CN104096428A - Front filter device of vacuum pump - Google Patents
Front filter device of vacuum pump Download PDFInfo
- Publication number
- CN104096428A CN104096428A CN201410348148.4A CN201410348148A CN104096428A CN 104096428 A CN104096428 A CN 104096428A CN 201410348148 A CN201410348148 A CN 201410348148A CN 104096428 A CN104096428 A CN 104096428A
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- CN
- China
- Prior art keywords
- screen pack
- filter
- vavuum pump
- chamber
- rotating shaft
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Abstract
The invention relates to a front filter device of a vacuum pump, and belongs to the field of filter equipment. The device mainly comprises a filter barrel, a filter screen and an actuator, wherein a cavity, an air inlet, an air outlet and a dust collecting area are formed in the filter barrel; the filter screen is around a shaft center and is mounted in the cavity; a rotating shaft which is connected with the filter screen and can be used for rotating the filter screen is mounted on the actuator, and a coupler which is mounted on the filter barrel and is used for sealing the rotating shaft and the actuator is arranged on the rotating shaft. Therefore, the device capable of being used for generating high-concentration particles is used for filtering the high-concentration particles, and the filtered particles are separated from the filter screen by centrifugal force by rotating the filter screen, so that the purposes of cleaning and reusing can be achieved without dismounting the filter screen.
Description
Technical field
A kind of filter plant of the present invention, espespecially a kind of seeing through rotates through filter screen and can reach the particulate on cleaning filter net, and need not to dismantle be the preposition filter plant of reusable vavuum pump.
Background technology
Press, the industry that can produce at present high-concentration particle in processing procedure is solar energy, semiconductor and part chemical industry mostly, wherein single crystal growing furnace particularly, in order reducing, because the particulate of processing procedure thing enters side, chamber deposition in Pu causes causing vacuum pump rotor stuck, damage even, therefore the current practice is to install filter apparatus additional, sees through filter type aforesaid particulate is removed, and then effectively extend service life of vacuum pump.
So, the filter apparatus of present stage must detach its inner screen pack rear clean after using a period of time, no matter be to utilize gas to blow Net screen pack or the screen pack more renewing, when clean, still must dismantle filter apparatus, this kind of mode is not only time-consuming when clean, and the replacing of not timing filtration Netease causes cost to increase.
Summary of the invention
Technical problem to be solved by this invention is: a kind of filter plant is provided, it utilizes screen pack high-concentration particle can be seen through to air inlet and can directly be filtered net obstruct and reach filter effect, the gas that completes filtration is discharged by gas outlet again, then rotate through filter screen in utilization and can reach cleaning effect, and process does not need to pull down screen pack completely.
The preposition filter plant of a kind of vavuum pump, is characterized in that:
It comprises
One filter vat, this filter vat forms the accumulation area that a chamber, an air inlet communicating with this chamber and gas outlet and are positioned at this filter vat below and communicate with this chamber;
One screen pack, this screen pack with an axis direction around and be installed in this chamber; And
One actuator, this actuator is equiped with the rotating shaft of this screen pack of a connection rotatable this screen pack, and this rotating shaft arranges one and is installed in this filter vat and by the shaft coupling of this chamber and this rotating shaft sealing.
Wherein this gas outlet connects a vavuum pump.
Wherein this screen pack forms plural mesh.
Wherein this actuator is hand or one of them person of mechanical force of manpower.
Wherein this mechanical force is motor.
Wherein this shaft coupling also can be magnetic shaft coupling.
By above-mentioned design, the present invention can bring following beneficial effect: the preposition filter plant of a kind of vavuum pump of the present invention, it comprises: a filter vat, and this filter vat forms the accumulation area that a chamber, an air inlet communicating with this chamber and gas outlet and are positioned at this filter vat below and communicate with this chamber; One screen pack, this screen pack with an axis direction around and be installed in this chamber; And an actuator, this actuator is equiped with the rotating shaft of this screen pack of a connection rotatable this screen pack, and utilizes shaft coupling to seal its rotating shaft.
