CN104077186A - Operating system with embedded real-time kernel and embedding method - Google Patents

Operating system with embedded real-time kernel and embedding method Download PDF

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CN104077186A
CN104077186A CN 201310096332 CN201310096332A CN104077186A CN 104077186 A CN104077186 A CN 104077186A CN 201310096332 CN201310096332 CN 201310096332 CN 201310096332 A CN201310096332 A CN 201310096332A CN 104077186 A CN104077186 A CN 104077186A
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real
time
operating system
kernel
process
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CN 201310096332
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刘鹏
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中微半导体设备(上海)有限公司
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Abstract

The invention provides an operating system with an embedded real-time kernel and an embedding method. The operating system is used for controlling semiconductor technology processing equipment. The embedding method is characterized by comprising the following steps: embedding a real-time kernel in an operating system; distributing system resource for the kernel of the operating system and the real-time kernel to use; and dividing control software for controlling the kernel of the operating system and the real-time kernel.

Description

内嵌实时内核的操作系统及内嵌方法 Embedded real-time operating system kernel and embedded method

技术领域 FIELD

[0001] 涉及操作系统,尤其是用于控制半导体工艺处理设备的操作系统。 [0001] relates to operating systems, particularly operating system for a semiconductor processing apparatus for controlling the process.

背景技术 Background technique

[0002] 由于我们在制造并加工晶圆时,趋向于更小的几何形状和更大的晶圆尺寸,系统的定时需求变得尤为严苛。 [0002] Since we manufacture and processing of the wafers, the timing requirements tend to be smaller geometry and larger wafer sizes, the system becomes particularly severe. 在另一方面,用户在FDC (Facility Design Criteria)设备设计标准以及制程上需要更多自动控制和更多数据。 On the other hand, users require more and more automatic control data on FDC (Facility Design Criteria) standard equipment design and process. 同时设备上的进程/工具数据文件需要定期和不定期的反馈。 At the same time the process on the device / tool data file and the need for regular feedback from time to time.

[0003] 这些都需要控制软件有独立的速度以及更多的确定性的定时。 [0003] These require separate software to control the timing and speed of more certainty. 这也需要操作系统的控制和定时不受在设备控制外的其他因素影响。 This also requires control and timing are not affected by other factors outside the control of the operating system of the device.

[0004] Windows是应用最为广泛的操作系统,它拥有最多的可用技术人才以及已经建立完善的技术环境。 [0004] Windows is the most widely used operating system, it has the most available technical personnel and has established a sound technical environment. 它开始被用于监控和控制半导体工艺处理设备。 It began to be used to monitor and control process of the semiconductor processing apparatus. 然而Windows是一个通用的操作系统,它并没有被设计用于严格的实时控制。 However, Windows is a general-purpose operating system, it has not been designed for strict real-time control. 也就是说,它不是一个实时的操作系统,有时,它的定时误差以及不确定性不能满足更多的控制需求。 In other words, it is not a real-time operating system, and sometimes, it's a timing error and uncertainty can not meet the demand for more control. 具体地定时误差如图1所示,设置无线射频功率开的定时为1000ms,利用通讯交换机进行通讯控制时,定时误差为50%。 Specifically, the timing errors shown in Figure 1, RF power is provided to a timing apart 1000ms, when the communication using the communication control switch, a timing error of 50%. 利用RS232串口进行通讯控制,定时误差为20%。 Using RS232 serial communication control, the timing error of 20%. RS-232称为标准串口,是目前最常用的一种串行通讯接口。 RS-232 serial interface standard called, is the most commonly used as a serial communication interface. 通常RS-232接口以9个引脚(DB-9)或是25个引脚(DB-25)的型态出现,一般个人计算机上会有两组RS-232接口,分别称为COMl和COM2。 Typically, or RS-232 interface pins 25 (DB-25) appears as a 9-pin type (DB-9), a general personal computer have two RS-232 interface, called COMl and COM2 . 利用增加速度了的RS232串口(RS232-38400)串口进行通讯控制时,定时误差为10%。 Utilizing the rate of increase of the RS232 serial port (RS232-38400) for serial communication control, the timing error is 10%. 直接通讯时,定时误差也为10%。 When the direct communication, the timing error is 10%. 而在半导体工艺处理设备的控制中,由于这些定时误差会使得半导体制备时产生毛边,不够光滑等缺陷,因此对操作系统的定时要求更加严苛。 In the process of controlling the semiconductor processing apparatus, since the timing error will cause burrs when preparing a semiconductor, and other defects not smooth enough, and therefore the operating system timing requirements more stringent. .

[0005] 而Linux系统支持多种平台,支持多用户,多任务。 [0005] and Linux systems support multiple platforms, supports multi-user, multi-tasking. 然而Linux也是一个通用的操作系统,它并没有被设计用于严格的实时控制。 However, Linux is a general-purpose operating system, it has not been designed for strict real-time control. 也就是说,它不是一个实时的操作系统,有时,它的定时误差以及不确定性也不能满足更多的控制需求。 In other words, it is not a real-time operating system, and sometimes, it's a timing error and uncertainty can not meet the demand for more control.

[0006] 为了克服这些缺陷,一些操作系统使用两台计算机,一台基于原本的操作系统,用于控制非实时软件功能,例如,用户交互界面,另一台基于实时操作系统用于实时操作。 [0006] To overcome these drawbacks, some operating systems use two computers, an operating system based on the original, non-real time for controlling software functions, e.g., a user interface, based on another real time operating system for real-time operation. 但是这种方法显然会增加系统的复杂度,还会增加系统的成本。 However, this method will obviously increase the complexity of the system, it will increase the cost of the system.

