CN104376006A - Technical method for integrating data of multiple regional devices of integrated circuit production line - Google Patents

Technical method for integrating data of multiple regional devices of integrated circuit production line Download PDF

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Publication number
CN104376006A
CN104376006A CN201310353523.XA CN201310353523A CN104376006A CN 104376006 A CN104376006 A CN 104376006A CN 201310353523 A CN201310353523 A CN 201310353523A CN 104376006 A CN104376006 A CN 104376006A
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data
id
step
device
according
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CN201310353523.XA
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Chinese (zh)
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王宏
裴志伟
林跃
康凯
姬小兵
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沈阳中科博微自动化技术有限公司
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Publication of CN104376006A publication Critical patent/CN104376006A/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F16/00Information retrieval; Database structures therefor; File system structures therefor
    • G06F16/20Information retrieval; Database structures therefor; File system structures therefor of structured data, e.g. relational data
    • G06F16/25Integrating or interfacing systems involving database management systems
    • GPHYSICS
    • G06COMPUTING; CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00Arrangements for program control, e.g. control units
    • G06F9/06Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44Arrangements for executing specific programs
    • G06F9/445Program loading or initiating
    • G06F9/44505Configuring for program initiating, e.g. using registry, configuration files
    • G06F9/4451User profiles; Roaming

Abstract

The invention discloses a technology for integrating data of multiple regional devices of an integrated circuit production line. The technology includes steps of firstly, configuring ID (identification) of database management devices and attributive department ID mapping tables; secondly, configuring ID of database management regions and controlled department ID mapping tables; thirdly, loading device information from data servers to memories; fourthly, starting regional data acquisition service and the devices and interchanging data information between the regional data acquisition service and the devices; fifthly, acquiring data of controlled regions and parsing the data according to formats; sixthly, integrating the data according to data record charts of the ID of the devices. The data record charts are stored in the remote data servers. The technology has the advantages that the data of the production devices which are distributed in the multiple regions of the integrated circuit production line can be integrated by the aid of the technology, accordingly, the problem of deterioration of the acquisition performance of data acquisition service due to the fact that devices of an existing production line are expanded to a certain extent can be solved, and the flexibility, the adaptability and the performance of software can be improved.

Description

集成电路生产线的多区域设备数据集成技术方法 Multi-region device data integration IC production line art method

技术领域 FIELD

[0001 ] 本发明涉及集成电路生产线的多区域设备数据集成技术,具体说是针对集成电路生产线数据采集系统中的多区域数据集成技术方法。 Multi-region device invention relates to a data integration technology IC production line [0001] present, specifically for multi-region data integration IC production line art methods of data acquisition system.

背景技术 Background technique

[0002] 在集成电路生产线中,设备种类和数量繁多,由于工厂单个部门车间容纳设备的数量有限,工厂不得不将设备分区域进行管理,使得与设备配套的数据采集系统必须适用这种实际情况,然而随着设备数量的不断增加,如果采用一个数据采集系统的服务程序进行管理所有设备的方式,数据采集系统的性能也会随着下降,终究会随着设备增加到一定的数量,数据采集系统的服务程序的管理达到上限,使得数据采集系统有瘫痪的风险。 [0002] In an integrated circuit production line, the number and variety of types of equipment, a limited number of individual sectors due to factory workshop receiving apparatus, the plant had to be sub-area management apparatus, the equipment for such data acquisition system must apply to this situation However, with the increasing number of devices, if a data acquisition system service program to manage all the devices the way, performance data acquisition system will also decrease, eventually with a certain number of devices increases, data acquisition management service system reach the limit, making the data acquisition system at risk of paralysis.

发明内容 SUMMARY

[0003] 针对上述技术不足,本发明的目的提供一种集成电路生产线数据采集系统中的多区域数据集成技术方法,以适应集成电路生产厂的实际需求。 [0003] For the above technical deficiencies, an object of the present invention to provide a multi-zone data integration art method an integrated circuit production line data acquisition system to meet the actual needs of the integrated circuit manufacturer.

