _m, pendulous frequency n, infrared fourier spectrometer exports one group of output voltage signal V _b1(λ _i), V _b2(λ _i) ..., V _bn(λ _i) to computer testing system, wherein i=1,2 ..., m; And these group data are kept in Computer Storage module.

Step 2: by rotating mirror reflecting surface towards sample heating furnace; Test specimen material is arranged on sample heating furnace, opens sample heating furnace and is heated to temperature spot to be measured and stablizes; The infrared signal transmitted by infrared fourier spectrometer measurement infrared optics coupled system, infrared signal start wavelength λ ₁, by wavelength X _m, pendulous frequency n, infrared fourier spectrometer exports one group of output voltage signal V ₁(λ _i), V ₂(λ _i) ..., V _n(λ _i) to computer testing system, wherein i=1,2 ..., m; And these group data are kept in Computer Storage module.

Step 3: computer testing system is according to the emissivity of following formulae discovery specimen material:

$\left\{\begin{array}{c}{V}_b\left({\mathrm{\λ}}_i\right)=V_{\mathrm{bl}}\left({\mathrm{\λ}}_i\right)+V_{b2}\left({\mathrm{\λ}}_i\right)+......+V_{\mathrm{bn}}\left({\mathrm{\λ}}_i\right)\\ V\left({\mathrm{\λ}}_i\right)=V_1\left({\mathrm{\λ}}_i\right)+V_2\left({\mathrm{\λ}}_i\right)+......+V_n\left({\mathrm{\λ}}_i\right)\\ \mathrm{\ϵ}\left({\mathrm{\λ}}_i\right)=V\left({\mathrm{\λ}}_i\right)/V_b\left({\mathrm{\λ}}_i\right)\·{\mathrm{\ϵ}}_b\end{array}\right.$

Wherein V _b(λ _i) for alternating temperature standard blackbody is in wavelength X _imeasure output voltage signal value sum n time; V (λ _i) for sample heating furnace is in wavelength X _imeasure output voltage signal value sum n time; ε _bfor the emissivity of alternating temperature standard blackbody, ε (λ _i) be the emissivity of testing sample material.

Claims (2)

1. a high precision infrared specimen material spectral emittance measurement mechanism, is characterized in that: comprise alternating temperature standard blackbody and temperature control system thereof, sample heating furnace, two water-cooled iris, infrared optics Coupling System, infrared fourier spectrometer, computer testing systems; Infrared optics coupled system is made up of a rotating mirror, an off axis paraboloidal mirror and a plane mirror;

Alternating temperature standard blackbody and sample heating furnace are placed on rotating mirror both sides, and sample furnace outlet center is relative with alternating temperature standard blackbody export center, and sample furnace outlet center is equal to the distance at rotating mirror center with alternating temperature standard blackbody export center; Sample furnace outlet center, alternating temperature standard blackbody export center and rotating mirror center are point-blank;

First water-cooled iris is placed on apart from alternating temperature standard blackbody outlet L place, and the first water-cooled iris bore is less than the output bore of alternating temperature standard blackbody; Second water-cooled iris is placed on sample furnace outlet L place, and the second water-cooled iris bore equals the first water-cooled iris bore;

The infrared radiation signal that alternating temperature standard blackbody sends is after the first water-cooled iris limit bundle, or the infrared radiation signal that sample heating furnace sends is after the second water-cooled iris limit bundle, get on rotating mirror, rotating mirror is by after this signal reflex, received by off axis paraboloidal mirror, this signal is converted to directional light by off axis paraboloidal mirror, then through plane mirror reflection, is received by infrared fourier spectrometer; Infrared fourier spectrometer by signal transmission to computer testing system.

2. utilize device described in claim 1 to carry out a method for the infrared specimen material spectral emittance measurement of high precision, it is characterized in that: comprise the following steps:

Step 1: by rotating mirror reflecting surface towards alternating temperature standard blackbody; By alternating temperature standard blackbody temperature control system, alternating temperature standard blackbody is warming up to temperature spot to be measured also to stablize; The infrared signal transmitted by infrared fourier spectrometer measurement infrared optics coupled system, infrared signal start wavelength λ ₁, by wavelength X _m, pendulous frequency n, infrared fourier spectrometer exports one group of output voltage signal V _b1(λ _i), V _b2(λ _i) ..., V _bn(λ _i) to computer testing system, wherein i=1,2 ..., m;

Step 2: by rotating mirror reflecting surface towards sample heating furnace; Test specimen material is arranged on sample heating furnace, opens sample heating furnace and is heated to temperature spot to be measured and stablizes; The infrared signal transmitted by infrared fourier spectrometer measurement infrared optics coupled system, infrared signal start wavelength λ ₁, by wavelength X _m, pendulous frequency n, infrared fourier spectrometer exports one group of output voltage signal V ₁(λ _i), V ₂(λ _i) ..., V _n(λ _i) to computer testing system, wherein i=1,2 ..., m;

Step 3: the emissivity according to following formulae discovery specimen material:

$\left\{\begin{array}{c}{V}_b\left({\mathrm{\λ}}_i\right)=V_{b1}\left({\mathrm{\λ}}_i\right)+V_{b2}\left({\mathrm{\λ}}_i\right)+......+V_{\mathrm{bn}}\left({\mathrm{\λ}}_i\right)\\ V\left({\mathrm{\λ}}_i\right)=V_1\left({\mathrm{\λ}}_i\right)+V_2\left({\mathrm{\λ}}_i\right)+......+V_n\left({\mathrm{\λ}}_i\right)\\ \mathrm{\ϵ}\left({\mathrm{\λ}}_i\right)=V\left({\mathrm{\λ}}_i\right)/V_b\left({\mathrm{\λ}}_i\right)\·{\mathrm{\ϵ}}_b\end{array}\right.$

Wherein V _b(λ _i) for alternating temperature standard blackbody is in wavelength X _imeasure output voltage signal value sum n time; V (λ _i) for sample heating furnace is in wavelength X _imeasure output voltage signal value sum n time; ε _bfor the emissivity of alternating temperature standard blackbody, ε (λ _i) be the emissivity of testing sample material.