The embodiment one of according to the present invention, wherein this gas outlet connects a vavuum pump.
The embodiment one of according to the present invention, wherein this screen pack forms plural mesh.
The embodiment one of according to the present invention, wherein this actuator is hand or one of them person of mechanical force of manpower.
The embodiment one of according to the present invention, wherein this mechanical force is motor.
The embodiment one of according to the present invention, wherein this shaft coupling also can be magnetic shaft coupling.
The present invention can carry out back washing function, it is mainly by gas outlet air inlet, then by air inlet exhaust, by reverse gas, the particulate on screen pack is blown off, allow the particulate remaining on screen pack can depart from and drop on accumulation area, and then reach and need not dismantle the object that screen pack can clean.
The present invention utilizes gathering-device the particle deposition of accumulating after clean can be processed.
Intraware of the present invention is few, therefore the probability that breaks down is relatively low.
Manufacturing cost of the present invention is comparatively cheap, assembling is easy.
Brief description of the drawings
Below in conjunction with the drawings and specific embodiments, the present invention is further illustrated:
Fig. 1 is the schematic diagram of preferred embodiment of the present invention.
Fig. 2 is the illustrative view of inlet air filtration particulate of the present invention.
Fig. 3 is that the present invention rotates screen pack and removes the illustrative view of adhesion of particles.
Fig. 4 is the illustrative view that the present invention carries out back washing function.
Fig. 5 is the path schematic diagram of filter particulates of the present invention.
Fig. 6 is the schematic diagram of another preferred embodiment of the present invention.
Detailed description of the invention
By specific instantiation explanation embodiments of the present invention, the personage who is familiar with this skill can understand advantage of the present invention and effect easily by content disclosed in the present specification below.The present invention can also other different mode be implemented, and, under not departing from disclosed category, can give different modifications and change that is.
Referring to shown in Fig. 1, is the schematic diagram of preferred embodiment of the present invention.The present invention is the preposition filter plant 1 of a kind of vavuum pump, it is mainly by filter vat 10, screen pack 12 and actuator 14 form, wherein filter vat 10 forms a chamber 100, the accumulation area 106 that one air inlet 102 communicating with this chamber 100 and gas outlet 104 and are positioned at these filter vat 10 belows and communicate with this chamber 100, screen pack 12 with an axis direction 2 around and be installed in this chamber 100, in addition, actuator 14 is equiped with the rotating shaft 140 of this screen pack 12 of a connection rotatable this screen pack 12, and this rotating shaft 140 arranges a shaft coupling 142 that is installed in this filter vat 10 and this chamber 100 and this rotating shaft 140 are sealed.
Consult in the lump shown in Fig. 2, Fig. 3, Fig. 4 and Fig. 5, for the illustrative view of inlet air filtration particulate of the present invention, rotate screen pack and remove the path schematic diagram of the illustrative view of adhesion of particles, the illustrative view of carrying out back washing function and filter particulates.Aforesaid gas outlet 104 connects a vavuum pump 3, the present invention is to apply to understanding the single crystal growing furnace that produces high-concentration particle as example, when single crystal growing furnace 4 produces high-concentration particle, fine-grained tool gas can be delivered to the preposition filter plant 1 of vavuum pump, now gas can enter chamber 100 by air inlet 102, because the multiple meshes 120 on screen pack 12 must be to use process apparatus to feel the diameter of mesh 120, mesh 120 diameter mainly coordinate the selected use of biologic grain size of processing procedure, and too small mesh 120 easily causes screen pack 12 to deposit rapidly and lost efficacy; Excessive without any filter effect.Mesh 120 diameters in the present invention are taking 400mm as example, and particulate now all can be attached to screen pack 12, and the gas after filtering is discharged by gas outlet 140.
