CN104386455B - Automatically equipment and the sweep-out method thereof depositing metal on conveyer belt is removed - Google Patents

Abstract

Automatically the equipment depositing metal on conveyer belt is removed, including cleaning actuating device, chemically-cleaning device, clear water swab, wipes of alcohol cleaning device and base, clean actuating device and include motor, decelerator and driving-chain wheels, chemically-cleaning device includes cleanout fluid collector groove, cleanout fluid circulation pipe, hairbrush cleans roller, dry roller, extrusion dehydration roller one and nitrogen sparge tube, clear water swab includes sparge pipe, foam plastics clearing roll, dehydration clearing roll, extrusion dehydration roller two and lack of water collector groove, wipes of alcohol cleaning device includes ethanol clearing roll, extrusion dehydration roller three, ethanol collector groove and draining valve, base includes mounting, running wheel, lift cylinder and lifting idler pulley, and cleanout fluid storage bin and circulating pump.Chemical cleaning solution and the deposition of aluminum on conveyer belt, zinc and oxide thereof carry out chemical reaction dissolving and come off, and deposition metal is cleaned up from band by swab, solves and removes the problem depositing metal on conveyer belt.

Description

Equipment for automatically removing metal deposits on conveyor belts and method for removing them

technical field

The invention relates to equipment and a method for automatically cleaning and removing deposited metal on a conveyor belt, in particular to equipment and a method for automatically cleaning and removing deposited metal on a continuous magnetron sputtering substrate conveyor belt.

Background technique

Magnetron sputtering thin film formation technology is a surface treatment technology that has developed rapidly in recent years. Patent No. CN102392224A discloses a continuous arrangement, flipping, and non-destructive collection device for workpieces that can work under high-temperature vacuum conditions. This device is mainly used for vacuum magnetron sputtering coating and other surface treatment of metal or non-metal workpieces . The conveyor belt of this device is made of stainless steel or other corrosion-resistant metal materials. During the production of vacuum sputtering coating, part of the target metal splashes onto the conveyor belt for deposition. When the deposited metal reaches a certain thickness, the surface of the conveyor belt becomes uneven, which affects the device. of normal operation. These deposited metals _on magnetron sputtering lines are mainly Al, Zn, _Al2O3 and ZnO. These metal deposits are firmly combined with the conveyor belt, and the peel strength can reach more than 20MPa, which is difficult to remove by mechanical means. Patent No. CN103303656A discloses a conveyor belt cleaning device. This device uses physical methods to scrub and remove oil stains, minced meat, bone, etc. on the conveyor chain. It is mainly used in the meat segmentation processing line, and it cannot remove the metal deposited on the conveyor belt during the production of magnetron sputtering coating.

Currently, there is no solution in the field of magnetron sputtering technology to prevent the deposition of conveyor belt targets. The existing solution is to replace the conveyor belt regularly, which not only wastes the material of the conveyor belt, but also complicated replacement work, labor-intensive and time-consuming, and is easy to damage the equipment parts. method.

Contents of the invention

The technical problem to be solved by the present invention is to provide a device capable of automatically removing metal deposits on a conveyor belt and a method thereof for the above-mentioned technical status quo.

The equipment for automatically removing metal deposits on the conveyor belt is characterized in that it includes a cleaning transmission device, a chemical cleaning device, a clean water scrubbing device, an alcohol scrubbing device and a base, and the cleaning transmission device includes a motor, a reducer and a drive sprocket set. The chemical cleaning device includes a cleaning liquid collection tank, a cleaning liquid circulation pipe, a brush cleaning roller, a foam plastic drying roller, an extrusion dehydration roller one and a nitrogen purge pipe, and the clear water scrubbing device includes a water spray pipe, a foam plastic scrubbing roller , Styrofoam dehydration scrubbing roller, extrusion dehydration roller two and lack of water collection tank, the alcohol scrubbing device includes alcohol scrubbing roller, extrusion dehydration roller three, alcohol collection tank and drain valve, the base includes a seat frame, a device The walking wheels on the seat frame, the lifting cylinder and the lifting guide wheel arranged above the two ends of the seat frame, as well as the cleaning liquid storage tank and the cleaning liquid circulating pump arranged on the seat frame.

