CN103954927B - Volume resistance and square resistance change calibrating installation and calibration steps thereof - Google Patents

Volume resistance and square resistance change calibrating installation and calibration steps thereof Download PDF

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Publication number
CN103954927B
CN103954927B CN201410217300.5A CN201410217300A CN103954927B CN 103954927 B CN103954927 B CN 103954927B CN 201410217300 A CN201410217300 A CN 201410217300A CN 103954927 B CN103954927 B CN 103954927B
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China
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stitch
connection circuit
calibration
current source
calibrating installation
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CN201410217300.5A
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Chinese (zh)
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CN103954927A (en
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周学峰
闫萍
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常州天合光能有限公司
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Publication of CN103954927A publication Critical patent/CN103954927A/en
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Abstract

The invention discloses a kind of volume resistance and square resistance changes calibrating installation and calibration steps thereof, volume resistance and square resistance change calibrating installation, it comprises current source, voltage acquisition equipment, RS232 output interface and is used for the RS232 input interface of grafting calibration module to be measured, and the one No. 1 stitch, the one No. 2 stitch, the one No. 3 stitch of RS232 output interface are connected respectively by connection circuit correspondence with the two No. 4 stitch with the two No. 1 stitch of RS232 input interface, the two No. 2 stitch, the two No. 3 stitch with the one No. 4 stitch; One pole of described current source is connected in the connection circuit of the one No. 1 stitch and the two No. 1 stitch, and its another pole is connected in the connection circuit of the one No. 4 stitch and the two No. 4 stitch; One pole of described voltage acquisition equipment is connected in the connection circuit of the one No. 2 stitch the two No. 2 stitch; Its another pole is connected in the connection circuit of the one No. 3 stitch and the two No. 3 stitch.The present invention can realize the calibration to calibration module, thus ensures accuracy and the traceability of the rear Square resistance measurement of sun power crystal silicon cell diffusion.

