CN104112730A - Intelligent power module and manufacturing method thereof - Google Patents
Intelligent power module and manufacturing method thereof Download PDFInfo
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- CN104112730A CN104112730A CN201310231229.1A CN201310231229A CN104112730A CN 104112730 A CN104112730 A CN 104112730A CN 201310231229 A CN201310231229 A CN 201310231229A CN 104112730 A CN104112730 A CN 104112730A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07551—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting
- H10W72/07552—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting changes in structures or sizes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/521—Structures or relative sizes of bond wires
- H10W72/527—Multiple bond wires having different sizes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
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- H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
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Abstract
本发明适用于电子器件技术,提供了一种智能功率模块及其制造方法,智能功率模块包括上表面覆盖有绝缘层的基板、于所述绝缘层表面设置的电路布线、于所述电路布线相应位置配设的电路元件,所述智能功率模块还包括:引脚,与电路布线连接并自所述基板外延,并通过一镀层将所述引脚完全覆盖;密封层,铺设于所述基板具有所述电路布线及电路元件的上表面。该智能功率模块引脚完全被镀层密封,极大提高了智能功率模块的抗腐蚀能力,在长期使用过程中,保证智能功率模块的引脚不会因为局部过热而烧断。
The present invention is applicable to electronic device technology, and provides an intelligent power module and a manufacturing method thereof. The intelligent power module includes a substrate covered with an insulating layer on the upper surface, circuit wiring arranged on the surface of the insulating layer, and corresponding to the circuit wiring. The intelligent power module further includes: pins connected to the circuit wiring and extending from the substrate, and completely covering the pins with a plating layer; a sealing layer laid on the substrate with The circuit wiring and the upper surface of the circuit element. The pins of the intelligent power module are completely sealed by plating, which greatly improves the corrosion resistance of the intelligent power module, and ensures that the pins of the intelligent power module will not be blown due to local overheating during long-term use.
Description
技术领域technical field
本发明属于电子器件制造工艺领域,尤其涉及一种智能功率模块及其制造方法。The invention belongs to the field of electronic device manufacturing technology, and in particular relates to an intelligent power module and a manufacturing method thereof.
背景技术Background technique
智能功率模块,即IPM(Intelligent Power Module),是一种将电力电子和集成电路技术结合的功率驱动类产品。智能功率模块把功率开关器件和高压驱动电路集成在一起,并内设有过电压、过电流和过热等故障检测电路。智能功率模块一方面接收MCU(Microprogrammed Control Unit,微程序控制器)的控制信号,驱动后续电路工作,另一方面将系统的状态检测信号送回MCU。与传统分立方案相比,智能功率模块以其高集成度、高可靠性等优势赢得越来越大的市场,尤其适合于应用于驱动电机的变频器及各种逆变电源,是变频调速、冶金机械、电力牵引、伺服驱动、变频家电的一种理想电力电子器件。Intelligent Power Module, or IPM (Intelligent Power Module), is a power drive product that combines power electronics and integrated circuit technology. The intelligent power module integrates the power switching device and the high-voltage driving circuit, and has built-in fault detection circuits such as overvoltage, overcurrent and overheating. On the one hand, the intelligent power module receives the control signal of the MCU (Microprogrammed Control Unit, microprogram controller) to drive the subsequent circuit to work, and on the other hand, it sends the system status detection signal back to the MCU. Compared with the traditional discrete solution, the intelligent power module wins more and more markets with its advantages of high integration and high reliability. It is especially suitable for frequency converters and various inverter power supplies for driving motors. , metallurgical machinery, electric traction, servo drive, an ideal power electronic device for frequency conversion appliances.
参照图1,说明现有智能功率模块100的结构。图1(A)是所述智能功率模块100的俯视结构图,图1(B)是图1(A)的沿X-X’线剖面图。Referring to FIG. 1 , the structure of a conventional smart power module 100 will be described. Fig. 1(A) is a top structural view of the smart power module 100, and Fig. 1(B) is a sectional view along line X-X' of Fig. 1(A).
所述智能功率模块100具有如下结构,其包括:电路基板106,所述电路基板106表面上的设有绝缘层107,且绝缘层107上形成的电路布线108;被固定在所述电路布线108上的电路元件104;连接所述电路元件104和所述电路布线108的金属线105;与所述电路布线108连接的引脚101,所述引脚101边缘存在未电镀的缺口103,引脚101除缺口103外的其余部分均被电镀层覆盖;所述智能功率模块100的整体被密封树脂102密封。另外,有时也在使所述铝基板106的背面露出到外部的状态下进行密封。The intelligent power module 100 has the following structure, which includes: a circuit substrate 106, an insulating layer 107 is provided on the surface of the circuit substrate 106, and a circuit wiring 108 formed on the insulating layer 107; is fixed on the circuit wiring 108 The circuit element 104 on the top; the metal wire 105 connecting the circuit element 104 and the circuit wiring 108; the pin 101 connected with the circuit wiring 108, there is an unplated gap 103 on the edge of the pin 101, and the pin The remaining part of 101 except the gap 103 is covered by electroplating layer; the whole of the intelligent power module 100 is sealed by sealing resin 102 . In addition, sealing may be performed in a state in which the back surface of the aluminum substrate 106 is exposed to the outside.
所述智能功率模块100一般会工作在恶劣的工况中,如变频空调的室外机,高温高湿的状态下,缺口103容易被水气入侵,进入对铝或铜材产生腐蚀,长期使用时会导致引脚101变细,对于某些需要承受大电流、大电压的引脚101,在变细部分容易产生热积聚,加速了引脚101的腐蚀进程,最终导致引脚101熔断,智能功率模块100失效。The intelligent power module 100 generally works in harsh working conditions, such as the outdoor unit of an inverter air conditioner, under high temperature and high humidity, the gap 103 is easy to be invaded by water vapor, which will corrode aluminum or copper when it is used for a long time. It will cause the pin 101 to become thinner. For some pins 101 that need to withstand high current and high voltage, heat accumulation is easy to occur in the thinned part, which accelerates the corrosion process of the pin 101 and eventually causes the pin 101 to fuse. Smart power Module 100 fails.
此外,参考图1(C),因为传统的智能功率模块100在制造过程中引脚101是通过加强筋109相连的,制造过程中的机械手和工人通过夹持引脚101搬运智能功率模块100时,一般都是通过夹持相对两侧的两个引脚101实现,这样,引脚101和电路布线108的连接部会产生较大的拉力,会形成焊接松动,在注塑和成形工序中,有可能引起部分引脚101与电路布线分离,造成断路,严重影响了制程合格率;如果引脚101和电路布线108间是部分分离而未完全分离,这样的产品很难在成品测试过程中检查出来,流入市场后,经过一段时间的使用后就会造成断路失效,使设备停止工作,严重时会发生设备失控烧毁等情况。In addition, referring to FIG. 1(C), because the pins 101 of the traditional smart power module 100 are connected by ribs 109 during the manufacturing process, when manipulators and workers in the manufacturing process carry the smart power module 100 by clamping the pins 101 , is generally achieved by clamping two pins 101 on opposite sides. In this way, the connection between the pins 101 and the circuit wiring 108 will generate a large tensile force, which will cause loose welding. In the injection molding and forming process, it is possible Part of the pin 101 is separated from the circuit wiring, causing an open circuit, which seriously affects the process qualification rate; if the pin 101 and the circuit wiring 108 are partially separated but not completely separated, such a product is difficult to detect during the finished product test. After entering the market, after a period of use, it will cause open circuit failure, make the equipment stop working, and in severe cases, the equipment will be out of control and burn down.
发明内容Contents of the invention
本发明旨在解决现有技术的不足,提供一种高可靠性的智能功率模块及一种工序流程得到简化的智能功率模块制造方法,可在保证智能功率模块加工时不受静电损伤的情况下,使制造出的智能功率模块的引脚被镀层完全密封。The present invention aims to solve the deficiencies of the prior art, and provides a high-reliability intelligent power module and a manufacturing method of the intelligent power module with a simplified process flow, which can ensure that the intelligent power module is not damaged by static electricity during processing , so that the pins of the manufactured intelligent power module are completely sealed by the coating.
本发明是这样实现的,一种智能功率模块,包括上表面覆盖有绝缘层的基板、于所述绝缘层表面设置的电路布线、于所述电路布线相应位置配设的电路元件,所述智能功率模块还包括:The present invention is achieved in this way. An intelligent power module includes a substrate covered with an insulating layer on the upper surface, circuit wiring arranged on the surface of the insulating layer, and circuit elements arranged at corresponding positions of the circuit wiring. The power module also includes:
引脚,与电路布线连接并自所述基板外延,并通过一镀层将所述引脚完全覆盖;pins, connected to circuit wiring and extending from the substrate, and completely covering the pins with a plating layer;
密封层,铺设于所述基板具有所述电路布线及电路元件的上表面。The sealing layer is laid on the upper surface of the substrate with the circuit wiring and circuit elements.
