CN103817591B - 一种抛光机碎片处理装置 - Google Patents
一种抛光机碎片处理装置 Download PDFInfo
- Publication number
- CN103817591B CN103817591B CN201210465542.7A CN201210465542A CN103817591B CN 103817591 B CN103817591 B CN 103817591B CN 201210465542 A CN201210465542 A CN 201210465542A CN 103817591 B CN103817591 B CN 103817591B
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- groove
- buffing machine
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000010298 pulverizing process Methods 0.000 claims abstract description 7
- 238000005498 polishing Methods 0.000 abstract description 20
- 238000000034 method Methods 0.000 abstract description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 230000008569 process Effects 0.000 abstract description 10
- 230000009466 transformation Effects 0.000 abstract description 3
- 230000006872 improvement Effects 0.000 abstract description 2
- 239000012634 fragment Substances 0.000 description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000004083 survival effect Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210465542.7A CN103817591B (zh) | 2012-11-16 | 2012-11-16 | 一种抛光机碎片处理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210465542.7A CN103817591B (zh) | 2012-11-16 | 2012-11-16 | 一种抛光机碎片处理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103817591A CN103817591A (zh) | 2014-05-28 |
CN103817591B true CN103817591B (zh) | 2016-08-03 |
Family
ID=50753031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210465542.7A Active CN103817591B (zh) | 2012-11-16 | 2012-11-16 | 一种抛光机碎片处理装置 |
Country Status (1)
Country | Link |
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CN (1) | CN103817591B (zh) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1440321A (zh) * | 2000-05-12 | 2003-09-03 | 多平面技术公司 | 具有独立限位环和多区域压力控制结构的气动隔膜式抛光头及其使用方法 |
CN1545441A (zh) * | 2001-08-02 | 2004-11-10 | ��ʽ����Skc | 利用激光制造化学机械抛光垫的方法 |
CN2664836Y (zh) * | 2003-08-13 | 2004-12-22 | 张祯育 | 具吸除粉尘功能的研磨机 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3852758B2 (ja) * | 2002-03-01 | 2006-12-06 | インターナショナル・ビジネス・マシーンズ・コーポレーション | スラリー回収装置及びその方法 |
KR100469677B1 (ko) * | 2004-09-30 | 2005-02-03 | 주식회사 서원산업 | 임목폐기물 파쇄장치 |
-
2012
- 2012-11-16 CN CN201210465542.7A patent/CN103817591B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1440321A (zh) * | 2000-05-12 | 2003-09-03 | 多平面技术公司 | 具有独立限位环和多区域压力控制结构的气动隔膜式抛光头及其使用方法 |
CN1545441A (zh) * | 2001-08-02 | 2004-11-10 | ��ʽ����Skc | 利用激光制造化学机械抛光垫的方法 |
CN2664836Y (zh) * | 2003-08-13 | 2004-12-22 | 张祯育 | 具吸除粉尘功能的研磨机 |
Also Published As
Publication number | Publication date |
---|---|
CN103817591A (zh) | 2014-05-28 |
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C06 | Publication | ||
PB01 | Publication | ||
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C53 | Correction of patent for invention or patent application | ||
CB02 | Change of applicant information |
Address after: 100088 Beijing city Xicheng District Xinjiekou Avenue No. 2 Applicant after: YOUYAN NEW MATERIAL CO., LTD. Address before: 100088 Beijing city Xicheng District Xinjiekou Avenue No. 2 Applicant before: GRINM Semiconductor Materials Co., Ltd. |
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COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: GRINM SEMICONDUCTOR MATERIALS CO., LTD. TO: GRINM ADVANCED MATERIALS CO., LTD. |
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SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: GRINM SEMICONDUCTOR MATERIALS CO., LTD. Free format text: FORMER OWNER: GRINM ADVANCED MATERIALS CO., LTD. Effective date: 20150617 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20150617 Address after: 101300 Beijing city Shunyi District Shuanghe Linhe Industrial Development Zone on the south side of the road Applicant after: You Yan Semi Materials Co., Ltd. Address before: 100088 Beijing city Xicheng District Xinjiekou Avenue No. 2 Applicant before: YOUYAN NEW MATERIAL CO., LTD. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 101300 south side of Shuanghe Road, Linhe Industrial Development Zone, Shunyi District, Beijing Patentee after: Youyan semiconductor silicon materials Co.,Ltd. Address before: 101300 south side of Shuanghe Road, Linhe Industrial Development Zone, Shunyi District, Beijing Patentee before: GRINM SEMICONDUCTOR MATERIALS Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder |