CN104034740A - Charged particle photographic apparatus based on energy loss and focused imaging - Google Patents
Charged particle photographic apparatus based on energy loss and focused imaging Download PDFInfo
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Abstract
A charged particle photographic apparatus based on energy loss and focused imaging comprises a beam transmission line and an optical imaging system, and is characterized in that the beam transmission line is divided into a front half segment and a rear half segment which are distributed in an axial symmetrical way; the optical imaging system is disposed at the end of the beam transmission line; the transmission matrix of the front half segment is a six-order matrix A, the transmission matrix A satisfies the following chromatic dispersion elimination conditions: A[12]=0, A[26]=0, A[21]=0, A[34]=0 and A[43]=0, and each first subscript and each second subscript respectively represent the row and the column of a corresponding element. The beneficial effects comprise that by utilizing deflection magnet and quadrupolar magnet for forming an achromatic imaging system, the function of focused imaging is provided, and also by arranging an energy collimator on an energy discrimination plane, the contrast ratio of an image is formed through the energy loss of charged particles.
Description
Technical field
The present invention relates to charged particle camera technique, particularly, relate to a kind of charged particle photographic means based on energy loss focal imaging.
Background technology
It is a kind of in-duction linac technology that charged particle is taken a picture.Utilize accurate monoenergetic charged particle beam to pass sample to obtain image, and then obtain by density, the space etc. of product sample interior need the information of paying close attention in the same old way.
Charged particle is taken a picture can two kinds of forms, and the first is direct in-duction linac, and the second is the in-duction linac that adopts electromagnetic lens to focus on.Adopt condenser lens can improve the resolution of image, the present invention only relates to the second photographic means.
Focusing on electromagnetic lens also has two kinds of forms, and the first is axially symmetric structure, and the second is nonaxisymmetric structure.The focussing force of axially symmetric structure electromagnetic lens is more weak, can only use the particle that energy is lower, and thinner sample is taken a picture.The focusing electromagnetic lens of nonaxisymmetric structure can form much higher focussing force, thereby is applicable to the photograph of thick sample.The present invention only relates to the condenser lens of nonaxisymmetric structure.
When charged particle moves in sample, being subject to the effect of sample material atom, can forming three kinds of effects, is respectively that number of particles reduces, particle scattered through angles, particle energy loss.In the time taking a picture, these effects all can impact the image obtaining, and have namely carried the information of sample interior.
In at present conventional nonaxisymmetrical focusing magnetic lens, can utilize information that number of particles reduces to form the contrast of image, also can utilize the information of particle scattered through angles to form the contrast of image.But for the information of particle energy loss, not only can not be used, be the principal element that forms image blur on the contrary, has a strong impact on the quality of obtained image.
Summary of the invention
Can not utilize particle energy loss for overcoming existing charged particle imaging technique, cause image blurringly, the technological deficiency that image quality is poor, the invention provides a kind of charged particle photographic means based on energy loss focal imaging.
Charged particle photographic means based on energy loss focal imaging of the present invention, comprise beam-flow transmission line and optical imaging system, it is characterized in that, beam-flow transmission line is divided into first half section and the second half section that rotational symmetry distributes, and described optical imaging system is positioned at beam-flow transmission line end; Described first half section is by the second focusing section that comprises energy collimating apparatus, be positioned at forward and backward the first focusing section and the 3rd of the second focusing section and focus on section composition, described first focus on section and second focus on section between, second focus on section and the 3rd focus on section between be respectively arranged with the first deflection magnet and the second deflection magnet, the transmission matrix of described first half section is six rank matrix A:
Transmission matrix A meets dispersion conditions to release: A
12=0, A
26=0, A
21=0, A
34=0, A
43=0; Forward and backward subscript represents respectively the row, column at this element place.
Concrete, make transmission matrix A meet dispersion conditions to release by quadrupole electromagnet being set in each focusing section.
Concrete, described energy collimating apparatus is made up of two parallel metal sheets.
Concrete, described optical imaging system is made up of opto-electronic conversion screen and CCD camera
The invention has the beneficial effects as follows: utilize deflection magnet and quadrupole electromagnet composition de-dispersion imaging system, formed the function of focal imaging, energy collimating apparatus is set simultaneously in energy discrimination plane, form the contrast of image by the energy loss of charged particle.
