CN103962727B - 蓝宝石切割装置 - Google Patents

蓝宝石切割装置 Download PDF

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CN103962727B
CN103962727B CN201310030847.XA CN201310030847A CN103962727B CN 103962727 B CN103962727 B CN 103962727B CN 201310030847 A CN201310030847 A CN 201310030847A CN 103962727 B CN103962727 B CN 103962727B
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sapphire
laser
laser beam
cutter device
picosecond
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CN103962727A (zh
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陈杰良
王仲培
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Fulian Yuzhan Technology Shenzhen Co Ltd
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Shenzhen Yuzhan Precision Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses

Abstract

本发明提供一种蓝宝石切割装置,包括一皮秒激光器及一准直透镜。该皮秒激光器用于发出一脉冲宽度为皮秒级(10‑12s)的激光束。该准直透镜用于将该激光束汇聚成一平行激光束。该平行激光束用于切割一蓝宝石。该皮秒激光器发射的该激光束具有超短脉冲,可有效减少该激光束与该蓝宝石相互作用所产生的热效应,避免热熔问题,切割面平滑度高,因此无需后续对切割面进行研磨、抛光,从而可以大大缩短制程,提高效率。

Description

蓝宝石切割装置
技术领域
本发明涉及蓝宝石切割技术,特别涉及一种蓝宝石切割装置。
背景技术
蓝宝石由于具有优异的机械及光学特性而被应用于电子产品中,例如作为保护盖(cover glass)应用于镜头模组中或者作为前盖应用于手机中以利用耐磨、抗击的特性保护镜头模组及手机。然而,由于蓝宝石的硬度很高(硬度9级),加工困难,例如即使使用先进的纳米激光器进行切割,也会由于热熔问题在切割面产生微裂缝(micro-cracks),需要在切割后对切割面进行研磨、抛光处理,导致制程漫长,效率低下。
发明内容
有鉴于此,有必要提供一种可提高效率的蓝宝石素材制造方法。
一种蓝宝石切割装置,包括一皮秒激光器及一准直透镜。该皮秒激光器用于发出一脉冲宽度为皮秒级(10-12s)的激光束。该准直透镜用于将该激光束汇聚成一平行激光束。该平行激光束用于切割一蓝宝石。
该皮秒激光器发射的该激光束具有超短脉冲,可有效减少该激光束与该蓝宝石相互作用所产生的热效应,避免热熔问题,切割面平滑度高,因此无需后续对切割面进行研磨、抛光,从而可以大大缩短制程,提高效率。另外,该皮秒激光器具有高重复频率,相比纳秒激光器200kHz左右的重复频率,该皮秒激光器的重复频率可提升至1-2MHz级别,也可大大加快切割速度,也可提高效率。
附图说明
图1为本发明较佳实施方式的蓝宝石切割装置的立体示意图。
图2为图1的蓝宝石切割装置的部分平面示意图。
主要元件符号说明
如下具体实施方式将结合上述附图进一步说明本发明。
具体实施方式
请参阅图1-2,本发明较佳实施方式的蓝宝石切割装置10包括一皮秒激光器100及一准直透镜200。该皮秒激光器100用于发出一脉冲宽度为皮秒级(10-12s)的激光束110。该准直透镜200用于将该激光束110汇聚成一平行激光束120。该平行激光束120用于切割一蓝宝石20。
该皮秒激光器100发射的该激光束110具有超短脉冲,可有效减少该激光束与该蓝宝石20相互作用所产生的热效应,避免热熔问题,切割面平滑度高,因此无需后续对切割面进行研磨、抛光,从而可以大大缩短制程,提高效率。另外,该皮秒激光器100具有高重复频率,相比纳秒激光器200kHz左右的重复频率,该皮秒激光器100的重复频率可提升至1-2MHz级别,也可大大加快切割速度,也可提高效率。
具体的,该激光束110的脉冲宽度小于15皮秒,为紫外激光、绿色激光或近红外激光,优选的,紫外激光的波长为355nm或343nm或266nm,绿色激光的波长为532nm或515nm,近红外激光的波长为1030nm或1064nm。该皮秒激光器100的脉冲重复频率可调。
具体的,该蓝宝石切割装置还包括一外壳300。该外壳300形成有一收容空间310。该收容空间310具有一开口312。该皮秒激光器100收容于该收容空间310内,并朝该开口312发射该激光束110。该准直透镜200封闭该开口312,并汇聚该激光束110。
具体的,该蓝宝石切割装置10还包括一工作台400。该工作台400包括一承载台410、一个三维移动臂420及一控制系统430。该承载台410用于承载定位该蓝宝石20。该承载台410形成有一缝隙412。该蓝宝石20横跨该缝隙412设置。该三维移动臂420用于固持该外壳300。该控制系统430用于驱动该三维移动臂420按预定的轨迹移动并控制该皮秒激光器100的开启与关闭从而切割定位于该承载台410上的该蓝宝石20。该预定的轨迹落入该缝隙412内,如此,该蓝宝石切割装置10不会切割到该承载台410。
该承载台410还形成有一个圆孔414。该圆孔414可以与该缝隙412连通设置,也可以独立设置。该蓝宝石20覆盖该圆孔414。该预定的轨迹包括在该蓝宝石20上画圆已在该蓝宝石20上形成圆孔(例如作为光圈)。此时,该预定的轨迹落入该圆孔414,如此,该蓝宝石切割装置10不会切割到该承载台410。本实施方式中,该圆孔414与该缝隙412连通。
在其他实施方式中,若该预定的轨迹为画圆时也可落入该缝隙412,则可省略该圆孔414。
总之,本技术领域的普通技术人员应当认识到,以上的实施方式仅是用来说明本发明,而并非用作为对本发明的限定,只要在本发明的实质精神范围之内,对以上实施例所作的适当改变和变化都落在本发明要求保护的范围之内。