发明内容 SUMMARY

[0007] 针对现有技术中的技术缺陷,本发明提供一种在操作系统中内嵌实时内核的方法,所述操作系统用于控制半导体工艺处理设备,其特征在于,包括:在所述操作系统中内嵌一实时内核;分配系统资源以供所述操作系统的内核和所述实时内核使用;以及划分控制软件以供所述操作系统的内核和所述实时内核控制。 [0007] For technical drawbacks of the prior art, the present invention provides a method of embedded real-time kernel in the operating system, the operating system for controlling the processing process of the semiconductor device, characterized by comprising: the operation a real-time kernel in the embedded system; real-time kernel and the kernel to allocate system resources for the operating system; and dividing the control software for the operating system kernel and the real-time kernel control.

[0008] 优选地,所述分配系统资源以供所述操作系统的内核和所述实时内核使用包括:分配所述半导体设备的处理器的物理内核;分配所述半导体设备的端口。 [0008] Preferably, the dispensing system resources for use by the operating system kernel and the real-time kernel comprises: allocating physical processor core of the semiconductor device; dispensing port of the semiconductor device.

[0009] 优选地,所述分配所述半导体设备的处理器的物理内核包括:设置供所述操作系统的内核使用的所述物理内核的个数;设置供所述实时内核使用的所述物理内核的个数。 [0009] Preferably, the dispensing processor of the physical core of the semiconductor device comprising: number setting for the operating system kernel using the physical core; providing real-time kernel for the use of the physical the number of cores.

[0010] 优选地,所述处理器的物理内核的个数为如下个数中的一种:2个;4个;以及8个。 [0010] Preferably, the number of physical processor core is the number of one of the following: 2; 4; and 8.

[0011] 优选地,所述端口包括:硬件端口;网络端口以及协议端口。 [0011] Preferably, said port comprising: a hardware port; a network port, and protocol port.

[0012] 优选地,所述划分控制软件以供所述操作系统的内核和所述实时内核控制包括:将所述控制软件划分为第一类进程以及第二类进程,其中,所述第一类进程由所述操作系统的内核控制,所述第二类进程由所述实时内核控制。 [0012] Preferably, the division control software for the operating system kernel and the real-time kernel controlling comprises: the control software is divided into a first and a second class of processes class of processes, wherein the first class of processes by the control of the operating system kernel, the second type of process control by the real-time kernel.

[0013] 优选地,所述第一类进程包括:非实时进程;弱实时进程;以及非重要通讯进程。 [0013] Preferably, the first type of process comprises: a non-real-time processes; weak real-time process; communication and non-critical processes.

[0014] 优选地,所述非实时进程包括如下进程的一种或多种:人机交互;或者系统管理。 [0014] Preferably, the non-real-time processes comprises one or more of the following processes: interactive; or system management.

[0015] 优选地,所述第二类进程包括:实时进程;以及重要通讯进程。 [0015] Preferably, the second class of processes comprising: a real-time process; and a process important communication.

[0016] 优选地,所述实时进程包括如下模块的一种或多种:硬件控制中数字信号的输入/输出;硬件控制中模拟信号的输入/输出;或者硬件中断。 [0016] Preferably, the real-time process module comprises one or more of: hardware control digital signal input / output; an input control hardware in the analog signal I / O; or a hardware interrupt.

[0017] 优选地,所述操作系统包括如下操作系统中的一种:Windows操作系统;或者Linux操作系统。 [0017] Preferably, the operating system comprises one of the following operating systems: Windows operating system; or the Linux operating system.

[0018] 根据本发明的又一个方面,还提供一种内嵌实时内核的操作系统,所述操作系统用于控制半导体工艺处理设备,其特征在于,所述实时内核通过硬件端口与所述半导体工艺处理设备相连接,所述硬件端口用于所述实时内核与所述半导体工艺处理设备之间的数据交互和信号转换。 [0018] According to another aspect of the present invention, there is provided an embedded real-time operating system kernel, the operating system for controlling the processing process of the semiconductor device, wherein the real-time kernel and the hardware port semiconductor process devices are connected, the port hardware for signal conversion and data exchange between the real-time kernel and the semiconductor process equipment.

[0019] 优选地,所述实时内核通过所述硬件端口控制所述半导体工艺处理设备中数字信号与模拟信号的输入/输出。 [0019] Preferably, the real-time kernel by said hardware input port of the semiconductor process control digital signal and analog signal processing device / output.

[0020] 优选地,所述硬件端口连接一定时装置,所述定时装置由所述实时内核控制,其用于对所述实时内核控制的进程进行定时。 [0020] Preferably, said hardware device port connected to a timing, said timing means controlled by the real-time kernel, which processes the real-time kernel for controlling the timing.

[0021] 本发明通过在控制半导体工艺处理设备的操作系统中内嵌一实时内核,并对系统资源进行分配,同时划分控制软件的不同进程以供操作系统的内核和实时内核使用和控制实现将操作系统能够部分实现实时操作系统的作用和优势,也就是避免外界因素对定时不准确的影响,实现更快的准确性定时以满足对半导体工艺设备的控制需求。 [0021] The present invention, by a real-time kernel in the embedded control process of the semiconductor processing apparatus operating system, and the allocation of system resources, while a different process division control software for real-time operating system kernel and the kernel and the control is realized part of the operating system can realize the role and benefits of real-time operating system, which is to avoid external factors influence the timing is not accurate, the accuracy of the timing faster to meet the demand for semiconductor process control equipment.