The drive sprocket set includes the sprockets, chains and gears that drive the brush cleaning roller, the foam plastic drying roller, the foam plastic scrubbing roller, the foam plastic dehydration scrubbing roller, and the alcohol scrubbing roller in turn.

The cleaning liquid circulation pipe also includes a circulation pump connected to one end of the cleaning liquid circulation pipe, a cleaning liquid collection tank under the cleaning liquid circulation pipe, a cleaning liquid storage tank under the cleaning liquid collection tank, and a cleaning liquid storage tank. The circulating filter pipe and valve connected to the other end of the circulating pump.

The cleaning liquid circulation pipe is connected in parallel with two spaced cleaning liquid injection pipes, and each cleaning liquid injection pipe is provided with a number of nozzles for upward spraying.

The nitrogen purge pipe includes an upper purge pipe and a lower purge pipe, and each purge pipe is provided with several purge heads blowing along the length direction of the cleaning tank.

The cleaning tank includes a cleaning liquid collection tank, an exhausted water collection tank and an alcohol collection tank which are separated in sequence. A guide rail for receiving the conveyor belt frame is arranged above the cleaning tank, and a front stopper and a rear stopper are provided at both ends of the guide rail.

The bottom of the cleaning liquid collection tank is provided with a cleaning liquid discharge pipe, the bottom of the dry water collection tank is provided with a dry water discharge pipe, and the bottom of the alcohol collection tank is provided with an alcohol discharge pipe and a discharge valve.

The method for automatically removing metal deposits on a conveyor belt comprises the following steps:

1) First push the equipment for automatically removing metal deposits on the conveyor belt to the discharge port of the magnetron sputtering equipment, then push the conveyor belt in the magnetron sputtering device to the cleaning equipment with a box frame until it touches the front stopper, and install The rear stop locks the conveyor box frame;

2) Start the lifting cylinder to raise the cleaning tank, make the brush cleaning roller and scrubbing roller contact with the conveyor belt, and adjust the height of the cleaning tank, so that the brush cleaning roller and scrubbing roller are in full contact with the conveyor belt;

3) Inject dilute sulfuric acid or dilute alkali cleaning solution into the cleaning solution storage tank, inject absolute ethanol into the alcohol collection tank, connect the cleaning solution circulation pipeline, turn on the cleaning solution circulation pump, turn on the tap, and close the alcohol discharge valve;

4) Start the conveyor belt motor to make the conveyor belt rotate slowly at a speed of 0.5-3 m/h, start the cleaning drive motor, and adjust the speed of the reducer to 30-60 rpm to drive the brush cleaning roller, foam plastic drying roller, foam Plastic scrubbing roller Foam plastic dehydration scrubbing roller, alcohol scrubbing roller and squeeze dehydration roller rotate, start the cleaning liquid circulation pump, and start cleaning;

5) The cleaning liquid is sprayed from the cleaning liquid circulation pipe to react with the metal deposited on the surface of the conveyor belt, causing the metal deposits to fall off. Absorbed by the plastic drying roller, and then squeezed out by the dehydration roller, falling into the cleaning solution collection tank and returning to the cleaning solution storage tank;

6) When the conveyor belt passes through the clean water scrubbing device forward, the water spray pipe sprays tap water and the rotating foam plastic scrubbing roller to wash off the residual cleaning liquid. Sucked away, then squeezed out by the second extrusion dehydration roller, collected and discharged into the exhausted water collection tank;

7) When the conveyor belt passes above the alcohol scrubbing device, the alcohol scrubbing roller is wiped with anhydrous ethanol once to further remove the residual cleaning liquid and water. The excess alcohol in the alcohol scrubbing roller is extruded three times by the extrusion dehydration roller and falls into the alcohol pool. in the slot;

8) The conveyor belt rotates in a slow cycle, and the cleaning liquid circulation pipeline continuously delivers cleaning liquid to the injection pipe for continuous spraying until the metal deposits on the conveyor belt are removed.

Compared with the prior art, the present invention has the beneficial effects that: the cleaning solution chemically reacts and dissolves the deposited metal aluminum, zinc and their oxides on the conveyor belt at normal temperature, and the rotating brush cleaning roller can accelerate the shedding of the deposited metal dissolved matter. Therefore, the deposited metal can be cleaned from the metal conveyor belt, and the problem that the metal deposit on the conveyor belt cannot be removed in the prior art is solved.

