CN103943452B - Process control method and device for plasma treatment - Google Patents
Process control method and device for plasma treatment Download PDFInfo
- Publication number
- CN103943452B CN103943452B CN201410175598.8A CN201410175598A CN103943452B CN 103943452 B CN103943452 B CN 103943452B CN 201410175598 A CN201410175598 A CN 201410175598A CN 103943452 B CN103943452 B CN 103943452B
- Authority
- CN
- China
- Prior art keywords
- technological
- data
- processing step
- dog
- process data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 304
- 238000009832 plasma treatment Methods 0.000 title claims abstract description 30
- 238000004886 process control Methods 0.000 title claims abstract description 23
- 238000004891 communication Methods 0.000 claims abstract description 18
- 238000012544 monitoring process Methods 0.000 claims abstract description 8
- 238000012545 processing Methods 0.000 claims description 64
- 238000005538 encapsulation Methods 0.000 claims description 7
- 238000007619 statistical method Methods 0.000 claims description 5
- 241001269238 Data Species 0.000 claims description 4
- 238000010923 batch production Methods 0.000 claims description 4
- 238000011112 process operation Methods 0.000 abstract 2
- 238000004806 packaging method and process Methods 0.000 abstract 1
- 238000007726 management method Methods 0.000 description 43
- 238000005516 engineering process Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000013523 data management Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- General Factory Administration (AREA)
Abstract
The embodiment of the invention discloses a process control method and a device for plasma treatment, wherein the method comprises the following steps: acquiring process data in a process flow parameter management table, wherein the process flow parameter management table comprises configured process data, and the process data comprises process steps and process parameters under the corresponding process steps; and packaging the acquired process data through data communication based on an OPC (OLE for process control) protocol, and sending the packaged process data to industrial configuration monitoring equipment so that the industrial configuration monitoring equipment controls the process equipment connected with the industrial configuration monitoring equipment to execute corresponding process operation according to the process steps and the process parameters. The invention can flexibly process the process data, track and adjust the process operation executed by the process equipment in real time, and improve the process treatment quality.
Description
Technical field
The present invention relates to control technology field, particularly relate to a kind of process control method and device of plasma treatment.
Background technology
Plasma technique is one of method the most frequently used in vacuum processing techniques, is widely used in the etching of surface mass and the preparation of various film.In plasma-treating technology, technological parameter is many and assorted, a complete operational process of craft comprises a large amount of steps, and each step comprises a large amount of parametric variables, adopt traditional data management mode to revise, increase and decrease and storage technology data, convenient not, easily generation optimum configurations mistake or historical data cannot store problems such as calling simultaneously.
Summary of the invention
Embodiment of the present invention technical problem to be solved is, provides a kind of process control method and device of plasma treatment, can flexibly according to the process data of configuration, and real-time Controlling Technology equipment performs corresponding technological operation.
In order to solve the problems of the technologies described above, embodiments provide a kind of process control method of plasma treatment, comprising:
Obtain the process data in technological process parameter management table, wherein, described technological process parameter management table comprises the process data of configuration, and this process data comprises the technological parameter under processing step and corresponding processing step;
By the data communication based on OPC agreement, the process data got is encapsulated, and the process data after encapsulation is sent to industrial configuration watch-dog, perform corresponding technological operation to make described industrial configuration watch-dog according to described processing step and the coupled process equipment of process parameter control.
Wherein, described method also comprises:
Perform in operational process of craft at process equipment, obtain the technological operation state real time information that described industrial configuration watch-dog monitors from described process equipment, wherein, the real time information of described technological operation state comprises the actual process parameter under the processing step and corresponding processing step performed;
By the processing step that performing in the real time information of described technological operation state and actual process parameter, with the processing step in the described process data configured and technological parameter, contrast;
According to described comparing result, the technological operation that industrial configuration watch-dog described in Reverse Turning Control adjustment is performing.
Wherein, described technological process parameter management table comprises the EXCEL table for data processing and statistical analysis; Described industrial configuration watch-dog comprises the Programmable Logic Controller for obtaining technological operation state real time information and order process equipment execution technological operation from process equipment, and configuration software.
Described method, also comprises:
Obtain at least one statistical graph that described technique configuration monitoring equipment generates according to described technological operation state real time information;
By the data communication based on described OPC agreement, at least one statistical graph of described acquisition is sent to described technological process parameter management table.