[0004] 为实现上述目的本发明采用的技术方案是: [0004] To achieve the above object of the present invention adopts the technical solution is:

[0005] 一种集成电路生产线数据采集系统中的多区域数据集成技术方法,根据工厂对设备进行分区域管理,数据采集系统的服务程序也分区域进行管理,采用将各区域服务采集的数据进行集成的技术来完成对工厂所有设备的数据采集,利用数据库平台进行管理,对数据库管理的设备ID和所归属部门ID进行映射,对数据库管理的区域ID和部门ID进行映射,从数据服务器加载设备信息到内存,根据服务程序所管理的区域参数启动区域数据采集服务与设备进行数据信息交互,采集所管控区域的数据并按照格式解析,按照设备ID存储于远程数据服务器的数据记录表,完成数据集成。 [0005] The multi-zone data integration art method an integrated circuit production line data acquisition system, according to the plant of the sub-area management device, the program data acquisition system can be divided into service areas managed using the service acquisition data for each area will be integrated technology to complete the data collection for all plant equipment, to manage the use of database platform, device ID and the database management attributable department ID mapping, regional ID and department database management ID mapping, loading equipment from the data server information into memory, the region parameter according to the service program managed by the boot area data collection services and device data information exchange, data control area for acquisition pipe and the format parsing, data recording table apparatus ID stored in the remote data servers, the completion of the data integrated.

[0006] 所述的集成电路生产线的多区域设备数据集成技术,包括以下步骤: [0006] IC production line according to the multi-region data integration technology devices, comprising the steps of:

[0007] 步骤I,配置数据库管理的设备ID和所归属部门ID映射表; [0007] Step I, the configuration of the device ID and the sector ID mapping table of the home database management;

[0008] 步骤2,配置数据库管理的区域ID和所管控的部门ID映射表; [0008] Step 2, the configuration management database region ID and the control sector ID mapping table;

[0009] 步骤3,从数据服务器加载设备信息到内存; [0009] Step 3, the device information is loaded from the server to the data memory;

[0010] 步骤4,启动区域数据采集服务与设备进行数据信息交互; [0010] Step 4, starting with the service area of ​​the data acquisition device data information exchange;

[0011] 步骤5,采集所管控区域的数据并按照格式解析; Control data area [0011] Step 5, the collection pipe and parsed according to the format;

[0012] 步骤6,按照设备ID存储于远程数据服务器的数据记录表,完成数据集成。 [0012] Step 6 according to the device ID stored in the data recording table remote data server, for data integration.

[0013] 在所述步骤I中,配置数据库管理的设备ID和所归属部门ID映射表,此映射表为所有区域的设备ID与设备所属部门ID的映射表。 [0013] In the step I, the configuration of the device ID and the sector ID mapping table of the home database management, the mapping table for the device with the device ID Sector ID mapping table of all regions.

[0014] 在所述步骤2中,配置数据库管理的区域ID和所管控的部门ID映射表,此映射表为生产线上所有区域ID与所管控部门的映射表。 [0014] In the step 2, the configuration of the control area ID and the sector ID mapping table of database management, this is a mapping table for all the production line and the area ID mapping table control department.

[0015] 在所述步骤3中,根据所述步骤I中,配置数据库管理的设备ID和所归属部门ID映射表,根据所述步骤2中,配置数据库管理的区域ID和所管控的部门ID映射表,根据所述步骤3中,从数据服务器加载设备信息到内存,主要是加载数据库配置信息,数据库相关的映射表数据。 [0015] In the step 3, according to step I, the configuration of the database management device ID and sector ID mapping table belongs, according to the step 2, the configuration database administration area ID and sector ID of the control mapping table, according to the step 3, the data is loaded from the server to the memory device information, primarily load the database configuration information relating to the mapping database table data.

[0016] 所述步骤4中,根据所述步骤3中,从数据服务器加载设备信息到内存,启动区域数据采集服务与设备进行数据信息交互。 In [0016] step 4, according to the step 3, the memory, the boot area and the data acquisition device data service information interaction device information is loaded from a data server.

