CN104131269A - Preparation apparatus of microspheric polymer coating - Google Patents
Preparation apparatus of microspheric polymer coating Download PDFInfo
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- CN104131269A CN104131269A CN201410355087.4A CN201410355087A CN104131269A CN 104131269 A CN104131269 A CN 104131269A CN 201410355087 A CN201410355087 A CN 201410355087A CN 104131269 A CN104131269 A CN 104131269A
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- polymer coating
- telefault
- vacuum chamber
- specimen holder
- quartz resonance
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Abstract
The invention provides a preparation apparatus of a microspheric polymer coating. The apparatus comprises an air inlet pipe, a radio shielding case, an inductance coil, a quartz resonant cavity and a vacuum chamber. The quartz resonant cavity is positioned in the inductance coil which is positioned inside the radio shielding case. The air inlet pipe is connected with the quartz resonant cavity which is connected with the vacuum chamber. A sample rack, a sample lifting platform and a knocking stick are arranged inside the vacuum chamber. The preparation apparatus is applied in the preparation of a pellet ablation-layer material in the field of initial confinement fusion, and has the characteristic of realizing controllable thickness of the microspheric polymer coating, single layer of the microspheric polymer coating, multilayer doping and the like.
Description
Technical field
The present invention relates to the preparation facilities of microsphere polymer coating in a kind of laser inertial confinement fusion field.
Background technology
In laser inertial confinement fusion field, glow discharge polymer coating, because transmitance is high, can realize opticmeasurement and the Infrared Heating of deuterium tritium ice sheet; Compact structure is without microdefect; Surface smoothness advantages of higher, becomes the fuel container of target capsule of fusion, is applied to the pellet ablation layer material in fusion site firer journey.The preparation of microballoon glow discharge polymer coating needs using plasma to strengthen chemical Vapor deposition process, yet current plasma enhanced chemical vapor deposition unit is generally used for the preparation of flat film or plane coating, be difficult to meet the uniform requirement of microsphere polymer coating; On the other hand, the performance to microsphere polymer in Physical Experiment has particular requirement, and the prepared polymkeric substance of current plasma enhanced chemical vapor deposition unit is difficult to reach the requirement of fusion igniting.
Summary of the invention
The object of the invention is to overcome the technological deficiency of above-mentioned existing plasma enhanced chemical vapor deposition unit, a kind of laser inertial confinement fusion field requirement that meets is provided, can realizes all microsphere polymer preparation facilitiess of controlled, the microsphere polymer coating individual layer of even thickness and multi-layer doping of microsphere polymer coating.
The technical solution used in the present invention is: comprise inlet pipe, radio frequency shielded enclosure, telefault, quartz resonance chamber, vacuum chamber.Quartz resonance chamber is arranged in telefault, and telefault is arranged in radio frequency shielded enclosure.Inlet pipe is connected with quartz resonance chamber, and quartz resonance chamber is connected with vacuum chamber.In vacuum chamber, be provided with specimen holder, sample lifting table, knock bar, specimen holder is connected with sample lifting table.
Upper end, described quartz resonance chamber is cylindrical, and lower end is taper.
Described telefault two lead-in wires are drawn from the terminal stud on device top, are connected with radio-frequency power supply, and the coil turn of telefault is adjustable.
The described bar that knocks is comprised of solenoid coil, electro-magnet stainless steel, and stainless steel stretches into vacuum chamber and contacts with specimen holder.
Described specimen holder consists of bowl-shape sample disc, vacuum motor and electric machine support, and bowl-shape sample disc is connected with vacuum motor, and vacuum motor is placed in electric machine support.
Beneficial effect of the present invention is as follows: 1. upper end, quartz resonance of the present invention chamber is cylindrical, and lower end is taper, is conducive to reactant gases ionization, has guaranteed that microsphere polymer coating can meet the requirement of laser inertial confinement fusion field.2. specimen holder of the present invention is the bowl-shape sample disc that tilting vacuum motor connects, and knocks function with knocking bar, has guaranteed the evenly preparation of microsphere polymer coating ground.3. the adjustable telefault of the number of turn has been realized the adjustment of plasma generating region, is convenient to the adjustment of processing parameter, has guaranteed groping of optimal processing parameter.