Perform in operational process of craft at described process equipment, obtain described industrial configuration watch-dog from after the technological operation state real time information that described process equipment monitors, also comprise:
Technological operation state real time information described in described technological process parameter management table real-time storage is indicated to analyze improving technique operating process in order to monitor staff.
Described method, also comprises:
When described technological process parameter management table comprises at least two batches of process datas, receive the control command selected by drop-down menu that monitor staff is provided by described technological parameter management table;
By the data communication based on OPC agreement, send to after described control command is encapsulated described industrial configuration watch-dog make process equipment according to described control command process control command instruction batch process data;
Wherein, described control command comprises the process data running or stop certain batch.
Correspondingly, the embodiment of the present invention also provides a kind of process control device of plasma treatment, comprising:
Process data acquisition module, for obtaining the process data in technological process parameter management table, wherein, described technological process parameter management table comprises the process data of configuration, and this process data comprises the technological parameter under processing step and corresponding processing step;
Process data sending module, for passing through the data communication based on OPC agreement, the process data that described process data acquisition module gets is encapsulated, and the process data after encapsulation is sent to industrial configuration watch-dog, perform corresponding technological operation to make described industrial configuration watch-dog according to described processing step and the coupled process equipment of process parameter control.
Described device also comprises:
Technological operation state real time information acquisition module, for performing in operational process of craft at process equipment, obtain the technological operation state real time information that described industrial configuration watch-dog monitors from described process equipment, wherein, the real time information of described technological operation state comprises actual process parameter under the processing step and associated process steps performed;
Contrast module, for the processing step that will perform in the real time information of described technological operation state and actual process parameter, with the processing step in the described process data configured and technological parameter, contrasts;
Control module, for according to described comparing result, the technological operation that industrial configuration watch-dog described in Reverse Turning Control adjustment is performing.
Wherein, described technological process parameter management table comprises the EXCEL table for data processing and statistical analysis;
Described industrial configuration watch-dog comprises the Programmable Logic Controller for obtaining technological operation state real time information and order process equipment execution technological operation from process equipment, and configuration software.
Implement the embodiment of the present invention, there is following beneficial effect:
The embodiment of the present invention is by the process data transmission between described technological process parameter management table and described industrial configuration watch-dog, described Technological Process Management table edit process data can be adopted, then described industrial configuration watch-dog is sent to by described process data to make process equipment perform corresponding technological operation, improve the process data disposal ability in plasma treatment, can flexible configuration process data, and then improve the product quality of plasma treatment.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The schematic flow sheet of the process control method of a kind of plasma treatment that Fig. 1 provides for the embodiment of the present invention;
A kind of concrete technological process parameter management table that Fig. 2 provides for the embodiment of the present invention;
The schematic flow sheet of the process control method of the another kind of plasma treatment that Fig. 3 provides for the embodiment of the present invention;
The structural representation of the process control device of a kind of plasma treatment that Fig. 4 provides for the embodiment of the present invention;
The structural representation of the process control device of the another kind of plasma treatment that Fig. 5 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Plasma treatment technique is widely used in the preparation of surface mass etching and various film, for different products and technique, for completing the setting of technological parameter in process data and technological process, amendment or storage fast, and facilitate the process data of visual execution different batches, just need a kind of process control method of plasma treatment to process process data.
In prior art, the processing capacity of the process data adopting industrial configuration watch-dog to carry, the process of simple, a small amount of process data can only be carried out, the requirement of high volume process data cannot be met, the process control method of a kind of plasma treatment provided by the invention can solve the problem, and specifically refers to following optional inventive embodiments.
Refer to Fig. 1, the schematic flow sheet of the process control method of a kind of plasma treatment provided for the embodiment of the present invention, described method comprises:
S101: obtain the process data in technological process parameter management table, wherein, described technological process parameter management table comprises the process data of configuration, and this process data comprises the technological parameter under processing step and corresponding processing step;
Optionally, the process data in described acquisition technological process parameter management table, the interface write functional block provide from described technological process parameter management table by programming language obtains process data.Described technological process parameter management table can be EXCEL table, form NO. Sheetn represents the process data of different batches, the processing step that line display performs, the technological parameter performing every process steps is shown in list, according to (form NO., line number, row number) locate and obtain described process data, by described technological process parameter management table, editing and processing is carried out to described process data.
Concrete, described technological parameter comprise prepare film temperature, gas flow, operation pressure, technique power supply power, process time etc., described fault alarm parameter comprises vacuum pressure, the temperature rate of rise, valve event time delay interval etc.; Described processing step comprises placement sample, opening power, preheating, pressurizes, passes into the operation such as working gas or powered-down.
Alternatively, a kind of technological process parameter management table comprising process data specifically shown in Figure 2, first row represents each technological parameter title, the first row represents each processing step, other guide represents the actual value of often kind of technological parameter in each processing step, as table in perform processing step step6 time, the SF of 75sccm need be passed into
6gas, the O of 60sccm
2deng, when performing step step7, the radio-frequency power of process equipment is 1000W.
S102: by the data communication based on OPC agreement, the process data got is encapsulated, and the process data after encapsulation is sent to industrial configuration watch-dog, perform corresponding technological operation to make described industrial configuration watch-dog according to described processing step and the coupled process equipment of process parameter control;
Wherein, described by the data communication based on industrial standard OPC (OLEforProcessControlObjectLinkingandEmbedding) agreement, the process data got is encapsulated and namely by the rule of communication of arranging between local terminal and described industrial configuration watch-dog or data format, described process data is sent to described industrial configuration watch-dog; Then, described process data is sent to corresponding process equipment by relevant driving interface by described industrial configuration watch-dog; Finally, described process equipment performs technological operation according to the processing step comprised in described process data and technological parameter.
The embodiment of the present invention is by realizing the process data transmission between described technological process parameter management table and described industrial configuration watch-dog, can by described Technological Process Management table edit process data, then described industrial configuration watch-dog is sent to by described process data to make process equipment perform corresponding technological operation, improve the process data disposal ability in plasma treatment, flexible configuration process data, and then the product quality that improve plasma treatment.
Refer to Fig. 3, the schematic flow sheet of the process control method of the another kind of plasma treatment provided for the embodiment of the present invention, described method specifically comprises:
S201: obtain the process data in technological process parameter management table, wherein, described technological process parameter management table comprises the process data of configuration, and this process data comprises the technological parameter under processing step and corresponding processing step;
S202: by the data communication based on OPC agreement, the process data got is encapsulated, and the process data after encapsulation is sent to industrial configuration watch-dog, perform corresponding technological operation to make described industrial configuration watch-dog according to described processing step and the coupled process equipment of process parameter control;
Step S201, S202 are identical with S101, the S102 in above-described embodiment, no longer describe in detail here.
S203: perform in operational process of craft at described process equipment, obtain the technological operation state real time information that described industrial configuration watch-dog monitors from described process equipment;
Wherein, the real time information of described technological operation state comprises actual process parameter under the processing step and associated process steps performed;
S204: indicate technological operation state real time information described in described technological process parameter management table real-time storage to analyze improving technique operating process in order to monitor staff;
Step S203, S204 achieve described technological process parameter management table and carry out implementation record storage to the data message of whole operational process of craft, can provide reliable foundation for product tablet quality follow-up analysis and process modification.
S205: by the processing step that performing in the real time information of described technological operation state and actual process parameter, with the processing step in the described process data configured and technological parameter, contrast;
S206: according to described comparing result, the technological operation that industrial configuration watch-dog described in Reverse Turning Control adjustment is performing.
Concrete, described by the processing step that performing in the real time information of described technological operation state and actual process parameter, with the processing step in the described process data configured and technological parameter, carry out contrast to comprise: contrast whether the processing step performed is the processing step configured, whether the technological parameter under the described processing step performed is the technological parameter under the corresponding processing step configured, if the temperature under the pre-heating technique step of configuration is 45 degree, temperature under the current pre-heating technique step performed is 40 degree, then need according to this result, perform described step S206.
S207: obtain at least one statistical graph that described technique configuration monitoring equipment generates according to described technological operation state real time information;
S208: by the data communication based on described OPC agreement, sends to described technological process parameter management table by least one statistical graph of described acquisition;
Described technique configuration monitoring equipment can represent with various statistical graph form according to the mass data monitored, and local terminal can obtain described statistical graph, and sends to the technological process parameter management table on upper strata, for labor operational process of craft.
Further, the described method of the embodiment of the present invention also comprises: when described technological process parameter management table comprises at least two batches of process datas, and when receiving the control command selected by drop-down menu that monitor staff provided by described technological parameter management table, by the data communication based on OPC agreement, send to after described control command is encapsulated described industrial configuration watch-dog make process equipment according to described control command process control command instruction batch process data.
Wherein, described control command comprises the process data running or stop certain batch.