When the accumulation of particulates on screen pack 12 is to a certain extent time (filter effect variation or capacity deficiency), valve-off 6,7, after utilize actuator 14 (can motor or manual mode of operation) to see through rotating shaft 140 and rotate screen pack 12, now particulate 5 can be departed to screen pack 12 through centrifugal force mode by particulate 5 through rotating through filter screen 12, and then reaching the object that can reach clean and reuse without dismounting screen pack 12, the particulate 5 departing from drops in accumulation area 106.
Complete after aforesaid cleaning, can again carry out back washing mode through barotropic gas thoroughly cleans screen pack 12 again, it is mainly by gas outlet 104 air inlets, again by air inlet 102 exhausts, by reverse gas, the particulate on screen pack 12 5 is blown off, allow the particulate 5 remaining on screen pack 12 can depart from and drop on accumulation area 106, and then reach and need not dismantle the object that screen pack can clean.
Moreover rotating shaft 140 is provided with shaft coupling 142, utilize the shaft coupling 142 being installed on filter vat 10 chamber 100 and rotating shaft 140 can be isolated completely, to avoid the gas in processing procedure to be emitted in atmosphere.
The preposition filter plant 1 of vavuum pump of the present invention, its demand for the configuration of cooperation real space must have level and vertical two kinds of aspects, change with collocation application place, and aforesaid aspect is taking vertically as main, another kind of horizontal aspect refers to shown in Fig. 6, air inlet 102a is positioned at filter vat 10a side gas outlet 104a and is positioned at filter vat 10a top, in addition, actuator 14a is equiped with the rotating shaft 140a of this screen pack of connection 12a rotatable this screen pack 12a, screen pack 12a with an axis direction 2a around and be installed in the chamber 100a of lauter tub 10a, aforesaid rotating shaft 140a arranges one and is installed in this filter vat 10a and by the shaft coupling 142a (taking magnetic shaft coupling as example) of this chamber 100a and this rotating shaft 140a sealing, general shaft coupling has gap in the part of drive-connecting shaft and produces, therefore easily there is gas leak phenomenon, only, utilize the structurally seamless generation of magnetic shaft coupling with magnetic driven rotary, therefore can there is not gas leak phenomenon.Below filter vat 10a, there is to collect the accumulation area 106a of particulate 5a.Its gas filtration mode, cleaning filter net 12a are all identical with the preposition filter plant 1 of aforementioned vertically disposed vavuum pump with back washing mode, therefore repeat no more and the effect reaching is also identical.
Can effectively most dust particle and processing procedure thing be filtered in advance by the preposition filter plant 1 of vavuum pump of the present invention, avoid causing and being deposited between rotor in vavuum pump 3, finally cause rotor interfere stuck and break down.
Above-described embodiment is only illustrative principle of the present invention and effect thereof, but not for limiting the present invention.Any personage who is familiar with this skill all can, under spirit of the present invention and category, modify to above-described embodiment.Therefore the scope of the present invention, claim is listed as described later.
Claims (6)
1. the preposition filter plant of vavuum pump, is characterized in that:
It comprises
One filter vat, this filter vat forms the accumulation area that a chamber, an air inlet communicating with this chamber and gas outlet and are positioned at this filter vat below and communicate with this chamber;
One screen pack, this screen pack with an axis direction around and be installed in this chamber; And
One actuator, this actuator is equiped with the rotating shaft of this screen pack of a connection rotatable this screen pack, and this rotating shaft arranges one and is installed in this filter vat and by the shaft coupling of this chamber and this rotating shaft sealing.
2. the preposition filter plant of vavuum pump according to claim 1, is characterized in that: wherein this gas outlet connects a vavuum pump.
3. the preposition filter plant of vavuum pump according to claim 1, is characterized in that: wherein this screen pack forms plural mesh.
4. the preposition filter plant of vavuum pump according to claim 1, is characterized in that: wherein this actuator is hand or one of them person of mechanical force of manpower.
