CN104258681A - Method for prolonging service life of MOCVD filter - Google Patents

Method for prolonging service life of MOCVD filter Download PDF

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Publication number
CN104258681A
CN104258681A CN201410514578.9A CN201410514578A CN104258681A CN 104258681 A CN104258681 A CN 104258681A CN 201410514578 A CN201410514578 A CN 201410514578A CN 104258681 A CN104258681 A CN 104258681A
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China
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filter
water cooling
water
mocvd
cooling
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CN201410514578.9A
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Chinese (zh)
Inventor
师伟堂
王伟
王富文
周向志
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杭州广荣科技有限公司
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Priority to CN201410514578.9A priority Critical patent/CN104258681A/en
Publication of CN104258681A publication Critical patent/CN104258681A/en

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Abstract

The invention discloses a method for prolonging the service life of an MOCVD filter. According to the method, a water cooling device is additionally arranged at the front end of the MOVCD filter. The water cooling device comprises a water cooling cavity; a water cooling pipe which coils spirally is arranged in the water cooling cavity; a water inlet end and a water outlet end of the water cooling pipe are respectively arranged at the two ends of the water cooling device; the water cooling cavity is also provided with a stainless steel mesh filter element which is used for filtering large particles in exhaust. On one hand, common solid particles and low-boiling-point substances can be subjected to cohesion and deposition before entering the filter by the water cooling device, so that solid substances which enter the filter are reduced, the adsorption amount of a single filter element in the single standard LED program process is reduced, and the service life of the filter element is prolonged; on the other hand, the temperature of the exhaust which enters the filter can be reduced, the waiting time for replacing the filter can be shortened, and the time cost is reduced.

Description

—种延长MOCVD过滤器寿命的方法 - Species extended filter life MOCVD method

技术领域 FIELD

[0001] 本发明涉及一种延长MOCVD过滤器寿命的方法。 [0001] The present invention relates to a method of MOCVD extended filter life.

背景技术 Background technique

[0002] MOCVDCMetal-organic Chemical Vapor Deposit1n 金属有机化合物化学气相沉积)是在气相外延生长的基础上发展起来的一种新型气相外延生长技术。 [0002] MOCVDCMetal-organic Chemical Vapor Deposit1n metal organic chemical vapor deposition) is developed on the basis of vapor phase epitaxial growth of a new type vapor phase epitaxial growth techniques. MOCVD是以II1-V族元素的有机化合物和V、VI族元素的氢化物等作为晶体生长的原材料,以热分解反应方式在衬底(氧化铝、碳化硅、砷化镓、锗等)上进行气相外延生长,主要用于生长化合物半导体及其多元固溶体的单晶薄膜材料。 MOCVD crystal growth starting material is II1-V group elements and organic compounds V, VI group element hydrides like manner to a thermal decomposition reaction on the substrate (aluminum oxide, silicon carbide, gallium arsenide, germanium, etc.) vapor phase epitaxial growth, is mainly used for growing a compound semiconductor single crystal thin film materials and polyhydric solid solution.

[0003] 金属有机化合物与氢化物反应后尾气一般经过单层或多层过滤装置,以除去反应尾气中含有的固体颗粒,尾气处理装置的滤芯材料一般为无纺布或者不锈钢网,随着机台运转时间延长,尾气中固体颗粒在过滤器中逐渐沉积,达到一定沉积程度后,过滤器的滤芯需要更换以满足机台生长时反应室内压力稳定的要求。 [0003] After the organic compound metal hydride reactor tail gas generally after a single or multilayer filter means to remove the solid particles contained in the reaction off-gas, exhaust gas treatment apparatus of filter material is typically stainless steel mesh or non-woven fabric, with the machine prolonged operation stage, the exhaust gas is gradually deposited solid particles in the filter, to a certain extent after the deposition, the filter cartridge needs to be replaced when the machine to meet the growth reaction chamber pressure stability requirements. 更换过滤器滤芯时,MOCVD机台需要停止生产数小时,单独拆换过滤器装置,频繁地更换过滤器装置会降低机台运转效率,影响生产产量。 When replacing the filter element, the MOCVD machine needs to be stopped for several hours of production, a separate removable filter apparatus, the filter unit replacement reduces the operation efficiency of the machine frequently affect production yield.