Brief description of the drawings
Fig. 1 is a kind of embodiment schematic diagram of charged particle photographic means of the present invention;
Fig. 2 is the structural representation of energy collimating apparatus of the present invention;
Fig. 3 is classical De-dispersion structural representation;
Fig. 4 be in 35Mev Proton-Induced Reactions embodiment standard energy of the present invention (being 35MeV) situation particle in the distribution situation of energy collimator position;
Fig. 5 be 35Mev Proton-Induced Reactions embodiment energy of the present invention while thering is 2% deviation particle in the distribution situation of energy collimator position;
Mark and corresponding parts title in accompanying drawing: 1-deflection magnet, 2-defocuses quadrupole electromagnet, 3-focusing quadrupole magnet, 4-first focuses on section, 5-second focuses on section, and 6-the 3rd focuses on section, the geometirc symmetry axis that 7-is forward and backward half section, 8-energy collimating apparatus, 9-charged particle electron gun, 10-is by product in the same old way, 11-electric light conversion screen, 12-CCD camera, 13-particle transmission locus.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the present invention is done to detailed description further, but embodiments of the present invention are not limited to this.
Charged particle photographic means based on energy loss focal imaging of the present invention, comprises electronic imaging system, it is characterized in that, also comprises into first half section and second half section that rotational symmetry distributes, and described electronic imaging system is positioned at second half section end; Described first half section is by the second focusing section that comprises energy collimating apparatus, be positioned at forward and backward the first focusing section and the 3rd of the second focusing section and focus on section composition, described first focus on section and second focus on section between, second focus on section and the 3rd focus on section between be respectively arranged with the first deflection magnet and the second deflection magnet, the transmission matrix of described first half section is:
Transmission matrix A meets dispersion conditions to release: A12=0, A26=0, A21=0, A34=0, A43=0;
Described energy collimating apparatus meets energy collimation condition.
For the transmission system of monoenergetic charged particle, if need imaging, also just mean, particle only depends on its position at object plane in the position as plane, and irrelevant with its angle at object plane.
If charged particle is not monoenergetic, also have the requirement of De-dispersion, namely particle in the position of picture plane can not with its energy correlation at object plane.In the present invention, if the transmission matrix of first half section is A, the transmission matrix of second half section is B, and the transmission matrix of entirety is R.Here only pay close attention to horizontal coordinate, level angle and the energy of particle.
According to " charged particle beam optics " (Lv Jianqin work, Higher Education Publishing House, 2004), and consider that first half section becomes rotational symmetry to distribute with the second half section, transmission matrix A, the B of first half section, second half section and entirety are respectively:
(1)
Wherein A, in B matrix, the element of mark X and the present invention have nothing to do in the computation process of X plane, and by A, B is abbreviated as
，
In this instructions, the matrix below occurring is six rank matrixes, but all according to the method for writing a Chinese character in simplified form A, B, only express first and second, six row first and second, six be listed as totally nine elements, all the other all do not write out.
Overall transfer matrix R is the product of B and A
（3）
In charged particle transmission system, conventionally represent the state of particle by six-dimensional coordinate, represent the performance of system with sextuple transmission matrix.
Charged particle six-dimensional coordinate expression formula is as follows.
(4)
In formula
for six-dimensional coordinate,
represent particle levels coordinate,
represent particle levels angle,
represent particle vertical coordinate,
represent particle vertical angle,
represent the particle position coordinate of transmission direction,
represent the deviation of particle energy.Here transmission direction represents the direction of motion of the particle beams, and horizontal direction and vertical direction are all described in the plane perpendicular to transmission direction.
Can obtain the position coordinates of particle in picture plane:
(6)
For at X planar imaging, namely particle has nothing to do with its initial angle x ' in the position of picture plane, needs its coefficient A
12* A
22=0, due to A
22be positioned on the diagonal line of transmission matrix A, be generally difficult for being embodied as zero, therefore the method for most convenient is order
(8)
Known according to (6) formula, for De-dispersion, namely make particle have nothing to do in position and its zero energy of picture plane, with
irrelevant, Ke Yiqu
A
12*A
26=0
When
time, naturally, also meet A
12* A
26=0.
For Y planar imaging, utilize identical derivation method, can obtain similar condition.
In actual system, because particle generally has energy deviation, therefore need De-dispersion.Even but the dispersion of single order eliminates, high-order aberration also may affect the quality of image.
When utilizing A
12=A
26=0 eliminates after 1st order chromatic dispersion, and (6) formula is reduced to
(10)
Its Taylor expansion is arrived to second order, with momentum spread
for variable launches,
(11)
The particle beam of supposing input is band modulation, the namely angle of particle
be and particle position
linear dependence.
(12)
In formula
the index of modulation,
it is the additive term that non-ideal factor causes.
Recycling image-forming condition is that particle position and the particle initial angle on imaging plane is irrelevant,
, by (12) formula substitution (11) formula, can obtain:
(13)
From (13) formula, in order to eliminate the second order aberration item relevant to position,
coefficient is zero, needs to meet
Can meet second order color matching condition. in the time meeting second order color matching condition, meet image-forming condition, can imaging.
According to (5) formula,
, to the element R in R matrix
11with momentum spread
for variable differentiate, and consider in image-forming condition
if, order
(15)
(16)
(14) formula is set up.
Utilize identical derivation method, obtain the second order color matching condition of vertical plane.
Below discuss meeting of energy collimation condition.
Supposing from system entry to first half section, in energy collimating apparatus, the transmission matrix of shaft position is T.
The transmission matrix of supposing in addition the first focusing section 4 is
; The deflection radius of deflection magnet is
r, deflection angle is
, the transmission matrix of deflection magnet is
; The second transmission matrix that focuses on section 5 is
, wherein the second transmission matrix that focuses on the first half section of section is
; The 3rd transmission matrix that focuses on section 6 is
.According to " charged particle beam optics " (Lv Jianqin work, Higher Education Publishing House, 2004), the expression of these matrixes is as follows, wherein
,
,
matrix element be to specify arbitrarily.
(18)
(19)
(20)
(21)
(22)
According to accelerator beam transfer theory, can write out the transmission matrix from entrance to energy collimating apparatus axis:
Can be written as to the transmission matrix the axis of symmetry of forward and backward half section from particle beams incident starting point:
(24)
Each matrix multiplies each other successively, launches (24) formula, order
,
, and consider (11) formula, can solve the expression formula of alphabetical c and h, substitution
in, can obtain:
, subscript represents the ranks number of living in of this element.(25)
The six-dimensional coordinate of particle final state is that transmission matrix is multiplied by the initial six-dimensional coordinate of particle, and therefore particle position in the strict expression formula of energy collimation plane is:
(26)
According to (15) formula
, the parallel incident of particle, in the situation that ignoring non-ideal factor,
, in conjunction with
, obtain
(27)
Visible now in energy collimation plane, the energy deviation that it is initial is only depended in the position of particle
, therefore meet energy collimation condition.
Utilize above computation process, can obtain De-dispersion and the energy collimation condition of Y plane
For: A
34=A
43=0.
Comprehensive above-mentioned various, meet A
12=A
21=A
26=A
34=A
43the first half section transmission matrix A of=0 condition and can realize De-dispersion and energy alignment function with the second half section of first half section full symmetric.
For realizing the transmission matrix A that meets above-mentioned condition, can adopt with the following method and realize, first according to the energy of adopted charged particle beam, select to be applicable to quadrupole electromagnet and the deflection magnet of this energy, according to particle beams energy, and specific requirement when practical application, the such as ability of site space size, existing magnet processing technology etc., determine magnetic field gradient, length, the aperture of quadrupole electromagnet, the parameter such as the deflection radius of deflection magnet, deflection angle, magnetic pole gap; Then focus on situation about calculating according to coupling in section, the 3rd focusing section in the first focusing section, second and place the quadrupole electromagnet of some, in practical application, each focuses on section can not place quadrupole electromagnet as required, also can place 3 or 4 or more quadrupole electromagnets.
The matching feature that utilizes existing ripe software such as Transport, the Trace3D etc. of the theoretical establishment of accelerator beam transfer, the transmission matrix that calculates first half section is meeting A
12=A
21=A
26=A
34=A
43under=0 condition, the design parameter of each block of magnet; What finally according to coupling, calculating obtained
parameter, rationally arranges the parameter of energy collimating apparatus.
According to (27) formula, the horizontal level of particle in energy collimating apparatus is only relevant with its zero energy, therefore the gap of two pole plates of energy collimating apparatus has determined the particle energy scope that can pass through, by the gap between two pole plates of energy collimating apparatus is set, makes
.
