CN103884295B - Axial cone mirror cone angle detecting device and detection method thereof - Google Patents

Abstract

A kind of axial cone mirror cone angle detecting device and detection method thereof, this device is made up of collimator, condenser lens and imageing sensor, its position relationship is: be described condenser lens and imageing sensor successively along described collimator outgoing beam direction, arranges the socket of axial cone mirror to be measured between described collimator and condenser lens.This device has simple in construction, it is easy to accomplish the measurement to arbitrarily angled axial cone mirror, additionally it is possible to the advantages such as measurement axis axicon lens various location cone angle.

Description

Axial cone mirror cone angle detecting device and detection method thereof

Technical field

The present invention relates to field of optical detection, particularly a kind of axial cone mirror cone angle detecting device and detection method thereof.

Technical background

Axial cone mirror is the focal line rotationally symmetrical pyramid optical element along optical axis direction, owing to it can be optical system One Diode laser is provided so that it laser beam reshaping, laser drilling processes, optical detection, laser resonator, The aspects such as the generation of non-diffracted beam are widely used, and utilize axial cone mirror can realize ring in lithography illuminating system Shape light illumination mode.This just making precision to taper surface propose strict requirements, the measurement of countershaft axicon lens cone angle needs Accurate method is wanted to realize.

At first technology [1] (M.de Angelis, S.De Nicola, P.Ferraro, et al. " Test of a conical lens Using a two-beam shearing interferometer ", Opt Laser Eng.39:155-163 (2003) .) utilize two light Bundle shear interference technology for detection diffraction tapered lens, for measuring the angle formed by the taper surface of plane and lens. This technology is to be realized a kind of off-axis interference detection method of two phase dried noodle wavefront transmission by tapered lens to be measured.Should Method is invalid to the measurement of wide-angle axial cone mirror.

At first technology [2] (Jun Ma, Christof Pruss, Matthias, et al. " Systematic analysis of the measurement of cone angles using high line density computer-generated holograms”, Optical Engineering.50 (5): 05580-1-05880-9 (2011) .), give the experimental approach of cone angle measuring. The method is firstly the need of the computed hologram of one high linear density of making, and next needs to calibrate interferometer.

Summary of the invention

The present invention, in order to overcome above-mentioned the deficiencies in the prior art, proposes a kind of axial cone mirror cone angle detecting device and detection thereof Method, this device has simple in construction, it is easy to accomplish the measurement to arbitrarily angled axial cone mirror, additionally it is possible to measure axial cone The advantages such as mirror various location cone angle.

The technical solution of the present invention is as follows:

The detection device of a kind of axial cone mirror cone angle, its feature is that this device is by collimator, condenser lens and image Sensor forms, and its position relationship is: the focusing being described successively along described collimator outgoing beam direction is saturating Mirror and imageing sensor, arrange the socket of axial cone mirror to be measured between described collimator and condenser lens.

Utilize the detection method of above-mentioned axial cone mirror cone angle detecting device countershaft axicon lens cone angle, this detection method include with Lower step:

1. the socket of the axial cone mirror to be measured between described collimator and described condenser lens inserts the angle of wedge and axle The wedge that the cone angle of axicon lens is same or like, goes out light side by the plane of described wedge towards described collimator To, the plane adjusting described wedge is vertical with described collimator outgoing beam；

The axis of the axis and wedge emergent light that 2. adjust described condenser lens overlaps；Described imageing sensor Photosurface overlaps with the image space focal plane of described condenser lens；

The light beam of 3. described collimator outgoing converges to described image sensing through described wedge, condenser lens Imaging on the photosurface of device, records the position of this picture；

4. with the wedge described in described axial cone mirror to be measured replacement, the plane of the axial cone mirror to be measured described in adjustment is with described Collimator outgoing beam vertical；A direction center line of described axial cone mirror plane to be measured and collimator outgoing The cross section correspondence direction center line of light beam overlaps, simultaneously the cross section of collimator outgoing beam not with axial cone mirror to be measured The other direction center line of plane intersects；

The light beam of 5. described collimator outgoing converges to described through described axial cone mirror to be measured, condenser lens Imaging on the photosurface of imageing sensor, records the position of this picture；

6. the light beam of described collimator outgoing is measured through wedge or axial cone mirror transmission light line focus lens to be measured The position deviation Δ x of the picture on the photosurface of imageing sensor after focusing, utilizes the axial cone to be measured described in following formula calculating The taper angle theta of mirror:

$\mathrm{\θ}=\arctan \left\{\frac{\sin [\mathrm{\α}-\arcsin (n*\sin \left(\mathrm{\α}\right))+\arctan (\mathrm{\Δx}/f)]}{\cos [\mathrm{\α}-\arcsin (n*\sin \left(\mathrm{\α}\right))+\arctan (\mathrm{\Δx}/f)]-n}\right\}$

In formula, n is the refractive index of described axial cone mirror to be measured, and f is the focal length of condenser lens, and α is the angle of wedge of wedge, obtains Obtain θ 1；

7. vertical with described axial cone mirror plane to be measured at the collimator outgoing beam described in guarantee, described is to be measured A direction center line of axial cone mirror plane overlaps with the cross section correspondence direction center line of collimator outgoing beam, and flat The cross section of row light pipe outgoing beam not other direction center line with axial cone mirror plane to be measured is mobile institute in the case of intersecting 5. and 6. the axial cone mirror to be measured stated, repeats step, it is thus achieved that θ 2；

8. vertical with described axial cone mirror plane to be measured at the collimator outgoing beam described in guarantee, described is to be measured A direction center line of axial cone mirror plane overlaps with the cross section correspondence direction center line of collimator outgoing beam, and flat The cross section of row light pipe outgoing beam not other direction center line with axial cone mirror plane to be measured rotates institute in the case of intersecting 5. and 6. the axial cone mirror to be measured stated, repeats step, it is thus achieved that θ 3；

The cone angle average theta of the axial cone mirror to be measured 9. step 6., 7., 8. calculated=(θ 1+ θ 2+ θ 3)/3, are The taper angle theta of axial cone mirror to be measured.

Described axial cone mirror to be measured is convex surface axial cone mirror or concave surface axial cone mirror.

Compared with in first technology, the technique effect of the present invention is as follows:

1. the present invention can realize the cone angle measuring to arbitrarily angled axial cone mirror；

2. apparatus of the present invention simple in construction, it is easy to accomplish detection operation；

3. the present invention can measure cone angle, can measure again diverse location cone angle distribution situation, and result is more accurate.

Accompanying drawing explanation

Fig. 1 is the principle that axial cone mirror of the present invention cone angle detecting device determines wedge transmission light position on the image sensor Figure

Fig. 2 is the schematic diagram of axial cone mirror cone angle of the present invention detection measurement device convex surface axial cone mirror

Fig. 3 is the schematic diagram of axial cone mirror cone angle of the present invention detection measurement device concave surface axial cone mirror

Detailed description of the invention

The invention will be further described with embodiment below in conjunction with the accompanying drawings, but should not limit the guarantor of the present invention with this Protect scope.

First refer to the schematic diagram that Fig. 1 and Fig. 2, Fig. 1 and Fig. 2 are axial cone mirror of the present invention cone angle detecting devices.By Scheming visible, axial cone mirror of the present invention cone angle detecting device, this device is passed by collimator 1, condenser lens 3 and image Sensor 4 forms, and its position relationship is: be condenser lens 3 and image successively along collimator 1 outgoing beam direction Sensor 4.Wedge or the socket of axial cone mirror to be measured is placed between described collimator 1 and condenser lens 3.

Utilize above-mentioned axial cone mirror cone angle detecting device countershaft axicon lens cone angle carry out detection method, this detection method include with Lower step:

1. the socket of the axial cone mirror to be measured between collimator 1 and condenser lens 3 is inserted and is processed cone angle with axial cone mirror Identical wedge 2, the plane of wedge 2 is towards the light direction of collimator 1；Adjust the plane of wedge 2 with flat The outgoing beam of row light pipe 1 is vertical；

2. the axis adjusting condenser lens 3 overlaps with wedge 2 emergent light axis；Imageing sensor 4 position and focusing The image space focal plane of lens 3 overlaps；

3. the light beam of collimator 1 outgoing incides condenser lens 3 through wedge 2, and line focus lens 3 are by light beam Converge on imageing sensor 4, record the position of picture on imageing sensor 4.

4. replace wedge 2 with axial cone mirror 5 to be measured, adjust plane and collimator 1 emergent light of axial cone mirror 5 to be measured Shu Chuizhi；A direction center line of axial cone mirror 5 plane to be measured and the cross section counterparty of collimator 1 outgoing beam Overlap to the midline, simultaneously the cross section of collimator 1 outgoing beam not with the other direction of axial cone mirror 5 plane to be measured Center line intersects；

5. the light beam of collimator 1 outgoing incides condenser lens 3, line focus lens 3 through axial cone mirror 5 to be measured Light beam is converged on imageing sensor 4, record the position of picture on imageing sensor 4.By contrast wedge 2 After focusing on axial cone mirror 5 transmission light line focus lens 3 to be measured, on imageing sensor 4, position can calculate described The cone angle of axial cone mirror 5 to be measured.

The taper angle theta of axial cone mirror 5 to be measured is represented by:

$\mathrm{\θ}=\arctan \left\{\frac{\sin [\mathrm{\α}-\arcsin (n*\sin \left(\mathrm{\α}\right))+\arctan (\mathrm{\Δx}/f)]}{\cos [\mathrm{\α}-\arcsin (n*\sin \left(\mathrm{\α}\right))+\arctan (\mathrm{\Δx}/f)]-n}\right\}$

In formula, n is the refractive index of axial cone mirror 5 to be measured, and f is the focal length of condenser lens 3, and α is wedge 2 angle, and Δ x is Position deviation on imageing sensor 4 after wedge 2 and axial cone mirror 5 transmission light line focus lens 3 to be measured focusing.

6. ensureing that collimator 1 outgoing beam is vertical with axial cone mirror 5 plane to be measured, axial cone mirror 5 plane to be measured A direction center line overlaps with cross section a direction center line of collimator 1 outgoing beam, and collimator 1 goes out Treating described in the cross section of irradiating light beam not other direction center line with axial cone mirror 5 plane to be measured is mobile in the case of intersecting Survey axial cone mirror 5, repeat step 5..

7. ensureing that collimator 1 outgoing beam is vertical with axial cone mirror 5 plane to be measured, axial cone mirror 5 plane to be measured A direction center line overlaps with cross section a direction center line of collimator 1 outgoing beam, and collimator 1 goes out In the case of the cross section of irradiating light beam not other direction center line with axial cone mirror 5 plane to be measured intersects, described in rotation 5. axial cone mirror 5 to be measured, repeat step.

8. by each position measurement angle being averaged the average cone angle that can obtain axial cone mirror 5 to be measured.

Fig. 3 is the schematic diagram of axial cone mirror cone angle of the present invention detection measurement device concave surface axial cone mirror, as seen from the figure, and this The axial cone mirror 5 to be measured of bright embodiment 2 is concave surface axial cone mirror, measures step and the measurement convex surface of concave surface axial cone mirror cone angle The step of axial cone mirror cone angle is identical.

Claims (3)

1. the detection device of an axial cone mirror cone angle, it is characterised in that this device is by collimator, condenser lens and figure As sensor forms, its position relationship is: be described focusing successively along described collimator outgoing beam direction Lens and imageing sensor, arrange the socket of axial cone mirror to be measured between described collimator and condenser lens；? The wedge that the angle of wedge is same or like with the cone angle of axial cone mirror inserted by the socket of this axial cone mirror to be measured, by described wedge Plane is towards the light direction of described collimator, the plane of described wedge and described collimator outgoing beam Vertically.

2. utilizing the axial cone mirror described in claim 1 to bore the detection method of angle detecting device countershaft axicon lens cone angle, it is special Point is that this detection method comprises the following steps:

1. the socket of the axial cone mirror to be measured between described collimator and described condenser lens inserts the angle of wedge and axle The wedge that the cone angle of axicon lens is same or like, goes out light side by the plane of described wedge towards described collimator To, the plane adjusting described wedge is vertical with described collimator outgoing beam；

The axis of the axis and wedge emergent light that 2. adjust described condenser lens overlaps；Described imageing sensor Photosurface overlaps with the image space focal plane of described condenser lens；

The light beam of 3. described collimator outgoing converges to described image sensing through described wedge, condenser lens Imaging on the photosurface of device, records the position of this picture；

4. with the wedge described in described axial cone mirror to be measured replacement, the plane of the axial cone mirror to be measured described in adjustment is with described Collimator outgoing beam vertical；A direction center line of described axial cone mirror plane to be measured and collimator outgoing The cross section correspondence direction center line of light beam overlaps, simultaneously the cross section of collimator outgoing beam not with axial cone mirror to be measured The other direction center line of plane intersects；

The light beam of 5. described collimator outgoing converges to described through described axial cone mirror to be measured, condenser lens Imaging on the photosurface of imageing sensor, records the position of this picture；

6. the light beam measuring described collimator outgoing gathers through wedge or axial cone mirror transmission light line focus lens to be measured The position deviation Δ x of defocused picture on the photosurface of imageing sensor, utilizes the axial cone mirror to be measured described in following formula calculating Taper angle theta:

$\mathrm{\θ}=\arctan \left\{\frac{sin\[\mathrm{\α}-\arcsin (n*sin(\mathrm{\α}\left)\right)+\arctan (\mathrm{\Δ}x/f)\]}{cos\[\mathrm{\α}-\arcsin (n*\sin (\mathrm{\α}\left)\right)+\arctan (\mathrm{\Δ}x/f)\]-n}\right\}$

In formula, n is the refractive index of described axial cone mirror to be measured, and f is the focal length of condenser lens, and α is the angle of wedge of wedge, obtains Obtain θ 1；

7. vertical with described axial cone mirror plane to be measured at the collimator outgoing beam described in guarantee, described is to be measured A direction center line of axial cone mirror plane overlaps with the cross section correspondence direction center line of collimator outgoing beam, and flat The cross section of row light pipe outgoing beam not other direction center line with axial cone mirror plane to be measured is mobile institute in the case of intersecting 5. and 6. the axial cone mirror to be measured stated, repeats step, it is thus achieved that θ 2；

8. vertical with described axial cone mirror plane to be measured at the collimator outgoing beam described in guarantee, described is to be measured A direction center line of axial cone mirror plane overlaps with the cross section correspondence direction center line of collimator outgoing beam, and flat The cross section of row light pipe outgoing beam not other direction center line with axial cone mirror plane to be measured rotates institute in the case of intersecting 5. and 6. the axial cone mirror to be measured stated, repeats step, it is thus achieved that θ 3；

The cone angle average theta of the axial cone mirror to be measured 9. step 6., 7., 8. calculated=(θ 1+ θ 2+ θ 3)/3, are The taper angle theta of axial cone mirror to be measured.

Detection method the most according to claim 2, its feature is that described axial cone mirror to be measured is convex surface axial cone Mirror or concave surface axial cone mirror.