The chemical cleaning device in the equipment of the present invention is provided with a cleaning liquid circulation pump, which is connected to a cleaning liquid circulation pipe, and a circulation pump filter pipe is arranged inside the cleaning liquid storage tank to realize recycling of the cleaning liquid, prevent environmental pollution, and save resources.

Description of drawings

Fig. 1 is a schematic diagram of the present invention.

Fig. 2 is a top view of the present invention.

detailed description

Embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings.

As shown in Figure 1, the equipment for automatically removing metal deposits on the conveyor belt includes a cleaning transmission device 1, a chemical cleaning device 2, a clean water scrubbing device 3, an alcohol scrubbing device 4 and a base 5.

As shown in Figures 1 and 2, the cleaning transmission device 1 includes a motor 11, a speed reducer 12, a sprocket one 13 installed on the speed reducer, a chain one 14, a sprocket two 15, and a gear that transmit momentum sequentially with the sprocket one 13 One 16, gear two 17, sprocket three 18, chain two 19, sprocket four 110, sprocket five 111, chain three 112, sprocket six 113, sprocket seven 114, chain four 115, sprocket eight 116, chain Wheel nine 117, chain five 118 and sprocket wheel ten 119.

Described transmission sprocket group comprises drive brush cleaning roller 23 successively, foam plastics dry roller 24, foam plastics scrubbing roller 32, foamed plastics dehydration scrubbing roller 33, the sprocket wheel, chain and gear that alcohol scrubbing roller 41 rotates.

As shown in Figures 1 and 2, the chemical cleaning device 2 includes a cleaning liquid collection tank 21, a cleaning liquid circulation pipe 22, a brush cleaning roller 23 that rotates in opposite directions, a foam plastic drying roller 24 and a squeezer that can adjust the extrusion strength. Press dehydration roller one 25 and nitrogen purge pipe 26. A cleaning liquid discharge pipe 211 is provided at the bottom of the cleaning liquid collection tank 21 . The upper end of the cleaning fluid circulation pipe 22 is connected in parallel with two spray pipes 221 spaced apart. Two brush cleaning rollers 23 are arranged between the two spray pipes 221, and each spray pipe is provided with several nozzles 222 for upward spraying. The other port 223 of the cleaning liquid circulation pipe 22 is connected to the outlet joint 552 of the cleaning liquid circulation pump 55 . The cleaning liquid circulation pipe 22 also includes a circulation pump 55 connected to one end of the cleaning liquid circulation pipe 22, a cleaning liquid collection tank 21 located under the cleaning liquid circulation pipe 22, a cleaning liquid storage tank 54 located under the cleaning liquid collection tank 21, and The circulation filter pipe 543 and the valve 544 connected with the other end of the circulation pump 55 in the cleaning storage tank. The nitrogen purge pipe 26 includes an upper purge pipe 261 and a lower purge pipe 262, and the upper purge pipe 261 and the lower purge pipe 262 are all provided with several purge heads 263 blown along the length direction of the cleaning tank 7, It can effectively reduce the concentration of hydrogen in every corner. Since the target metal Al and Zn will generate hydrogen when they react with _NaOH or KOH or _H2SO4 , in order to prevent the potential safety hazard of hydrogen explosion (when the ratio of hydrogen and air volume is 4%-74.2%), the present invention Adjust and control the concentration of the solvent, the number of cleaning liquid circulation pipes and the rotation speed of the brush cleaning roller, etc., so that the hydrogen gas produced by the dissolution reaction of the target metal Al and Zn per minute is ≤ 5 liters, and the hydrogen gas is purged with a nitrogen gas purging device at the same time. Diluted so that the volume ratio of hydrogen to air is ≤0.1%, far less than the explosion ratio of 4%, eliminating the hidden danger of explosion caused by hydrogen production.