Description

Volume resistance and square resistance change calibrating installation and calibration steps thereof
Technical field
The present invention relates to a kind of volume resistance and square resistance changes calibrating installation and calibration steps thereof, belong to the fields of measurement of square resistance after the diffusion of sun power crystal silicon cell.
Background technology
At present, the existing domestic unspecial calibrating installation to calibration module also has and does not have special calibration steps, needs to deliver to external genuine and does special calibration.
Summary of the invention
Technical matters to be solved by this invention is the defect overcoming prior art, a kind of volume resistance and square resistance is provided to change calibrating installation, it can realize the calibration to calibration module, thus ensures accuracy and the traceability of the rear Square resistance measurement of sun power crystal silicon cell diffusion.
In order to solve the problems of the technologies described above, technical scheme of the present invention is: a kind of volume resistance and square resistance change calibrating installation, it comprises current source, voltage acquisition equipment, RS232 output interface and is used for the RS232 input interface of grafting calibration module to be measured, and the one No. 1 stitch, the one No. 2 stitch, the one No. 3 stitch of RS232 output interface are connected respectively by connection circuit correspondence with the two No. 4 stitch with the two No. 1 stitch of RS232 input interface, the two No. 2 stitch, the two No. 3 stitch with the one No. 4 stitch; One pole of described current source is connected in the connection circuit of the one No. 1 stitch and the two No. 1 stitch, and another pole of described current source is connected in the connection circuit of the one No. 4 stitch and the two No. 4 stitch; One pole of described voltage acquisition equipment is connected in the connection circuit of the one No. 2 stitch and the two No. 2 stitch; Another pole of described voltage acquisition equipment is connected in the connection circuit of the one No. 3 stitch and the two No. 3 stitch.
Further in order to avoid external environment condition is on the impact of input current and output voltage, the two poles of the earth of described current source are provided with anti-tampering magnetic coil respectively with the connection of corresponding connection circuit, and the two poles of the earth of described voltage acquisition equipment are also provided with anti-tampering magnetic coil respectively with the connection of corresponding connection circuit.
Present invention also offers the calibration steps that a kind of volume resistance and square resistance change calibrating installation, the step of the method is as follows:
A) calibration module to be measured is inserted in RS232 input interface;
B) by current source to input current I in the one No. 1 stitch and the connection circuit of the two No. 1 stitch and the connection circuit of the one No. 4 stitch and the two No. 4 stitch; Wherein, the unit of electric current is mA;
C) adopt voltage acquisition equipment gather in the one No. 2 stitch and the connection circuit of the two No. 2 stitch and the connection circuit of the one No. 3 stitch and the two No. 3 stitch between output voltage V; Wherein, the unit of voltage is mV;
D) volume resistance R and the square resistance R of calibration module to be measured is calculated s, its computing formula is as follows: R=V/I; R s=k*R, wherein, k=π/ln2.
After have employed technique scheme, the present invention can measure its volume resistance R exactly, thus learns its square resistance R s, thus the calibration to calibration module can be realized, thus ensure accuracy and the traceability of the rear Square resistance measurement of sun power crystal silicon cell diffusion.
Accompanying drawing explanation
Fig. 1 is the structural representation that volume resistance of the present invention and square resistance change calibrating installation;
Fig. 2 is the measuring principle figure of four probes in a line pin.
Embodiment
In order to make content of the present invention more easily be clearly understood, below according to specific embodiment also by reference to the accompanying drawings, the present invention is further detailed explanation.
As shown in Figure 1, a kind of volume resistance and square resistance change calibrating installation, it comprises current source 1, voltage acquisition equipment 2, RS232 output interface 3 and is used for the one No. 1 stitch of RS232 input interface 4, RS232 output interface 3 of grafting calibration module to be measured, the one No. 2 stitch, the one No. 3 stitch and is connected respectively by connection circuit correspondence with the two No. 4 stitch with the two No. 1 stitch of RS232 input interface 4, the two No. 2 stitch, the two No. 3 stitch with the one No. 4 stitch; One pole of current source 1 is connected in the connection circuit of the one No. 1 stitch and the two No. 1 stitch, and another pole of described current source 1 is connected in the connection circuit of the one No. 4 stitch and the two No. 4 stitch; One pole of described voltage acquisition equipment 2 is connected in the connection circuit of the one No. 2 stitch and the two No. 2 stitch; Another pole of described voltage acquisition equipment 2 is connected in the connection circuit of the one No. 3 stitch and the two No. 3 stitch.Current source 1 adopts SourceMeter digital sourcemeter, voltage acquisition equipment 2 adopts ReferenceMultimeTer, calibration module of the present invention is that 280SI-MIC calibrates module, it is used: the module of low resistance be metallic resistance, the module of high value be (the precision < 0.1%) that carbon film and burning membrane material are made, measurement interface is unified adopts RS232-IOIOI.RS232 output interface 3 and RS232 input interface 4 adopt the plastic housing of digital multimeter as body, and fixed by a pair RS232-IO test adaptor mouth holding screw, the rated range of current/voltage test channel is 1A/20V.
The two poles of the earth of current source 1 are provided with anti-tampering magnetic coil 5 respectively with the connection of corresponding connection circuit, and the two poles of the earth of described voltage acquisition equipment 2 are also provided with anti-tampering magnetic coil 5 respectively with the connection of corresponding connection circuit.
Volume resistance and square resistance change a calibration steps for calibrating installation, and the step of the method is as follows:
A) calibration module to be measured is inserted in RS232 input interface 4;
B) by current source 1 to input current I in the one No. 1 stitch and the connection circuit of the two No. 1 stitch and the connection circuit of the one No. 4 stitch and the two No. 4 stitch; Wherein, the unit of electric current is mA;
C) adopt voltage acquisition equipment 2 gather in the one No. 2 stitch and the connection circuit of the two No. 2 stitch and the connection circuit of the one No. 3 stitch and the two No. 3 stitch between output voltage V; Wherein, the unit of voltage is mV;
D) volume resistance R and the square resistance R of calibration module to be measured is calculated s, its computing formula is as follows: R=V/I; R s=k*R, wherein, k=π/ln2.
Computing formula: R=V/I; R s=k*R, wherein, k=π/ln2 obtains according to following theory: the measuring principle of four probes in a line pin as shown in Figure 2, four probes of arranging in a line are pressed in sample on the surface with certain pressure perpendicular, electric current I (mA) is passed between 1,4 probes, 2, certain voltage V (mV) is just produced between 3 probes, different with the size of sample according to metering system, carry out square resistance and volume resistance is changed.
For a very thin layer (during thickness t < < probe spacing S), we obtain electric current loop instead of ball.Therefore the region A=2 π xt expressed.Derive as follows:
As R=V/2I, then resistivity is:
&rho; = &pi; t l n 2 ( V I )
In addition, the pass of thin layer square resistance and resistivity is:
R s = &rho; t
Then, the relational expression deriving square resistance and volume resistance is: R s=k* (V/I), k=π/ln2 ≈ 4.53
Above-described specific embodiment; technical matters, technical scheme and beneficial effect that the present invention solves are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (3)

1. a volume resistance and square resistance change calibrating installation, it is characterized in that: it comprises current source (1), voltage acquisition equipment (2), RS232 output interface (3) and is used for the RS232 input interface (4) of grafting calibration module to be measured, the one No. 1 stitch, the one No. 2 stitch, the one No. 3 stitch of RS232 output interface (3) are connected respectively by connection circuit correspondence with the two No. 4 stitch with the two No. 1 stitch of RS232 input interface (4), the two No. 2 stitch, the two No. 3 stitch with the one No. 4 stitch; One pole of described current source (1) is connected in the connection circuit of the one No. 1 stitch and the two No. 1 stitch, and another pole of described current source (1) is connected in the connection circuit of the one No. 4 stitch and the two No. 4 stitch; One pole of described voltage acquisition equipment (2) is connected in the connection circuit of the one No. 2 stitch and the two No. 2 stitch; Another pole of described voltage acquisition equipment (2) is connected in the connection circuit of the one No. 3 stitch and the two No. 3 stitch.
2. volume resistance according to claim 1 and square resistance change calibrating installation, it is characterized in that: the two poles of the earth of described current source (1) are provided with anti-tampering magnetic coil (5) respectively with the connection of corresponding connection circuit, the two poles of the earth of described voltage acquisition equipment (2) are also provided with anti-tampering magnetic coil (5) respectively with the connection of corresponding connection circuit.
3. volume resistance as claimed in claim 1 or 2 and square resistance change a calibration steps for calibrating installation, it is characterized in that the step of the method is as follows:
A) calibration module to be measured is inserted in RS232 input interface (4);
B) by current source (1) to input current I in the one No. 1 stitch and the connection circuit of the two No. 1 stitch and the connection circuit of the one No. 4 stitch and the two No. 4 stitch; Wherein, the unit of electric current is mA;
C) adopt voltage acquisition equipment (2) gather in the one No. 2 stitch and the connection circuit of the two No. 2 stitch and the connection circuit of the one No. 3 stitch and the two No. 3 stitch between output voltage V; Wherein, the unit of voltage is mV;
D) volume resistance R and the square resistance R of calibration module to be measured is calculated s, its computing formula is as follows: R=V/I; R s=k*R, wherein, k=π/ln2.
CN201410217300.5A 2014-05-21 2014-05-21 Volume resistance and square resistance change calibrating installation and calibration steps thereof CN103954927B (en)

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CN104614593B (en) * 2014-12-26 2017-12-15 同济大学 One kind is based on self-alignment high-precision intelligent instrument system and its application process

Citations (8)

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Publication number Priority date Publication date Assignee Title
GB2184849A (en) * 1985-06-13 1987-07-01 Plessey Co Plc Calibrating microwave integrated circuit test systems
DE3800243A1 (en) * 1987-01-09 1988-07-21 Asahi Chemical Ind Magnetoresistive element made from ferromagnetic material, and method for producing it
CN1897242A (en) * 2005-07-14 2007-01-17 中芯国际集成电路制造(上海)有限公司 Method and system for calibrating semiconductor-device manufacture measuring tool
CN101980041A (en) * 2010-10-25 2011-02-23 南车戚墅堰机车有限公司 Intelligent calibration system for instrument
CN202433517U (en) * 2012-01-30 2012-09-12 江苏省计量科学研究院 Portable EMC (electromagnetic compatibility) test-level detecting device for electric energy meter
WO2013167631A1 (en) * 2012-05-07 2013-11-14 Melexis Technologies Nv Method and device for sensing isotropic stress and providing a compensation for the piezo-hall effect
CN103412272A (en) * 2013-06-17 2013-11-27 上海晶盟硅材料有限公司 Standard sheet for calibrating mercury-probe resistivity measuring instrument and mercury-probe resistivity measuring instrument calibration method
CN103424732A (en) * 2013-08-05 2013-12-04 广西电网公司电力科学研究院 Detection device and detection method for direct current electric energy meter

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2184849A (en) * 1985-06-13 1987-07-01 Plessey Co Plc Calibrating microwave integrated circuit test systems
DE3800243A1 (en) * 1987-01-09 1988-07-21 Asahi Chemical Ind Magnetoresistive element made from ferromagnetic material, and method for producing it
CN1897242A (en) * 2005-07-14 2007-01-17 中芯国际集成电路制造(上海)有限公司 Method and system for calibrating semiconductor-device manufacture measuring tool
CN101980041A (en) * 2010-10-25 2011-02-23 南车戚墅堰机车有限公司 Intelligent calibration system for instrument
CN202433517U (en) * 2012-01-30 2012-09-12 江苏省计量科学研究院 Portable EMC (electromagnetic compatibility) test-level detecting device for electric energy meter
WO2013167631A1 (en) * 2012-05-07 2013-11-14 Melexis Technologies Nv Method and device for sensing isotropic stress and providing a compensation for the piezo-hall effect
CN103412272A (en) * 2013-06-17 2013-11-27 上海晶盟硅材料有限公司 Standard sheet for calibrating mercury-probe resistivity measuring instrument and mercury-probe resistivity measuring instrument calibration method
CN103424732A (en) * 2013-08-05 2013-12-04 广西电网公司电力科学研究院 Detection device and detection method for direct current electric energy meter

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Address after: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2

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