CN104295796A - Utilization method of vacuum pipe installation support - Google Patents

Utilization method of vacuum pipe installation support Download PDF

Info

Publication number
CN104295796A
CN104295796A CN201410390830.XA CN201410390830A CN104295796A CN 104295796 A CN104295796 A CN 104295796A CN 201410390830 A CN201410390830 A CN 201410390830A CN 104295796 A CN104295796 A CN 104295796A
Authority
CN
China
Prior art keywords
vacuum
vacuum pipe
mounting bracket
support
vacuum pump
Prior art date
Application number
CN201410390830.XA
Other languages
Chinese (zh)
Inventor
林博强
Original Assignee
林博强
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 林博强 filed Critical 林博强
Priority to CN201410390830.XA priority Critical patent/CN104295796A/en
Publication of CN104295796A publication Critical patent/CN104295796A/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Abstract

The invention belongs to the fields of the manufacturing process of semiconductor chips and manufacturing of photovoltaic solar cell panels, and relates to a vacuum pipe system and a novel method for installing the pipe system. According to the method, centralized power condition supply is disintegrated into a support using machine table vacuum pipes and all power pipes (including cooling water, circulating water, nitrogen, compressed air and the like) mounted on machine tables. Accordingly, people can clearly recognize which machine tables the pipes belong to, using points are close, power pipelines can be effectively omitted, and accidents of water leakage and gas leakage due to too long hoses are reduced. The support of the vacuum pipes is used, so that the space occupied by independently installing the support is saved, and clean space can be more effectively utilized.

Description

The utilization of vacuum pipe mounting bracket

Technical field

The present invention relates to the field such as manufacture of the manufacture process of semiconductor chip, photovoltaic solar cell version, the vacuum pipe system particularly in the silicon chip manufacture process of above-mentioned field and corresponding pipe-line system thereof.

Background technique

In the manufacture process of semiconductor chip and silicon-based photovoltaic solar cell, multiple working procedure is had to need to carry out under vacuum, as semiconductor chip manufacture in the operation such as etching, CVD, injection, need to use compared with the vacuum pump of multiple stage, board will use the vacuum pump of two to four sometimes.In order to save limited clean room, the vacuum pump of board is arranged on lower one deck of board mostly, namely descends interlayer.Need to arrange except vacuum pump in lower interlayer, also to lay the control cabinet etc. of the power transformer of board, power switch cabinet, radio-frequency power supply, Chiller Unit, board, also will install the electric closet of board, the tail gas treatment device, VMB etc. of board, the accessory of these boards will occupy limited better purifying space equally.

In the ordinary course of things, will there be a segment distance mounting point of vacuum pump with the vacuum interface of board, so the admission line of vacuum pump and exhaust duct all need support of pipelines to be fixed.The main frame of vacuum pump, radio-frequency power supply, Chiller Unit and board, in running, needs cooling water to cool, and some equipment also needs the supply of the gas such as nitrogen and pressurized air.In certain region of electronic workshop, usually can install the power conduits such as cooling water, nitrogen and pressurized air concentratedly, and then be connected to each use point with flexible pipe respectively.Install these cooling waters, nitrogen and pressurized air concentratedly to need certain space and carry out laying of support of pipelines, because the demand point of these dynamic conditions is all distant, so the flexible pipe be dispersed on ground and support is a lot, namely unsightly, also dangerous, the accident of metalling run out often is had to occur, the dynamic condition of these centralizedly supplies also will occupy limited clean room space simultaneously, the region of concentrating is installed at equipment, sometimes space may do not had to settle these power conduits, so just cannot carry out the installation of board.

Summary of the invention

In order to save limited clean room to greatest extent, the invention provides a kind of method.

By centralized dynamic condition supply, be decomposed into the support utilizing this board vacuum pipe, all power conduits (comprising cooling water cycle water, nitrogen and pressure sky etc.) of this board are installed, make people clearly can tell those pipelines and belong to that board, and use point very near, effectively can save service line, reduce due to flexible pipe long and cause leak, the generation of gas leakage accident.

If support also has position the switch box of vacuum pump also can be installed on this support.

Accompanying drawing explanation

This figure is the plan view of vacuum pipe mounting bracket.

Embodiment

First according to the requirement positioning vacuum pump 1 of equipment layout, then confirm the position of vacuum pipe mounting bracket 2, require that the installation of vacuum pipe mounting bracket 2 is wanted to facilitate vacuum pump 1 to pass in and out, carry out the maintenance of vacuum pump 1.All vertical vacuum pipe mounting brackets 2 will adopt H profile steel, and in order to keep the stable of vacuum pipe support 2, support 2 will have fixing with the building structure on ground and top.

See accompanying drawing, vacuum pump 1 air inlet, exhaust duct can be arranged on the inner side and outer side of vacuum pipe support 2, but in order to maximally utilise support of pipelines, vacuum pump air inlet and exhaust duct are preferably arranged on the inner side of support of pipelines 2.The front side of support of pipelines 2 and rear side can install power conduit, as cooling water pipeline, nitrogen pipeline and compressed air line etc., these power conduits according to the installation specification of various pipes, can install corresponding valve, pressure gauge, flowmeter and reduction valve etc.

If vacuum pipe support 2 also has position, the switch box etc. of vacuum pump can be installed.

The arranged on left and right sides of accompanying drawing can accommodated side-by-side multiple stage vacuum pump, and the support 2 of vacuum pipe can overallly be considered, the installation of power conduit also will carry out entirety consideration.