The embodiment of the present invention is by realizing the transmission of process data between described technological process parameter management table and described industrial configuration watch-dog and technological operation state information, described Technological Process Management table inediting process data can be adopted or contrast according to the real time information of described technological operation state and the process data configured, to adjust described technological operation in real time, improve the process data disposal ability in plasma treatment, have modified technological operation precision in real time, and then improve the product quality of plasma treatment.
Refer to Fig. 4, the structural representation of the process control device of a kind of plasma treatment provided for the embodiment of the present invention, described device comprises:
Process data acquisition module 1, for obtaining the process data in technological process parameter management table, wherein, described technological process parameter management table comprises the process data of configuration, and this process data comprises the technological parameter under processing step and corresponding processing step;
Process data sending module 2, for passing through the data communication based on OPC agreement, the process data that described process data acquisition module gets is encapsulated, and the process data after encapsulation is sent to industrial configuration watch-dog, perform corresponding technological operation to make described industrial configuration watch-dog according to described processing step and the coupled process equipment of process parameter control.
The embodiment of the present invention is by realizing the process data transmission between described technological process parameter management table and described industrial configuration watch-dog, can by described Technological Process Management table edit process data, then described industrial configuration watch-dog is sent to by described process data to make process equipment perform corresponding technological operation, improve the process data disposal ability in plasma treatment, flexible configuration process data, and then the product quality that improve plasma treatment.
Refer to Fig. 5, the structural representation of the process control device of the another kind of plasma treatment provided for the embodiment of the present invention, device described in the embodiment of the present invention is except the process data acquisition module 1 comprised described in foregoing invention embodiment and described process data sending module 2, also comprise: technological operation state real time information acquisition module 3, for performing in operational process of craft at described process equipment, obtain the technological operation state real time information that described industrial configuration watch-dog monitors from described process equipment, wherein, the real time information of described technological operation state comprises the actual process parameter under the processing step and corresponding processing step performed,
Contrast module 4, for the processing step that will perform in the real time information of described technological operation state and actual process parameter, with the processing step in the described process data configured and technological parameter, contrasts;
Control module 5, for according to described comparing result, the technological operation that industrial configuration watch-dog described in Reverse Turning Control adjustment is performing.
Wherein, described technological process parameter management table comprises the EXCEL table for data processing and statistical analysis; Described industrial configuration watch-dog comprises the Programmable Logic Controller for obtaining technological operation state real time information and order process equipment execution technological operation from process equipment, and configuration software.
In addition, described device also comprises:
Statistical graph acquisition module 6, for obtaining at least one statistical graph that described technique configuration monitoring equipment generates according to described technological operation state real time information;
Statistical graph sending module 7, for by the data communication based on described OPC agreement, sends to described technological process parameter management table by least one statistical graph of described acquisition.
Further, described device also comprises:
Instruction memory module 8, is used to indicate technological operation state information described in described technological process parameter management table real-time storage and analyzes improving technique operating process in order to monitor staff.
Control command receiver module 9, for comprising at least two batches of process datas when described technological process parameter management table, receives the control command selected by drop-down menu that monitor staff is provided by described technological parameter management table;
Control command sending module 10, for the process data by sending to after described control command being encapsulated based on the data communication of OPC agreement described industrial configuration watch-dog to make process equipment control command instruction batch according to described control command process, and by the operational status information of described this batch processes of technological operation state real time information acquisition module 3 Real-time Obtaining.
Wherein, described control command comprises the process data running or stop certain batch.
The embodiment of the present invention is by realizing the process data transmission between described technological process parameter management table and described industrial configuration watch-dog, can by described Technological Process Management table edit process data, then described industrial configuration watch-dog is sent to make process equipment perform corresponding technological operation the process data of described editor or configuration, and the technological operation state real time information of acquisition and the process data configured can be contrasted, the technological operation that real-time adjustment is performing, improve the process data processing accuracy in plasma treatment, and then improve the product quality of plasma treatment.
One of ordinary skill in the art will appreciate that all or part of flow process realized in above-described embodiment method, that the hardware that can carry out instruction relevant by computer program has come, described program can be stored in a computer read/write memory medium, this program, when performing, can comprise the flow process of the embodiment as above-mentioned each side method.Wherein, described storage medium can be magnetic disc, CD, read-only store-memory body (Read-OnlyMemory, ROM) or random store-memory body (RandomAccessMemory, RAM) etc.