5. the preposition filter plant of vavuum pump according to claim 4, is characterized in that: wherein this mechanical force is motor.
6. the preposition filter plant of vavuum pump according to claim 1, is characterized in that: wherein this shaft coupling also can be magnetic shaft coupling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410348148.4A CN104096428A (en) | 2014-04-11 | 2014-07-21 | Front filter device of vacuum pump |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410146404 | 2014-04-11 | ||
| CN201410146404.1 | 2014-04-11 | ||
| CN201410348148.4A CN104096428A (en) | 2014-04-11 | 2014-07-21 | Front filter device of vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104096428A true CN104096428A (en) | 2014-10-15 |
Family
ID=51665207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410348148.4A Pending CN104096428A (en) | 2014-04-11 | 2014-07-21 | Front filter device of vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104096428A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104596084A (en) * | 2014-12-22 | 2015-05-06 | 武汉科技大学 | Cleaning device for air-condition filter screen |
| CN107185304A (en) * | 2017-07-19 | 2017-09-22 | 安徽三品技术服务有限公司 | Filtering apparatus for water purifier and its water purifier |
| CN113058342A (en) * | 2021-04-13 | 2021-07-02 | 西安航空制动科技有限公司 | CVD furnace filter equipment convenient to online real-time clearance |
| WO2023279523A1 (en) * | 2021-07-09 | 2023-01-12 | 长鑫存储技术有限公司 | Vacuum system, low-pressure vacuum process apparatus, and stop member |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08164313A (en) * | 1994-12-09 | 1996-06-25 | Yoshio Moronuki | Dust filter |
| CN201815207U (en) * | 2010-04-29 | 2011-05-04 | 杭州富通半导体设备科技有限公司 | Filter of vacuum system of single-crystal furnace |
| CN202136890U (en) * | 2011-01-26 | 2012-02-08 | 杨学辉 | Self-cleaning dust collector |
| CN202768347U (en) * | 2012-07-31 | 2013-03-06 | 银川隆基硅材料有限公司 | Device for cleaning single crystal furnace vacuum pipeline |
| CN203253277U (en) * | 2013-04-11 | 2013-10-30 | 林祥莉 | Online filter screen rotary dust collection device with flow aiding fan |
-
2014
- 2014-07-21 CN CN201410348148.4A patent/CN104096428A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08164313A (en) * | 1994-12-09 | 1996-06-25 | Yoshio Moronuki | Dust filter |
| CN201815207U (en) * | 2010-04-29 | 2011-05-04 | 杭州富通半导体设备科技有限公司 | Filter of vacuum system of single-crystal furnace |
| CN202136890U (en) * | 2011-01-26 | 2012-02-08 | 杨学辉 | Self-cleaning dust collector |
| CN202768347U (en) * | 2012-07-31 | 2013-03-06 | 银川隆基硅材料有限公司 | Device for cleaning single crystal furnace vacuum pipeline |
| CN203253277U (en) * | 2013-04-11 | 2013-10-30 | 林祥莉 | Online filter screen rotary dust collection device with flow aiding fan |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104596084A (en) * | 2014-12-22 | 2015-05-06 | 武汉科技大学 | Cleaning device for air-condition filter screen |
| CN107185304A (en) * | 2017-07-19 | 2017-09-22 | 安徽三品技术服务有限公司 | Filtering apparatus for water purifier and its water purifier |
| CN113058342A (en) * | 2021-04-13 | 2021-07-02 | 西安航空制动科技有限公司 | CVD furnace filter equipment convenient to online real-time clearance |
| CN113058342B (en) * | 2021-04-13 | 2022-10-28 | 西安航空制动科技有限公司 | CVD furnace filter equipment convenient to online real-time clearance |
| WO2023279523A1 (en) * | 2021-07-09 | 2023-01-12 | 长鑫存储技术有限公司 | Vacuum system, low-pressure vacuum process apparatus, and stop member |
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| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
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Application publication date: 20141015 |