本发明的智能功率模块的有益效果是:引脚完全覆盖有镀层,极大提高了智能功率模块的抗腐蚀能力,在长期使用过程中,保证智能功率模块的引脚不会因为局部过热而烧断,提高了智能功率模块的长期可靠性,避免了发生爆炸等安全隐患。The beneficial effect of the intelligent power module of the present invention is: the pins are completely covered with plating, which greatly improves the corrosion resistance of the intelligent power module, and ensures that the pins of the intelligent power module will not burn due to local overheating during long-term use. This improves the long-term reliability of the intelligent power module and avoids safety hazards such as explosions.
本发明的另一目的在于提供一种智能功率模块的制造方法,包括以下步骤:Another object of the present invention is to provide a method for manufacturing an intelligent power module, including the following steps:
S11:设置基板,于所述基板上表面覆盖绝缘层,并在所述绝缘层表面布设电路布线,其中,在所述电路布线将要焊接引脚的引脚焊盘间形成可通过相应电流熔断的焊盘连线;S11: Set up a substrate, cover the upper surface of the substrate with an insulating layer, and lay out circuit wiring on the surface of the insulating layer, wherein a fuse that can be fused by a corresponding current is formed between the pads of the circuit wiring to be soldered. Pad connection;
S13:设置所述引脚,于所述引脚的表面形成镀层;S13: setting the pin, and forming a plating layer on the surface of the pin;
S15:于所述电路布线相应位置配设的电路元件,并将所述引脚焊接于相应的引脚焊盘上使其自所述基板外延;S15: Arranging circuit elements at corresponding positions of the circuit wiring, and soldering the pins to corresponding pin pads to extend from the substrate;
S17:将所述基板具有所述电路布线及电路元件的上表面密封;S17: sealing the upper surface of the substrate with the circuit wiring and circuit elements;
S19:对相邻的所述引脚间接通相应的电流将所述焊盘连线熔断。S19: Connecting corresponding currents between adjacent pins to fuse the bonding pads.
本发明的制造方法的有益效果是:在没有增加生产工序、确保加工时不受静电损伤的条件下,使引脚彼此独立,通过夹持引脚取放智能功率模块时,不会因为传统加强筋的存在产生杠杆效应而导致使引脚和电路布线间产生巨大的拉力,确保了引脚和电路布线的可靠连接,进一步提高了智能功率模块的可靠性,提高了智能功率模块的成品率。The beneficial effect of the manufacturing method of the present invention is: without increasing the production process and ensuring that the processing is not damaged by static electricity, the pins are independent of each other, and when the intelligent power module is picked and placed by clamping the pins, it will not be strengthened by the tradition. The existence of the ribs produces a leverage effect, which results in a huge tension between the pins and the circuit wiring, which ensures the reliable connection between the pins and the circuit wiring, further improves the reliability of the intelligent power module, and improves the yield of the intelligent power module.
附图说明Description of drawings
图1(A)为现有的智能功率模块的俯视结构示意图;Fig. 1 (A) is a top view structural schematic diagram of an existing intelligent power module;
图1(B)是图1(A)的X-X’线剖面图;Fig. 1 (B) is the X-X' line sectional view of Fig. 1 (A);
图1(C)为现有的智能功率模块的引脚结构示意图;Figure 1 (C) is a schematic diagram of the pin structure of an existing intelligent power module;
图2(A)为本发明实施例提供的智能功率模块的俯视结构示意图;Fig. 2 (A) is a top view structural diagram of the intelligent power module provided by the embodiment of the present invention;
图2(B)是图1(A)的X-X’线剖面图;Fig. 2 (B) is the X-X' line sectional view of Fig. 1 (A);
图2(C)是图1(A)的智能功率模块去掉密封层后的俯视图;Fig. 2(C) is a top view of the smart power module in Fig. 1(A) after removing the sealing layer;
图3为本发明实施例提供的智能功率模块的制造方法的工序流程图;Fig. 3 is a process flow chart of the manufacturing method of the intelligent power module provided by the embodiment of the present invention;
图4(A)、4(B)为本发明实施例提供的设置基板、绝缘层及电路布线的工序;Figures 4(A) and 4(B) are the process of setting the substrate, insulating layer and circuit wiring provided by the embodiment of the present invention;
图5(A)、5(B)为本发明实施例提供的设置引脚及对其镀层的工序;Figure 5(A) and 5(B) are the process of setting pins and their plating provided by the embodiment of the present invention;
图6(A)、6(B)为本发明实施例提供的配设电路元件及焊接引脚的工序;Figure 6(A) and 6(B) are the process of arranging circuit elements and soldering pins provided by the embodiment of the present invention;
图7为本发明实施例提供的智能功率模块的密封工序;Fig. 7 is the sealing process of the intelligent power module provided by the embodiment of the present invention;
图8为本发明实施例提供的焊盘连线熔断和模块功能测试的工序;Fig. 8 is the process of fusing pad connection and module function test provided by the embodiment of the present invention;
图9(A)、9(B)为本发明实施例提供的智能功率模块的制造方法的邦定及清洗工序。9(A) and 9(B) are the bonding and cleaning processes of the manufacturing method of the smart power module provided by the embodiment of the present invention.
具体实施方式Detailed ways
为了使本发明要解决的技术问题、技术方案及有益效果更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
结合图2(A)、2(B)、2(C),智能功率模块包括引脚11、密封层12、电路元件14、邦线15、基板16、绝缘层17、电路布线18。2(A), 2(B) and 2(C), the intelligent power module includes pins 11 , sealing layer 12 , circuit elements 14 , bonding wires 15 , substrate 16 , insulating layer 17 , and circuit wiring 18 .
绝缘层17覆盖于基板16的上表面,电路布线18设置于绝缘层17的表面,电路元件14配设于电路布线18相应位置。电路布线18包括用于配设电路元件14的元件焊盘、用于焊接引脚11的引脚焊盘18A和连接在引脚焊盘18A之间用于临时固定引脚11间距的焊盘连线18B。The insulating layer 17 covers the upper surface of the substrate 16 , the circuit wiring 18 is disposed on the surface of the insulating layer 17 , and the circuit element 14 is arranged at a corresponding position of the circuit wiring 18 . The circuit wiring 18 includes element pads for arranging the circuit elements 14, lead pads 18A for soldering the pins 11, and pad connections for temporarily fixing the pitch of the pins 11 connected between the pin pads 18A. Line 18B.
引脚11与电路布线18连接并自基板16外延,并通过一镀层(图未示出)将所述引脚完全覆盖。密封层12铺设于基板16具有电路布线18及电路元件14的上表面。The pins 11 are connected to the circuit wiring 18 and extend from the substrate 16, and are completely covered by a plating layer (not shown in the figure). The sealing layer 12 is laid on the upper surface of the substrate 16 having the circuit wiring 18 and the circuit element 14 .
进一步地,参考图2(B),电路布线18设有用于焊接引脚11的引脚焊盘18A。引脚11包括相接的弯折部112和延伸部114,弯折部112收容于密封层12,且的弯折部112一侧端焊接于相应的电路布线18的引脚焊盘18A,弯折部112另一端与延伸部114相接。更近一步地,延伸部114为L形,其长边与弯折部112相接。Further, referring to FIG. 2(B), the circuit wiring 18 is provided with pin pads 18A for soldering the pins 11 . The pin 11 includes a bent portion 112 and an extension portion 114 connected to each other. The bent portion 112 is accommodated in the sealing layer 12, and one end of the bent portion 112 is welded to the lead pad 18A of the corresponding circuit wiring 18. The other end of the folded portion 112 is connected to the extension portion 114 . Furthermore, the extending portion 114 is L-shaped, and its long side is in contact with the bending portion 112 .
实际上,引脚11被固定在设于所述基板16一个边缘的引脚焊盘18A上,其具有与外部进行输入、输出的作用。在此,设计成一边上设有多条引脚11,引脚11和引脚焊盘18A通过焊锡等电性粘结剂焊接。引脚11一般采用铜等金属制成,铜表面通过化学镀和电镀形成一层镍锡合金层,合金层的厚度一般为5μm,镀层可保护铜不被腐蚀氧化,并可提高可焊接性。Actually, the pins 11 are fixed on the pin pads 18A provided on one edge of the substrate 16 , which have the functions of inputting and outputting with the outside. Here, a plurality of pins 11 are provided on one side, and the pins 11 and the lead pads 18A are soldered with an electrical adhesive such as solder. Pin 11 is generally made of copper and other metals. The copper surface forms a layer of nickel-tin alloy layer through electroless plating and electroplating. The thickness of the alloy layer is generally 5 μm. The plating layer can protect copper from corrosion and oxidation and improve solderability.
进一步地,基板16的上表面、下表面均铺设有密封层12。在其他实施例中,基板16的上、下、侧面均设有密封层12。Further, the sealing layer 12 is laid on the upper surface and the lower surface of the substrate 16 . In other embodiments, the sealing layer 12 is provided on the upper, lower and side surfaces of the substrate 16 .
密封层12可通过传递模方式使用热硬性树脂模制也可使用注入模方式使用热塑性树脂模制。在此,密封层12完全密封基板16具有电路布线18的一表面上的所有元素;而对于致密性要求高的智能功率模块,基板16不具有电路布线18的其他表面一般也进行密封处理。The sealing layer 12 may be molded using a thermosetting resin by transfer molding or may be molded using a thermoplastic resin by injection molding. Here, the sealing layer 12 completely seals all elements on one surface of the substrate 16 with the circuit wiring 18 ; and for smart power modules that require high compactness, the other surface of the substrate 16 without the circuit wiring 18 is generally also sealed.
邦线15可以是铝线、金线或铜线,通过邦线15邦定使各电路元件14之间、各电路布线18之间、电路元件14与电路布线18之间建立电连接关系,有时还用于使基板16或引脚11和电路布线18或电路元件14之间建立电连接关系。The state wire 15 can be an aluminum wire, a gold wire or a copper wire, and through the bonding of the state wire 15, an electrical connection relationship is established between each circuit element 14, between each circuit wiring 18, and between the circuit element 14 and the circuit wiring 18, sometimes It is also used to establish an electrical connection relationship between the substrate 16 or the pin 11 and the circuit wiring 18 or the circuit element 14 .
本发明所提供的智能模块通过将引脚11用镀层完全密封,极大提高了智能功率模块的抗腐蚀能力,在长期使用过程中,保证智能功率模块的引脚11不会因为局部过热而烧断,提高了智能功率模块的长期可靠性,避免了发生爆炸等安全隐患。The intelligent module provided by the present invention greatly improves the anti-corrosion ability of the intelligent power module by completely sealing the pin 11 with a coating, and ensures that the pin 11 of the intelligent power module will not be burned due to local overheating during long-term use. This improves the long-term reliability of the intelligent power module and avoids safety hazards such as explosions.
另外,还提供了一种制造上述智能模块的制造方法,在一个较优选的实施例中,结合图2(A)、2(B)、2(C)和3,该制造方法包括以下步骤:In addition, a manufacturing method for manufacturing the above-mentioned smart module is also provided. In a more preferred embodiment, referring to FIGS. 2(A), 2(B), 2(C) and 3, the manufacturing method includes the following steps:
步骤S11:设置基板16,于基板16上表面覆盖绝缘层17,并在绝缘7层表面布设电路布线18,其中,在电路布线18将要焊接引脚11的引脚焊盘18A间形成可通过相应电流熔断的焊盘连线18B。Step S11: Set up the substrate 16, cover the upper surface of the substrate 16 with the insulating layer 17, and lay out the circuit wiring 18 on the surface of the insulating layer 7, wherein the circuit wiring 18 is formed between the pin pads 18A to which the pins 11 are to be soldered. Current-fuse pad connection 18B.
作为制造方法的第一工序:本工序是在大小合适的基板16上形成绝缘层17并在绝缘层17表面形成电路布线18的工序。The first step of the manufacturing method: This step is a step of forming an insulating layer 17 on a substrate 16 having an appropriate size and forming circuit wiring 18 on the surface of the insulating layer 17 .
首先,参照图4(A)和沿图4(A)的X-X’线的截面图4(B),根据需要的电路布局设计大小合适的电路基板16。对于一般的智能功率模块,一枚的大小可选取64±10mm×30±10mm,对两面进行防蚀处理。在铝基板的至少一个表面上设有绝缘层17。另外,在绝缘层17的表面粘贴有作为电路布线18的铜箔。然后将该工序制造的铜箔进行蚀刻,局部地除去铜箔,形成电路布线18,电路布线18包括用于配设电路元件14的元件焊盘、用于焊接引脚11的引脚焊盘18A和连接在引脚焊盘18A之间用于临时固定引脚11间距的焊盘连线18B。First, referring to FIG. 4(A) and the cross-sectional view 4(B) along the line X-X' in FIG. 4(A), design a circuit substrate 16 with a suitable size according to the required circuit layout. For general intelligent power modules, the size of one piece can be selected as 64±10mm×30±10mm, and anti-corrosion treatment is carried out on both sides. An insulating layer 17 is provided on at least one surface of the aluminum substrate. In addition, copper foil as circuit wiring 18 is pasted on the surface of insulating layer 17 . Then, the copper foil produced in this process is etched, and the copper foil is partially removed to form circuit wiring 18. Circuit wiring 18 includes element pads for arranging circuit elements 14 and lead pads 18A for soldering pins 11. and the pad connection 18B connected between the pin pads 18A for temporarily fixing the pitch of the pins 11.
