CN103925390A - Piloted control valve group - Google Patents

Piloted control valve group Download PDF

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Publication number
CN103925390A
CN103925390A CN201310009589.7A CN201310009589A CN103925390A CN 103925390 A CN103925390 A CN 103925390A CN 201310009589 A CN201310009589 A CN 201310009589A CN 103925390 A CN103925390 A CN 103925390A
Authority
CN
China
Prior art keywords
pilot
valve
cavity
diaphragm
outlet pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310009589.7A
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Chinese (zh)
Inventor
徐学利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Aeonmed Co Ltd
Original Assignee
Beijing Aeonmed Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Aeonmed Co Ltd filed Critical Beijing Aeonmed Co Ltd
Priority to CN201310009589.7A priority Critical patent/CN103925390A/en
Publication of CN103925390A publication Critical patent/CN103925390A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

The invention discloses a piloted control valve group which comprises a pilot valve, a diaphragm, an elastic part and an electromagnetic valve. A valve cavity is defined in the pilot valve, the diaphragm is arranged in the valve cavity to divide the valve cavity into a first cavity and a second cavity, a damping hole communicated with the first cavity and the second cavity is formed in the diaphragm, an air inlet pipe, an air outlet pipe, an air delivery pipe and an exhaust pipe are arranged on the pilot valve, a second end of the air inlet pipe and a second end of the air outlet pipe are respectively communicated with the second cavity, a first end of the air delivery pipe is communicated with the first cavity, a first end of the exhaust pipe is communicated with the air outlet pipe, the elastic part is arranged in the valve cavity and connected with the diaphragm to push the diaphragm to close the second end of the air outlet pipe, the electromagnetic valve is provided with an air inlet and an air outlet, the air inlet is connected with a second end of the air delivery pipe, and the air outlet is connected with a second end of the exhaust pipe, so that the air delivery pipe is communicated with the exhaust pipe. The piloted control valve group is simple in structure and convenient to inspect and maintain.