Above disclosedly be only present pre-ferred embodiments, certainly can not limit the interest field of the present invention with this, therefore according to the equivalent variations that the claims in the present invention are done, still belong to the scope that the present invention is contained.
Claims (10)
1. a process control method for plasma treatment, is characterized in that, comprising:
Obtain the process data in technological process parameter management table, wherein, described technological process parameter management table comprises the process data of configuration, and this process data comprises the technological parameter under processing step and corresponding processing step;
By the data communication based on OPC agreement, the process data got is encapsulated, and the process data after encapsulation is sent to industrial configuration watch-dog, perform corresponding technological operation to make described industrial configuration watch-dog according to described processing step and the coupled process equipment of process parameter control.
2. the method for claim 1, is characterized in that, also comprises:
Perform in operational process of craft at described process equipment, obtain the technological operation state real time information that described industrial configuration watch-dog monitors from described process equipment, wherein, the real time information of described technological operation state comprises the actual process parameter under the processing step and corresponding processing step performed;
By the processing step that performing in the real time information of described technological operation state and actual process parameter, with the processing step in the process data of described configuration and technological parameter, contrast;
According to described comparing result, the technological operation that industrial configuration watch-dog described in Reverse Turning Control adjustment is performing.
3. method as claimed in claim 1 or 2, is characterized in that, described technological process parameter management table comprises the EXCEL table for data processing and statistical analysis.
4. method as claimed in claim 1 or 2, is characterized in that, described industrial configuration watch-dog comprises the Programmable Logic Controller for obtaining technological operation state real time information and order process equipment execution technological operation from process equipment, and configuration software.
5. method as claimed in claim 2, is characterized in that, also comprise:
Obtain at least one statistical graph that described technique configuration monitoring equipment generates according to described technological operation state real time information;
By the data communication based on described OPC agreement, at least one statistical graph of described acquisition is sent to described technological process parameter management table.
6. method as claimed in claim 2, is characterized in that, performs in operational process of craft at described process equipment, obtains described industrial configuration watch-dog from after the technological operation state real time information that described process equipment monitors, also comprises:
Technological operation state real time information described in described technological process parameter management table real-time storage is indicated to analyze improving technique operating process in order to monitor staff.
7. the method for claim 1, is characterized in that, also comprises:
When described technological process parameter management table comprises at least two batches of process datas, receive the control command selected by drop-down menu that monitor staff is provided by described technological parameter management table;
By the data communication based on OPC agreement, send to after described control command is encapsulated described industrial configuration watch-dog make process equipment according to described control command process control command instruction batch process data;
Wherein, described control command comprises the process data running or stop certain batch.
8. a process control device for plasma treatment, is characterized in that, comprising:
Process data acquisition module, for obtaining the process data in technological process parameter management table, wherein, described technological process parameter management table comprises the process data of configuration, and this process data comprises the technological parameter under processing step and corresponding processing step;
Process data sending module, for passing through the data communication based on OPC agreement, the process data that described process data acquisition module gets is encapsulated, and the process data after encapsulation is sent to industrial configuration watch-dog, perform corresponding technological operation to make described industrial configuration watch-dog according to described processing step and the coupled process equipment of process parameter control.
9. device as claimed in claim 8, is characterized in that, also comprise:
Technological operation state real time information acquisition module, for performing in operational process of craft at described process equipment, obtain the technological operation state real time information that described industrial configuration watch-dog monitors from described process equipment, wherein, the real time information of described technological operation state comprises actual process parameter under the processing step and corresponding processing step performed;
Contrast module, for the processing step that will perform in the real time information of described technological operation state and actual process parameter, with the processing step in the process data of described configuration and technological parameter, contrasts;
Control module, for according to described comparing result, the technological operation that industrial configuration watch-dog described in Reverse Turning Control adjustment is performing.