Be for example the proton source of 35MEV (million-electron-volt) for energy, according to above-mentioned computation process, finally select following technical scheme:
First focuses on section uses 3 blocks of quadrupole electromagnets, and the 3rd focuses on section uses two blocks of quadrupole electromagnets, and second focuses on section does not use quadrupole electromagnet.In first half section, each component parameters from particle incident starting point to axis of symmetry as shown in Table 1, each components and parts of second half section and first half section full symmetric, 26.904 meters of whole system total lengths, are used altogether 4 blocks of deflection magnets, 10 blocks of quadrupole electromagnets.
In table one magnetic field gradient on the occasion of time be focus magnet, when negative for defocusing magnet.
Table one
Utilize analogue G4Beamline to set up model to said system, and carried out analog computation.Fig. 4 and Fig. 5 have provided primary in different-energy situation, the distribution of particles situation of energy collimator position.Wherein Fig. 4 be in standard energy (this example is 35MeV) situation particle in the distribution situation of energy collimator position, Fig. 5 be energy while thering is 2% deviation particle in the distribution situation of energy collimator position.
From Fig. 4 and Fig. 5, in the horizontal direction, the distribution of particles of energy collimation plane in a very little scope, the effect of this energy collimation plane that theoretical analysis provides just; Meanwhile, due to 2% energy deviation, the average bit of distribution of particles is equipped with the change of about 11mm, and the result providing according to design software Transport, particle energy departs from 1%, and particle will be 5.57mm in the position deviation at energy collimating apparatus place.Visible approach between the two consistent.
As mentioned above, can realize preferably the present invention.
Claims (4)
1. the charged particle photographic means based on energy loss focal imaging, comprises beam-flow transmission line and optical imaging system, it is characterized in that, beam-flow transmission line is divided into first half section and the second half section that rotational symmetry distributes, and described optical imaging system is positioned at beam-flow transmission line end; Described first half section is by the second focusing section that comprises energy collimating apparatus, be positioned at forward and backward the first focusing section and the 3rd of the second focusing section and focus on section composition, described first focus on section and second focus on section between, second focus on section and the 3rd focus on section between be respectively arranged with the first deflection magnet and the second deflection magnet, the transmission matrix of described first half section is six rank matrix A:
Transmission matrix A meets dispersion conditions to release: A
12=0, A
26=0, A
21=0, A
34=0, A
43=0; Forward and backward subscript represents respectively the row, column at this element place.
2. the charged particle photographic means based on energy loss focal imaging according to claim 1, is characterized in that, makes transmission matrix A meet dispersion conditions to release by quadrupole electromagnet being set in each focusing section.
3. the charged particle photographic means based on energy loss focal imaging according to claim 1, is characterized in that, described energy collimating apparatus is made up of two parallel metal sheets.
4. the charged particle photographic means based on energy loss focal imaging according to claim 1, is characterized in that, described optical imaging system is made up of opto-electronic conversion screen and CCD camera.
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Cited By (3)
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| CN104914119A (en) * | 2015-06-15 | 2015-09-16 | 中国工程物理研究院流体物理研究所 | Charged particle photographing device for parallel matching beams |
| CN107846771A (en) * | 2017-10-31 | 2018-03-27 | 华中科技大学 | A kind of method and system for adjusting rotary frame isocenter point beam spot size |
| CN110944446A (en) * | 2019-10-29 | 2020-03-31 | 清华大学 | Electron beam group storage ring and extreme ultraviolet light source with same |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104914119A (en) * | 2015-06-15 | 2015-09-16 | 中国工程物理研究院流体物理研究所 | Charged particle photographing device for parallel matching beams |
| CN104914119B (en) * | 2015-06-15 | 2017-10-27 | 中国工程物理研究院流体物理研究所 | It is a kind of to match the charged particle photographic means that line is parallel beam |
| CN107846771A (en) * | 2017-10-31 | 2018-03-27 | 华中科技大学 | A kind of method and system for adjusting rotary frame isocenter point beam spot size |
| CN110944446A (en) * | 2019-10-29 | 2020-03-31 | 清华大学 | Electron beam group storage ring and extreme ultraviolet light source with same |
| WO2021083098A1 (en) * | 2019-10-29 | 2021-05-06 | 清华大学 | Electron-beam bunch storage ring and extreme-ultraviolet light source having same |
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