CN104064429A - Mass spectrum ionization source - Google Patents

Mass spectrum ionization source Download PDF

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Publication number
CN104064429A
CN104064429A CN201410339881.XA CN201410339881A CN104064429A CN 104064429 A CN104064429 A CN 104064429A CN 201410339881 A CN201410339881 A CN 201410339881A CN 104064429 A CN104064429 A CN 104064429A
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mass spectrum
shower nozzle
electrode
sample
dielectric chamber
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CN104064429B (en
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程平
刘吉星
朱辉
董俊国
周振
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Kunshan Hexin Mass Spectrometry Technology Co ltd
Guangzhou Hexin Instrument Co Ltd
University of Shanghai for Science and Technology
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KUNSHAN HEXIN ZHIPU TECHNOLOGY CO LTD
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Abstract

The invention discloses a mass spectrum ionization source and belongs to the technical field of mass spectrum ion sources. The mass spectrum ionization source is designed in order to solve the problems that the detection range of an existing ion source ionization source is limited and ionization efficiency is low. The mass spectrum ionization source comprises a sample injection device, a repelling electrode and a dielectric barrier discharge device; liquid or gas samples enter a tee nozzle through a sample injection tube of the sample injection device, and the liquid samples with solvent removed are sprayed out from the lead-out end of the tee nozzle along with carrier gas or the gas samples are sprayed out from the lead-out end of the tee nozzle; reaction gas enters an insulation dielectric cavity through a gas guide tube of the dielectric barrier discharge device, and low-temperature plasma is generated under the action of a discharge electrode and sprayed out from the lead-out end of the insulation dielectric cavity; the low-temperature plasma and the liquid or gas samples converge on a mass spectrum opening in a backflow mode, ionized sample molecules are formed, and the molecules converge to the mass spectrum opening under the action of the repelling electrode. According to the mass spectrum ionization source, not only is the detection range of the ionization source widened, but also the ionization efficiency and the detection sensitivity of an instrument are improved.

Description

A kind of mass spectrum ionization source
Technical field
The present invention relates to a kind of mass ion source, relate in particular to a kind of mass spectrum ionization source that is applicable to analyze liquid or gaseous sample.
Background technology
Mass spectrography is one of the sensitiveest known and analytical method of having wide range of applications, and the mass spectrometer that the method is used is made up of ion source and mass analyzer two parts.
Wherein, ion source is the key technology of sample ions.Electric spray ion source (ESI) is as a kind of common atmospheric pressure mass spectrum ioning method, and electron spray using electric field produces Charged Droplet, by ion evaporation, analyte ions is sent into mass spectrum and detects.Ionization completes under liquid state, this ionization technique is suitable for the ionization of large biological molecule material, but ionizing efficiency is lower, also lower to the endurance of non-volatile salt, and for organochlorine compound and gas molecule sample, ESI cannot make sample effectively ionize.
Development plasma technique is for many years widely used in the numerous areas such as ozone generation, environmental protection, textile surface processing; start to be in recent years applied to sample ions field; as glow discharge (glowdischarge; GD); dielectric barrier discharge (dielectric barrier discharge; DBD), low temperature plasma ion source (low-temperature plasma source, LTP).Glow discharge ion unit features simple structure, operating cost is lower, but needs certain vacuum degree, causes the design complexity of instrument.The disclosed dielectric barrier discharge ion source structure of Chinese patent 2006100115481 is simple, gas flow rate is low, pollute less and cost low, under atmospheric pressure, can complete direct desorption and the ionization of solid sample, but its electrode is respectively in medium both sides, and the shape of sample, size and thickness are subject to the restriction of electrode and dielectric space size.The disclosed low temperature plasma ionization source of Chinese patent 2008102270160 improves Chinese patent 2006100115481, but the solution that is mainly applicable to solid organic matters, fluid organic material or contains fluid organic material, ionization source is single, and its detection range is restricted.