在此,大小合适的基板16的形成是通过直接对2±1m×2±1m的铝或铜材进行锣板处理的方式形成,锣刀使用高速钢作为材质,马达使用5000转/分钟的转速,锣刀与板材平面呈直角下刀;也可以通过冲压的方式形成。Here, the substrate 16 with a suitable size is formed by directly performing gong-plate treatment on aluminum or copper materials of 2±1m×2±1m. The gong knife is made of high-speed steel, and the motor uses a speed of 5000 rpm. , the gong knife is cut at right angles to the plane of the plate; it can also be formed by stamping.
S13:设置所述引脚,于所述引脚的表面形成镀层。S13: setting the pin, and forming a plating layer on the surface of the pin.
作为制造方法的第二工序:参照图5(A)和图5(B):本工序是制成独立的带镀层的引脚11的工序。As the second process of the manufacturing method: refer to FIG. 5(A) and FIG. 5(B): this process is a process of making an independent pin 11 with plating.
每个引脚11都是用铜或铝基材,制成长度C为25±10mm,宽度K为1.5±0.5mm,厚度H为1±0.5mm的长条状,如图5(A)所示。Each pin 11 is made of copper or aluminum base material, and made into a long strip with a length C of 25±10mm, a width K of 1.5±0.5mm, and a thickness H of 1±0.5mm, as shown in Figure 5(A) Show.
在此,优选地,如图5(B)所示为便于装配,所述步骤15包括步骤S151:引脚11弯折后将其弯折部分(即上述的弯折部112)的一侧端焊接于与引脚焊盘18A上,且将引脚11的弯折部分收容于密封层12,即在引脚11其中一端压制出一定的弧度.Here, preferably, as shown in FIG. 5(B) for ease of assembly, the step 15 includes step S151: after the pin 11 is bent, one side end of the bent part (that is, the above-mentioned bent part 112 ) is Solder it on the pin pad 18A, and accommodate the bent part of the pin 11 in the sealing layer 12, that is, press a certain arc on one end of the pin 11.
然后通过化学镀的方法在引脚11的表面形成镀层。通过镍盐和次亚磷酸钠混合溶液,并添加了适当的络合剂,在已形成特定形状的铜材表面形成镍层,在金属镍具有很强的钝化能力,能迅速生成一层极薄的钝化膜,能抵抗大气、碱和某些酸的腐蚀。镀镍结晶极细小,镍层厚度一般为0.1±0.01μm;Then, a plating layer is formed on the surface of the pin 11 by electroless plating. Through the mixed solution of nickel salt and sodium hypophosphite, and adding an appropriate complexing agent, a nickel layer is formed on the surface of the copper material that has formed a specific shape. The metal nickel has a strong passivation ability and can quickly form a layer of electrode. Thin passivation film, resistant to corrosion by atmosphere, alkali and some acids. The crystals of nickel plating are very small, and the thickness of nickel layer is generally 0.1±0.01μm;
接着通过酸性硫酸盐工艺,在室温下将已形成形状和镍层的铜材浸在带有正锡离子的镀液中通电,在镍层表面形成镍锡合金层,镍层厚度一般控制在5±1μm,镍层的形成极大提高了保护性和可焊性。到此,引脚11制造完成。Then, through the acid sulfate process, at room temperature, the copper material with the formed shape and nickel layer is immersed in the plating solution with positive tin ions and energized, and a nickel-tin alloy layer is formed on the surface of the nickel layer. The thickness of the nickel layer is generally controlled at 5 ±1μm, the formation of nickel layer greatly improves the protection and solderability. So far, pin 11 is manufactured.
S15:于电路布线18相应位置配设的电路元件14,并将引脚11焊接于相应的引脚焊盘18A上使其自基板16外延。具体是在电路布线18的元件焊盘上配设电路元件14。S15 : arrange the circuit element 14 at the corresponding position of the circuit wiring 18 , and weld the pin 11 on the corresponding pin pad 18A to make it extend from the substrate 16 . Specifically, the circuit element 14 is arranged on the element pad of the circuit wiring 18 .
作为制造方法的第三工序:参考图6(A)和图6(B),本工序是在电路布线18表面装配电路元件14和引脚11的工序。As the third step of the manufacturing method: referring to FIG. 6(A) and FIG. 6(B), this step is a step of mounting circuit elements 14 and pins 11 on the surface of circuit wiring 18 .
在其中一个实施例中,首先,通过锡膏印刷机,使用钢网,对基板16的电路布线18的特定位置进行锡膏涂装,钢网可使用0.13±0.03mm的厚度。In one embodiment, firstly, a solder paste printing machine is used to coat a specific position of the circuit wiring 18 of the substrate 16 with a stencil, and the thickness of the stencil can be 0.13±0.03 mm.
其次,参照侧视图图6(A)和俯视图图6(B),进行电路元件14和引脚11的安装,电路元件14可直接放置在电路布线18的特定位置,而引脚11则一端要安放在引脚焊盘18A上,另一端需要载具20进行固定,载具20通过合成石等材料制成。Secondly, referring to the side view Figure 6(A) and the top view Figure 6(B), the installation of the circuit element 14 and the pin 11 is carried out. The circuit element 14 can be directly placed on a specific position of the circuit wiring 18, and one end of the pin 11 needs to be It is placed on the pin pad 18A, and the other end needs to be fixed by a carrier 20, and the carrier 20 is made of synthetic stone and other materials.
然后,放于载具20上的基板16通过回流焊,锡膏固化,电路元件14和所述引脚11被固定。Then, the substrate 16 placed on the carrier 20 undergoes reflow soldering, the solder paste is solidified, and the circuit elements 14 and the pins 11 are fixed.
S17:将基板16具有电路布线18及电路元件14的上表面密封层。S17: The substrate 16 is provided with a sealing layer on the upper surface of the circuit wiring 18 and the circuit element 14 .
作为制造方法的第四工序:参照图7,说明密封层12铺设于电路基板16的工序。图7表示使用模具50由密封层12密封电路基板16的工序的剖面图。The fourth step of the manufacturing method: with reference to FIG. 7 , the step of laying the sealing layer 12 on the circuit board 16 will be described. FIG. 7 is a cross-sectional view showing a step of sealing the circuit board 16 with the sealing layer 12 using the mold 50 .
进步一地,步骤S18:于基板15的下表面铺设密封层。Further, step S18 : laying a sealing layer on the lower surface of the substrate 15 .
首先,在无氧环境中对基板16进行烘烤,烘烤时间不应小于2小时,烘烤温度选择125℃左右。Firstly, the substrate 16 is baked in an oxygen-free environment, the baking time should not be less than 2 hours, and the baking temperature is selected to be around 125°C.
将配置好引脚11的电路基板16搬送到模型44及45。通过使引脚11的弯折部分与固定装置46接触,进行基板16的定位。The circuit board 16 on which the pins 11 are arranged is transferred to the molds 44 and 45 . The positioning of the substrate 16 is performed by bringing the bent portion of the lead 11 into contact with the fixture 46 .
合模时,在形成于模具50内部的模腔中放置、基板16,然后由浇口53注入密封树脂。进行密封的方法可采用使用热硬性树脂的传递模制法或使用热硬性树脂的注入模制法。而且,对应自浇口53注入的密封树脂模腔内部的气体通过排气口54排放到外部。When closing the mold, the substrate 16 is placed in the cavity formed inside the mold 50 , and then the sealing resin is injected through the gate 53 . A method of sealing may employ transfer molding using a thermosetting resin or injection molding using a thermosetting resin. Also, the gas corresponding to the inside of the sealing resin cavity injected from the gate 53 is discharged to the outside through the exhaust port 54 .
步骤S18:对相邻的引脚11间接通相应的电流将焊盘连线18B熔断。Step S18 : Connect corresponding currents between adjacent pins 11 to fuse the pad connection 18B.
作为制造方法的第五工序:参照图8,是进行引脚11成型并进行焊盘连线18B熔断和模块功能测试的工序,智能功率模块经由此工序作为制品完成。As the fifth process of the manufacturing method: referring to FIG. 8 , it is the process of forming the pins 11, fusing the pad connection 18B and testing the module function. The intelligent power module is completed as a product through this process.
本工序根据引脚11使用的长度和形状需要,在虚线51的位置将外部引脚11折弯成一定形状,便于后续装配。而此工序也可以在步骤15中的步骤S153中完成,步骤S153:将引脚的外延部分折成L形,其长边与弯折部分连接。In this process, the outer pin 11 is bent into a certain shape at the position of the dotted line 51 according to the length and shape of the pin 11 to facilitate subsequent assembly. And this process can also be completed in step S153 in step 15, step S153: fold the extension part of the lead into an L shape, and its long side is connected with the bent part.
然后将智能功率模块放入测试设备中,为相邻的引脚11通一定大小的电流.例如,根据本实施例的焊盘连线18B的大小,电流值可设置为0.35A,当电流从0.35A忽然减少,证明焊盘连线18B已经熔断,焊盘连线18B均已熔断后,进行常规的电参数测试,一般包括绝缘耐压、静态功耗、迟延时间等测试项目,测试合格者为成品。Then put the intelligent power module into the test equipment, and pass a certain amount of current for adjacent pins 11. For example, according to the size of the pad connection 18B of this embodiment, the current value can be set to 0.35A, when the current from The sudden decrease of 0.35A proves that the pad connection 18B has been fused. After the pad connection 18B has been fused, conduct conventional electrical parameter tests, generally including insulation withstand voltage, static power consumption, delay time and other test items, and those who pass the test for the finished product.
可以理解的是,第四工序即步骤S17之前还包括进行邦线15连接并清洗基板16的工序。It can be understood that the fourth process, that is, prior to step S17 , also includes the process of connecting the bonding wire 15 and cleaning the substrate 16 .
参考图9(A)和图9(B),通过邦线15邦定使各电路元件14之间、各电路布线18之间、电路元件14与电路布线18之间建立电连接关系,有时还用于使基板16或引脚11和电路布线18或电路元件14之间建立电连接关系。邦线15可以是铝线、金线或铜线。Referring to Fig. 9(A) and Fig. 9(B), electrical connections are established between the circuit elements 14, between the circuit wirings 18, between the circuit elements 14 and the circuit wiring 18, and sometimes It is used to establish an electrical connection relationship between the substrate 16 or the pin 11 and the circuit wiring 18 or the circuit element 14 . Bond wire 15 can be aluminum wire, gold wire or copper wire.
首先将基板16放入清洗机中进行清洗,将回流焊时残留的松香等助焊剂及冲压时残留的铝线等异物洗净,根据电路元件14在电路布线18的排布密度,清洗可通过喷淋或超声或两者结合的形式进行。清洗时,通过机械臂夹持两条或多条引脚11,将基板16置于清洗槽中,因为引脚11彼此独立而没有加强筋彼此相连,即使机械臂对每个引脚的夹持力度不均,清洗过程中的震动也不会在引脚间产生力传递,造成部分引脚11与焊盘18A分离。First, put the substrate 16 into a cleaning machine for cleaning, and clean the residual flux such as rosin during reflow soldering and the foreign matter such as aluminum wire remaining during stamping. According to the arrangement density of the circuit components 14 on the circuit wiring 18, cleaning can Spray or ultrasonic or a combination of both. When cleaning, two or more pins 11 are clamped by the mechanical arm, and the substrate 16 is placed in the cleaning tank, because the pins 11 are independent of each other and there is no reinforcing rib connected to each other, even if the mechanical arm clamps each pin The strength is uneven, and the vibration during the cleaning process will not generate force transmission between the pins, causing some of the pins 11 to separate from the pad 18A.
其次,通过在电路元件14和电路布线18的特定位置邦定一定直径的金属线形成电连接,在此,金属线的粗细应根据邦定点的大小、所需的同流能力、元器件的可加工性等综合考虑,一般地,单根金属线的直径不应大于400μm,不应小于15μm,对于功率器件的连接,可考虑使用多根400μm的铝线并联邦定,对于功能器件的连接,可考虑使用单根38μm的铝线进行邦定。Secondly, an electrical connection is formed by bonding a metal wire of a certain diameter at a specific position of the circuit element 14 and the circuit wiring 18. Comprehensive considerations such as processability, generally, the diameter of a single metal wire should not be greater than 400 μm, and should not be less than 15 μm. For the connection of power devices, multiple 400 μm aluminum wires can be used in parallel. For the connection of functional devices, Consider using a single 38μm aluminum wire for bonding.
可以理解的是,上述的制造方法在实际操作或其他实施例中,其标号S11、S13、S15、S17、S19只是方便说明具体实施方式而设置,而实际上其步骤S11至S19的顺序可以根据需要进行更改。It can be understood that, in the actual operation or other embodiments of the above-mentioned manufacturing method, the labels S11, S13, S15, S17, and S19 are only set for the convenience of describing the specific implementation, but in fact the order of the steps S11 to S19 can be according to Changes are required.
因此,通过上述的制造方法,在没有增加生产工序、确保加工时不受静电损伤的条件下,使引脚11彼此独立,通过夹持引脚11取放智能功率模块时,不会因为传统加强筋的存在产生杠杆效应而导致使引脚11和电路布线18间产生巨大的拉力,确保了引脚11和电路布线18的可靠连接,进一步提高了智能功率模块的可靠性,提高了智能功率模块的成品率。Therefore, through the above-mentioned manufacturing method, without increasing the production process and ensuring that the processing is not damaged by static electricity, the pins 11 are independent of each other, and the intelligent power module will not be strengthened by the traditional The presence of the ribs produces a leverage effect that causes a huge tension between the pin 11 and the circuit wiring 18, ensuring a reliable connection between the pin 11 and the circuit wiring 18, further improving the reliability of the intelligent power module, and improving the reliability of the intelligent power module. yield rate.
以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the protection of the present invention. within range.
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