[0017] 所述步骤5中,根据所述步骤4中,启动区域数据采集服务与设备进行数据信息交互,采集所管控区域的数据并按照格式解析。 [0017] In step 5, the data according to the information interaction in step 4, the data acquisition start area services and equipment, the data acquisition control area and parsed according to the format of the tube.

[0018] 所述步骤6中,根据所述步骤5中,采集所管控区域的数据并按照格式解析,按照设备ID存储于远程数据服务器的数据记录表,完成数据集成。 In [0018] step 6, the control data area according to the step 5, the collection pipe and parses the format, according to the device ID stored in the data recording table remote data server, for data integration.

[0019] 本发明的优点是: [0019] The advantage of the present invention are:

[0020] 1、升级扩展方便。 [0020] 1, easy to upgrade expansion. 本发明通过数据库平台进行数据管理,用户只需对数据库相关配置表的更改即完成系统的升级扩展。 The present invention is a data management platform through the database, the user only changes to the database configuration table, i.e., expansion of the system to complete the upgrade.

[0021] 2、高效、通用。 [0021] 2, efficient, versatile. 本发明通过给服务程序传入区域名参数来管理所属区域的设备,通过数据库管理相关区域与设备映射,来对不同设备类型设备进行管理,提高了管理软件的开发效率,具有很高的通用性。 The present invention belongs to the region to manage the device by passing domain parameters to the service area of ​​the program, to manage different types of devices by device database management-related areas and mapping equipment, improve the efficiency of development management software, with a high versatility .

附图说明 BRIEF DESCRIPTION

[0022] 图1为本发明多区域数据集成流程图; [0022] Figure 1 a flowchart of a multi-zone data integration of the present invention;

[0023] 图2为本发明从数据库加载配置信息流程图; [0023] FIG 2 is a flowchart of the configuration information loaded to the invention from a database;

[0024] 图3为本发明启动数据采集服务,采集数据并进行数据集成流程图。 [0024] FIG. 3 for data acquisition service of the present invention, data collection and data integration flowchart.

具体实施方式 Detailed ways

[0025] 下面结合附图对本发明作进一步详细说明。 [0025] The following figures of the present invention will be further described in detail in conjunction.

[0026] 一种集成电路生产线数据采集系统中的多区域数据集成技术方法,利用数据库平台对多区域数据集成进行配置管理,主要是对区域ID和所属区域的部门ID的映射,通过此映射可以配置不同的区域的所属管控部门的信息,通过区域ID可以查找到对应的部门信息;对部门ID和所属管控部门的设备ID的映射,通过此映射可以查找到部门下所管控的设备信息,以便数据采集服务根据设备信息与设备进行通讯,采集数据;从数据库加载相关配置信息,包括加载数据库的配置信息、加载区域ID和所属区域的部门ID的映射到内存、力口载部门ID和所属管控部门的设备ID信息到内存;根据数据采集系统服务的输入的区域参数,启动采集服务;与加载的设备进行数据通讯,采集数据并存储于远程数据服务器相应数据表,完成数据的集成。 Multi-area data Integration Method [0026] An integrated circuit production line data acquisition system, integration of multiple region data using the configuration management database platform, mainly mapping sector ID and area ID of the area belongs, by this mapping can configure different areas of information relevant to control sector, can be found by the area ID to the sector information corresponding to; mapping device ID department ID and their respective control sector, by this mapping may find the device information of the sector control so data collection services for communications, data collection device information with the device according to; loading configuration information from a database, including the configuration information loaded databases, load map sector area ID and the associated area ID to the memory, the force mouth carrying sector ID and the associated control the device ID information to the memory sector; regional service parameters according to data acquisition system input, starting collection services; data communication with loading equipment, data collection and data stored on a remote server the corresponding data table, the integrated data is completed.