[0004] 传统MOCVD过滤器装置,一般采用单筒多级滤芯或多筒滤芯,通过空气冷却及滤芯作用来达到过滤尾气中固体颗粒的效果,单筒多级过滤器主要是靠逐层分级的滤芯来过滤直径大小不一的固体颗粒,多筒滤芯则是靠增加尾气与滤芯的接触面积来实现过滤效果O [0004] MOCVD conventional filter apparatus, the general single cylinder or multi-stage filter cartridge filter, and cooled by air to achieve the filter effect filtering solid particles in the exhaust gas, mainly monocular multiple stage filter is fractionated by layer by layer the diameter of the filter to filter the solid particles of different sizes, the multiple tube filter is improved by increasing the contact area with the exhaust gas cartridge filtering effect achieved O

[0005] 传统过滤方法一方面由于容纳固体颗粒空间有限,经过80到120个标准LED程序后就需要更换过滤器滤芯,另一方面由于高温尾气使得过滤器温度比室温高出很多,更换时需要等到过滤器冷却后才能操作。 [0005] Since the conventional filtration method aspect of the limited space receiving the solid particles, through the LED 80 to 120 standard procedures after the need to replace the filter element, on the other hand due to high temperature exhaust gas so that the filter temperature is much higher than room temperature, requires replacement after cooling until the filter to operate.

发明内容 SUMMARY

[0006] 本发明针对现有技术的不足,提供了一种延长MOCVD过滤器寿命的方法。 [0006] The present invention addresses deficiencies in the prior art, there is provided a method of MOCVD extended filter life.

[0007] 本发明解决技术问题所采取的技术方案为: [0007] The present invention solves the technical problem adopted technical solutions:

一种延长MOCVD过滤器寿命的方法,在MOCVD过滤器前端加装水冷装置。 A method of extending the life of the filter MOCVD method, MOCVD filter fitting of a water cooling device.

[0008] 所述的水冷装置包括水冷腔体,在水冷腔体内设置有螺旋盘绕的水冷管,水冷管的进水端和出水端分别设置于水冷装置两端,在水冷腔体还设置有用于过滤尾气中大颗粒的不锈钢网滤芯。 [0008] The water-cooling unit includes a water cooling chamber, provided with a water cooling chamber helically coiled cooling pipe, the inlet end and the outlet end of the water cooling pipes are disposed at both ends of the water cooling means, water cooling chamber is also provided with a stainless steel mesh filter exhaust filter large particles.

[0009] 所述的水冷装置一方面提前降低高温尾气的温度,使得通过MOCVD过滤器时尾气温度相对较低,同时也将尾气中大颗粒首先凝聚析出,在水冷装置中拦截过滤,减少了到达MOCVD过滤器的大颗粒及其数量。 [0009] In one aspect of the water-cooling unit down early, exhaust gas temperature, exhaust gas temperature is relatively low so that when the filter by MOCVD, while large particles will first exhaust aggregated precipitate was filtered to intercept water cooling device, reducing the reach a large number of particles, and MOCVD filters.

[0010] 另一方面由于水冷装置是一个连续的冷却系统,在更换MOCVD过滤器时省去了冷却等待的时间,在生产上节约了时间成本。 [0010] On the other hand a continuous water cooling means is a cooling system, eliminating the need to wait for the time when replacing the cooling MOCVD filter, saving time in the production cost.

[0011] 本发明在传统过滤器前端加装水冷装置,一方面能使一般固体颗粒及低沸点物质在进入过滤器之前发生凝聚沉积,进入过滤器中的颗粒物质变少,降低了单个标准LED程序过程中滤芯的吸附量,延长滤芯寿命,另一方面可以降低进入过滤器内尾气的温度,减少更换过滤器时的等待时间,降低时间成本。 [0011] In the present invention, the filter fitting of a conventional water-cooling device, which would enable the solid particles and generally low boiling substances prior to entering the filter agglomerate deposition of particulate matter into the filter decreases, reducing the LED single standard procedures adsorption process cartridge, extended filter life, on the other hand can reduce the exhaust gas temperature entering the filter, to reduce the waiting time to replace the filter, to reduce the time cost.

附图说明 BRIEF DESCRIPTION

[0012] 图1为传统的过滤装置。 [0012] FIG. 1 is a conventional filter means.

[0013] 图2为本发明与传统的过滤装置结合示意图。 [0013] FIG 2 with a conventional filter apparatus of the present invention in conjunction with a schematic diagram.

[0014] 图3为水冷装置结构示意图。 [0014] FIG. 3 is a schematic view of the water cooling unit.

具体实施方式 Detailed ways

[0015] 传统过滤方法由于直接过滤的是未经冷却的高温尾气,首先对滤芯材料有耐高温的要求,其次在更换过滤器时需要有一个降温等待时间,另外滤芯的过滤能力也只限于现有的空间范围。 [0015] Since the conventional filtration method is direct filtration of the cooled exhaust gas without high-temperature, high temperature requirements have first filter material, followed by replacing the filter when there is a need to cool down the waiting time, additional filter cartridge now also limited the ability to some spatial extent. 本发明在过滤器前端加装水冷装置,一方面可以提前降低高温尾气的温度,使得通过过滤器时尾气温度相对较低,对滤芯材料的耐高温的要求就不需要那么苛刻,可以从滤芯原材料上降低成本;另一方面由于水冷装置是一个连续的冷却系统,在更换过滤器时省去了冷却等待的时间,在生产上节约了时间成本;水冷装置在降低尾气温度的同时,也将尾气中大颗粒首先凝聚析出,在水冷装置中拦截过滤,这样就减少了到达后端过滤器的颗粒大小和数量,也能起到延长传统过滤器滤芯寿命的作用,降低滤芯更换频率,节约生产成本。 In the present invention, the filter fitting of a water cooling device, on the one hand can be reduced in advance, exhaust gas temperature, so that the exhaust gas temperature is relatively low through the filter, the temperature of the filter material does not need the requirements so demanding, the filter material can be cutting costs; on the other hand a continuous water cooling means is a cooling system, eliminating the need to wait in the cooling time when replacing the filter, the time savings in production costs; water-cooling unit while reducing the exhaust gas temperature, exhaust gas will large particles are first aggregated precipitate was filtered to intercept water cooling apparatus, thus reducing the size and number of particles reaching the rear end of the filter, it can also play a role in prolonged life of the conventional filter cartridge, reducing the frequency of filter replacement, cost savings .

[0016] 本发明主要是在尾气进入传统过滤装置(如图1所示)之前加装水冷装置(如图2所示),通过提前冷却并过滤尾气中的大颗粒,减少过滤器滤芯的负载,延长过滤器的工作寿命。 [0016] The present invention is in the conventional exhaust gas entering the filter device (Figure 1) prior to the installation of water cooling unit (2), and filtering the exhaust gas by cooling in advance of large particles, to reduce the load of the filter cartridge , to extend the working life of the filter. 本发明可使原有过滤器寿命从80-100个标准LED程序提高到140-160个标准LED程序。 The present invention allows the filter life was increased from the original 80-100 standard procedures LED to LED 140-160 standard procedures.

[0017] 如图3所示,水冷装置包括水冷腔体,在水冷腔体内设置有螺旋盘绕的水冷管,水冷管的进水端和出水端分别设置于水冷装置两端,在水冷腔体还设置有用于过滤尾气中大颗粒的不锈钢网滤芯。 [0017] 3, water cooling means comprising a water cooled cavity, the cavity is provided with a water cooling coil coiled cooling pipe, the inlet end and the outlet end of the water cooling pipes are disposed at both ends of the water cooling means, water cooling cavity further It is provided with a stainless steel mesh for filtering exhaust filter large particles.

[0018] 本发明可以增加传统过滤器的工作寿命,降低生产成本;也省去了过滤器更换时的等待时间,提高生产效率;同时相对低温的尾气过滤,可以降低滤芯材料的耐高温要求,节约滤芯原材料的生产成本。 [0018] The present invention can increase the operating life of conventional filters, reducing production costs; also eliminates the waiting time of filter replacement, improve production efficiency; while a relatively low temperature exhaust filter, the filter can reduce the required high temperature materials, filter production cost savings of raw materials.