Summary of the invention
The object of the invention is to propose a kind of ionization source detection range wide, Ionization Efficiency is high, the mass spectrum ionization source that instrument detection sensitivity is high.
For reaching this object, the present invention by the following technical solutions:
The invention provides a kind of mass spectrum ionization source, comprise sampling device, repulsion electrode and dielectric barrier discharge device;
The threeway shower nozzle that described sampling device comprises sample feeding pipe and is communicated with described sample feeding pipe, liquid or gaseous sample enter in described threeway shower nozzle by described sample feeding pipe, and the fluid sample after desolventizing is sprayed by the exit of described threeway shower nozzle with carrier gas or gaseous sample;
Described threeway shower nozzle is the cavity body structure that exit is provided with inside contraction opening;
Described dielectric barrier discharge device comprises dielectric chamber, sparking electrode, wireway, reacting gas enters in described dielectric chamber by described wireway, under the discharge process of described sparking electrode, produce low temperature plasma, and sprayed by the exit in described dielectric chamber;
Described dielectric chamber is that one end exit is provided with inside contraction opening, the cavity body structure of other end sealing;
Described repulsion electrode is positioned at the front of the mass spectrum mouth of mass spectrometer mass analyzer;
The liquid of described low temperature plasma and ejection or gaseous sample converge in described mass spectrum mouth place adverse current, form the sample molecule of ionization, and the sample molecule of described ionization converges to described mass spectrum mouth under the effect of described repulsion electrode.
Preferably, described sample feeding pipe comprises Liquid sample introduction pipe, breather pipe and heater;
Described Liquid sample introduction pipe box is located in described threeway shower nozzle, and one end of described Liquid sample introduction pipe stretches out the liquid leading-in end of described threeway shower nozzle, and the other end is positioned at described threeway shower nozzle;
Between the inwall of the outer wall of described Liquid sample introduction pipe and described threeway shower nozzle, form sheath gas-bearing formation;
One end of described breather pipe is stretched in described threeway shower nozzle, and is connected with described sheath gas-bearing formation, and the other end stretches out the gas leading-in end of described threeway shower nozzle, and described breather pipe is used for passing into carrier gas or gaseous sample;
Described heater is coated on outside described threeway shower nozzle, for heating liquid sample desolvation.
Preferably, the liquid leading-in end of described threeway shower nozzle and stretch out between the described Liquid sample introduction pipe of described threeway shower nozzle liquid leading-in end Liquid sample introduction seal of tube part is set;
The gas leading-in end of described threeway shower nozzle and stretch out between the described breather pipe of described threeway shower nozzle gas leading-in end breather pipe seal is set.
Preferably, described sparking electrode comprises interior electrode and external electrode;
Described interior electrode is stick electrode or hollow tubular electrode, it is sheathed in described dielectric chamber, one end of described interior electrode is connected with one end of power supply, and the other end of described interior electrode is positioned at described dielectric chamber, and with the exit port in described dielectric chamber at a distance of 3-10mm;
Described external electrode arranges around described dielectric cavity outer wall, the periphery coated insulation medium of described external electrode, described external electrode is connected with the other end of described power supply, near described external electrode one end of described dielectric chamber exit and the exit port in described dielectric chamber 2-5mm apart.
Preferably, the other end in described dielectric chamber seals by sealing device, is provided with described wireway on described sealing device;
One end of described wireway is stretched in described sealing device, and is connected with the one end in described dielectric chamber, and the other end stretches out described sealing device, and described wireway is used for passing into described reacting gas.
Preferably, the exit port in described dielectric chamber and described mass spectrum interruption-forming angle are 90-135 °, and the exit port in described dielectric chamber and described mass spectrum mouth are at a distance of 3-5mm;
The exit port of described threeway shower nozzle and described mass spectrum mouth are at a distance of 3-5mm;
The exit port in the exit port of described threeway shower nozzle and described dielectric chamber on same straight line or both form angle 0-45 °, and both are at a distance of 5-10mm;
Described repulsion electrode and described mass spectrum mouth are at a distance of 6-10mm.
Preferably, described dielectric chamber is formed by quartz glass or ceramic making.
Preferably, the internal diameter in described dielectric chamber is 0-3mm, and length is 50-120mm.
Preferably, described power supply is high-voltage radio-frequency power supply, and frequency is 0.5-500KHz, and crest voltage is 220-80000V, and operating power is 2-50W.
Preferably, described repulsion electrode adopts sheet metal as electrode.
Beneficial effect of the present invention is:
(1) the invention provides a kind of mass spectrum ionization source, its sampling device adopts threeway shower nozzle, not only can be for analyzing liquid sample, and all right analytical gas sample, has effectively expanded the ionogenic scope of application.
Liquid or gaseous sample enter in threeway shower nozzle by the sample feeding pipe of sampling device, and the fluid sample after desolventizing is sprayed by the exit of threeway shower nozzle with carrier gas or gaseous sample; And reacting gas enters in dielectric chamber by the wireway of dielectric barrier discharge device, under the discharge process of sparking electrode, produce low temperature plasma, and sprayed by the exit in dielectric chamber; The liquid of low temperature plasma and ejection or gaseous sample converge in mass spectrum mouth place adverse current, form the sample molecule of ionization, the sample molecule of ionization converges to mass spectrum mouth under the voltage effect of repulsion electrode, play the effect of ion selectivity, effectively strengthen the sample size of sample ions, improve Ionization Efficiency and instrument detection sensitivity, provide possibility for further expanding plasma technique in the range of application of field of mass spectrometry.
(2), in the time of fluid sample sample introduction, can effectively remove the solvent in fluid sample by heater.
(3) the exit port in dielectric chamber and mass spectrum interruption-forming angle are 90-135 °, and the exit port in dielectric chamber and mass spectrum mouth are at a distance of 3-5mm; The exit port of threeway shower nozzle and mass spectrum mouth are at a distance of 3-5mm; The exit port of threeway shower nozzle and the exit port in dielectric chamber on same straight line or both form angle 0-45 °, and both are at a distance of 5-10mm; Repulsion electrode and described mass spectrum mouth are at a distance of 6-10mm.Like this, by the sample of exit ejection and the low temperature plasma stream counter current contacting of the exit ejection by dielectric chamber of threeway shower nozzle, increased the time that sample contacts with plasma, sample ionization is abundant.
(4) dielectric chamber is to be formed by quartz glass or ceramic making, not only has good heat-proof quality, also has good insulation property, and makes handling ease, low price.
(5) repulsion electrode adopts sheet metal to make electrode, by apply certain direct voltage on repulsion electrode, makes to form certain pressure drop between repulsion electrode and mass spectrum mouth, has improved the sample size of charged sample.
Brief description of the drawings
Fig. 1 is the structural representation of the mass spectrum ionization source that provides of the embodiment of the present invention one;
Fig. 2 is the structural representation of the sampling device that provides of the embodiment of the present invention one;
Fig. 3 is the structural representation of the dielectric barrier discharge device that provides of the embodiment of the present invention one;
Fig. 4 is the structural representation of the mass spectrum ionization source that provides of the embodiment of the present invention two.
In figure, 1, sampling device; 11, threeway shower nozzle; 12, Liquid sample introduction pipe; 13, breather pipe; 14, heater; 15, Liquid sample introduction seal of tube part; 16, breather pipe seal; 2, repulsion electrode; 3, dielectric barrier discharge device; 31, dielectric chamber; 32, sparking electrode; 33, wireway; 321, interior electrode; 322, external electrode; 34, power supply; 35, dielectric; 36, sealing device; 4, mass spectrum mouth; 5, sample converges ionized region.
Embodiment
Further illustrate technical scheme of the present invention below in conjunction with accompanying drawing and by embodiment.