The method is not limited only to the manufacture process of semiconductor chip and the manufacture of photovoltaic solar cell version, is applied to the place of this type of high vacuum at other, and the method can be adopted too to carry out the installation of vacuum pump and corresponding pipeline thereof.

Claims (5)

1. the utilization of vacuum pipe mounting bracket, provides the new method that a kind of vacuum pump is installed.First confirm the position of vacuum pump, and be fixed, then carry out the support installing of vacuum pipe on request.See accompanying drawing, the air inlet of vacuum pump and exhaust duct can be arranged on the outside of vacuum pipe mounting bracket 2, also the inner side of vacuum pipe mounting bracket can be arranged on, in order to more effectively utilize vacuum pipe mounting bracket 2, vacuum pump air inlet and exhaust duct are preferably arranged on the inner side of vacuum pipe mounting bracket 2.
2., after vacuum pipe mounting bracket 2 installation, in the front and rear sides of vacuum pipe mounting bracket 2, see that accompanying drawing installs power conduit on request, as recirculated cooling water, nitrogen pipeline, compressed air line etc.
3. multiple stage vacuum pump can be installed in the left and right sides of accompanying drawing, and vacuum pipe support can be considered in the lump, and the installation of power conduit also wants entirety to consider.
4., when vacuum pipe mounting bracket also has position, the switch box of vacuum pump can be arranged on this support.
5. the method is not limited only to the manufacture process of semiconductor chip and the manufacture of photovoltaic solar cell version, is applied to the place of this type of high vacuum at other, and the method can be adopted too to carry out the installation of vacuum pump and corresponding pipeline thereof.
CN201410390830.XA 2014-08-11 2014-08-11 Utilization method of vacuum pipe installation support CN104295796A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410390830.XA CN104295796A (en) 2014-08-11 2014-08-11 Utilization method of vacuum pipe installation support

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410390830.XA CN104295796A (en) 2014-08-11 2014-08-11 Utilization method of vacuum pipe installation support

Publications (1)

Publication Number Publication Date
CN104295796A true CN104295796A (en) 2015-01-21

Family

ID=52315647

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410390830.XA CN104295796A (en) 2014-08-11 2014-08-11 Utilization method of vacuum pipe installation support

Country Status (1)

Country Link
CN (1) CN104295796A (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003301488A (en) * 2002-04-11 2003-10-24 Sekisui Chem Co Ltd Piping system
CN201902704U (en) * 2010-11-18 2011-07-20 林德工程(杭州)有限公司 Safety valve outlet pipe support in air separating unit
CN102368475A (en) * 2011-09-20 2012-03-07 嘉兴科民电子设备技术有限公司 Device for etching rigid inorganic material substrate by dry method
CN103362165A (en) * 2012-03-29 2013-10-23 神钢建设机械株式会社 Working machine
CN103817680A (en) * 2014-03-19 2014-05-28 四川西林石油物资装备有限公司 Labeling device used for machining petroleum pipeline
CN203753983U (en) * 2013-12-26 2014-08-06 泰安康平纳机械有限公司 Vacuum feeding device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003301488A (en) * 2002-04-11 2003-10-24 Sekisui Chem Co Ltd Piping system
CN201902704U (en) * 2010-11-18 2011-07-20 林德工程(杭州)有限公司 Safety valve outlet pipe support in air separating unit
CN102368475A (en) * 2011-09-20 2012-03-07 嘉兴科民电子设备技术有限公司 Device for etching rigid inorganic material substrate by dry method
CN103362165A (en) * 2012-03-29 2013-10-23 神钢建设机械株式会社 Working machine
CN203753983U (en) * 2013-12-26 2014-08-06 泰安康平纳机械有限公司 Vacuum feeding device
CN103817680A (en) * 2014-03-19 2014-05-28 四川西林石油物资装备有限公司 Labeling device used for machining petroleum pipeline

Similar Documents

Publication Publication Date Title
CN201340152Y (en) Novel circulating water cooling device
CN103855916A (en) Cooling pipeline and cooling device of current transformer
WO2008009899A3 (en) A radiator
CN204901084U (en) Prefabricated integration assembled sectional shelf -unit based on BIM
MX342123B (en) Table coupling system with power and data.
CN201826449U (en) Laminated draining type photovoltaic installation system
CN204066624U (en) Vertical pivoting angle formula equipment for hydroelectric station nameplate mounting bracket
CN201474999U (en) Prefabricated combined type water pump set
CN201125828Y (en) Hydro-turbo generator set thrust bearing drawer type coolers
MX2012006355A (en) Power plant cooling system and a method for its operation.
CN204868353U (en) A cooling structure for on digit control machine tool
CN204885964U (en) Photovoltaic case becomes with contravariant function of stepping up
CN203194052U (en) Adaptive installation part of communication cabinet pedestal
CN203325661U (en) Leading-out structure of transformer bushing end screen
CN203907861U (en) Air-conditioner cold source system for data center in severe cold region
NO333520B1 (en) solar tariff
JP2011157916A (en) Low pressure air supply system
CN103471190B (en) A kind of integrated system of integrated refrigeration station and integrated approach
CN203257641U (en) Air compressor parallel system
CN204012340U (en) Brass electroplating production line power distribution cabinet water cooling plant
CN203445597U (en) Zero power protector
CN203508462U (en) Automatic dedusting device for solar cell assemblies
CN203216330U (en) Connected closed type cooling tower
RU2265776C1 (en) Building heat supply system
KR101399964B1 (en) Duct alignment device

Legal Events

Date Code Title Description
PB01 Publication
C06 Publication
SE01 Entry into force of request for substantive examination
C10 Entry into substantive examination