[0019] 本发明之所以能达到延长过滤器滤芯寿命的效果,主要是因为本发明对高温尾气进入过滤器之前对其进行了降温去除大颗粒物质的预先处理,以降低过滤器的负载。 [0019] The present invention is able to achieve extended filter life of a filter, primarily because prior to the present invention, exhaust gas entering the filter to be pre-treated to remove large particulate matter cooling, to reduce the load of the filter. 加装水冷装置是一个比较简便快捷的方式,不同于传统的过滤方法。 Installation of water-cooling means is a relatively simple and efficient manner, unlike conventional filtration methods.

[0020] 本发明提供了一种延长传统过滤器寿命的方法,将水冷方法与传统过滤方法结合起来,优化了尾气处理的途径,节约生产成本。 [0020] The present invention provides a method of prolonging the life of the conventional filter method, water cooling method combined with conventional filtration methods, to optimize the way of tail gas treatment, production cost savings.

Claims (1)

1.一种延长MOCVD过滤器寿命的方法,其特征在于:在MOCVD过滤器前端加装水冷装置; 所述的水冷装置包括水冷腔体,在水冷腔体内设置有螺旋盘绕的水冷管,水冷管的进水端和出水端分别设置于水冷装置两端,在水冷腔体还设置有用于过滤尾气中大颗粒的不锈钢网滤芯; 所述的水冷装置一方面提前降低高温尾气的温度,使得通过MOCVD过滤器时尾气温度相对较低,同时也将尾气中大颗粒凝聚析出,在水冷装置中拦截过滤,减少了到达MOCVD过滤器的大颗粒及其数量; 另一方面由于水冷装置是一个连续的冷却系统,在更换MOCVD过滤器时省去了冷却等待的时间,在生产上节约了时间成本。 1. A method of extending the life of the filter MOCVD method, wherein: the front end of the filter installed in a water-cooled MOCVD apparatus; said water cooling means comprises a water cooling chamber is provided with a water-cooling pipe in the spiral wound cavity cooled, water-cooled tubes the inlet ends and outlet ends are disposed at both ends of the water cooling means, water cooling is also provided in the chamber for filtering exhaust stainless steel mesh filter large particles; aspect of the water-cooling unit down early, exhaust gas temperature, so by MOCVD the filter exhaust gas temperature is relatively low, but also the exhaust aggregated large particles precipitated, filtered to intercept water cooling apparatus, and reducing the number of large particles reaching the filter MOCVD; the other hand, since the water-cooled cooling apparatus is a continuous system, when replacing the filter MOCVD cooling eliminates waiting time, the time savings in production costs.
CN201410514578.9A 2014-09-29 2014-09-29 Method for prolonging service life of MOCVD filter CN104258681A (en)

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Citations (6)

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US20070089674A1 (en) * 2002-09-11 2007-04-26 Planar Systems, Inc. Precursor material delivery system with thermal enhancements for atomic layer deposition
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CN102357309A (en) * 2011-08-25 2012-02-22 句容宁武高新技术发展有限公司 Recovering and utilizing method for epoxide gas in tail gas
CN103071353A (en) * 2012-04-23 2013-05-01 光达光电设备科技(嘉兴)有限公司 Gas filtration treatment structure, tail gas treatment system and tail gas treatment method thereof
CN103203135A (en) * 2013-01-31 2013-07-17 上海博恩世通光电股份有限公司 Filtration system and filtration method for tail gas particle of MOCVD equipment
CN103658164A (en) * 2013-05-17 2014-03-26 上海康恒环境股份有限公司 Device for processing organic contaminants in soil

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070089674A1 (en) * 2002-09-11 2007-04-26 Planar Systems, Inc. Precursor material delivery system with thermal enhancements for atomic layer deposition
CN101125264A (en) * 2006-08-15 2008-02-20 深圳迈瑞生物医疗电子股份有限公司 Integrated refrigerating functional gas filtering device
CN102357309A (en) * 2011-08-25 2012-02-22 句容宁武高新技术发展有限公司 Recovering and utilizing method for epoxide gas in tail gas
CN103071353A (en) * 2012-04-23 2013-05-01 光达光电设备科技(嘉兴)有限公司 Gas filtration treatment structure, tail gas treatment system and tail gas treatment method thereof
CN103203135A (en) * 2013-01-31 2013-07-17 上海博恩世通光电股份有限公司 Filtration system and filtration method for tail gas particle of MOCVD equipment
CN103658164A (en) * 2013-05-17 2014-03-26 上海康恒环境股份有限公司 Device for processing organic contaminants in soil

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