Embodiment mono-:
The present embodiment provides a kind of mass spectrum ionization source, and as shown in Figure 1-Figure 3, it comprises sampling device 1, repulsion electrode 2 and a dielectric barrier discharge device 3 to the structure of this mass spectrum ionization source.Repulsion electrode 2 is positioned at the front of the mass spectrum mouth 4 of mass spectrometer mass analyzer, and repulsion electrode 2 at a distance of 10mm, applies the positive voltage of 500V with mass spectrum mouth 4 on repulsion electrode 2.Repulsion electrode 2 adopts sheet metal as electrode, by apply certain direct voltage on repulsion electrode 2, makes to form certain pressure drop between repulsion electrode 2 and mass spectrum mouth 4, has improved the sample size of charged sample.
As shown in Figure 2, the threeway shower nozzle 11 that sampling device 1 comprises sample feeding pipe and is communicated with sample feeding pipe, exit port and the mass spectrum mouth 4 of threeway shower nozzle 11 are orthogonal, and it is 90 ° that two-port forms angle, and two-port is at a distance of 5mm.
Wherein, sample feeding pipe comprises Liquid sample introduction pipe 12, breather pipe 13 and heater 14.The cavity body structure of threeway shower nozzle 11 inside contraction opening for exit is provided with.Liquid sample introduction pipe 12 is sheathed in threeway shower nozzle 11, and one end of Liquid sample introduction pipe 12 stretches out the liquid leading-in end of threeway shower nozzle 11, and the other end is positioned at threeway shower nozzle 11.Between the inwall of the outer wall of Liquid sample introduction pipe 12 and threeway shower nozzle 11, form sheath gas-bearing formation, one end of breather pipe 13 is stretched in threeway shower nozzle 11, and be connected with sheath gas-bearing formation, the other end stretches out the gas leading-in end of threeway shower nozzle 11, and breather pipe 13 is for passing into carrier gas or gaseous sample.The liquid leading-in end of threeway shower nozzle 11 and stretch out between the Liquid sample introduction pipe 12 of threeway shower nozzle 11 liquid leading-in ends Liquid sample introduction seal of tube part 15 is set, in the present embodiment, Liquid sample introduction pipe 12 is preferably capillary, and Liquid sample introduction seal of tube part 15 is capillary seal spiral shell head.The gas leading-in end of threeway shower nozzle 11 and stretch out between the breather pipe 13 of threeway shower nozzle 11 gas leading-in ends breather pipe seal 16 is set, in the present embodiment, breather pipe seal 16 is breather pipe sealing spiral shell head.Heater 14 is coated on outside threeway shower nozzle 11, for heating liquid sample desolvation.
In the time that the sample of analyzing is gaseous sample, gaseous sample is directly incorporated into the sheath gas-bearing formation of threeway shower nozzle 11 by breather pipe 13, in the exit ejection of threeway shower nozzle 11.In the time that the sample of analyzing is fluid sample, fluid sample is passed in threeway shower nozzle 11 by capillary, the sheath gas-bearing formation of threeway shower nozzle 11 will be incorporated into as the nitrogen of carrier gas by breather pipe 13 simultaneously, fluid sample is heated to 1500 DEG C through heater 14, remove the exit ejection at threeway shower nozzle 11 together with nitrogen after solvent contained in fluid sample, and converge ionized region 5 at sample and form spraying.Heater 14 temperature are controlled, can set different heating-up temperatures according to different fluid samples by attemperating unit.