Accompanying drawing explanation
Fig. 1 is the structural representation of microsphere polymer coating preparation facilities of the present invention;
Fig. 2 is the quartz resonance cavity configuration schematic diagram in the present invention;
Fig. 3 is the specimen holder structural representation in the present invention;
In figure, 1. inlet pipe 2. radio frequency shielded enclosure 3. telefault 4. quartz resonance chamber 5. specimen holder 6. sample lifting tables 7. knock bar 8. vacuum chamber 9. viewing window 10. radio-frequency power supply 11. sample disc 12. vacuum motor 13. electric machine supports.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is the structural representation of microsphere polymer coating preparation facilities of the present invention, in Fig. 1, quartz resonance chamber 4 is arranged in telefault 3,3 liang of lead-in wires of telefault are drawn from the terminal stud on device top, be connected with radio-frequency power supply 10, the coil turn of telefault 3 is adjustable, to realize the adjustment of plasma generating region.Telefault 3 is arranged in radio frequency shielded enclosure 2, to shield the high-frequency signal of telefault 3.Inlet pipe 1 is connected with 4 tops, quartz resonance chamber, and 4 bottoms, quartz resonance chamber are connected with vacuum chamber 8.Reactant gases is coupled and plasma body by radio frequency induction coil 3 in quartz resonance chamber 4 through inlet pipe 1.Vacuum chamber 8 adopts button fly front structure, is convenient to take, put sample.In vacuum chamber 8, be provided with specimen holder 5, sample lifting table 6 and knock bar 7.Specimen holder 5 is connected with sample lifting table 6, and the height of specimen holder 5 regulates by sample lifting table 6, that is to say that microballoon passes through sample lifting table 6 to the distance of 4 bottoms, quartz resonance chamber and controls.Knock bar 7 and contact with specimen holder 5, knocking bar 7 outer ends is solenoid coil and electro-magnet, and frequency and dynamics that it knocks are adjustable, to prevent that microballoon from sticking in sample disc.
Fig. 2 is the quartz resonance cavity configuration schematic diagram in the present invention, in Fig. 2, and quartz resonance chamber 4, upper end is cylindrical, lower end is taper, the silica tube of boring.
Fig. 3 is the specimen holder structural representation in the present invention, and in Fig. 3, specimen holder 5, consists of bowl-shape sample disc 11, vacuum motor 12 and electric machine support 13.Bowl-shape sample disc 11 is connected with vacuum motor 12, and vacuum motor 12 is placed in electric machine support 13, and tilts 15 ° with the rotation of electric machine support 13, can be 0 ~ 30 ° of selection.When vacuum motor 12 rotates, its machine shaft drives sample disc 11 to rotate, so that the interior microballoon random rolling of sample disc 11.The material capable of choosing multiple of sample disc 11, as glass, quartz, tetrafluoroethylene etc.
Claims (5)
1. a microsphere polymer coating preparation facilities, comprises inlet pipe (1), radio frequency shielded enclosure (2), telefault (3), quartz resonance chamber (4), vacuum chamber (8); It is characterized in that: quartz resonance chamber (4) are arranged in telefault (3), telefault (3) is arranged in radio frequency shielded enclosure (2); Telefault (3) two lead-in wires are drawn from the terminal stud on device top, are connected with radio-frequency power supply (10); Inlet pipe (1) is connected with quartz resonance chamber (4), and quartz resonance chamber (4) are connected with vacuum chamber (8); In vacuum chamber (8), be provided with specimen holder (5), sample lifting table (6), knock bar (7), specimen holder (5) is connected with sample lifting table (6).
2. microsphere polymer coating preparation facilities according to claim 1, is characterized in that: upper end, quartz resonance chamber (4) is cylindrical, and lower end is taper.
3. microsphere polymer coating preparation facilities according to claim 1, is characterized in that: the coil turn of telefault (3) is adjustable.
4. microsphere polymer coating preparation facilities according to claim 1, is characterized in that: knock bar (7) and be comprised of solenoid coil, electro-magnet stainless steel, stainless steel stretches into vacuum chamber (8) and contacts with specimen holder (5).
