CN104344001A - 大型闸板阀 - Google Patents

大型闸板阀 Download PDF

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Publication number
CN104344001A
CN104344001A CN201310321335.9A CN201310321335A CN104344001A CN 104344001 A CN104344001 A CN 104344001A CN 201310321335 A CN201310321335 A CN 201310321335A CN 104344001 A CN104344001 A CN 104344001A
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Prior art keywords
door
valve
plate
chambers
control system
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CN201310321335.9A
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苑玉坤
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Priority to CN201310321335.9A priority Critical patent/CN104344001A/zh
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

大型平面镀真空膜生产线有若干个溅射室是连通的，给其中一个溅射室维修，所有腔室都一同放入大气。重新工作前都要一同抽气，花的时间较长。目前国内没有解决这个问题。本发明是大型闸板阀能隔离并封闭两个相邻的真空溅射室，由以下部分组成：提升机构：由电动推杆(1)提升丝杠组成(13)；压缩空气管路和真空管路(3)共用管路；壳体由上阀体(4)下阀体(5)密封胶圈(6)组成；门板系统由门板(7)，密封圈(8)，波纹管夹紧模块(9)，悬挂轴(14)组成；控制系统由行程开关(10)接近开关(11)三通阀(12)和PLC控制系统组成；这样抽气的时间较原来减少一半以上，这样可以提高设备的有效工作时间，达到节约资源的目的。

Description

大型闸板阀
1、技术领域
大型闸板阀属于真空技术领域，
2、背景技术
目前一般大型平板真空膜生产线溅射腔室之间是连通的，没有隔离机构。一条生产线有几个到10个溅射室，其中一个腔室维修或更换靶材，其他所有溅射室都一同放入大气。维修结束后所有溅射室重新工作前都要抽气，抽到10-5Pa才能重新工作，由于一同给多个溅射室抽气，抽气用的时间较长。降低了生产效率，浪费了能源。目前国内没有一种有效方法解决这个问题。
3、发明内容
本发明的目的是提供一种在两个溅射室之间的起隔离作用的大型闸板阀。其特征在于：由四部分组成：一、提升机构，它由电动推杆(或慢速气缸)(1)加提升丝杠组成(13)，另外有磁流体密封机构，真空密封圈和焊接波纹管(2)等在提升和静止情况下提供密封。压缩空气管路，真空管路(3)(图示：压缩空气和真空共用管路)，二、壳体，它由上阀体(4)，下阀体(5)，密封胶圈(6)等组成。三、门板系统，它由门板(7)，密封圈(8)，波纹管夹紧模块(9)，悬挂轴(14)等组成。控制系统，它由行程开关(10)，接近开关(11)，两位三通阀(12)和PLC控制系统等组成。
4、附图说明
图1是大型闸板阀示意图。(1)电动推杆、(2)焊接波纹管、(3)管路、(4)上阀体、(5)下阀体、(6)密封胶圈、(7)门板、(8)密封圈、(9)波纹管夹紧模块、(10)行程开关、(11)接近开关、(12)两位三通阀、(13)提升丝杠、(14)悬挂轴。
5、具体实施方式
实施例1见图1一种在两个溅射室之间的起隔离作用的大型闸板阀。其特征在于：由四部分组成：一、提升机构，它由电动推杆(或慢速气缸)(1)加提升丝杠组成(13)，另外有磁流体密封机构，真空密封圈和焊接波纹管(2)等在提升和静止情况下提供密封。压缩空气管路，真空管路(3)(图示：压缩空气和真空共用管路)，二、壳体，它由上阀体(4)，下阀体(5)，密封胶圈(6)等组成。三、门板系统，它由门板(7)，密封圈(8)，波纹管夹紧模块(9)，悬挂轴(14)等组成。控制系统，它由行程开关(10)，接近开关(11)，两位三通阀(12)和PLC控制系统等组成。
工作过程：当两个溅射室有隔离需要时：启动电动推杆(1)，电机推动丝杆(13)旋转，丝杆下端通过悬挂轴(14)连接着门板系统。丝杠下降，带动门板系统一同下降。下降到下止点，接近开关(11)起作用，使电机停止旋转。无论提升机构是动还是静。磁流体密封机构，真空密封圈，焊接波纹管(2)和壳体都起着密封作用。下止点是预设好的位置。在这个位置接近开关接收到信号通过PLC指令让电机断电使电机停转，(或让电磁阀换向使气缸停止运动)。波纹管夹紧模块(9)通入压缩空气，夹紧模块张开将门板(7)推向两边。门板紧紧贴在下阀体内壁上。有效的将两个溅射室隔离。门板推开过程：两位三通阀(12)换向将压缩空气接通。压缩空气经压缩空气管路、丝杠中开的通气孔，进入门板之间的波纹管夹紧模块。夹紧模块在压缩空气的推动下将两个门板向两边撑开。将门板顶在阀体内壁上，门板上的密封圈(8)起着有效的密封作用，将两个溅射室彻底隔离开。在张开门板后大型闸板阀内部通入大气。普通的空气，压力是一个大气压。这个大气压起着加强隔离的作用。因为它向保持真空的溅射室出口处的门板提供了一个大气压的压力。当溅射室维修结束时。该溅射室封闭，开始抽真空。同时线性闭锁阀内部抽真空。当线性闭锁阀内部和维修后的溅射室，还有刚刚隔离的溅射室压力相同时。两位三通阀换向将通入的压缩空气卸载，波纹管夹紧模块收缩，带动门板向中间移动。门板就离开阀体内壁了，溅射室之间连通了。再使两位三通阀换向将波纹管夹紧模块内部抽真空。目的是波纹管夹紧模块内的压力与阀体内的压力接近。夹紧模块回位弹簧起作用。让门板回复原位。门板复位后门板最外端与腔室内壁有5mm以上的距离，上下移动门板时不会磕碰到阀体内壁。开动电动推杆。电机带动丝杠提升门板系统。当门板上升到上止点时，接近开关接收到信号，PLC控制系统发出信号。使电机停止转动。门板停止运动。
6、有益效果
它的主要功能是隔离并封闭两个相邻的真空溅射室，以允许其中一个或两个放入大气，打开进行维修或更换靶材。隔离的另一部分溅射腔室能短时间或长时间保持真空状态。维修好的溅射室工作前只需要单独抽气。这样抽气的时间大大缩短。较原来全部腔室抽气的时间减少一半以上。这样可以提高设备的有效工作时间。降低真空泵组的功率。达到节约社会资源的目的。