[0027] 所述的集成电路生产线的多区域设备数据集成技术,包括以下步骤: [0027] IC production line according to the multi-region data integration technology devices, comprising the steps of:

[0028] 步骤I,配置数据库管理的设备ID和所归属部门ID映射表; [0028] Step I, the configuration of the device ID and the sector ID mapping table of the home database management;

[0029] 步骤2,配置数据库管理的区域ID和所管控的部门ID映射表; [0029] Step 2, the configuration management database region ID and the control sector ID mapping table;

[0030] 步骤3,从数据服务器加载设备信息到内存; [0030] Step 3, the device information is loaded from the server to the data memory;

[0031] 步骤4,启动区域数据采集服务与设备进行数据信息交互; [0031] Step 4, starting with the service area of ​​the data acquisition device data information exchange;

[0032] 步骤5,采集所管控区域的数据并按照格式解析; Control data area [0032] Step 5, the collection pipe and parsed according to the format;

[0033] 步骤6,按照设备ID存储于远程数据服务器的数据记录表,完成数据集成。 [0033] Step 6 according to the device ID stored in the data recording table remote data server, for data integration.

[0034] 在所述步骤I中,配置数据库管理的设备ID和所归属部门ID映射表,此映射表为所有区域的设备ID与设备所属部门ID的映射表。 [0034] In the step I, the configuration of the device ID and the sector ID mapping table of the home database management, the mapping table for the device with the device ID Sector ID mapping table of all regions.

[0035] 在所述步骤2中,配置数据库管理的区域ID和所管控的部门ID映射表,此映射表为生产线上所有区域ID与所管控部门的映射表。 [0035] In the step 2, the configuration of the control area ID and the sector ID mapping table of database management, this is a mapping table for all the production line and the area ID mapping table control department.

[0036] 在所述步骤3中,根据所述步骤I中,配置数据库管理的设备ID和所归属部门ID映射表,根据所述步骤2中,配置数据库管理的区域ID和部门ID映射表,根据所述步骤3中,从数据服务器加载设备信息到内存,主要是加载数据库配置信息,数据库相关的映射表数据。 [0036] In the step 3, according to step I, the configuration device ID and the sector ID mapping table of the home database management, according to the step 2, the configuration ID and sector ID area map database management, according to the step 3, the data is loaded from the server to the memory device information, primarily load the database configuration information relating to the mapping database table data.

[0037] 所述步骤4中,根据所述步骤3中,从数据服务器加载设备信息到内存,启动区域数据采集服务与设备进行数据信息交互。 In [0037] step 4, according to the step 3, the memory, the boot area and the data acquisition device data service information interaction device information is loaded from a data server.

[0038] 所述步骤5中,根据所述步骤4中,启动区域数据采集服务与设备进行数据信息交互,采集所管控区域的数据并按照格式解析。 [0038] In step 5, the data according to the information interaction in step 4, the data acquisition start area services and equipment, the data acquisition control area and parsed according to the format of the tube.

[0039] 所述步骤6中,根据所述步骤5中,采集所管控区域的数据并按照格式解析,按照设备ID存储于远程数据服务器的数据记录表,完成数据集成。 In [0039] step 6, the control data area according to the step 5, the collection pipe and parses the format, according to the device ID stored in the data recording table remote data server, for data integration.

[0040] 如图1所示,本发明多区域数据集成流程如下: [0040] As shown in FIG 1, the present invention is a multi-region data integration process is as follows:

[0041] 配置数据库管理的设备ID和所归属部门ID映射表; [0041] Configuration management database device ID and sector ID mapping table of the home;

[0042] 配置数据库管理的区域ID和所管控的部门ID映射表; [0042] Configuration management database region ID and the control sector ID mapping table;

[0043] 从数据服务器加载设备配置信息到内存; [0043] The loading device configuration information from a data server to a memory;

[0044] 如果加载设备信息到内存成功则继续,否则报错退出; [0044] If the device information is loaded into memory successfully continues, otherwise an error exit;

[0045]启动区域数据采集服务; [0045] The promoter region data collection services;

[0046] 如果启动区域数据采集服务成功则继续,否则报错退出; [0046] If the area of ​​data collection services start successfully continue, otherwise an error exit;

[0047] 采集所管控区域的数据,并格式解析数据; [0047] The control data area for acquisition and analysis data format;

[0048] 按照设备ID分类,存储于远程数据服务器的相应数据记录表。 [0048] The apparatus according to the classification ID, stored in the data recording table corresponding remote data server.

