CN103981569B - 一种解决铸造晶体硅长晶阴影缺陷的方法 - Google Patents
一种解决铸造晶体硅长晶阴影缺陷的方法 Download PDFInfo
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- CN103981569B CN103981569B CN201410179617.4A CN201410179617A CN103981569B CN 103981569 B CN103981569 B CN 103981569B CN 201410179617 A CN201410179617 A CN 201410179617A CN 103981569 B CN103981569 B CN 103981569B
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- 229910021419 crystalline silicon Inorganic materials 0.000 title claims abstract description 19
- 239000013078 crystal Substances 0.000 claims abstract description 33
- 239000000126 substance Substances 0.000 claims abstract description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 15
- 239000010703 silicon Substances 0.000 claims abstract description 15
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- 238000005259 measurement Methods 0.000 claims abstract description 8
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229920005591 polysilicon Polymers 0.000 claims description 3
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- 230000007704 transition Effects 0.000 claims description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims 1
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Abstract
Description
| 步骤 | 长晶步骤剩余时间(h:min) | 长晶高度(mm) | 长晶速率(mm/h) |
| G1 | 00:30 | 0 | 0 |
| G2 | 02:29 | 3 | 3 |
| G2 | 01:29 | 10.2 | 7.2 |
| G2 | 00:29 | 20.6 | 10.4 |
| G3 | 01:29 | 33.5 | 12.9 |
| G3 | 00:29 | 43.4 | 9.9 |
| G4 | 04:29 | 56.1 | 12.7 |
| G4 | 03:29 | 68.6 | 12.5 |
| G4 | 02:29 | 81.4 | 12.8 |
| 类别 | Uoc/V | Isc/A | Rs/Ω | Rsh/Ω | FF | Eta |
| 调整前阴影片 | 0.6262 | 8.631 | 0.0027 | 110.68 | 77.81 | 17.28 |
| 调整后相同位置 | 0.6286 | 8.750 | 0.0026 | 239.20 | 78.74 | 17.79 |
Claims (3)
Priority Applications (1)
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| CN201410179617.4A CN103981569B (zh) | 2014-04-30 | 2014-04-30 | 一种解决铸造晶体硅长晶阴影缺陷的方法 |
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| CN201410179617.4A CN103981569B (zh) | 2014-04-30 | 2014-04-30 | 一种解决铸造晶体硅长晶阴影缺陷的方法 |
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| CN103981569A CN103981569A (zh) | 2014-08-13 |
| CN103981569B true CN103981569B (zh) | 2017-08-18 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104894642A (zh) * | 2015-06-29 | 2015-09-09 | 韩华新能源(启东)有限公司 | 一种有效改善铸造多晶硅锭质量的方法 |
| CN105780109A (zh) * | 2016-04-08 | 2016-07-20 | 江西旭阳雷迪高科技股份有限公司 | 一种多晶铸锭炉改善边缘晶粒倾斜生长的装置及其方法 |
| CN114351250A (zh) * | 2022-01-07 | 2022-04-15 | 安顺学院 | 一种控制生长速率提高铸锭多晶硅晶体质量的工艺 |
| CN115722138B (zh) * | 2022-09-22 | 2023-06-23 | 青岛宝恒机械技术有限公司 | 一种养殖业饲料自动定时定量控制系统及方法 |
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| JP2002145696A (ja) * | 2000-10-31 | 2002-05-22 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法、シリコン単結晶ウェーハ及びシリコン単結晶製造装置の設計方法 |
| CN1473213A (zh) * | 2000-11-03 | 2004-02-04 | Memc | 用高生长速率制备低缺陷密度硅的方法 |
| CN1653213A (zh) * | 2002-05-09 | 2005-08-10 | 信越半导体株式会社 | 单晶硅晶片及外延片以及单晶硅的制造方法 |
| WO2004044278A1 (ja) * | 2002-11-14 | 2004-05-27 | Komatsu Denshi Kinzoku Kabushiki Kaisha | シリコンウェーハとその製造方法および製造装置 |
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| CN103981569A (zh) | 2014-08-13 |
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