Claims (1)

1.一种在两个溅射室之间的起隔离作用的大型闸板阀，其特征在于：由四部分组成：一、提升机构，它由电动推杆(1)提升丝杠组成(13)，另外有磁流体密封机构，真空密封圈和焊接波纹管(2)等在提升和静止情况下提供密封。压缩空气管路，真空管路(3)共用管路)，二、壳体，它由上阀体(4)，下阀体(5)，密封胶圈(6)组成；三、门板系统，它由门板(7)，密封圈(8)，波纹管夹紧模块(9)，悬挂轴(14)组成；控制系统，它由行程开关(10)，接近开关(11)，两位三通阀(12)和PLC控制系统组成。
CN201310321335.9A 2013-07-23 2013-07-23 大型闸板阀 Pending CN104344001A (zh)

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CN201310321335.9A CN104344001A (zh) 2013-07-23 2013-07-23 大型闸板阀

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108662273A (zh) * 2017-03-27 2018-10-16 苑玉坤 超宽双闸板闸阀
CN113719624A (zh) * 2021-09-30 2021-11-30 洛阳明远石化技术有限公司 密封件、密封组件和密封阀

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001324032A (ja) * 2000-05-17 2001-11-22 Tokyo Electron Ltd ゲートバルブおよび駆動軸の真空シール機構
US20050253099A1 (en) * 2004-05-17 2005-11-17 Eagle Industry Co., Ltd. Gate valve
CN201695083U (zh) * 2010-06-08 2011-01-05 湘潭宏大真空设备有限公司 真空镀膜生产线用插板阀
CN102181839A (zh) * 2011-06-03 2011-09-14 浙江大学 同端进出式连续溅射镀膜设备
CN102678955A (zh) * 2012-05-17 2012-09-19 东莞宏威数码机械有限公司 双挡板真空闸阀装置
CN202483986U (zh) * 2011-12-12 2012-10-10 沈双宇 一种可在高真空中工作的波纹管夹紧模块

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001324032A (ja) * 2000-05-17 2001-11-22 Tokyo Electron Ltd ゲートバルブおよび駆動軸の真空シール機構
US20050253099A1 (en) * 2004-05-17 2005-11-17 Eagle Industry Co., Ltd. Gate valve
CN201695083U (zh) * 2010-06-08 2011-01-05 湘潭宏大真空设备有限公司 真空镀膜生产线用插板阀
CN102181839A (zh) * 2011-06-03 2011-09-14 浙江大学 同端进出式连续溅射镀膜设备
CN202483986U (zh) * 2011-12-12 2012-10-10 沈双宇 一种可在高真空中工作的波纹管夹紧模块
CN102678955A (zh) * 2012-05-17 2012-09-19 东莞宏威数码机械有限公司 双挡板真空闸阀装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108662273A (zh) * 2017-03-27 2018-10-16 苑玉坤 超宽双闸板闸阀
CN113719624A (zh) * 2021-09-30 2021-11-30 洛阳明远石化技术有限公司 密封件、密封组件和密封阀

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Application publication date: 20150211