[0049] 如图2所示,从数据库加载配置信息流程如下: [0049] 2, the load configuration information from the database process is as follows:

[0050] 初始化数据库链接; [0050] initialize the database link;

[0051] 如果链接数据库成功则继续,否则报错退出; [0051] If the link database continued success, otherwise an error exit;

[0052] 加载数据库管理的设备ID与所属管控部门的信息到内存,此内存设计的形式为以部门ID为键,以所属管控下的所有设备信息结构体数组为值的字典; [0052] The loading device ID information relevant to the management database control sector into memory, this memory is designed to form sector-ID is a bond, an array of structures in the device information relevant to all the tubes under the control of the value of the dictionary;

[0053] 如果加载到内存成功则继续,否则报错退出; [0053] If success continues to be loaded into memory, otherwise an error exit;

[0054] 加载区域ID和所管控下的部门ID信息到内存,内存的设计形式为一个以区域ID为键,已区域所管控下的部门信息数组为值的字典; [0054] The loading area ID and sector ID in the control information memory, a memory designed to form a bond area ID, the tube has area array is controlled sector information dictionary values;

[0055] 如果加载到内存成功则继续,否则报错退出。 [0055] If success continues to be loaded into memory, otherwise an error exit.

[0056] 如图3所示,启动数据采集服务,采集数据并进行数据集成流程如下: [0056] As shown in FIG. 3, the service start data collection, data collection and data integration process is as follows:

[0057] 数据采集服务根据输入的区域名参数,从内存加载该区域管控的部门信息; [0057] The data collection services domain parameter input region, the region is loaded from the memory control sector information;

[0058] 如果加载成功则继续,否则报错退出; [0058] If the loaded successfully continue, otherwise an error exit;

[0059] 根据部门信息从内存加载部门管控下的设备信息; [0059] The device information under control from the memory load information sector by sector;

[0060] 如果加载成功则继续,否则报错退出; [0060] If the loaded successfully continue, otherwise an error exit;

[0061] 根据加载的设备信息,采集设备数据,并存储于远程数据服务器。 [0061] The loading of the device information, the data acquisition device, and stored in a remote data server.

Claims (8)