As shown in Figures 1 and 2, the clear water scrubbing device 3 includes a water spray pipe 31, a foamed plastic scrubbing roller 32, a foamed plastics dehydration scrubbing roller 33, and an extrusion dehydration roller 2 34 that can adjust the extrusion strength and a water-deficient collection tank 35. The water spray pipe 31 may be provided with a plurality of water spray ports 311 . The bottom of the exhausted water collection tank 35 is provided with a exhausted water discharge pipe 351, and the water in the exhausted water collection tank 35 flows to the external exhausted water collection tank of the equipment through the external hose of the exhausted water discharge pipe 351.

As shown in FIGS. 1 and 2 , the alcohol scrubbing device 4 includes an alcohol scrubbing roller 41 , a squeeze dehydration roller 3 42 that can adjust the extrusion strength, and an alcohol collection tank 43 . An alcohol discharge pipe 431 and a discharge valve 432 are arranged at the lower end of the alcohol collection tank 43 . When it stops working, the discharge valve 432 is opened, and the alcohol is recycled into the alcohol container through the discharge pipe 431 . A baffle 433 is also arranged above the alcohol collection tank 43, and the baffle 433 can prevent a large amount of alcohol from volatilizing.

As shown in FIGS. 1 and 2 , the base 5 includes traveling wheels 51 , lifting cylinders 52 , lifting guide wheels 53 , cleaning fluid storage tanks 54 , circulation pumps 55 and base frames 56 . A detachable filter frame 542 is provided on the body of the cleaning solution storage tank 54 , and a filter tube 543 connected to the other end of the circulation pump 55 and a valve 544 are provided in the cleaning solution storage tank. The outlet of the circulating pump filter pipe 543 is connected to the inlet joint 551 of the cleaning liquid circulating pump 55, and a slag discharge port 546 is installed at the bottom of the cleaning liquid storage tank 54, which can regularly clean the filter residue in the cleaning liquid storage tank 54. The base 5 is provided with a base frame 56 to support the cleaning tank 7. The cleaning tank 7 includes a cleaning liquid collection tank 21, an exhausted water collection tank 35 and an alcohol collection tank 43 separated in sequence, and a guide rail for receiving the conveyor belt box frame 8 is arranged above the cleaning tank 7. 9. Front stoppers 562 and rear stoppers 561 are provided at both ends of the guide rail 9, and screws 563 that can adjust the height of the cleaning tank 7 are arranged on the top of the four corners of the cleaning tank 7.

First push the device for automatically removing the deposited metal on the conveyor belt to the discharge port of the magnetron sputtering device, then place the conveyor belt 6 in the magnetron sputtering device in the box frame 8, and the guide wheels 10 under the box frame 8 along the The guide rail 9 is pushed onto the cleaning tank 7 until it contacts the front stopper 562, and the rear end stopper 561 is installed to lock the conveyor belt case frame 8. Start the lifting cylinder 52, raise the cleaning tank 7, make each brush cleaning roller and scrubbing roller contact with the conveyor belt 6, and adjust the screws 563 at the four corners of the two ends of the cleaning tank 7, so that the rotating brush cleaning roller and the scrubbing roller are in contact with the outer surface of the conveyor belt. Frictional contact.

Connect the cleaning liquid discharge pipe 221 and the cleaning liquid circulation pump outlet 552 with a hose, connect the exhaust water discharge pipe 351 with the external exhaust water collection tank of the equipment with a hose, and close the alcohol discharge valve 432 . Open the circulation pump 55, open the valve 544 of the cleaning liquid circulation pump inlet 551, connect the water spray pipe 31 with the water pipe with a flexible pipe, open the water tap, and connect the nitrogen purge pipe 26. Inject 20%-30% NaOH or KOH or 10-20% H ₂ SO ₄ cleaning solution into the cleaning solution storage tank 54 , and inject absolute ethanol into the alcohol collection tank 43 .

First start the conveyor belt motor to make the conveyor belt rotate at a speed of 0.5-3 meters per hour. Restart the cleaning drive motor 11, adjust the reducer speed at 30 to 60 rpm, and drive the brush cleaning roller 23, the foam plastic drying roller 24, the foam plastic scrubbing roller 32, the foam plastic dehydration scrubbing roller 33 and Alcohol scrubbing roller 41 rotates, and starts cleaning liquid circulating pump 55, starts to clean.

