CN103983215B - Improved device for measuring area of aperture diaphragm of monitoring system with effective area method - Google Patents
Improved device for measuring area of aperture diaphragm of monitoring system with effective area method Download PDFInfo
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- CN103983215B CN103983215B CN201410193131.6A CN201410193131A CN103983215B CN 103983215 B CN103983215 B CN 103983215B CN 201410193131 A CN201410193131 A CN 201410193131A CN 103983215 B CN103983215 B CN 103983215B
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- iriss
- integrating sphere
- detector
- monitoring system
- beam splitter
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Abstract
The invention provides an improved device for measuring the area of an aperture diaphragm of a monitoring system with an effective area method, and relates to the field of high-accuracy measurement on the area of diaphragms. The technical problem that the monitoring and measuring result is not accurate is solved. The device comprises a hene laser, a variable diaphragm A, a beam splitter, a variable diaphragm B, a variable diaphragm C, a x-y horizontal-movement platform, the monitoring system and a detecting system, wherein the detecting system comprises an integrating sphere a and a detector a, the detector a is installed on the integrating sphere a, the hene laser, the variable diaphragm A, the beam splitter, the variable diaphragm B, the aperture diaphragm and the integrating sphere of the detecting system are sequentially arranged from left to right, and the center of the hene laser, the center of the variable diaphragm A, the center of the beam splitter, the center of the variable diaphragm B, the center of the aperture diaphragm and the center of the integrating sphere of the detecting system are located on the same horizontal line. The monitoring system and the detecting system are the same in structure, type and beam collecting method, stability of laser beams can be accurately detected, and accuracy of the monitoring result is guaranteed.
Description
Technical field
The invention belongs to high-acruracy survey aperture area field is and in particular to a kind of significant surface area method of improvement monitoring system
The device of measurement aperture aperture area.
Background technology
The measurement of some radiology and photoptometry is aperture diaphragm face based on high-acruracy survey precision aperture area
Long-pending size limit incident illumination geometric areas, determine calculate radiant illumination when incident area and radiance solid
Angle, the area of therefore high-acruracy survey aperture diaphragm has vital meaning.
The device of measurement aperture aperture area has much at present, discloses a title in Britain meas.sci.technol
For an optical method for direct determination of the radiometric aperture area
The technical scheme of at high accuracy (device of significant surface area method measured hole footpath aperture area), referring to accompanying drawing 1, this device
Including light-source system, beam splitting system, translation system, detection system and monitoring system；Described light-source system includes hene laser instrument
1, described beam splitting system includes iriss a2, beam splitter 3, iriss b4 and iriss c9, described detection system
Including integrating sphere a7 and detector a8, detector a8 is arranged on integrating sphere a7, and described monitoring system includes trap detector, its
The monitoring process of significant surface area method is: adjust laser instrument 1 first before area measurement so as to the stable Gaussian beam of output, high
This light beam is injected after beam splitter 3 by iriss a2, and 50% energy reflection 50% energy passes through, and beam splitter 3 will
A part of light beam assigns to trap detector 10 by iriss c9, and another part light beam is assigned to detection by iriss b4
In the integrating sphere a7 of system.During area measurement, acquiescence beam splitter 3 is preferable, and two parts energy is identical,
Trap detector 10 is monitoring system, the energy value of its light beam detecting, if keeping stable, can guarantee that the steady of laser beam
Qualitative, also ensure that stablizing of beam energy used by measurement, thus reaching the purpose of control survey.
But when calculating aperture area, surveyed with detection system for surveyed for monitoring system energy value energy value need to be opposed
Than.The monitoring system of this measurement apparatus is only a single trap detector, when carrying out control survey to LASER Light Source, due to surveying
The detection system of amount device differs with the structure of monitoring system, beam collection method difference, and the type photodetector of use is not yet
Identical, though monitoring system measured value keeps stable, it is able to demonstrate that laser instrument sends the stability of light beam, still may be to diaphragm
The measurement result of area produces impact, leads to whole control survey result inaccurate.
Content of the invention
It is an object of the invention to provide a kind of dress of the significant surface area method measured hole footpath aperture area improving monitoring system
Put, solve the inaccurate technical problem of control survey result.
For achieving the above object, the significant surface area method measured hole footpath aperture area of a modification of the present invention monitoring system
Device includes light-source system, beam splitting system, translation system, detection system and monitoring system；Described light-source system includes hene and swashs
Light device (helium neon laser)；Described beam splitting system includes iriss a, beam splitter, iriss b and iriss c, institute
Stating translation system is x-y shift platform, and on x-y shift platform, described detection system includes integrating sphere a and detector a to aperture diaphragm,
Detector a is arranged on integrating sphere a, hene laser instrument, iriss a, beam splitter, iriss b, aperture diaphragm and spy
The integrating sphere a of examining system arrays from left to right, and its center is in the same horizontal line；Described monitoring system includes integrating
Ball b and detector b, detector b are arranged on integrating sphere b；Iriss a incident light is passed through by the light beam that hene laser instrument exports
Beam separator, light beam is divided into energy identical two-beam by beam splitter, and light beam assigns to detection system by iriss b
System, another light beam assigns to monitoring system by iriss c.
Described detector a is identical with detector b model.
Described integrating sphere a is identical with the size of integrating sphere b and performance.
The invention has the benefit that a kind of significant surface area method measured hole footpath aperture area improving monitoring system of the present invention
The monitoring system of device include integrating sphere b and detector b, detector b is arranged on integrating sphere b, and detection system includes integrating
Ball a and detector a, detector a are arranged on integrating sphere a；Monitoring system is identical with detection system structure, model is identical, collection
The method of light beam is identical, can precisely detect the stability of laser beam it is ensured that the accuracy of monitoring result.
Brief description
Fig. 1, is the structural representation of the device of significant surface area method measured hole footpath aperture area in prior art；
Fig. 2, is a kind of structure of the device of significant surface area method measured hole footpath aperture area improving monitoring system of the present invention
Schematic diagram；
Wherein, 1, hene laser instrument, 2, iriss a, 3, beam splitter, 4, iriss b, 5, x-y shift platform, 6,
Aperture diaphragm, 7, integrating sphere a, 8, detector a, 9, iriss c, 10 trap detectors, 11, integrating sphere b, 12, detector b.
Specific embodiment
The present invention is further elaborated below in conjunction with the accompanying drawings.
Referring to accompanying drawing 2, a kind of device bag of the significant surface area method measured hole footpath aperture area improving monitoring system of the present invention
Include light-source system, beam splitting system, translation system, detection system and monitoring system；Described light-source system includes hene laser instrument 1,
Described beam splitting system includes iriss a2, beam splitter 3, iriss b4 and iriss c9, and described translation system is
X-y shift platform 5, on x-y shift platform 5, x-y shift platform 5 is used for adjusting the position of iriss 6, described detection iriss 6
System includes integrating sphere a7 and detector a8, and detector a8 is arranged on integrating sphere a7, described hene laser instrument 1, iriss
A2, beam splitter 3, the integrating sphere a7 of iriss b4, aperture diaphragm 6 and detection system array from left to right, and
In the same horizontal line, described monitoring system includes integrating sphere b11 and detector b12 at its center, and detector b12 is arranged on integration
On ball b11；The light beam being exported by hene laser instrument 1 injects beam splitter 3 by iriss a2, and beam splitter 3 is by light
Bundle is divided into two beam energy identical light beams, and light beam assigns to detection system by iriss b4, and another light beams pass through can
Become diaphragm c9 and assign to monitoring system.
Described detector a8 is identical with detector b12 model for institute.
Described integrating sphere a7 is identical with the size of integrating sphere b11 and performance.
The monitoring process of the present invention is: adjusts hene laser instrument 1 first before area measurement so as to export stable Gauss
Light beam, after beam splitter 3,50% energy passes through reflection and enters monitoring system, 50% energy through iriss c9 this light beam
Amount enters detection system through beam splitter 3 by iriss b4, during area measurement, the light of monitoring system measurement
Beam energy value is identical with the beam energy value that detection system measures, monitoring system to the detection process of light beam with detection system to light
The actual measurement process of bundle is identical, is all that light beam is collected by integrating sphere a7 and integrating sphere b11 respectively first, after respectively by identical
The detector a8 of model and detector b12 receives, and then the energy value of measuring beam.Due to monitoring system and detection system structure
The method that identical, model is identical, collect light beam is identical, can precisely detect the stability of laser beam it is ensured that monitoring result
Accuracy, thus reaching the purpose of real-time monitoring.
Claims (2)
1. a kind of device of the significant surface area method measured hole footpath aperture area improving monitoring system, including light-source system, light splitting system
System, detection system and monitoring system；Described light-source system includes hene laser instrument (1)；Described beam splitting system includes iriss a
(2), beam splitter (3), iriss b (4) and iriss c (9), described detection system includes integrating sphere a (7) and detects
Device a (8), detector a (8) are arranged on integrating sphere a (7), hene laser instrument (1), iriss a (2), beam splitter (3),
The integrating sphere a (7) of iriss b (4), aperture diaphragm (6) and detection system arrays from left to right, and its center is same
On one horizontal line；It is characterized in that, described monitoring system includes integrating sphere b (11) and detector b (12), and detector b (12) pacifies
It is contained on integrating sphere b (11)；Beam splitter (3) is injected by iriss a (2) by the light beam that hene laser instrument (1) exports,
Light beam is divided into energy identical two-beam by beam splitter (3), and light beam injects detection system, separately by iriss b (4)
Light beam injects monitoring system by iriss c (9)；
Described detector a (8) is identical with detector b (12) model；Described integrating sphere a (7) and integrating sphere b (11) size and performance
All identical.
2. the device of a kind of significant surface area method measured hole footpath aperture area improving monitoring system according to claim 1,
It is characterized in that, described device also includes translation system, and described translation system is x-y shift platform (5), described aperture diaphragm (6)
On x-y shift platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410193131.6A CN103983215B (en) | 2014-05-08 | 2014-05-08 | Improved device for measuring area of aperture diaphragm of monitoring system with effective area method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410193131.6A CN103983215B (en) | 2014-05-08 | 2014-05-08 | Improved device for measuring area of aperture diaphragm of monitoring system with effective area method |
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| Publication Number | Publication Date |
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| CN103983215A CN103983215A (en) | 2014-08-13 |
| CN103983215B true CN103983215B (en) | 2017-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410193131.6A Expired - Fee Related CN103983215B (en) | 2014-05-08 | 2014-05-08 | Improved device for measuring area of aperture diaphragm of monitoring system with effective area method |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105136071B (en) * | 2015-09-06 | 2017-07-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of method for correcting significant surface area method measurement data |
| CN107860334B (en) * | 2017-11-01 | 2019-12-06 | 西北核技术研究所 | high-power laser breakdown metal hole shape and area real-time measurement device and method |
Citations (4)
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|---|---|---|---|---|
| CN2658729Y (en) * | 2003-03-26 | 2004-11-24 | 中国科学院长春光学精密机械与物理研究所 | Absorption rate measuring device |
| WO2008115684A1 (en) * | 2007-03-16 | 2008-09-25 | Lighthouse Imaging Corporation | System and method for an illumination-quality test |
| CN101922974A (en) * | 2010-08-31 | 2010-12-22 | 中国科学院西安光学精密机械研究所 | Automatic calibration device and method for laser parameter performance test |
| CN103591910A (en) * | 2013-10-28 | 2014-02-19 | 中国科学院长春光学精密机械与物理研究所 | High-precision measurement device for radiometer diaphragm area |
-
2014
- 2014-05-08 CN CN201410193131.6A patent/CN103983215B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2658729Y (en) * | 2003-03-26 | 2004-11-24 | 中国科学院长春光学精密机械与物理研究所 | Absorption rate measuring device |
| WO2008115684A1 (en) * | 2007-03-16 | 2008-09-25 | Lighthouse Imaging Corporation | System and method for an illumination-quality test |
| CN101922974A (en) * | 2010-08-31 | 2010-12-22 | 中国科学院西安光学精密机械研究所 | Automatic calibration device and method for laser parameter performance test |
| CN103591910A (en) * | 2013-10-28 | 2014-02-19 | 中国科学院长春光学精密机械与物理研究所 | High-precision measurement device for radiometer diaphragm area |
Non-Patent Citations (2)
| Title |
|---|
| 《An optical method for direct determination of the radiometric aperture area at high accuracy》;A Lassila etc.;《Measurement Science and Technology》;19970530;第8卷(第9期);第973-974页 * |
| 高精度测量孔径光阑面积方法概述;陈祥子 等;《物理学报》;20130831;第62卷(第16期);第164211-1至164211-6 * |
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