1.集成电路生产线的多区域设备数据集成技术方法,其特征在于: 根据工厂设备的分区域管理,将数据采集的服务也分区域进行管理,将各区域采集的数据进行集成,来完成对工厂所有设备的数据采集,利用数据库平台进行管理,对数据库管理的设备ID和所归属部门ID进行映射,对数据库管理的区域ID和部门ID进行映射;根据服务程序所管理的区域参数启动区域数据采集服务与设备进行数据信息交互,采集所管控区域的数据并按照格式解析,按照设备ID存储于远程数据服务器的数据记录表,完成数据集成。 Multi-region device 1. Data integration technology of integrated circuit production line, characterized in that: the plant in accordance with sub-regional management device, the data acquisition sub-area services are managed, each data acquisition region for integration to complete the factory data collection for all devices, using the database platform management, device ID and the database management attributable department ID mapping, regional ID and department database management of ID maps; regional parameters start depending on the service program managed by regional data collection service information interaction with the device data, control data collection tube and the area in the format parsing, according to the device ID stored in the data recording table remote data server, for data integration.
2.按照权利要求1所述的集成电路生产线的多区域设备数据集成技术方法,其特征在于,包括以下步骤: 步骤1,配置数据库管理的设备ID和所归属部门ID映射表; 步骤2,配置数据库管理的区域ID和所管控的部门ID映射表; 步骤3,从数据服务器加载设备信息到内存; 步骤4,启动区域数据采集服务与设备进行数据信息交互; 步骤5,采集所管控区域的数据并按照格式解析; 步骤6,按照设备ID存储于远程数据服务器的数据记录表,完成数据集成。 2. The multi-region device data integration technology method of integrated circuit production line according to claim, characterized in that it comprises the following steps: Step 1, a device ID, and the configuration database managed by the home sector ID mapping table; Step 2, the configuration region ID database management and the control of the sector ID mapping table; step 3, the loading device information from a data server to a memory; step 4, starting region data collection services and device data information interaction; data control area in step 5, the acquisition of the tube the format and parsing; step 6, according to the device ID stored in the data recording table remote data server, for data integration.
3.按照权利要求2所述的集成电路生产线的多区域设备数据集成技术,其特征在于:在所述步骤1中,配置数据库管理的设备ID和所归属部门ID映射表,此映射表为所有区域的设备ID与设备所属部门ID的映射表。 3. The apparatus as claimed in claim multi-region data integration technology according to the second integrated circuit production line, wherein: in step 1, and the device ID management database configured home sector ID mapping table, the mapping table for all the device ID and the device ID of department map area.
4.按照权利要求2所述的集成电路生产线的多区域设备数据集成技术,其特征在于:在所述步骤2中,配置数据库管理的区域ID和部门ID映射表,此映射表为生产线上所有区域ID与所管控部门的映射表。 4. The apparatus as claimed in claim multi-region data integration technology of the integrated circuit production line 2, characterized in that: in the step 2, the configuration management database region ID and sector ID mapping table, the mapping table for all the production line area ID mapping table control department.
5.按照权利要求2所述的集成电路生产线的多区域设备数据集成技术,其特征在于:在所述步骤3中,根据所述步骤1中,配置数据库管理的设备ID和所归属部门ID映射表,根据所述步骤2中,配置数据库管理的区域ID和所管控的部门ID映射表,根据所述步骤3中,从数据服务器加载设备信息到内存,主要是加载数据库配置信息,数据库相关的映射表数据。 Data Integration multi-region device according to claim 5. The integrated circuit production line of claim 2, wherein: in the step 3, according to the step 1, a device ID, and the configuration database management home sector ID mapping table, according to the step 2, the configuration management database region ID and the sector ID control the mapping table, according to the step 3, the device information is loaded into memory from the data server, primarily load the database configuration information relating to the database map data.
6.按照权利要求2所述的集成电路生产线的多区域设备数据集成技术,其特征在于:所述步骤4中,根据所述步骤3中,从数据服务器加载设备信息到内存,启动区域数据采集服务与设备进行数据信息交互。 Multi-region device 6. The data integration technology IC production line according to claim 2, wherein: in said Step 4, according to the step 3, the device information is loaded into memory from the data server, the data acquisition start region services and devices for data information exchange.
7.按照权利要求2所述的集成电路生产线的多区域设备数据集成技术,其特征在于:所述步骤5中,根据所述步骤4中,启动区域数据采集服务与设备进行数据信息交互,采集所管控区域的数据并按照格式解析。 7. The apparatus as claimed in claim multi-region data integration technology of the integrated circuit production line 2, characterized in that: in the step 5, based on the data information interaction in step 4, the data acquisition start area services and equipment, collecting control data area according to the format of the tube and resolution.
8.按照权利要求2所述的集成电路生产线的多区域设备数据集成技术,其特征在于:所述步骤6中,根据所述步骤5中,采集所管控区域的数据并按照格式解析,按照设备ID存储于远程数据服务器的数据记录表,完成数据集成。 Multi-region device 8. The data integration technology IC production line according to claim 2, wherein: in the step 6, the control data area according to the step 5, the collection pipe and parses the format, the device according to ID data stored in the remote data server record table, complete data integration.
CN201310353523.XA 2013-08-14 2013-08-14 Technical method for integrating data of multiple regional devices of integrated circuit production line CN104376006A (en)

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CN1409179A (en) * 2001-09-17 2003-04-09 费舍-柔斯芒特系统股份有限公司 Monitoring treatment property and device and controlling synthesizing
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Publication number Priority date Publication date Assignee Title
US20030225752A1 (en) * 1999-08-04 2003-12-04 Reuven Bakalash Central data warehouse with integrated data aggregation engine for performing centralized data aggregation operations
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