The cleaning liquid sprays out from the cleaning liquid injection pipe 221 and reacts with the metal deposited on the surface of the conveyor belt 6. The chemical reaction formula between the alkaline or acidic cleaning liquid and the metal deposits is expressed as follows:

2Al+2NaOH+2H ₂ O=2NaAlO ₂ +3H ₂ ↑

Al ₂ O ₃ +2NaOH=2NaAlO ₂ +H ₂ O

Zn+2NaOH=Na ₂ ZnO ₂ +H ₂ ↑

2Al+2KOH+2H ₂ O=2KAlO ₂ +3H ₂ ↑

Al ₂ O ₃ +2KOH=2KAlO ₂ +H ₂ O

Zn+2KOH=K ₂ ZnO ₂ +H ₂ ↑

2Al+3H ₂ SO4=Al ₂ (SO4) ₃ +3H ₂ ↑

Zn+H ₂ SO ₄ =ZnSO ₄ +H ₂ ↑

ZnO+H ₂ SO ₄ =ZnSO ₄ +H ₂ O

Deposited metal reacts with NaOH or KOH solution or H ₂ SO ₄ solution dissolves and falls off, and the cleaning solution adhered to the surface is absorbed by the foam plastics drying roller 24 when the conveyor belt 6 passes through the cleaning solution and the brush cleaning roller 23 forward, and is then squeezed out. The dewatering roller one 25 squeezes out and falls into the cleaning solution collection tank 21 and returns to the cleaning solution storage tank 54.

When the conveyor belt 6 passed through the clean water scrubbing device 3 forward, the water spray pipe 31 sprayed tap water and the rotating foam plastic dehydration scrubbing roller 33 to wash away the residual cleaning solution. When passing through the foamed plastic dehydration scrubbing roller 33, the water on the conveyor belt surface is sucked away by the foamed plastic dehydration scrubbing roller 33, then extruded by the extrusion dehydration roller 2 34, collected and discharged into the exhausted water collection tank 35, and in the exhausted water collection tank 35 The water in the exhausted water discharge pipe 351 external flexible pipe flows in the exhausted water collecting tank.

When the conveyor belt 6 is above the alcohol scrubbing device 4, the alcohol scrubbing roller 41 wipes the absolute ethanol once to further remove residual cleaning liquid and moisture. Into the alcohol collection tank 43.

The conveyor belt is cycled until the metal deposits are removed.

Claims (10)

1. null1. automatically remove the equipment depositing metal on conveyer belt，It is characterized in that: include cleaning actuating device、Chemically-cleaning device、Clear water swab、Wipes of alcohol cleaning device and base，Described cleaning actuating device includes motor、Decelerator and driving-chain wheels，Described chemically-cleaning device includes cleanout fluid collector groove、Cleanout fluid circulation pipe、Hairbrush cleans roller、Foam plastics dries roller、Extrusion dehydration roller one and nitrogen sparge tube，Described clear water swab includes sparge pipe、Foam plastics clearing roll、Foam plastics dehydration clearing roll、Extrusion dehydration roller two and lack of water collector groove，Described wipes of alcohol cleaning device includes ethanol clearing roll、Extrusion dehydration roller three、Ethanol collector groove and draining valve，Described base includes mounting、The running wheel being located on mounting and be located at the lift cylinder above mounting two ends and lifting idler pulley，And the cleanout fluid storage bin that is located on mounting and cleanout fluid circulating pump.
2. The equipment of metal is deposited on automatic removing conveyer belt the most according to claim 1, it is characterized in that described driving-chain wheels include that band electric brush cleans roller (23) successively, foam plastics dries roller (24), foam plastics clearing roll (32), foam plastics dehydration clearing roll (33), sprocket wheel, chain and the gear that ethanol clearing roll (41) rotates.
3. The equipment of metal is deposited on automatic removing conveyer belt the most according to claim 1, it is characterized in that described cleanout fluid circulation pipe (22) also includes connecting the circulating pump (55) of cleanout fluid circulation pipe (22) one end, the cleanout fluid collector groove (21) being located under cleanout fluid circulation pipe, the cleanout fluid storage bin (54) being located under cleanout fluid collector groove (21), be located in cleanout fluid storage bin (54) be connected with circulating pump (55) other end be circulated throughout chimney filter (543) and valve (544).
4. The equipment of metal is deposited on automatic removing conveyer belt the most according to claim 1, it is characterized in that upper parallel connection two the cleanout fluid playpipe (221) separately of described cleanout fluid circulation pipe (22), every cleanout fluid playpipe sets some spouts (222) upwards sprayed.
5. The equipment of metal is deposited on automatic removing conveyer belt the most according to claim 1, it is characterized in that described nitrogen sparge tube (26) includes that upper strata scavenging conduit (261) and lower floor's scavenging conduit (262), every layer of scavenging conduit set some sweeping heads (263) blown along rinse bath (7) length direction.
6. Deposit the equipment of metal on automatic removing conveyer belt the most according to claim 5, it is characterized in that cleanout fluid collector groove (21), lack of water collector groove (35) and ethanol collector groove (43) that described rinse bath (7) includes being spaced successively.
7. Deposit the equipment of metal on automatic removing conveyer belt the most according to claim 5, it is characterized in that setting the guide rail (9) receiving conveyer belt tank tower (8) in described rinse bath (7) top, set positive stop (561) and backstop (562) at guide rail two ends.
8. The equipment of metal is deposited on automatic removing conveyer belt the most according to claim 1, it is characterized in that described cleanout fluid collector groove (21) bottom is provided with cleanout fluid discharge pipe (211), lack of water collector groove (35) bottom is provided with lack of water discharge pipe (351), and ethanol collector groove (43) lower section is provided with ethanol discharge pipe (431) and discharge valve (432).
9. 9. automatically removing the method depositing metal on conveyer belt, its feature comprises the following steps:

   1) first push to magnetron sputtering apparatus discharging port by automatically removing the equipment depositing metal on conveyer belt, then the conveyer belt tank tower in magnetic control sputtering device is pushed on cleaning equipment until contacting positive stop, and backstop locking conveyer belt tank tower is installed；

   2) start lift cylinder to be risen by rinse bath, make hairbrush clean roller and contact with conveyer belt with clearing roll, and regulate the height of rinse bath, make hairbrush clean roller and clearing roll and completely attach to conveyer belt；

   3) in cleanout fluid storage bin, inject dilute sulfuric acid or diluted alkaline cleanout fluid, in ethanol collector groove, inject dehydrated alcohol, connect cleanout fluid circulation line, open cleanout fluid circulating pump, open water tap, close ethanol discharge valve；

   4) starting conveyer belt motor makes conveyer belt with the speed slow rotation of 0.5～3 m/h, start and clean actuating device motor, regulation decelerator rotating speed is that 30～60 revs/min of band electric brush clean roller, foam plastics dries roller, foam plastics clearing roll, foam plastics are dehydrated clearing roll, ethanol clearing roll and extrusion dehydration roller and rotate, start cleanout fluid circulating pump, start to clean；

   5) metal that cleanout fluid sprays with conveyer belt surface deposition from cleanout fluid circulation pipe reacts, metal deposit reaction is made to come off, conveyer belt is advanced past the cleanout fluid sticking to surface when cleanout fluid and hairbrush clean roller and is dried roller by foam plastics and absorb, and is then extruded dehydration roll one extrusion and falls into cleanout fluid collector groove and be back to cleanout fluid storage bin；

   6) when conveyer belt is advanced past clear water swab, the foam plastics clearing roll of sparge pipe ejection tap water and rotation washes away the cleanout fluid of residual, it is being dehydrated clearing roll through foam plastics, the water on conveyer belt surface is siphoned away by foam plastics dehydration clearing roll, it is extruded dehydration roll two extrusion again, collects and enter lack of water collector groove；

   7) when conveyer belt is above wipes of alcohol cleaning device, ethanol clearing roll rubbing a dehydrated alcohol, remove cleanout fluid and the moisture of residual further, ethanol unnecessary in ethanol clearing roll is extruded dehydration roll three extrusion, falls in ethanol collector groove；

   8) conveyer belt slowly cycle rotation, cleanout fluid circulation line carries the continuous hydro-peening of cleanout fluid to playpipe continuously, until metal deposit is cleaned on conveyer belt.
10. The method depositing metal on automatic removing conveyer belt the most according to claim 9, is characterized in that NaOH that described cleanout fluid mass ratio is 20 30% or KOH solution or mass ratio are the H of 10-20%₂SO₄Solution.