Claims (6)

1.一种蓝宝石切割装置,其特征在于:该蓝宝石切割装置包括一皮秒激光器及一准直透镜;该皮秒激光器用于发出一脉冲宽度为皮秒级的激光束;该准直透镜用于将该激光束汇聚成一平行激光束;该平行激光束用于直接切割蓝宝石,该蓝宝石切割装置还包括一外壳;该外壳形成有一收容空间;该收容空间具有一开口;该皮秒激光器收容于该收容空间内,并用于朝该开口发射该激光束;该准直透镜封闭该开口;该蓝宝石切割装置还包括一工作台,该工作台包括一承载台和一控制系统,该承载台用于承载定位该蓝宝石,该承载台形成有一缝隙,该蓝宝石横跨该缝隙设置;该工作台还包括一个三维移动臂,该三维移动臂用于固持该外壳并带动该外壳在三维空间内移动,该控制系统用于驱动该三维移动臂按预定的轨迹移动并控制该皮秒激光器的开启与关闭从而切割定位于该承载台上的该蓝宝石,该预定的轨迹落入该缝隙内。
2.如权利要求1所述的蓝宝石切割装置,其特征在于,该激光束的脉冲宽度小于15皮秒。
3.如权利要求1所述的蓝宝石切割装置,其特征在于,该激光束为紫外激光、绿色激光或近红外激光。
4.如权利要求1所述的蓝宝石切割装置,其特征在于,该皮秒激光器的工作波长为355nm、343nm、266nm、532nm、515nm,1030nm或1064nm。
5.如权利要求1所述的蓝宝石切割装置,其特征在于,该皮秒激光器的脉冲重复频率可调。
6.如权利要求1所述的蓝宝石切割装置,其特征在于,该承载台还形成有一个圆孔;该蓝宝石覆盖该圆孔;该预定的轨迹包括在该蓝宝石上画圆,该预定的轨迹为画圆时落入该圆孔。
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CN104384728B (zh) * 2014-11-18 2016-04-06 蓝思科技股份有限公司 一种激光加工蓝宝石面板的工艺及夹具
CN110587122A (zh) * 2019-10-28 2019-12-20 中国科学院上海光学精密机械研究所 激光材料损伤性能的预处理装置和处理方法
CN114633035B (zh) * 2022-05-11 2022-08-12 东莞市盛雄激光先进装备股份有限公司 一种正极极片的制片方法、制片系统及正极极片

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