CN103866400B - Sapphire crystal heat-exchanging method growth furnace helium cooling system - Google Patents
Sapphire crystal heat-exchanging method growth furnace helium cooling system Download PDFInfo
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- CN103866400B CN103866400B CN201410086708.3A CN201410086708A CN103866400B CN 103866400 B CN103866400 B CN 103866400B CN 201410086708 A CN201410086708 A CN 201410086708A CN 103866400 B CN103866400 B CN 103866400B
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Abstract
The invention discloses a kind of sapphire crystal heat-exchanging method growth furnace helium cooling system, predominant crystal growth furnace forms, it is characterized in that: on described crystal growing furnace, be also associated with helium gas cooling blood circulation, described helium gas cooling blood circulation includes the cooler being connected on crystal growing furnace by escape pipe and the helium gas compression purifier group being connected on crystal growing furnace by air inlet pipe, described cooler is connected by pipeline with helium gas compression purifier group, and the pipeline between described cooler and helium gas compression purifier group is additionally provided with filter. The present invention is not only simple in structure, and it is with low cost, by helium gas cooling blood circulation, the high-temperature low-pressure helium exported in crystal growing furnace can be converted into cryogenic high pressure helium, and be supplied to crystal growing furnace production sapphire use, thus forming the recycling loop of helium; Also the helium in circulation can be carried out remove impurity simultaneously, the purity of helium can be improved, it is ensured that sapphire quality, therefore be suitable for promoting the use of.
Description
Technical field
The present invention relates to a kind of sapphire crystal heat-exchanging method growth furnace helium cooling system.
Background technology
Synthetic sapphire belongs to corundum race, and hardness is 9, and density is 3.95～4.1 grams/cc, and its chemical composition is aluminium sesquioxide. Owing to sapphire hardness is high, stable chemical nature, have a wide range of applications in functional material preparation field, except making jewelry as artificial gem, most important function is the substrate as quartz crystal device and film preparation. In application, because sapphire possesses high-melting-point, corrosion resistance, high rigidity, resistance to wears and the characteristic such as electric insulation, current industrial main application is the optical window of special environment, mechanical bearing part, military project material etc. The baseplate material etc. of blue white LEDs, RFICs and the radium-shine element of blue light is then can be used in high-tech electronic field. In recent years, sapphire also occurs being applied to the special dimensions such as biomedical devices successively.
Owing to synthetic sapphire is in many application of high-tech area expanding day, expedites the emergence of synthetic sapphire and manufactured development and the production of equipment. In the production equipment manufacturing artificial sapphire several forms, exchange type sapphire crystal growing furnace production process needs to configure the cooling system that a set of medium is helium, it is desirable to large-minded, and oil-free is clean, the helium that constant pressure recycles.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art, it is provided that a kind of with helium for medium, and the sapphire crystal heat-exchanging method growth furnace helium cooling system of the helium that offer is large-minded, oil-free is clean, constant pressure recycles can be produced for sapphire.
The purpose of invention is achieved through the following technical solutions:
Sapphire crystal heat-exchanging method growth furnace helium cooling system, predominant crystal growth furnace forms, described crystal growing furnace is also associated with helium gas cooling blood circulation, described helium gas cooling blood circulation includes the cooler being connected on crystal growing furnace by escape pipe and the helium gas compression purifier group being connected on crystal growing furnace by air inlet pipe, described cooler is connected by pipeline with helium gas compression purifier group, and the pipeline between described cooler and helium gas compression purifier group is additionally provided with filter.
Further, what the compressor in described helium gas compression purifier group adopted is two-spool compressor.
For the ease of measuring the flow of the helium entering crystal growing furnace, described air inlet pipe is provided with effusion meter.
For the ease of controlling to enter the flow of the helium of crystal growing furnace, described air inlet pipe is additionally provided with flow controller.
For the ease of measuring the pressure of the helium entering crystal growing furnace, described air inlet pipe is additionally provided with Pressure gauge.
Further, described helium gas cooling blood circulation also includes making-up air device, and described making-up air device includes the high-pressure aerated pipe being connected in air inlet pipe, is provided with high pressure fill valve on described high-pressure aerated pipe.
In order to make high-pressure aerated pipe in high-pressure helium input crystal growth furnace, described air inlet pipe can will be additionally provided with the air delivery valve between high-pressure aerated pipe and crystal growing furnace smoothly.
Further, described making-up air device also includes the low inflation pipe being arranged between helium gas compression purifier group and filter, is additionally provided with the low pressure aeration valve group being made up of low inflation valve and return-air non-return valve on described low inflation pipe.
In order to realize the present invention better, between described low inflation pipe and filter, it is additionally provided with the return-air valve group being made up of return-air valve and return-air non-return valve.
In order to ensure effect, described cooler is respectively provided with the logical water inlet pipe of cooling current and outlet pipe.
The present invention compared with the prior art, has the following advantages and beneficial effect:
(1) present invention is not only simple in structure, and it is with low cost, the high-temperature low-pressure helium exported in crystal growing furnace can be converted into cryogenic high pressure helium by the helium gas cooling blood circulation of cooler, filter and helium gas compression purifier group composition, and it is supplied to crystal growing furnace production sapphire use, thus forming the recycling loop of helium; Meanwhile, also the helium in circulation can be carried out remove impurity, the purity of the helium entered in crystal growing furnace can be improved, therefore can ensure the sapphire quality produced in crystal growing furnace.
(2) what the compressor in the helium gas compression purifier group of the present invention adopted is two-spool compressor, and two-spool compressor volume is little, large-minded, and energy consumption is low, and noise and vibrations are all only small, can meet equipment job requirement reliably and with long-term.
(3) air inlet pipe of the present invention is provided with effusion meter, it is simple to measure the flow of the helium entering crystal growing furnace.
(4) air inlet pipe of the present invention is additionally provided with flow controller, it is simple to control to enter the flow of the helium of crystal growing furnace.
(5) air inlet pipe of the present invention is additionally provided with Pressure gauge, it is simple to measure the force value of the helium entering crystal growing furnace.
(6) the helium gas cooling blood circulation of the present invention also includes making-up air device, can be replenished the helium revealed in the process of circulation by this making-up air device, to ensure the amount of helium needed for helium gas cooling blood circulation; Described making-up air device includes the high-pressure aerated pipe being connected in air inlet pipe, it is simple to supplement high-pressure helium by this high-pressure aerated pipe.
(7) air inlet pipe of the present invention is additionally provided with the air delivery valve between high-pressure aerated pipe and crystal growing furnace, to ensure that high-pressure aerated pipe can smoothly by supplementary high-pressure helium input crystal growth furnace.
(8) making-up air device of the present invention also includes the low inflation pipe that is arranged between helium gas compression purifier group and filter, it is simple to supplement low pressure helium by this low inflation pipe; Described low inflation pipe is additionally provided with the low pressure aeration valve group being made up of low inflation valve and return-air non-return valve, can ensure that the low pressure helium supplemented enters helium gas cooling blood circulation smoothly by this low pressure aeration valve group, to prevent low pressure helium from flowing back to low pressure helium gas source device.
(9) the return-air valve group being made up of return-air valve and return-air non-return valve it is additionally provided with between low inflation pipe and the filter of the present invention, can be further ensured that supplementary low pressure helium enters helium gas cooling blood circulation smoothly by this return-air valve group, to prevent low pressure helium from flowing backwards between helium gas compression purifier group and cooler.
(10) cooler of the present invention is respectively provided with the logical water inlet pipe of cooling current and outlet pipe, it is simple to use water for industrial use that cooler is cooled down, in order to use the high temperature helium that crystal growing furnace is exported by water for industrial use to cool down.
Accompanying drawing explanation
Fig. 1 is the structured flowchart of the present invention.
Detailed description of the invention
Below in conjunction with embodiment, the present invention is described in further detail:
Embodiment
As it is shown in figure 1, the sapphire crystal heat-exchanging method growth furnace helium cooling system of the present invention, being mainly made up of crystal growing furnace, crystal growing furnace is for the production of sapphire crystal. Needing to use helium in producing sapphire process is cooling medium, and the helium medium circulation of the present invention uses, and is therefore also associated with helium gas cooling blood circulation on described crystal growing furnace. Described helium gas cooling blood circulation includes cooler and helium gas compression purifier group, and described cooler is connected to the outlet side of crystal growing furnace by escape pipe, and described helium gas compression purifier group is then connected to the inlet end of crystal growing furnace by air inlet pipe. It is connected by pipeline between described cooler with helium gas compression purifier group, so that crystal growing furnace forms the loop of a helium circulation with cooler and helium gas compression purifier group, helium medium can be made to recycle.
High temperature helium in described crystal growing furnace enters cooler by escape pipe, and the present invention uses water for industrial use that cooler is cooled down, and is therefore provided with on described cooler for cooling down the logical water inlet pipe of current and outlet pipe. For the ease of remove water cooled but after helium in impurity, the pipeline between described cooler and helium gas compression purifier group is additionally provided with filter, as shown in Figure 1. Enter the flow of the helium of crystal growing furnace for the ease of detection, described air inlet pipe is provided with effusion meter. For the ease of controlling to enter the flow of the helium of crystal growing furnace, being additionally provided with flow controller in described air inlet pipe, the flow controller in the present embodiment is arranged between effusion meter and helium gas compression purifier group. For the ease of measuring the pressure of the helium entering crystal growing furnace, being additionally provided with Pressure gauge in described air inlet pipe, the Pressure gauge in the present embodiment is arranged between flow controller and helium gas compression purifier group.
It is high-temperature low-pressure helium due to what crystal growing furnace exported, and the helium carrying out cooling down in input crystal growth furnace needs high pressure low temperature, namely the helium gas compression purifier group of the present invention can be used for the helium in input crystal growth furnace is compressed, it is crystal growing furnace and high-pressure helium is provided, meanwhile, the helium of output in crystal growing furnace is cooled down and removes the impurity in helium by this helium gas compression purifier group further. The helium gas compression purifier group of the present invention is also use water for industrial use to cool down, and is therefore also connected in described helium compressor group for cooling down the logical water inlet pipe of current and outlet pipe. What the compressor in the helium gas compression purifier group of the present invention adopted is two-spool compressor, and two-spool compressor volume is little, large-minded, and energy consumption is low, and noise and vibrations are all only small, can meet equipment job requirement reliably and with long-term. Meanwhile, the inlet end in described helium gas compression purifier group is provided with low pressure gauge, is then provided with high-pressure manometer in the outlet side of this helium compressor group.
Owing to helium leaks unavoidably in circulation process, therefore the helium gas cooling blood circulation of the present invention also includes making-up air device, and described making-up air device includes the high-pressure aerated pipe being connected in air inlet pipe, is provided with high pressure fill valve on described high-pressure aerated pipe.Between described high-pressure aerated pipe Pressure gauge in helium gas compression purifier group and air inlet pipe, described high-pressure aerated pipe accesses high-pressure helium, described helium gas compression purifier group provides high-pressure helium simultaneously, then can be directly read the force value of helium in input crystal growth furnace by the Pressure gauge in air inlet pipe. Supplementing high-pressure helium smoothly for the ease of high-pressure aerated pipe, be additionally provided with air delivery valve in described air inlet pipe, the air delivery valve in the present embodiment is between Pressure gauge and flow controller, as shown in Figure 1.
The making-up air device of the present invention also includes the Pressure Inflation pipe being connected on the pipeline between helium gas compression purifier group and cooler, and described low inflation pipe is arranged between helium gas compression purifier group and filter. Being additionally provided with low pressure aeration valve group on described low inflation pipe, described low pressure aeration valve group is made up of low inflation valve and return-air non-return valve, as shown in Figure 1. Meanwhile, the pipeline between described helium gas compression purifier group and cooler being additionally provided with return-air valve and the return-air valve group of return-air non-return valve composition, described return-air valve group is arranged between low inflation pipe and filter.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all any amendment, equivalent replacement and improvement etc. made within the spirit and principles in the present invention, should be included within protection scope of the present invention.
Claims (3)
1. sapphire crystal heat-exchanging method growth furnace helium cooling system, predominant crystal growth furnace forms, it is characterized in that: on described crystal growing furnace, be also associated with helium gas cooling blood circulation, described helium gas cooling blood circulation includes the cooler being connected on crystal growing furnace by escape pipe and the helium gas compression purifier group being connected on crystal growing furnace by air inlet pipe, described cooler is connected by pipeline with helium gas compression purifier group, and the pipeline between described cooler and helium gas compression purifier group is additionally provided with filter; Described helium gas cooling blood circulation also includes making-up air device, and described making-up air device includes the high-pressure aerated pipe being connected in air inlet pipe, is provided with high pressure fill valve on described high-pressure aerated pipe; Described air inlet pipe is additionally provided with the air delivery valve between high-pressure aerated pipe and crystal growing furnace; Described making-up air device also includes the low inflation pipe being arranged between helium gas compression purifier group and filter, is additionally provided with the low pressure aeration valve group being made up of low inflation valve and return-air non-return valve on described low inflation pipe; The return-air valve group being made up of return-air valve and return-air non-return valve it is additionally provided with between described low inflation pipe and filter; Described cooler is respectively provided with the logical water inlet pipe of cooling current and outlet pipe; What the compressor in described helium gas compression purifier group adopted is two-spool compressor; Described air inlet pipe is provided with effusion meter.
2. the sapphire crystal heat-exchanging method growth furnace helium cooling system described in claim 1, it is characterised in that: in described air inlet pipe, it is additionally provided with flow controller.
3. the sapphire crystal heat-exchanging method growth furnace helium cooling system described in claim 2, it is characterised in that: in described air inlet pipe, it is additionally provided with Pressure gauge.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410086708.3A CN103866400B (en) | 2014-03-10 | 2014-03-10 | Sapphire crystal heat-exchanging method growth furnace helium cooling system |
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| CN201410086708.3A CN103866400B (en) | 2014-03-10 | 2014-03-10 | Sapphire crystal heat-exchanging method growth furnace helium cooling system |
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| CN103866400A CN103866400A (en) | 2014-06-18 |
| CN103866400B true CN103866400B (en) | 2016-06-15 |
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| CN106440828A (en) * | 2016-11-16 | 2017-02-22 | 安徽万瑞冷电科技有限公司 | Cooling and protecting device for hot metal |
| CN108275002B (en) * | 2018-02-10 | 2020-05-05 | 浙江科丰传感器股份有限公司 | Sensor device for electric vehicle |
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Effective date of registration: 20180315 Address after: No. 502, No. 1, A building, No. 1, new and high tech entrepreneurship center, No. two, Sichuan high tech Park Patentee after: CHENGDU GOLDEN PLACE VACUUM TECHNICAL DEVELOPMENT Co.,Ltd. Address before: No. 19, No. 19, Yongan street, Qingyang District, Chengdu, Sichuan Province, No. 2 Patentee before: Chen Yong |
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