5. microsphere polymer coating preparation facilities according to claim 1, is characterized in that: specimen holder (5) consists of bowl-shape sample disc (11), vacuum motor (12) and electric machine support (13); Bowl-shape sample disc (11) is connected with vacuum motor (12), and vacuum motor (12) is placed in electric machine support (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410355087.4A CN104131269A (en) | 2014-07-24 | 2014-07-24 | Preparation apparatus of microspheric polymer coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410355087.4A CN104131269A (en) | 2014-07-24 | 2014-07-24 | Preparation apparatus of microspheric polymer coating |
Publications (1)
| Publication Number | Publication Date |
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| CN104131269A true CN104131269A (en) | 2014-11-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410355087.4A Pending CN104131269A (en) | 2014-07-24 | 2014-07-24 | Preparation apparatus of microspheric polymer coating |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104694880A (en) * | 2015-03-27 | 2015-06-10 | 中国工程物理研究院激光聚变研究中心 | Precise vacuum microsphere shifting device |
| CN106714439A (en) * | 2016-12-28 | 2017-05-24 | 中国工程物理研究院激光聚变研究中心 | Device and method for eliminating static electricity on microsphere surface |
| CN107217234A (en) * | 2017-07-17 | 2017-09-29 | 中国工程物理研究院激光聚变研究中心 | Prepare fragile metal microballoon coating sample disk and its processing method |
| CN108977789A (en) * | 2018-09-07 | 2018-12-11 | 中国工程物理研究院激光聚变研究中心 | Rebound disk device and microballoon coat system |
Citations (3)
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| US4701379A (en) * | 1986-08-27 | 1987-10-20 | The United States Of America As Represented By The United States Department Of Energy | Boron hydride polymer coated substrates |
| US20040242953A1 (en) * | 1990-08-13 | 2004-12-02 | Endotech, Inc. | Endocurietherapy |
| CN203976913U (en) * | 2014-07-24 | 2014-12-03 | 中国工程物理研究院激光聚变研究中心 | A kind of microsphere polymer coating preparation facilities |
-
2014
- 2014-07-24 CN CN201410355087.4A patent/CN104131269A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4701379A (en) * | 1986-08-27 | 1987-10-20 | The United States Of America As Represented By The United States Department Of Energy | Boron hydride polymer coated substrates |
| US20040242953A1 (en) * | 1990-08-13 | 2004-12-02 | Endotech, Inc. | Endocurietherapy |
| CN203976913U (en) * | 2014-07-24 | 2014-12-03 | 中国工程物理研究院激光聚变研究中心 | A kind of microsphere polymer coating preparation facilities |
Non-Patent Citations (2)
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| 曹洪等: "脉冲敲击技术对PI 微球表面粗糙度的影响", 《物理学报》, vol. 62, no. 19, 29 August 2013 (2013-08-29) * |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104694880A (en) * | 2015-03-27 | 2015-06-10 | 中国工程物理研究院激光聚变研究中心 | Precise vacuum microsphere shifting device |
| CN104694880B (en) * | 2015-03-27 | 2017-03-01 | 中国工程物理研究院激光聚变研究中心 | Precise vacuum microsphere striking gear |
| CN106714439A (en) * | 2016-12-28 | 2017-05-24 | 中国工程物理研究院激光聚变研究中心 | Device and method for eliminating static electricity on microsphere surface |
| CN106714439B (en) * | 2016-12-28 | 2023-10-27 | 中国工程物理研究院激光聚变研究中心 | Device and method for eliminating microsphere surface static electricity |
| CN107217234A (en) * | 2017-07-17 | 2017-09-29 | 中国工程物理研究院激光聚变研究中心 | Prepare fragile metal microballoon coating sample disk and its processing method |
| CN107217234B (en) * | 2017-07-17 | 2023-06-13 | 中国工程物理研究院激光聚变研究中心 | Sample tray for preparing brittle and hard metal microsphere coating and processing method thereof |
| CN108977789A (en) * | 2018-09-07 | 2018-12-11 | 中国工程物理研究院激光聚变研究中心 | Rebound disk device and microballoon coat system |
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Application publication date: 20141105 |