附图说明 BRIEF DESCRIPTION

[0022] 通过阅读参照以下附图对非限制性实施例所作的详细描述,本发明的其它特征、目的和优点将会变得更明显: [0022] By reading the following detailed description of non-limiting embodiments given with reference to the following figures, other features of the present invention, objects and advantages will become more apparent:

[0023] 图1示出根据基于现有操作系统的各情况下无线射频功率开启的定时误差示意图; [0023] Figure 1 shows a schematic diagram of a timing error based on the RF power is turned on in each of the existing operating system;

[0024] 图2示出根据本发明第一实施例的,一种在操作系统中内嵌实时内核的方法的流程图;以及 [0024] Figure 2 illustrates a flowchart, an embedded real-time operating system kernel in the method of the first embodiment of the present invention; and

[0025] 图3示出根据本发明第二实施例的,一种内嵌实时内核的操作系统的示意图。 [0025] Figure 3 shows a schematic view of a second embodiment of the present invention, an embedded real-time operating system kernel.

具体实施方式 Detailed ways

[0026] 通过阅读参照以下附图对非限制性实施例所作的详细描述,本发明的其它特征、目的和优点将会变得更明显: [0026] By reading the following detailed description of non-limiting embodiments given with reference to the following figures, other features of the present invention, objects and advantages will become more apparent:

[0027] 图2示出根据本发明第一实施例的,一种在操作系统中内嵌实时内核的方法的流程图。 [0027] Figure 2 illustrates a flowchart, an embedded real-time operating system kernel in the method of the first embodiment of the present invention. 上述操作系统用于控制半导体处理工艺设备。 Operating system for controlling the above-described processing of semiconductor process equipment. 具体地,本图示出了三个步骤。 In particular, the present illustrates three steps. 首先是步骤S101,在所述操作系统中内嵌一实时内核。 First, step S101, and embedded in a real-time kernel of the operating system. 步骤S102,分配系统资源以供所述操作系统的内核和所述实时内核使用。 Step S102, the allocation of system resources for the operating system kernel and the real-time kernel. 所述分配系统资源以供所述操作系统的内核和所述实时内核使用包括:分配所述半导体设备的处理器的物理内核。 The allocation of system resources for the operating system kernel and the real-time kernel comprises: allocating physical core of the semiconductor device processor. 具体地,本领域技术人员理解,现有的计算机中央处理器的物理内核有4个或者8个。 In particular, those skilled in the art understand, the physical core of the existing computer central processing unit 4 or 8. 在正常运作的过程中,通常有一般的物理内核没有被使用。 During normal operation, the general physical kernel usually not used. 因此,优选地,利用这些没有被原操作系统的内核使用的物理内核以供内嵌的实时内核使用。 Thus, preferably, these are not the original use of the operating system kernel physical core of real-time kernel for embedded use. 例如,中央处理器有8个物理内核时,在计算机正常运作时,有四个物理内核没有被使用,因此在分配系统资源时,将没有被使用的四个物理内核分配给实时内核使用。 For example, when the central processor has eight physical cores, during normal operation of the computer, there are four physical cores is not used, so in the allocation of system resources, allocated four physical cores will not be used for real-time kernel. 具体地,在分配所述半导体设备的处理器的物理内核时根据不同的需求对分配给原操作系统的内核以及实时内核的物理内核数进行设置。 Specifically, when the semiconductor device assignment processor to physically set the number of cores assigned to a physical cores original operating system kernel and the real-time kernel according to different needs. 首先设置供所述操作系统的内核使用的所述物理内核的个数。 The first set of physical core kernel of the operating system for the number. 之后设置供所述实时内核使用的所述物理内核的个数。 After setting the number of physical cores for use in real-time kernel. 设置过程并不仅限于上述顺序。 Setting process is not limited to this order. 例如,首先设置供所述实时内核使用的所述物理内核的个数。 For example, the first set for the number of the physical core of the real-time kernel. 之后设置供所述操作系统的内核使用的所述物理内核的个数。 The number of the physical core kernel of the operating system is provided for after. 具体地,本领域技术人员理解,当操作系统控制的半导体处理工艺设备对定时准确性要求比较高时,则分配给实时内核使用的中央处理器的物理内核的个数优选地,多于分配给原操作系统的内核使用的中央处理器的物理内核的个数。 In particular, those skilled in the art understand, when the semiconductor device operating system Process control requirements are relatively high accuracy timing is assigned to the physical core central processor a number of real-time kernel is preferably used, more than assigned the number of physical CPU core kernel of the operating system used in the original. 若操作系统控制的半导体处理工艺设备对定时准确性要求不高时,则分配给原操作系统的内核使用的物理内核的个数要多于分配给实时内核的物理内核的个数。 If the number of the semiconductor processing process device operating system controls the timing accuracy of less demanding, it is assigned to the physical original core kernel of the operating system kernel to be greater than the physical number assigned to real-time kernel. 另外,所述分配系统资源以供所述操作系统的内核和所述实时内核使用还包括:分配所述半导体设备的端口。 Further, the dispensing system resources for use by the operating system kernel and the real-time kernel further comprises: dispensing port of the semiconductor device. 优选地,所述端口包括:硬件端口、网络端口以及协议端口。 Preferably, said port comprising: a hardware port, a network port, and protocol port. 其中,硬件端口为操作系统所在计算机的数据接口。 Among them, the hardware data interface port for the computer's operating system resides. 数据接口包括,并行端口和串行端口。 It comprises a data interface, a parallel port and a serial port. 然后并行端口由于速度和兼容性方面较为落后,现在计算机中已经较少适用。 Since then parallel port speed and compatibility lagging behind, the computer now has been less applicable. 而现有的计算机大多数都有两个串行端口(Serial Port),优选地,在分配串行端口也就是串口时,使原操作系统的内核以及实时内核各使用一个串行端口。 Most of the existing computer has two serial ports (Serial Port), preferably, the allocation of the serial port is serial, to allow real-time operating system kernel and each kernel using a serial port. 现有的网络端口通常为以太网端口(以太网卡)。 Existing network port is usually an Ethernet port (Ethernet card). 以太网(Ethernet)指的是基带局域网规范,是当今现有局域网采用的最通用的通信协议标准。 Ethernet (Ethernet) refers to a baseband LAN specification, is the most common communication protocol standards used in today's existing LAN. 现有的计算机大多数都有两个以太网端口(Ethernet)。 Most existing computers have two Ethernet ports (Ethernet). 优选地,在分配以太网端口也就是以太网卡时,使原操作系统的内核以及实时内核各使用一个以太网端口。 Preferably, in the allocation of the Ethernet port is Ethernet card, the original operating system kernel and real-time kernel for each use an Ethernet port. 而协议端口根据提供服务类型的不同,协议端口分为两种,一种是TCP协议端口,一种是UDP协议端口。 The protocol port into two ports based on different service types, protocol - A protocol is TCP port, one is the UDP protocol port. TCP (Transmission Control Protocol)传输控制协议TCP是一种面向连接(连接导向)的、可靠的、基于字节流的传输层(Transport layer)通信协议。 TCP (Transmission Control Protocol) transport control protocol TCP is a connection-oriented (connection-oriented) reliable, based on the transport layer (Transport layer) byte stream communication protocol. UDP (UserDatagram Protocol)用户数据包协议是ISO参考模型中一种无连接的传输层协议,提供面向事务的简单不可靠信息传送服务。 UDP (UserDatagram Protocol) is the User Datagram Protocol transport layer in the ISO reference model for a non-connected, providing transaction-oriented messaging services simply unreliable. 对协议端口主要根据不同控制软件对于定时准确性的需求进行分配。 Protocol port allocation demand for the accuracy of the timing depending on the main control software. 步骤S103,划分控制软件以供所述操作系统的内核和所述实时内核控制。 Step S103, the division control software for the operating system kernel and the real-time kernel control. 所述划分控制软件以供所述操作系统的内核和所述实时内核控制包括:将所述控制软件划分为第一类进程以及第二类进程,其中,所述第一类进程由所述操作系统的内核控制,所述第二类进程由所述实时内核控制。 The division control software for the operating system kernel and the real-time kernel controlling comprises: the control software is divided into a first and a second class of processes class of processes, wherein the first class of processes by the operation core control system, the second class of processes controlled by the real-time kernel. 所述第一类进程包括:非实时进程;弱实时进程;以及非重要通讯进程。 The first type of process include: non-real-time process; weak real-time process; and non-critical communication processes. 所述非实时进程包括如下进程的一种或多种:人机交互;或者系统管理。 The non-real-time processes comprises one or more of the following processes: interactive; or system management. 相对应的,所述第二类进程包括:实时进程;以及重要通讯进程。 Correspondingly, the second type of process include: real-time process; and important communication process. 所述实时进程包括如下模块的一种或多种:硬件控制中数字信号的输入/输出;硬件控制中模拟信号的输入/输出;或者硬件中断。 The real-time process module comprises one or more of: hardware control signal in the digital input / output; an input control hardware in the analog signal I / O; or a hardware interrupt.

[0028] 图3示出根据本发明第二实施例的,一种内嵌实时内核的操作系统的示意图。 [0028] Figure 3 shows a schematic view of a second embodiment of the present invention, an embedded real-time operating system kernel. 具体地,本图示出了三个部分。 In particular, this figure shows three parts. 操作系统1、实时内核2以及硬件接卡口3。 Operating system 1, 2 real-time kernel and hardware interface card port 3. 所述操作系统I用于控制半导体工艺处理设备,所述实时内核2通过硬件接卡口3 (硬件端口)与所述半导体工艺处理设备相连接,所述硬件接卡口3 (硬件端口)用于所述实时内核2与所述半导体工艺处理设备之间的数据交互和信号转换。 The operating system process I for controlling the semiconductor processing apparatus, the real-time kernel 2 3 by a bayonet connection hardware (hardware ports) of the semiconductor process equipment is connected to the hardware interface card port 3 (hardware ports) with 2 in the real-time kernel and the data exchange between the signal converter and the semiconductor process equipment. 所述实时内核2通过所述硬件接卡口3 (硬件端口)控制所述半导体工艺处理设备中数字信号与模拟信号的输入/输出。 The real-time kernel 2 through the hardware interface 3 bayonet (port hardware) to control the semiconductor inputs / outputs digital and analog signals in process equipment. 所述硬件接卡口3 (硬件端口)连接一定时装置,所述定时装置由所述实时内核2控制,其用于对所述实时内核2控制的进行进行定时。 The hardware interface 3 bayonet (hardware ports) connected to a timing means, said timing means controlled by said real-time kernel 2, performs the second control for the real-time kernel timing. 具体地,硬件接卡口3 (硬件端口)包括两个以太网卡(以太网接口)和两个串行端口。 Specifically, the hardware interface card port 3 (hardware port) comprises two Ethernet card (Ethernet) and two serial ports. 如图3所示,分别将一个以太网卡(以太网接口)和一个串行端口分配给实时内核2,并将另一个以太网卡(以太网接口)和一个串行端口分配给原操作系统I使用。 3, respectively, an Ethernet card (Ethernet) and a serial port 2 is assigned to real-time kernel, and the other (Ethernet) port and a serial ethernet cards assigned to the original operating system I using . 更具体地,原操作系统控制非实时进程、弱实时进程以及非重要通讯进程。 More specifically, the original operating system, non-real-time process control, real-time process and weak non-critical communication processes. 其中,非实时进程、弱实时进程以及非重要通讯进程对定时准确性的需求较低,因此由原有的操作系统内核进行控制。 Among them, lower non-real-time processes, real-time process and weak non-critical communication process needs timing accuracy, and therefore control Some of the original operating system kernel. 实时内核控制实时进程以及重要通讯进程。 Real-time kernel real-time process control as well as an important communication process. 实时进程以及重要通讯进程对定时准确性的需求较高,因此由实时内核2进行控制。 Real-time process and process critical communications needs of high accuracy timing, and therefore controlled by real-time kernel 2. 所述实时进程包括如下模块的一种或多种:硬件控制中数字信号的输入/输出、硬件控制中模拟信号的输入/输出或者硬件中断。 The real-time process module comprises one or more of: hardware control digital signal input / output, analog hardware control input signal / output interrupt or hardware. 具体地,上述硬件控制也就是对半导体工艺处理设备的控制。 Specifically, the hardware control process is controlling the semiconductor processing apparatus. 在一个优选例中,该半导体工艺处理设备为一等离子体刻蚀装置,则实时内核2通过通过硬件接卡口3(硬件端口)与一等离子体刻蚀装置相连接,所述硬件接卡口3 (硬件端口)用于所述实时内核2与等离子体刻蚀装置之间的数据交互和信号转换。 In a preferred embodiment, the processing apparatus is a semiconductor processing plasma etching apparatus, the real-time kernel 2 is connected to a plasma etching apparatus by a bayonet connection 3 by hardware (hardware interface), the hardware interface card port 3 (hardware ports) and signal conversion for data exchange between the real-time kernel and a plasma etching apparatus 2. 所述实时内核2通过所述硬件接卡口3 (硬件端口)控制所述等离子体刻蚀装置中数字信号与模拟信号的输入/输出。 The real-time kernel 2 of the 3 hardware interface bayonet (port hardware) to control the plasma input / output digital signal and an etching apparatus by an analog signal. 所述硬件接卡口3 (硬件端口)连接一定时装置,所述定时装置由所述实时内核2控制,其用于对所述实时内核2控制的进行进行定时。 The hardware interface 3 bayonet (hardware ports) connected to a timing means, said timing means controlled by said real-time kernel 2, performs the second control for the real-time kernel timing. 具体地,所述实时内核2通过上述定时装置对等离子体刻蚀装置中还通过上述定时装置对无线射频功率源开关以及其他有定时需求的部分进行定时控制。 In particular, the real-time kernel timing means 2 via the plasma etching apparatus also controls the timing of the radio frequency power source and other parts of such switch timing requirements by the timing means. 同时,所述实时内核2通过与等离子体刻蚀装置之间的数据交互控制等离子体刻蚀装置中的电子能量。 Meanwhile, the electron energy interactive control data between the plasma etching apparatus and a plasma etching apparatus 2 via the real-time kernel. 等离子体密度以及反应物密度等。 The reaction was plasma density and density. 最终满足等离子体刻蚀装置的定时准确性需求,并实现半导体的精准刻蚀。 The accuracy of the timing requirements to meet the final plasma etching apparatus, and realize precise etching of a semiconductor.

[0029] 在一个优选例中,所述操作系统为Windows操作系统,则实时内核2内嵌于Windows操作系统I, Windows操作系统I用于控制半导体工艺处理设备。 [0029] In a preferred embodiment, the operating system is a Windows operating system, the real-time kernel 2 I embedded in the Windows operating system, the Windows operating system process I for controlling the semiconductor processing apparatus. 优选地,实时内核2拥有完善的进程/任务管理功能、调度机制以及时间管理功能。 Preferably, the real-time kernel 2 has improved the process / task management functions, scheduling mechanism, and time management. 实时内核2通过直接使用和操作中央处理器的物理内核完成实时进程/任务切换,以及对Windows操作系统的屏蔽和快速中断响应实现其强实时性。 2 real-time kernel is done by direct use and operation of the physical core central processor, real-time process / task switching, and a shield for the Windows operating system and fast interrupt response to achieve its strong real-time. 实时内核2与Windows操作系统基本处于相互独立的运行状态。 2 real-time kernel and the Windows operating system is basically in independent operation. 所述实时内核2通过硬件接卡口3 (硬件端口)与所述半导体工艺处理设备相连接,所述硬件接卡口3 (硬件端口)用于所述实时内核2与所述半导体工艺处理设备之间的数据交互和信号转换。 The real-time kernel 23 (hardware ports) connected to the semiconductor processing apparatus by hardware process bayonet connection, the bayonet connection 3 hardware (hardware port) 2 for the real-time kernel and the semiconductor process equipment and the data exchange between the signal conversion. 所述实时内核2通过所述硬件接卡口3 (硬件端口)控制所述半导体工艺处理设备中数字信号与模拟信号的输入/输出。 The real-time kernel 2 through the hardware interface 3 bayonet (port hardware) to control the semiconductor inputs / outputs digital and analog signals in process equipment. 所述硬件接卡口3 (硬件端口)连接一定时装置,所述定时装置由所述实时内核2控制,其用于对所述实时内核2控制的进行进行定时。 The hardware interface 3 bayonet (hardware ports) connected to a timing means, said timing means controlled by said real-time kernel 2, performs the second control for the real-time kernel timing. 优选地,该定时装置为一高精度高分辨率定时装置。 Preferably, the timing device is a high-resolution high-precision timing means. 该定时装置是实时系统实时性和稳定性的基础。 The timing means is a real-time basis real-time systems and stability. 具体地,硬件接卡口3 (硬件端口)包括两个以太网卡(以太网接口)和两个串行端口。 Specifically, the hardware interface card port 3 (hardware port) comprises two Ethernet card (Ethernet) and two serial ports. 如图3所示,分别将一个以太网卡(以太网接口)和一个串行端口分配给实时内核2,并将另一个以太网卡(以太网接口)和一个串行端口分配给Windows操作系统I使用。 3, respectively, an Ethernet card (Ethernet) and a serial port 2 is assigned to real-time kernel, and the other (Ethernet) port and a serial ethernet card assigned to use the Windows operating system I . 更具体地,Windows操作系统控制非实时进程、弱实时进程以及非重要通讯进程。 More specifically, Windows operating system, non-real-time process control, real-time process and weak non-critical communication processes. 其中,非实时进程、弱实时进程以及非重要通讯进程对定时准确性的需求较低,因此由Windows操作系统内核进行控制。 Among them, lower non-real-time processes, real-time process and weak non-critical communication process needs timing accuracy, and therefore controlled by the Windows operating system kernel. 所述非实时进程包括如下进程的一种或多种:人机交互或者系统管理。 The non-real-time processes include one or more of the following processes: human-computer interaction, or system administration. 例如,系统界面、文件管理以及参数管理等。 For example, the system interface, file management, and parameter management. 实时内核控制实时进程以及重要通讯进程。 Real-time kernel real-time process control as well as an important communication process. 实时进程以及重要通讯进程对定时准确性的需求较高,因此由实时内核2进行控制。 Real-time process and process critical communications needs of high accuracy timing, and therefore controlled by real-time kernel 2. 所述实时进程包括如下模块的一种或多种:硬件控制中数字信号的输入/输出、硬件控制中模拟信号的输入/输出或者硬件中断。 The real-time process module comprises one or more of: hardware control digital signal input / output, analog hardware control input signal / output interrupt or hardware. 具体地,上述硬件控制也就是对半导体工艺处理设备的控制。 Specifically, the hardware control process is controlling the semiconductor processing apparatus.

[0030] 根据上述实施例,通过windows操作系统中的不同时钟对内嵌实时内核的Windows操作系统以及没有内嵌实时内核的Windows操作系统进行定时准确性比较。 [0030] According to the above embodiment, the timing accuracy of the comparison of the real-time kernel embedded Windows operating system and the Windows operating system without real-time kernel built windows operating system by different clocks. 当使用Windows操作系统最快的时钟时,内嵌实时内核的Windows操作系统的定时的最大误差为47微妙。 When using the Windows operating system the fastest clock, embedded real-time kernel timing of the maximum error of the Windows operating system is 47 microseconds. 而没有内嵌实时内核的Windows操作系统的定时的最大误差为691微妙。 And no embedded real-time kernel of the Windows operating system, the timing of the maximum error of 691 microseconds. 当使用Windows操作系统的时钟CL0CK-1时,内嵌实时内核的Windows操作系统的定时的最大误差为54微妙。 When the clock CL0CK-1 when using the Windows operating system, an embedded real-time kernel of the Windows operating system, the maximum timing error of 54 microseconds. 而没有内嵌实时内核的Windows操作系统的定时的最大误差为5965微妙。 And no embedded real-time kernel of the Windows operating system, the timing of the maximum error is 5965 microseconds. 通过上述数据可以明确,内嵌实时内核的Windows操作系统相比没有内嵌实时内核的Windows操作系统能实现更精确定的定时。 Through the above data is clear, embedded real-time kernel of the Windows operating system no embedded real-time kernel compared to the Windows operating system allows more refined determine the timing.

[0031] 在一个变化例中,所述操作系统为Linux操作系统,则实时内核2内嵌于Linux操作系统1,Linux操作系统I用于控制半导体工艺处理设备。 [0031] In a variant embodiment, the operating system is a Linux operating system, the real-time kernel 2. 1 embedded in the Linux operating system, the Linux operating system process I for controlling the semiconductor processing apparatus. 其中,Linux内核由于POSIX实时扩展部分逐渐被添加进来,如P0SIX.1003.1b.引入了实时进程的概念,允许将一个进程的属性确定为实时进程。 Which, Linux kernel due to the POSIX real-time extensions gradually been added, such as P0SIX.1003.1b. Introduces the concept of real-time process, allowing the properties of a process to determine the real-time process. Linux区分实时进程和普通进程,并采用不同的调度策略。 Linux real-time process and to distinguish between ordinary processes, and the use of different scheduling strategies. 对实时进程,Linux提供两种简单的调度策略,即先来先服务调度和事件片轮转调度。 Real-time process, Linux offers two simple scheduling strategy, namely FCFS scheduling and event round-robin scheduling. 对普通进程,Linux采用类Unix的动态优先级调度,基本没有考虑实时应用所满足的时间约束。 Ordinary process, Linux dynamic priority scheduling class Unix, the basic real-time applications without considering the time constraints are met. 因此,Linux本身在实施支持方面已做的努力可以再粗粒度的软实时方面有一定的应用范围,但远不能满足硬实时应用。 Therefore, efforts Linux itself has been done in terms of implementation support may be soft real-time aspects of coarse-grained and then have a range of applications, but can not meet the hard real-time applications. 因此,本发明通过在Linux操作系统中内嵌一实时内核以实现Linux操作系统对于硬实时的支持。 Accordingly, the present invention is by a real-time kernel in the embedded Linux operating system, the Linux operating system to implement for hard real-time support. 优选地,该实时内核2拥有自己的根据优先级的调度算法。 Preferably, the core 2 has its own real time according to the priority scheduling algorithm. 所述实时内核2通过硬件接卡口3 (硬件端口)与所述半导体工艺处理设备相连接,所述硬件接卡口3 (硬件端口)用于所述实时内核2与所述半导体工艺处理设备之间的数据交互和信号转换。 The real-time kernel 23 (hardware ports) connected to the semiconductor processing apparatus by hardware process bayonet connection, the bayonet connection 3 hardware (hardware port) 2 for the real-time kernel and the semiconductor process equipment and the data exchange between the signal conversion. 所述实时内核2通过所述硬件接卡口3 (硬件端口)控制所述半导体工艺处理设备中数字信号与模拟信号的输入/输出。 The real-time kernel 2 through the hardware interface 3 bayonet (port hardware) to control the semiconductor inputs / outputs digital and analog signals in process equipment. 所述硬件接卡口3 (硬件端口)连接一定时装置,所述定时装置由所述实时内核2控制,其用于对所述实时内核2控制的进行进行定时。 The hardware interface 3 bayonet (hardware ports) connected to a timing means, said timing means controlled by said real-time kernel 2, performs the second control for the real-time kernel timing. 优选地,该定时装置为一高精度高分辨率定时装置。 Preferably, the timing device is a high-resolution high-precision timing means. 该定时装置是实时系统实时性和稳定性。 The timing means is a real real-time system and stability. 具体地,硬件接卡口3 (硬件端口)包括两个以太网卡(以太网接口)和两个串行端口。 Specifically, the hardware interface card port 3 (hardware port) comprises two Ethernet card (Ethernet) and two serial ports. 如图3所示,分别将一个以太网卡(以太网接口)和一个串行端口分配给实时内核2,并将另一个以太网卡(以太网接口)和一个串行端口分配给Linux操作系统I使用。 3, respectively, an Ethernet card (Ethernet) and a serial port 2 is assigned to real-time kernel, and the other Ethernet card (Ethernet) port and a serial I assigned to use the Linux operating system . 更具体地,Linux操作系统I控制非实时进程、弱实时进程以及非重要通讯进程。 More specifically, Linux operating system I non-real-time process control, real-time process and weak non-critical communication processes. 其中,非实时进程、弱实时进程以及非重要通讯进程对定时准确性的需求较低,因此由Linux操作系统I内核进行控制。 Among them, lower non-real-time processes, real-time process and weak non-critical communication process needs timing accuracy, and therefore controlled by the Linux operating system kernel I. 所述非实时进程包括如下进程的一种或多种:人机交互或者系统管理。 The non-real-time processes include one or more of the following processes: human-computer interaction, or system administration. 实时内核控制实时进程以及重要通讯进程。 Real-time kernel real-time process control as well as an important communication process. 实时进程以及重要通讯进程对定时准确性的需求较高,因此由实时内核2进行控制。 Real-time process and process critical communications needs of high accuracy timing, and therefore controlled by real-time kernel 2. 所述实时进程包括如下模块的一种或多种:硬件控制中数字信号的输入/输出、硬件控制中模拟信号的输入/输出或者硬件中断。 The real-time process module comprises one or more of: hardware control digital signal input / output, analog hardware control input signal / output interrupt or hardware. 具体地,上述硬件控制也就是对半导体工艺处理设备的控制。 Specifically, the hardware control process is controlling the semiconductor processing apparatus.

[0032] 以上对本发明的具体实施例进行了描述。 [0032] The foregoing specific embodiments of the invention have been described. 需要理解的是,本发明并不局限于上述特定实施方式,本领域技术人员可以在权利要求的范围内做出各种变形或修改,这并不影响本发明的实质内容。 Is to be understood that the present invention is not limited to the particular embodiments, those skilled in the art can make various changes and modifications within the scope of the appended claims, this does not affect the substance of the present invention.

Claims (14)

  1. 1.一种在操作系统中内嵌实时内核的方法,所述操作系统用于控制半导体工艺处理设备,其特征在于,包括: 在所述操作系统中内嵌一实时内核; 分配系统资源以供所述操作系统的内核和所述实时内核使用;以及划分控制软件以供所述操作系统的内核和所述实时内核控制。 1. A method for real-time embedded in the operating system kernel, the operating system for controlling the processing process of the semiconductor apparatus, comprising: a real-time kernel in the embedded operating system; allocate system resources for the operating system kernel and the real-time kernel; and dividing the control software for the operating system kernel and the real-time kernel control.
  2. 2.根据权利要求1所述的方法,其特征在于,所述分配系统资源以供所述操作系统的内核和所述实时内核使用包括: 分配所述半导体设备的处理器的物理内核; 分配所述半导体设备的端口。 2. The method according to claim 1, characterized in that the dispensing system resources for the operating system kernel and the real-time kernel comprising: dispensing said semiconductor device physics core processor; allocation port of said semiconductor device.
  3. 3.根据权利要求2所述的方法,其特征在于,所述分配所述半导体设备的处理器的物理内核包括: 设置供所述操作系统的内核使用的所述物理内核的个数; 设置供所述实时内核使用的所述物理内核的个数。 3. The method according to claim 2, characterized in that the allocation of physical processor core of the semiconductor device comprising: a setting for the number of the physical core of the operating system kernel; providing for the number of real-time kernel using the physical cores.
  4. 4.根据权利要求2所述的方法,其特征在于,所述处理器的物理内核的个数为如下个数中的一种: 2个; 4个;以及8个。 4. The method according to claim 2, wherein the number of the physical processor core is the number of one of the following: 2; 4; and 8.
  5. 5.根据权利要求2所述的方法,其特征在于,所述端口包括: 硬件端口; 网络端口;以及协议端口。 5. The method according to claim 2, characterized in that said port comprising: a hardware port; a network port; and protocol port.
  6. 6.根据权利要求1所述的方法,其特征在于,所述划分控制软件以供所述操作系统的内核和所述实时内核控制包括: 将所述控制软件划分为第一类进程以及第二类进程,其中,所述第一类进程由所述操作系统的内核控制,所述第二类进程由所述实时内核控制。 6. The method according to claim 1, wherein said division control software for the operating system kernel and the real-time kernel controlling comprises: the control software is divided into a first and a second class of processes class of processes, wherein the first class of processes by the control of the operating system kernel, the second type of process control by the real-time kernel.
  7. 7.根据权利要求6所述的方法,其特征在于,所述第一类进程包括: 非实时进程; 弱实时进程;以及非重要通讯进程。 7. The method according to claim 6, wherein the first type of process comprises: a non-real-time processes; weak real-time process; communication and non-critical processes.
  8. 8.根据权利要求7所述的方法,其特征在于,所述非实时进程包括如下进程的一种或多种: 人机交互;或者系统管理。 8. The method according to claim 7, wherein said non-real-time processes include one or more of the following processes: interactive; or system management.
  9. 9.根据权利要求6所述的方法,其特征在于,所述第二类进程包括: 实时进程;以及重要通讯进程。 9. The method according to claim 6, wherein said second class of processes comprising: a real-time process; and a process important communication.
  10. 10.根据权利要求9所述的方法,其特征在于,所述实时进程包括如下模块的一种或多种:硬件控制中数字信号的输入/输出; 硬件控制中模拟信号的输入/输出;或者硬件中断。 10. The method according to claim 9, wherein said real-time process module comprises one or more of: hardware control signal in the digital input / output; an input control hardware in the analog signal I / O; or hardware interrupt.
  11. 11.根据权利要求1所述的方法,其特征在于,所述操作系统包括如下操作系统中的一种: Windows操作系统;或者Linux操作系统。 11. The method according to claim 1, wherein said operating system comprises one of the following operating systems: Windows operating system; or the Linux operating system.
  12. 12.一种内嵌实时内核的操作系统,所述操作系统用于控制半导体工艺处理设备,其特征在于,所述实时内核通过硬件端口与所述半导体工艺处理设备相连接,所述硬件端口用于所述实时内核与所述半导体工艺处理设备之间的数据交互和信号转换。 A real-time embedded operating system kernel, the operating system for controlling the processing process of the semiconductor device, wherein the real-time kernel and hardware ports connected by the semiconductor process equipment, with the hardware ports signal conversion and data exchange between the real-time kernel in the semiconductor process equipment.
  13. 13.根据权利要求12所述的操作系统,其特征在于,所述实时内核通过所述硬件端口控制所述半导体工艺处理设备中数字信号与模拟信号的输入/输出。 13. The operating system as claimed in claim 12, wherein the real-time kernel by said hardware input port of the semiconductor process control digital signal and analog signal processing device / output.
  14. 14.根据权利要求12所述的操作系统,其特征在于,所述硬件端口连接一定时装置,所述定时装置由所述实时内核控制,其用于对所述实时内核控制的进程进行定时。 14. The operating system as claimed in claim 12, wherein said hardware means when a certain port, said timing means controlled by the real-time kernel, which processes the real-time kernel for controlling the timing.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1748203A (en) * 2002-12-12 2006-03-15 有限状态机实验室公司 Systems and methods for detecting a security breach in a computer system
CN101894045A (en) * 2010-06-18 2010-11-24 阳坚 Real-time Linux operating system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1748203A (en) * 2002-12-12 2006-03-15 有限状态机实验室公司 Systems and methods for detecting a security breach in a computer system
CN101894045A (en) * 2010-06-18 2010-11-24 阳坚 Real-time Linux operating system

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