As shown in Figure 3, dielectric barrier discharge device 3 comprises dielectric chamber 31, sparking electrode 32, wireway 33 and power supply 34.Dielectric chamber 31 is formed by quartz glass or ceramic making, not only has good heat-proof quality, also has good insulation property, and makes handling ease, low price.The internal diameter in dielectric chamber 31 is 1.5mm, and length is 80mm.Exit port and the mass spectrum mouth 4 in dielectric chamber 31 are orthogonal, and it is 90 ° that two-port forms angle, and two-port is at a distance of 5mm; The exit port of threeway shower nozzle 11 and the exit port in dielectric chamber 31 are on same straight line, and both are at a distance of 10mm.31Wei one end, dielectric chamber exit is provided with inside contraction opening, the cavity body structure of other end sealing.The other end in dielectric chamber 31 seals by sealing device 36, is provided with wireway 33 on sealing device 36, and one end of wireway 33 is stretched in sealing device 36, and is connected with the one end in dielectric chamber 31, and the other end stretches out sealing device 36.
Sparking electrode 32 comprises interior electrode 321 and external electrode 322, and external electrode 322 is annular electrode, and it is made material and adopts copper strips, and thickness is 1mm, and length is 15mm.The making material of interior electrode 321 adopts copper wire, diameter 1mm, and length 100mm, and interior electrode 321 is stick electrode or hollow tubular electrode, in the time that interior electrode 321 is hollow tubular electrode, can in hollow pipe, pass into functional gas hydrogen or steam etc.Interior electrode 321 is sheathed in dielectric chamber 31, and one end of interior electrode 321 is connected with one end of power supply 34, and the other end of interior electrode 321 is positioned at dielectric chamber 31, and with the exit port in dielectric chamber 31 at a distance of 3mm.External electrode 322 is around the 31 outer wall settings of dielectric chamber, the periphery coated insulation medium 35 of external electrode 322, external electrode 322 is connected with the other end of power supply 34, near external electrode 322 one end of dielectric chamber 31 exits and the exit port in dielectric chamber 31 3mm apart.Power supply 34 is powered for interior electrode 321 and external electrode 322, and power supply 34 is high-voltage radio-frequency power supply, and frequency is 10KHz, and crest voltage is 500V, and operating power is 10W.
Mobile reacting gas is introduced in dielectric chamber 31 by the wireway 33 on sealing device 36 as helium, flow velocity is 400ML/min, air pressure in chamber is atmospheric pressure, in the time of region of discharge that helium forms through interior electrode 321 and external electrode 322, the discharge voltage applying on sparking electrode makes gas ionization, produce helium low temperature plasma, this plasma is under the drive of air flow, in the openend ejection in dielectric chamber 31, formation low temperature plasma stream, converges ionized region 5 counter current contacting with sample at sample.
Sample converges the counter current contacting district of the sample that ionized region 5 is sampling device 1 and the low temperature plasma stream formation that dielectric barrier discharge device 3 produces, ion generation ion molecule reaction in this region in sample molecule and plasma, ionization produces the sample ions of positively charged, counter current contacting has increased the time that sample contacts with plasma, sample ionization is abundant, has effectively improved the ionizing efficiency of sample molecule.Now, repulsion electrode 2 applies positive voltage, between repulsion electrode 2 and mass spectrum mouth 4, forms voltage difference, under the effect of voltage difference, charged sample ions is converged to mass spectrum mouth 4, not only improved the sample size of charged sample molecule, and improved the detection sensitivity of mass spectrometer.
Embodiment bis-:
As shown in Figure 4, the present embodiment provides a kind of mass spectrum ionization source, the structure of this mass spectrum ionization source is substantially similar to the structure of embodiment mono-, it comprises sampling device 1, repulsion electrode 2 and dielectric barrier discharge device 3, each structure of sampling device 1, repulsion electrode 2 and dielectric barrier discharge device 3 and the structural similarity of embodiment mono-corresponding parts, repeat no more.
Difference part is: it is 120 ° that the dielectric chamber 31 exit ports of dielectric barrier discharge device 3 and mass spectrum mouth 4 form angle, and two-port is at a distance of 5mm; It is 150 ° that the threeway shower nozzle 11 exit ports of sampling device 1 and the exit port in dielectric chamber 31 form angle, and both are at a distance of 10mm.There is variation in the position that is dielectric chamber 3, in like manner, the liquid of low temperature plasma and ejection or gaseous sample converge ionized region 5 adverse currents at sample and converge, form the sample molecule of ionization, the sample molecule of ionization converges to mass spectrum mouth under the voltage effect of repulsion electrode 2, play the effect of ion selectivity, effectively strengthen the sample size of sample ions, improve Ionization Efficiency and instrument detection sensitivity, provide possibility for further expanding plasma technique in the range of application of field of mass spectrometry.
In the present invention, the exit port in dielectric chamber and mass spectrum interruption-forming angle are not limited to above-mentioned situation, can be controlled within the scope of 90-135 °.In like manner, the exit port in dielectric chamber and mass spectrum mouth can be controlled in the scope of 3-5mm apart; The exit port of threeway shower nozzle and mass spectrum mouth can be controlled in the scope of 3-5mm apart; The exit port of threeway shower nozzle and the exit port in dielectric chamber can be on same straight line or both form angle 135-180 °, and both can be controlled in the scope of 5-10mm apart; Repulsion electrode and mass spectrum mouth can be controlled in the scope of 6-10mm apart.
In addition, the internal diameter in dielectric chamber can be controlled in the scope of 0-3mm, and length is controlled at the scope of 50-120mm.The frequency of power supply can be controlled in the scope of 0.5-500KHz, and crest voltage can be controlled in the scope of 220-80000V, and operating power is controlled at the scope of 2-50W.Interior electrode one end of close dielectric chamber exit and the exit port in dielectric chamber can be controlled in the scope of 3-10mm apart; External electrode one end of close dielectric chamber exit and the exit port in dielectric chamber can be controlled in the scope of 2-5mm apart.
The quantity of repulsion electrode is not limited to 1, can also be 1-10 not etc., its voltage can allow the scope at-1000V-1000V; When the voltage applying as-500V, under the effect of repulsion electrode and mass spectrum mouth voltage difference, electronegative sample ions is converged to mass spectrum mouth, effectively improve the sample size of charged sample, improve the sensitivity of instrument.
Know-why of the present invention has below been described in conjunction with specific embodiments.These are described is in order to explain principle of the present invention, and can not be interpreted as by any way limiting the scope of the invention.Based on explanation herein, those skilled in the art do not need to pay creative work can associate other embodiment of the present invention, within these modes all will fall into protection scope of the present invention.

Claims (10)

1. a mass spectrum ionization source, is characterized in that: comprise sampling device (1), repulsion electrode (2) and dielectric barrier discharge device (3);
The threeway shower nozzle (11) that described sampling device (1) comprises sample feeding pipe and is communicated with described sample feeding pipe, liquid or gaseous sample enter in described threeway shower nozzle (11) by described sample feeding pipe, and the fluid sample after desolventizing is sprayed by the exit of described threeway shower nozzle (11) with carrier gas or gaseous sample;
The cavity body structure of described threeway shower nozzle (11) inside contraction opening for exit is provided with;
Described dielectric barrier discharge device (3) comprises dielectric chamber (31), sparking electrode (32), wireway (33), reacting gas enters in described dielectric chamber (31) by described wireway (33), under the discharge process of described sparking electrode (32), produce low temperature plasma, and sprayed by the exit in described dielectric chamber (31);
Described dielectric chamber (31) is inside contraction opening for one end exit is provided with, the cavity body structure of other end sealing;
Described repulsion electrode (2) is positioned at the front of the mass spectrum mouth (4) of mass spectrometer mass analyzer;
The liquid of described low temperature plasma and ejection or gaseous sample are located adverse current at described mass spectrum mouth (4) and are converged, the sample molecule that forms ionization, the sample molecule of described ionization converges to described mass spectrum mouth (4) under the effect of described repulsion electrode (2).
2. a kind of mass spectrum ionization source according to claim 1, is characterized in that: described sample feeding pipe comprises Liquid sample introduction pipe (12), breather pipe (13) and heater (14);
Described Liquid sample introduction pipe (12) is sheathed in described threeway shower nozzle (11), and the liquid leading-in end of described threeway shower nozzle (11) is stretched out in one end of described Liquid sample introduction pipe (12), the other end is positioned at described threeway shower nozzle (11);
Between the inwall of the outer wall of described Liquid sample introduction pipe (12) and described threeway shower nozzle (11), form sheath gas-bearing formation;
One end of described breather pipe (13) is stretched in described threeway shower nozzle (11), and be connected with described sheath gas-bearing formation, the other end stretches out the gas leading-in end of described threeway shower nozzle (11), and described breather pipe (13) is for passing into carrier gas or gaseous sample;
Described heater (14) is coated on outside described threeway shower nozzle (11), for heating liquid sample desolvation.
3. a kind of mass spectrum ionization source according to claim 2, is characterized in that: the liquid leading-in end of described threeway shower nozzle (11) and stretch out between the described Liquid sample introduction pipe (12) of described threeway shower nozzle (11) liquid leading-in end Liquid sample introduction seal of tube part (15) is set;
The gas leading-in end of described threeway shower nozzle (11) and stretch out between the described breather pipe (13) of described threeway shower nozzle (11) gas leading-in end breather pipe seal (16) is set.
4. according to a kind of mass spectrum ionization source described in claim 1-3 any one, it is characterized in that: described sparking electrode (32) comprises interior electrode (321) and external electrode (322);
Described interior electrode (321) is stick electrode or hollow tubular electrode, it is sheathed in described dielectric chamber (31), one end of described interior electrode (321) is connected with one end of power supply (34), the other end of described interior electrode (321) is positioned at described dielectric chamber (31), and with the exit port in described dielectric chamber (31) at a distance of 3-10mm;
Described external electrode (322) is around described dielectric chamber (31) outer wall setting, the periphery coated insulation medium (35) of described external electrode (322), described external electrode (322) is connected with the other end of described power supply (34), near described external electrode (322) one end of described dielectric chamber (31) exit and the exit port in described dielectric chamber (31) 2-5mm apart.
5. according to a kind of mass spectrum ionization source described in claim 1-3 any one, it is characterized in that: the other end in described dielectric chamber (31), by sealing device (36) sealing, is provided with described wireway (33) on described sealing device (36);
One end of described wireway (33) is stretched in described sealing device (36), and be connected with the one end in described dielectric chamber (31), the other end stretches out described sealing device (36), and described wireway (33) is for passing into described reacting gas.
6. according to a kind of mass spectrum ionization source described in claim 1-3 any one, it is characterized in that: it is 90-135 ° that the exit port in described dielectric chamber (31) and described mass spectrum mouth (4) form angle, the exit port in described dielectric chamber (31) and described mass spectrum mouth (4) are at a distance of 3-5mm;
The exit port of described threeway shower nozzle (11) and described mass spectrum mouth (4) are at a distance of 3-5mm;
The exit port in the exit port of described threeway shower nozzle (11) and described dielectric chamber (31) on same straight line or both form angle 0-45 °, and both are at a distance of 5-10mm;
Described repulsion electrode (2) and described mass spectrum mouth (4) 6-10mm apart.
7. a kind of mass spectrum ionization source according to claim 1, is characterized in that: described dielectric chamber (31) is formed by quartz glass or ceramic making.
8. according to a kind of mass spectrum ionization source described in claim 1 or 7, it is characterized in that: the internal diameter in described dielectric chamber (31) is 0-3mm, length is 50-120mm.
9. a kind of mass spectrum ionization source according to claim 4, is characterized in that: described power supply (34) is high-voltage radio-frequency power supply, and frequency is 0.5-500KHz, and crest voltage is 220-80000V, and operating power is 2-50W.
10. a kind of mass spectrum ionization source according to claim 1, is characterized in that: described repulsion electrode (2) adopts sheet metal as electrode.
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