Description

Pilot-operated type control valve assembly
Technical field
The present invention relates to manufacture technology field of medical appliance, particularly relate to a kind of pilot-operated type control valve assembly.
Background technique
Here the pilot valve of saying refers to two-way valve, because pressure medium acts on flap, wants to open the pulling force that this valve needs very large, must increase the power of electromagnet, and power consumption greatly like this.In order to address this problem, people have found out leading type structure, this is a kind of method of utilizing valve medium self opened by pressure valve, such as utilizing area to be greater than diaphragm device, the pressure of the medium before valve is delivered on diaphragm, by this power, remove to open flap, pilot valve is exactly a valve that flow area is very little, the unlatching of this valve is by the electromagnetic valve of a smaller power, after pilot valve is opened, utilize the pressure reduction that medium produces on diaphragm to open flap, so just can open and need the valve that strength is very large with the electric energy of smaller power.Said in above-mentioned " circulation area is very little ", normally realizes at a damping hole of import design of valve body, because this aperture design is on valve body, makes valve body structure become complicated, and inspection and maintenance is very inconvenient; The uuper valve chamber of existing pilot valve is all a columniform cavity, is all generally the working life that material by increasing the thickness of diaphragm and improving diaphragm increases diaphragm, and diaphragm is lacked to necessary protective gear.
Summary of the invention
The present invention is intended to one of solve the problems of the technologies described above at least to a certain extent.
For this reason, one object of the present invention is to propose a kind of simple in structure, inspection and maintenance pilot-operated type control valve assembly easily.
According to the pilot-operated type control valve assembly of the embodiment of the present invention, comprise: pilot valve and diaphragm, in described pilot valve, be limited with valve pocket, described diaphragm is located in described valve pocket described valve pocket is divided into the first cavity and the second cavity, described diaphragm is provided with the damping hole that is communicated with described the first cavity and described the second cavity, on described pilot valve, also there is suction tude, steam outlet pipe, pneumatic tube and outlet pipe, wherein, the second end of described suction tude the second end and described steam outlet pipe is communicated with described the second cavity respectively, the first end of described pneumatic tube is communicated with described the first cavity, the first end of described outlet pipe is communicated with described steam outlet pipe, elastic component, described elastic component is located in described valve pocket and is connected often to promote the second end that described diaphragm seals described steam outlet pipe with described diaphragm, and solenoid valve, described solenoid valve has suction port and air outlet, and described suction port is connected with the second end of described pneumatic tube and described air outlet is connected so that described pneumatic tube is communicated with described outlet pipe with the second end of described relief opening.
According to the pilot-operated type control valve assembly of the embodiment of the present invention, will on diaphragm, be provided with damping hole, simple in structure, inspection and maintenance convenience.
In addition, pilot-operated type control valve assembly according to the above embodiment of the present invention can also have following additional technical characteristics:
According to an example of the present invention, on described pilot valve, be also provided with blow-down pipe, on described solenoid valve, be also provided with the drain being communicated with described blow-down pipe.
According to an example of the present invention, described solenoid valve is two-bit triplet solenoid valve.
According to an example of the present invention, described two-bit triplet solenoid valve is open type/normal close type two-bit triplet solenoid valve.
According to an example of the present invention, also comprise diaphragm frame, described diaphragm is erected at described elastic component and described diaphragm support.
According to an example of the present invention, described suction tude is formed on the sidewall of described pilot valve and described steam outlet pipe is formed on the diapire of described pilot valve.
According to an example of the present invention, the second end of described steam outlet pipe has the flange that stretches into described the second cavity, has the fin suitable with described flange on described diaphragm.
According to an example of the present invention, described the first cavity is roughly frustoconic shape.
According to an example of the present invention, described pilot valve is open type/normal close type pilot valve.
According to an example of the present invention, described elastic component is spring.
Additional aspect of the present invention and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage accompanying drawing below combination obviously and is easily understood becoming embodiment's description, wherein:
Fig. 1 is the schematic diagram of pilot-operated type control valve assembly according to an embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, described embodiment's example is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment who is described with reference to the drawings, be exemplary, be intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", orientation or the position relationship of indications such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.
In addition, term " first ", " second " be only for describing object, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characteristics.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the invention, the implication of " a plurality of " is two or more, unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the terms such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can understand as the case may be above-mentioned term concrete meaning in the present invention.
In the present invention, unless otherwise clearly defined and limited, First Characteristic Second Characteristic it " on " or D score can comprise that the first and second features directly contact, also can comprise that the first and second features are not directly contacts but contact by the other feature between them.And, First Characteristic Second Characteristic " on ", " top " and " above " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that First Characteristic level height is higher than Second Characteristic.First Characteristic Second Characteristic " under ", " below " and " below " comprise First Characteristic under Second Characteristic and tiltedly, or only represent that First Characteristic level height is less than Second Characteristic.
Below with reference to accompanying drawing, describe the pilot-operated type control valve assembly according to the embodiment of the present invention in detail.
As shown in Figure 1, the pilot-operated type control valve assembly according to the embodiment of the present invention, comprising: pilot valve 100, diaphragm 200, elastic component 300 and solenoid valve 400.
Specifically, in pilot valve 100, be limited with valve pocket 101.Diaphragm 200 is located in valve pocket 101 valve pocket 101 is divided into the first cavity 1011 and the second cavity 1012.Diaphragm 200 is provided with the damping hole 201 that is communicated with the first cavity 1011 and the second cavity 1012.
On pilot valve 100, also there is suction tude 102, steam outlet pipe 103, pneumatic tube 104 and outlet pipe 105.Wherein, the second end of suction tude 102 second ends (as shown in Figure 1 the right-hand member of suction tude 102) and steam outlet pipe 103 (as shown in Figure 1 the upper end of steam outlet pipe 103) is communicated with the second cavity 1012 respectively.The first end of pneumatic tube 104 (as shown in Figure 1 the lower end of pneumatic tube 104) is communicated with the first cavity 1011, and the first end of outlet pipe 105 (as shown in Figure 1 the left end of outlet pipe 105) is communicated with steam outlet pipe 103.
Elastic component 300 is located in valve pocket 101 and is connected often to promote the second end of diaphragm 200 sealing steam outlet pipes 103 with diaphragm 200.
Solenoid valve 400 has suction port 401 and air outlet 402.The second end of suction port 401 and pneumatic tube 104 (as shown in Figure 1 the upper end of pneumatic tube 104) is connected and the second end of air outlet 402 and outlet pipe 105 (as shown in Figure 1 the upper end of outlet pipe 105) is connected so that pneumatic tube 104 is communicated with outlet pipe 105.
Advantageously, pilot valve 100 can be open type/normal close type pilot valve.Solenoid valve 400 can be open type/normal close type two-bit triplet solenoid valve.Certainly, solenoid valve 400 is not limited to two-bit triplet solenoid valve, can be also the other forms of valves such as manually operated valve, hydraulic operated valve, pneumatic valve.
The pilot valve 100 of take below is simply described according to the working procedure of pilot-operated type control valve assembly of the present invention as normal close type two-bit triplet solenoid valve as example as normal close type and solenoid valve 400.
During original state, pilot valve 100 is in closed condition.Under the active force of elastic component 300, diaphragm 200 moves downward to seal the second end of steam outlet pipe 103, thereby makes the pathway closure between suction tude 102 and steam outlet pipe 103.
Working state: solenoid valve 400 electric before, with the gas of certain pressure, from suction tude 102, enter, arrive the second cavity 1012, gas enters the first cavity 1011 by damping hole 201.Now, the second cavity 1012 equates with the air pressure of the first cavity 1011, and the suffered pressure of diaphragm 200 upper and lower surfaces also equates.Under the active force of elastic component 300, pilot valve is in closed condition.
Solenoid valve 400 electric after, the suction port 401 of solenoid valve 400 is connected with air outlet 402, the gas of the first cavity 1011 is by pneumatic tube 104, suction port 401, air outlet 402 and outlet pipe 105, and then discharges from steam outlet pipe 103.Make like this air pressure of the first cavity 1011 reduce rapidly, because the latus rectum of damping hole 201 is very little, the gas of the second cavity 1012 can not reach the first cavity 1011 by damping hole 201 in time, thereby makes between the second cavity 1012 and the first cavity 1011 mineralization pressure poor.Due to the existence of pressure difference, the pressure of the lower surface of diaphragm 200 is greater than the pressure of upper surface, and diaphragm 200 just moves upward, and diaphragm 200 and the second end of steam outlet pipe 103 are departed from, thus being communicated with between suction tude 102 and steam outlet pipe 103.
According to the pilot-operated type control valve assembly of the embodiment of the present invention, will on diaphragm, be provided with damping hole, simple in structure, inspection and maintenance is more efficient and convenient.
According to an example of the present invention, on pilot valve 100, be also provided with blow-down pipe 106.On solenoid valve 400, be also provided with the drain 403 being communicated with blow-down pipe 106.Thus, after solenoid valve 400 dead electricity, unnecessary gas can be discharged by blow-down pipe 106.
According to an example of the present invention, described pilot-operated type control valve assembly also comprises diaphragm frame 500.Diaphragm frame 500 is located between elastic component 300 and diaphragm 200.Thus, can avoid contacting such as between the elastic component 300 of spring and diaphragm 200, between elastic component 300 and diaphragm 200, play buffer function, can extend the working life of diaphragm 200.
According to an example of the present invention, suction tude 102 is formed on the sidewall of pilot valve 100 and steam outlet pipe 103 is formed on the diapire of pilot valve 100.Advantageously, the second end of steam outlet pipe 10 has the flange 1031 that stretches into the second cavity 1012, has the fin 202 suitable with flange 1031 on diaphragm 200.Thus, can make 200 pairs of steam outlet pipes 103 of diaphragm there is better sealing process.
According to an example of the present invention, the first cavity 1011 is roughly frustoconic shape.For better protection diaphragm 200 can be not damaged when working, also can on the first cavity 1011, design gas channeling groove according to actual conditions.Certainly, the shape of the first cavity 1011 is also not limited to frustoconic shape, for example, can be the cavity with arc surface or other form curved surfaces.
At this, it should be noted that, as shown in Figure 1, in order to guarantee according to the tightness of pilot-operated type control valve assembly of the present invention, can between pilot valve 100 and solenoid valve 400, be provided with valve pad 600, this is understandable for the person of ordinary skill of the art.
According to the pilot-operated type control valve assembly of the embodiment of the present invention, due to damping hole is located on diaphragm, make overall structure simpler, inspection and maintenance is also more convenient
In the description of this specification, the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or feature can be with suitable mode combinations in any one or more embodiments or example.
Although illustrated and described embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, those of ordinary skill in the art can change above-described embodiment within the scope of the invention in the situation that not departing from principle of the present invention and aim, modification, replacement and modification.

Claims (10)

1. a pilot-operated type control valve assembly, is characterized in that, comprising:
Pilot valve and diaphragm, in described pilot valve, be limited with valve pocket, described diaphragm is located in described valve pocket described valve pocket is divided into the first cavity and the second cavity, described diaphragm is provided with the damping hole that is communicated with described the first cavity and described the second cavity, on described pilot valve, also there is suction tude, steam outlet pipe, pneumatic tube and outlet pipe, wherein, the second end of described suction tude the second end and described steam outlet pipe is communicated with described the second cavity respectively, the first end of described pneumatic tube is communicated with described the first cavity, and the first end of described outlet pipe is communicated with described steam outlet pipe;
Elastic component, described elastic component is located in described valve pocket and is connected often to promote the second end that described diaphragm seals described steam outlet pipe with described diaphragm; With
Solenoid valve, described solenoid valve has suction port and air outlet, and described suction port is connected with the second end of described pneumatic tube and described air outlet is connected so that described pneumatic tube is communicated with described outlet pipe with the second end of described outlet pipe.
2. pilot-operated type control valve assembly according to claim 1, is characterized in that, is also provided with blow-down pipe on described pilot valve, is also provided with the drain being communicated with described blow-down pipe on described solenoid valve.
3. pilot-operated type control valve assembly according to claim 2, is characterized in that, described solenoid valve is two-bit triplet solenoid valve.
4. pilot-operated type control valve assembly according to claim 3, is characterized in that, described two-bit triplet solenoid valve is open type/normal close type two-bit triplet solenoid valve.
5. pilot-operated type control valve assembly according to claim 1, is characterized in that, also comprises diaphragm frame, and described diaphragm is erected between described elastic component and described diaphragm.
6. pilot-operated type control valve assembly according to claim 1, is characterized in that, described suction tude is formed on the sidewall of described pilot valve and described steam outlet pipe is formed on the diapire of described pilot valve.
7. pilot-operated type control valve assembly according to claim 6, is characterized in that, the second end of described steam outlet pipe has the flange that stretches into described the second cavity, has the fin suitable with described flange on described diaphragm.
8. pilot-operated type control valve assembly according to claim 1, is characterized in that, described the first cavity is roughly frustoconic shape.
9. pilot-operated type control valve assembly according to claim 1, is characterized in that, described pilot valve is open type/normal close type pilot valve.
10. pilot-operated type control valve assembly according to claim 1, is characterized in that, described elastic component is spring.
CN201310009589.7A 2013-01-10 2013-01-10 Piloted control valve group Pending CN103925390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310009589.7A CN103925390A (en) 2013-01-10 2013-01-10 Piloted control valve group

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310009589.7A CN103925390A (en) 2013-01-10 2013-01-10 Piloted control valve group

Publications (1)

Publication Number Publication Date
CN103925390A true CN103925390A (en) 2014-07-16

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Family Applications (1)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105333176A (en) * 2014-08-05 2016-02-17 喜开理株式会社 Pilot type solenoid valve
CN105546158A (en) * 2016-01-13 2016-05-04 北京航天发射技术研究所 High-voltage two-position five-way electromagnetic valve
CN107802932A (en) * 2017-11-21 2018-03-16 马鹏彦 A kind of gas oscillation device and medicine equipment
CN111225745A (en) * 2017-10-13 2020-06-02 Smc 株式会社 Compressed fluid ejection control device
JPWO2020054000A1 (en) * 2018-09-12 2021-08-30 Smc株式会社 Compressible fluid discharge control device
CN114754175A (en) * 2022-03-25 2022-07-15 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Gas exchange device

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JPH10132137A (en) * 1996-10-30 1998-05-22 Calsonic Corp Solenoid valve
CN2378588Y (en) * 1999-06-10 2000-05-17 林�建 Diaphragm on-off valve with electromagnetic guide valve
CN1327133A (en) * 2000-04-24 2001-12-19 速睦喜股份有限公司 Diaphragm electromagnetic valve
CN200978986Y (en) * 2006-11-10 2007-11-21 解雅亮 Explosion-proof high voltage solenoid valve for coal mine
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CN201277373Y (en) * 2008-10-10 2009-07-22 无锡埃费尔流体智控仪器有限公司 Valve monitoring apparatus
CN201344281Y (en) * 2009-03-15 2009-11-11 蒋可贞 Pilot-operated dished diaphragm solenoid valve
CN202252252U (en) * 2011-08-29 2012-05-30 宁波开灵气动元件制造有限公司 Guide diaphragm type high-pressure electromagnetic valve
CN202252131U (en) * 2011-08-15 2012-05-30 宁波开灵气动元件制造有限公司 Two-position two-way pilot membrane type solenoid valve with manual switch
CN202392251U (en) * 2011-11-30 2012-08-22 浙江盾安机械有限公司 Two-way flow solenoid valve
CN203131105U (en) * 2013-01-10 2013-08-14 北京谊安医疗系统股份有限公司 Pilot type control valve assembly

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10132137A (en) * 1996-10-30 1998-05-22 Calsonic Corp Solenoid valve
CN2378588Y (en) * 1999-06-10 2000-05-17 林�建 Diaphragm on-off valve with electromagnetic guide valve
CN1327133A (en) * 2000-04-24 2001-12-19 速睦喜股份有限公司 Diaphragm electromagnetic valve
CN101153668A (en) * 2006-08-07 2008-04-02 Smc株式会社 Diaphragm-type electromagnetic valve with closing-force strengthening mechanism
CN200978986Y (en) * 2006-11-10 2007-11-21 解雅亮 Explosion-proof high voltage solenoid valve for coal mine
CN201277373Y (en) * 2008-10-10 2009-07-22 无锡埃费尔流体智控仪器有限公司 Valve monitoring apparatus
CN201344281Y (en) * 2009-03-15 2009-11-11 蒋可贞 Pilot-operated dished diaphragm solenoid valve
CN202252131U (en) * 2011-08-15 2012-05-30 宁波开灵气动元件制造有限公司 Two-position two-way pilot membrane type solenoid valve with manual switch
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CN203131105U (en) * 2013-01-10 2013-08-14 北京谊安医疗系统股份有限公司 Pilot type control valve assembly

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10125888B2 (en) 2014-08-05 2018-11-13 Ckd Corporation Pilot type solenoid valve
CN105333176A (en) * 2014-08-05 2016-02-17 喜开理株式会社 Pilot type solenoid valve
CN105333176B (en) * 2014-08-05 2018-06-29 喜开理株式会社 Guide electromagnetic valve
CN105546158A (en) * 2016-01-13 2016-05-04 北京航天发射技术研究所 High-voltage two-position five-way electromagnetic valve
CN105546158B (en) * 2016-01-13 2018-04-13 北京航天发射技术研究所 A kind of two five-way electromagnetic valves of high pressure
CN111225745A (en) * 2017-10-13 2020-06-02 Smc 株式会社 Compressed fluid ejection control device
CN111225745B (en) * 2017-10-13 2021-09-03 Smc 株式会社 Compressed fluid ejection control device
US11278940B2 (en) 2017-10-13 2022-03-22 Smc Corporation Compressed fluid discharge control device
CN107802932A (en) * 2017-11-21 2018-03-16 马鹏彦 A kind of gas oscillation device and medicine equipment
JPWO2020054000A1 (en) * 2018-09-12 2021-08-30 Smc株式会社 Compressible fluid discharge control device
EP3851200A4 (en) * 2018-09-12 2022-04-27 SMC Corporation Compressed-fluid discharge control device
JP7331330B2 (en) 2018-09-12 2023-08-23 Smc株式会社 Compressed fluid discharge controller
US11964290B2 (en) 2018-09-12 2024-04-23 Smc Corporation Compressed-fluid discharge control device
CN114754175A (en) * 2022-03-25 2022-07-15 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Gas exchange device

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Application publication date: 20140716

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