CN103976743A - CMUT (Capacitive Micro-machined Ultrasonic Transducer) annular array based micro-photoacoustic transducer - Google Patents
CMUT (Capacitive Micro-machined Ultrasonic Transducer) annular array based micro-photoacoustic transducer Download PDFInfo
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- CN103976743A CN103976743A CN201410226273.8A CN201410226273A CN103976743A CN 103976743 A CN103976743 A CN 103976743A CN 201410226273 A CN201410226273 A CN 201410226273A CN 103976743 A CN103976743 A CN 103976743A
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Abstract
The invention discloses a CMUT (Capacitive Micro-machined Ultrasonic Transducer) annular array based micro-photoacoustic transducer. The CMUT annular array based micro-photoacoustic transducer comprises an optical fiber head, a lens, a CMUT annular array probe, a CMUT array element and a light transmitting protective film. The nondestructive photoacoustic excitation and transducing integrated micro-structure is achieved and the CMUT annular array based micro-photoacoustic transducer can be widely applied to the fields of blood sugar and blood oxygen detection, brain damage diagnoses, breast cancer censuses, endoscopic type medical imaging, industrial inspection and detection and the like.
Description
Technical field
The present invention relates to photonic propulsion technical field of imaging, be specifically related to a kind of Miniature optical sonic transducer based on cMUT annular array.
Background technology
Photoacoustic imaging is a kind of with the harmless Optical measurement technology of ultrasonic vehicular non-intervention type.It combines the advantage of pure optical technology and pure ultrasonic technique, adopt and detect ultrasound wave replacement detection scattered photon, thereby in principle, avoided as shortcomings such as the high scattering of the methods such as near infrared spectrum, muting sensitivity, low investigation depth, strong jammings, other photonic propulsion method shows more attracting advantage relatively.
Dissimilar sonic sensor is one of key equipment of photo-acoustic detection system, as piezoelectricity passes formula sensor, capacitance type sensor, non-contact optical detector etc.At present, in photoacoustic imaging, conventional checkout equipment is piezoelectric transducer, wherein maximum with the application of piezoelectric ceramics and Kynoar (PVDF) material.Piezoelectric ceramics has advantages of that piezoelectric constant is large and dielectric constant is high, and its manufacturing process is also more ripe, can reach desired performance by the Artificial Control such as rational formula and doping, but its mechanical quality factor is lower, electrical loss is large, poor stability.The pliable and tough light weight of material of the organic piezoelectric materials taking PVDF thin film as representative, there is broadband, low acoustic resistance, high sensitivity, high mechanical properties, high stability, easily processing and the easy feature such as installation compared with traditional piezoelectric, easily produce in a large number and make larger area arbitrary shape sensing element.For example conventional PVDF piezoelectric membrane, its submissive coefficient is about 30 times of PZT, but proportion only has 1/4 left and right of PZT, and chemical stability is higher 10 times than pottery.
But due to the restriction of piezoelectric and technique, all there is the high density multidimensional array that is difficult to realize grade volume with upper sensor, actual popularizing application prospect in photoacoustic imaging is limited by very large, especially at miniature photo-acoustic excitation and the sensing arrangement of inner peeping type.
Summary of the invention
For the problems referred to above, the technical problem to be solved in the present invention is to provide a kind of Miniature optical sonic transducer based on cMUT annular array, the all-in-one micro structure that realizes harmless photo-acoustic excitation and sensing, can be widely used in the fields such as the detection of blood glucose blood oxygen, brain injury diagnosis, Mass Screening of Breast Cancer, inner peeping type medical imaging, industrial detection and flaw detection.
For solving the problems of the technologies described above, realize above-mentioned purpose, the present invention is achieved through the following technical solutions:
A kind of Miniature optical sonic transducer based on cMUT annular array, comprise shell, be provided with fixed layer in cover top portion and middle part, the top of fixed layer is provided with optical fiber head, on optical fiber head, be inserted with optical fiber, central authorities at fixed layer are provided with lens, under fixed layer, be provided with the substrate of binding cMUT annular array probe, wherein optical fiber head, lens, cMUT annular array probe and substrate coaxially arrange, inside, substrate bottom is provided with cMUT array element, described cMUT array element includes the vibration membrane that matrix is arranged, each vibration membrane is by wire and electrode electrical connection, cMUT array element and holding wire electrical connection.
Further, the planar array that described cMUT annular array probe is hollow, is equipped with light transmission protecting film in the hollow of cMUT annular array probe, is provided with cMUT array element in substrate.
Preferably, described electrode and holding wire electrical connection, wherein holding wire is through fixed layer and shell.
Further, the center of described optical fiber head, lens, cMUT annular array probe and light transmission protecting film is all positioned on same axis, integrative packaging in shell, the coaxial confocal structure of being integrally formed.
The invention has the beneficial effects as follows:
(1) the present invention adopts cMUT technology, probe processing dimension and system dimension are respectively in micron dimension and millimeter magnitude, have compared with conventional piezoelectric sensor that volume is little, array density is high, be with roomy and dynamo-electric transformation efficiency advantages of higher, be easy to realize the microminiaturization of system structure and practical;
(2) the present invention, by cMUT array element with annular array structural arrangement, effectively raises its dynamic focusing detectivity on axis, can realize the optoacoustic detection in multiple sites, below, axis;
(3) the present invention is designed to photo-acoustic excitation and sensing the integral structure of coaxial confocal, has improved greatly exciting and sensing efficiency of photoacoustic signal;
(4) the present invention adopts mode detection photoacoustic signal dorsad, effectively raise operability and the scope of application of system, can be widely used in the fields such as the detection of blood glucose blood oxygen, brain injury diagnosis, Mass Screening of Breast Cancer, inner peeping type medical imaging, industrial detection and flaw detection.
Brief description of the drawings
Fig. 1 is the generalized section of structure of the present invention.
Fig. 2 is the upward view of structure of the present invention.
Fig. 3 is the structural representation of cMUT array element.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is illustrated:
The structure of the present embodiment as Figure 1-3, a kind of Miniature optical sonic transducer based on cMUT annular array, top and middle part at shell 4 are provided with fixed layer 3, be provided with optical fiber head 6 in the center of top of fixed layer 3, on optical fiber head 6, be inserted with optical fiber 7, the central authorities of fixed layer 3, be positioned at optical fiber head 6 below be provided with lens 8; Under the bottom of shell 4, fixed layer 3, be bonded with the substrate 2 of cMUT annular array probe 13, be provided with cMUT array element 1 in substrate 2 inside, bottom; The planar array that described cMUT annular array probe 13 is hollow, is provided with k cMUT array element 1 in the substrate 2 of cMUT annular array probe 13 and is evenly arranged on the circular arc that radian is K, and 0 < K≤2 π, k=2, and 3 ... n; Described cMUT array element 1 includes the vibration membrane 11 that i × j matrix arranged, and each vibration membrane 11 is electrically connected by wire 12 and electrode 10, and i=1, and 2 ... n, j=1,2 ... n; Described electrode 10 is electrically connected with holding wire 5, and wherein holding wire 5 is exported signal through fixed layer 3 and shell 4; Below lens 8, in the hollow of cMUT annular array probe 13, be equipped with light transmission protecting film 9; The center of optical fiber head 6, lens 8, cMUT annular array probe 13, light transmission protecting film 9 is all positioned on same axis, integrative packaging in shell 4, the coaxial confocal structure of being integrally formed; Described optical fiber 7 transmit one or more wavelength in ultraviolet to pulse or modulated laser in infra-red range; after lens 8, produce and focus on or parallel light beam; through the hollow internal ring of light transmission protecting film 9 and cMUT annular array probe 13; the detected sample excitation of directive goes out photoacoustic signal; cMUT annular array probe 13 adopts pattern dorsad to receive photoacoustic signal; realize the optoacoustic detection of continuous A type dynamic focusing scanning, the optical absorption feature in multiple sites, below, axis is provided.
Wherein cMUT annular array probe 13 has that volume is little, array density is high, be with the plurality of advantages such as roomy and dynamo-electric transformation efficiency height.The diameter of cMUT annular array probe 13 is about 1mm, mid frequency is 14MHz, bandwidth 175%, electromechanical coupling factor can reach 0.85, in substrate 2, be designed with 30 cMUT array elements 1 and be evenly arranged on the circular arc that radian is 2 π, array element distance is 98 μ m, and wherein each cMUT array element 1 contains 6 (3 × 2) matrixes arrangement vibration membranes 11, the material of vibration membrane 11 is silicon nitride, and its thickness and diameter are respectively 0.4 μ m and 26 μ m.
Claims (4)
1. the Miniature optical sonic transducer based on cMUT annular array, comprise that shell (4) is provided with fixed layer (3) at its top and middle part, be provided with optical fiber head (6) at the top of fixed layer (3), on optical fiber head (6), be inserted with optical fiber (7), it is characterized in that: be provided with lens (8) in the central authorities of fixed layer (3), under fixed layer (3), be provided with the substrate (2) of binding cMUT annular array probe (13), wherein optical fiber head (6), lens (8), cMUT annular array probe (13) and substrate (2) coaxially arrange, be provided with cMUT array element (1) in substrate (2) inside, bottom, described cMUT array element (1) includes the vibration membrane (11) that matrix is arranged, each vibration membrane (11) is connected with electrode (10) by wire (12), cMUT array element (1) is connected with holding wire (5).
2. a kind of Miniature optical sonic transducer based on cMUT annular array according to claim 1; it is characterized in that: described cMUT annular array probe (13) is the planar array of hollow; in the hollow of cMUT annular array probe (13), be equipped with light transmission protecting film (9), in substrate (2), be provided with cMUT array element (1).
3. a kind of Miniature optical sonic transducer based on cMUT annular array according to claim 2, is characterized in that: described electrode (10) is connected with holding wire (5), and wherein holding wire (5) is through fixed layer (3) and shell (4).
4. a kind of Miniature optical sonic transducer based on cMUT annular array according to claim 3; it is characterized in that: the center of described optical fiber head (6), lens (8), cMUT annular array probe (13) and light transmission protecting film (9) is all positioned on same axis; integrative packaging in shell (4), the coaxial confocal structure of being integrally formed.
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Cited By (5)
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| CN105147332A (en) * | 2015-09-14 | 2015-12-16 | 电子科技大学 | Optoacoustic/ultrasonic dual mode endoscope based on miniature piezoelectric ultrasonic transducer arrays |
| CN105411625A (en) * | 2015-12-28 | 2016-03-23 | 中国科学院苏州生物医学工程技术研究所 | Diagnosis and treatment integrated ultrasonic system based on cMUT (capacitive micromachining ultrasonic transducer) area array |
| CN106694347A (en) * | 2015-11-18 | 2017-05-24 | 珂纳医疗科技(苏州)有限公司 | Capacitive micromachined ultrasound transducers having varying properties |
| CN108025331A (en) * | 2015-06-30 | 2018-05-11 | 皇家飞利浦有限公司 | Ultrasonic system and ultrasound pulse transmission method |
| CN114441647A (en) * | 2022-01-25 | 2022-05-06 | 天津大学 | Focusing broadband capacitance type micro-mechanical transducer array based on combined micro-elements |
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| CN114441647A (en) * | 2022-01-25 | 2022-05-06 | 天津大学 | Focusing broadband capacitance type micro-mechanical transducer array based on combined micro-elements |
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