10. device as claimed in claim 8 or 9, is characterized in that, described technological process parameter management table comprises the EXCEL table for data processing and statistical analysis;
Described industrial configuration watch-dog comprises the Programmable Logic Controller for obtaining technological operation state real time information and order process equipment execution technological operation from process equipment, and configuration software.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410175598.8A CN103943452B (en) | 2014-04-28 | 2014-04-28 | Process control method and device for plasma treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410175598.8A CN103943452B (en) | 2014-04-28 | 2014-04-28 | Process control method and device for plasma treatment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103943452A CN103943452A (en) | 2014-07-23 |
| CN103943452B true CN103943452B (en) | 2016-04-27 |
Family
ID=51191067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410175598.8A Active CN103943452B (en) | 2014-04-28 | 2014-04-28 | Process control method and device for plasma treatment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103943452B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105867338B (en) * | 2016-05-25 | 2018-08-14 | 上海华力微电子有限公司 | A kind of the intelligent art interlock control method and system of ion implantation apparatus |
| CN112019805A (en) * | 2020-07-24 | 2020-12-01 | 神华和利时信息技术有限公司 | Process environment and process monitoring method and device, storage medium and electronic equipment |
| CN114625093B (en) * | 2022-03-25 | 2023-05-02 | 佛山市博顿光电科技有限公司 | Process control method, device and industrial control system |
| CN117026373B (en) * | 2023-10-10 | 2023-12-26 | 深圳优普莱等离子体技术有限公司 | Abnormal parameter detection method and related equipment in diamond growth process |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1638356A (en) * | 2003-12-26 | 2005-07-13 | 株式会社Ntt都科摩 | Transmitter device and relay device for performing data transmission control |
| CN101841616A (en) * | 2009-03-16 | 2010-09-22 | 佳能株式会社 | Information processor and control method thereof |
| CN102081358A (en) * | 2009-12-01 | 2011-06-01 | 爱默生过程管理电力和水解决方案公司 | Decentralized industrial process simulation system |
| CN102854870A (en) * | 2012-05-09 | 2013-01-02 | 上海西门子工业自动化有限公司 | Distributed control system and data report generating method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1197130C (en) * | 2000-07-04 | 2005-04-13 | 东京毅力科创株式会社 | Operation monitoring method for treatment apparatus |
| US6641746B2 (en) * | 2001-09-28 | 2003-11-04 | Agere Systems, Inc. | Control of semiconductor processing |
-
2014
- 2014-04-28 CN CN201410175598.8A patent/CN103943452B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1638356A (en) * | 2003-12-26 | 2005-07-13 | 株式会社Ntt都科摩 | Transmitter device and relay device for performing data transmission control |
| CN101841616A (en) * | 2009-03-16 | 2010-09-22 | 佳能株式会社 | Information processor and control method thereof |
| CN102081358A (en) * | 2009-12-01 | 2011-06-01 | 爱默生过程管理电力和水解决方案公司 | Decentralized industrial process simulation system |
| CN102854870A (en) * | 2012-05-09 | 2013-01-02 | 上海西门子工业自动化有限公司 | Distributed control system and data report generating method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103943452A (en) | 2014-07-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103943452B (en) | Process control method and device for plasma treatment | |
| JP7260227B2 (en) | Method and Apparatus for Defining Stages for Multivariate Batch Control Analysis, Article of Manufacture | |
| CN103019125B (en) | Multitask real-time data processing system and data recording and data analyzing method | |
| CN111673251B (en) | Virtual debugging method and device for welding parameters and welding quality of robot spot welding | |
| CN103522289B (en) | Multi-shaft mechanical arm control method and control device | |
| CN104794005A (en) | Method and device for optimizing CPU running frequencies | |
| CN105652841A (en) | Intelligent programmable logic controller | |
| CN107984471B (en) | Method and device for determining working state of robot and robot | |
| CN105045246B (en) | CIM systems and control method, production information system | |
| CN101833443A (en) | Display control system and method | |
| KR102560634B1 (en) | How to control a PLC using a PC program | |
| GB2533209A (en) | Method and device for managing and configuring field devices in an automation installation | |
| CN109976294B (en) | Intelligent parking method and system | |
| CN202110408U (en) | Computer controller for industrial irradiation electronic linear accelerator | |
| CN201788076U (en) | Laser ageing device | |
| CN109243957A (en) | A kind of control method of plasma-treating technology | |
| CN110647096A (en) | Full monitoring system abnormity alarm signal device and alarm method using same | |
| CN105345447A (en) | Screw locking method and system based on PLC | |
| CN114089645A (en) | Machine tool simulation and monitoring method | |
| CN204256465U (en) | Open restructural intelligent controller | |
| CN207232747U (en) | Data monitoring system | |
| EP2862028B1 (en) | A system and a method for configuring an intelligent electronic device | |
| CN105388874A (en) | Remote workshop control system based on internet | |
| CN107942948B (en) | Method for graphically editing detection and processing programs of probe system | |
| JP6382680B2 (en) | Programmable controller for sampling signal address of SFC active state step |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |