CN104201931B - 基于压电叠堆的微位移驱动器 - Google Patents
基于压电叠堆的微位移驱动器 Download PDFInfo
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- CN104201931B CN104201931B CN201410506958.8A CN201410506958A CN104201931B CN 104201931 B CN104201931 B CN 104201931B CN 201410506958 A CN201410506958 A CN 201410506958A CN 104201931 B CN104201931 B CN 104201931B
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Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104614196B (zh) * | 2015-02-11 | 2017-11-10 | 重庆大学 | 压电陶瓷叠堆执行器刚度测量装置 |
CN105417493B (zh) * | 2015-11-11 | 2017-07-25 | 中国科学院长春光学精密机械与物理研究所 | 气动微位移波纹管驱动器 |
CN107990859B (zh) * | 2016-10-27 | 2021-04-13 | 中国科学院长春光学精密机械与物理研究所 | 一种微位移传感器标定装置及其应用 |
CN107154747B (zh) * | 2017-06-05 | 2018-10-30 | 西安交通大学 | 一种基于柔性放大结构的径向压电驱动器 |
CN109004860A (zh) * | 2018-08-23 | 2018-12-14 | 三英精控(天津)科技有限公司 | 一种压电陶瓷驱动器预紧装置 |
CN110048634A (zh) * | 2019-05-13 | 2019-07-23 | 广东工业大学 | 一种微动平台 |
CN112910307B (zh) * | 2021-01-12 | 2022-06-07 | 西安交通大学 | 一种压电作动器保护装置 |
CN113064255A (zh) * | 2021-04-01 | 2021-07-02 | 中国空空导弹研究院 | 一种激光发射器的变焦机构 |
CN113315412B (zh) * | 2021-06-01 | 2022-12-06 | 上海隐冠半导体技术有限公司 | 压电陶瓷致动器 |
CN114060452B (zh) * | 2021-12-06 | 2023-07-21 | 哈尔滨工业大学 | 一种基于压电作动的主被动混合隔振器 |
CN114977878B (zh) * | 2022-03-31 | 2024-04-12 | 华南理工大学 | 一种叠堆式压电陶瓷驱动器的弹性簧片型预紧装置 |
CN117713583B (zh) * | 2024-02-05 | 2024-04-23 | 中国科学技术大学 | 用于压电驱动移相器的压电驱动单元及其装配预紧工艺 |
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JP4795748B2 (ja) * | 2004-09-13 | 2011-10-19 | 株式会社デンソー | 圧電アクチュエータ |
CN101232258B (zh) * | 2008-01-11 | 2011-04-27 | 大连理工大学 | 压电叠堆驱动器的封装固定结构器 |
CN102445568B (zh) * | 2011-10-10 | 2013-09-18 | 北京大学 | 多探针共成像的超高真空四探针扫描隧道显微镜 |
CN102709463B (zh) * | 2012-06-28 | 2014-03-12 | 陈�峰 | 压电陶瓷封装装置的制作方法 |
CN103414371B (zh) * | 2013-07-29 | 2017-06-16 | 南京航空航天大学 | 一种基于压电叠堆的激振器 |
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Inventor after: Zhang Duanqin Inventor after: Luo Guofu Inventor after: Wu Xuehong Inventor after: Yang Faliang Inventor after: Han Li Inventor after: Zhang Zhicheng Inventor after: Zhang Dehai Inventor after: Li Chengjia Inventor before: Zhang Duanqin Inventor before: Luo Guofu Inventor before: Wu Xuehong Inventor before: Yang Faliang |
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Effective date of registration: 20240229 Address after: 512-G060, Rongchao Economic and Trade Center, No. 4028 Jintian Road, Fuzhong Community, Lianhua Street, Futian District, Shenzhen City, Guangdong Province, 518038 Patentee after: Shenzhen Sheng'an Enterprise Management Co.,Ltd. Country or region after: China Address before: No. 136, Kexue Avenue, high tech Industrial Development Zone, Zhengzhou City, Henan Province Patentee before: Zhengzhou University of light industry Country or region before: China |