CN103728468B - A kind of method suppressing scanning probe microscopy to scan large Tu Shiwen drift impact - Google Patents

A kind of method suppressing scanning probe microscopy to scan large Tu Shiwen drift impact Download PDF

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CN103728468B
CN103728468B CN201310742930.XA CN201310742930A CN103728468B CN 103728468 B CN103728468 B CN 103728468B CN 201310742930 A CN201310742930 A CN 201310742930A CN 103728468 B CN103728468 B CN 103728468B
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image block
image
width
scan
scanning
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CN201310742930.XA
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CN103728468A (en
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杨秦敏
赵声
张�杰
卢建刚
陈积明
孙优贤
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浙江大学
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Abstract

The invention discloses a kind of method suppressing scanning probe microscopy to scan large Tu Shiwen drift impact, will be N*N square little image block for scan image Region dividing, each little image block and adjacent image block overlap.Zigzag is adopted to scan little image block successively.Often scan out a little image block, by the setting overlapping region cut and extract of itself and upper piece image out, calculate its temperature drift with phase correlation method.Several the little image blocks scanned are stitched together according to its initial sweep position set and actual temperature drift amount thereof.Piece image is first placed, after image block place successively, place coordinate for setting scanning origin coordinates and add that each image block temperature floats sum above.Method of the present invention effectively can be estimated and compensate under the environment not having strict Temperature and Humidity Control, the problem that in the large figure of scanning probe microscopy scanning high precision longer caused image consuming time, drift is serious.

Description

A kind of method suppressing scanning probe microscopy to scan large Tu Shiwen drift impact

Technical field

The present invention relates in a kind of environment not having strict humiture environmental Kuznets Curves, suppressing scanning probe microscopy to scan large Tu Shiwen and floating the method affected.

Background technology

Since late nineteen eighties scanning probe microscopy invention in last century, due to its nanometer resolution, it has needed to be used in increasing field.The instrument that it is measured from one and analyze, develops into the instrument of an operation and processing gradually.But, control object due to scanning probe microscopy is a piezoelectric ceramics, use it observe surrounding and watching object or add man-hour under there is no the condition of strict humiture environmental Kuznets Curves at one, still have a lot of piezoelectric ceramics unintentional nonlinearity characteristic to need people to intervene for carrying out and compensate.For example sluggish, creep and temperature drift.

In these above-mentioned problems, scanning is sluggish can by reducing along same scanning direction and to the method that unidirectional characteristic carries out modeling and compensation.And a few minutes are waited for after large section scanning, creep even can be eliminated completely.What be uniquely difficult to elimination is temperature drift, because it is caused by the temperature of near field random variation, and As time goes on it present cumulative effect.The accuracy of image when the drift of this temperature has had a strong impact on scanning one panel height resolution large figure.

For the temperature drift problem in the scanning probe microscopy course of work, forefathers proposed some solutions, but when being all for scanning same area multiple image mostly, the temperature drift between image.And few people are when considering overscanning single image, the temperature drift of accumulation in image.And when a scanning high-resolution large figure, need the tens even time of dozens of minutes, in the so long time, the temperature drift semi-invariant in image be can not ignore.

Summary of the invention

Can not float the deficiency that suppress to temperature in image to overcome existing method, the present invention proposes a kind of suppress scanning probe microscopy to scan method that large Tu Shiwen floats impact, makes the image scanned can more close to the real topography of sample.

The technical solution adopted for the present invention to solve the technical problems is: a kind of method suppressing scanning probe microscopy to scan large Tu Shiwen drift impact, comprises the following steps:

Step 1: will be N*N square little image block for scan image Region dividing, each little image block and adjacent image block overlap.Often in row, adjacent image lap is perpendicular strip rectangle, and often in row, adjacent image lap is bar shaped rectangle of growing crosswise.

Step 2, adopts zigzag to scan little image block successively.Namely the first row from left to right scans successively, and the second row scans from right to left successively, and the third line from left to right scans successively, by that analogy.

Step 3, often scans out a little image block, by the overlapping region cut and extract of itself and upper piece image out, calculates its temperature drift with phase correlation method.

Several the little image blocks scanned are stitched together according to its initial sweep position set and actual temperature drift amount thereof by step 4.Piece image is first placed, after image block place successively, placing the origin coordinates of image is that the scanning origin coordinates of setting adds that each image block temperature floats sum above; When placing, running into lap, covering the lap of last width with rear piece image.

Further, described step 1 is specially: note is L for scanning square-shaped image peak width 1, remember that the width of little image block is L 2, division methods is: often in row, adjacent isles overlaps, and note overlapping widths is L 3; In addition, often also overlap between adjacent isles in row, overlapping widths is also L 3.Being divided into N*N the length of side by the length of side square area that is L1 is L 2little square image blocks, have length and width to be respectively L between each little image block 2and L 3rectangular overlapping region.

Further, described overlapping widths the width of little image block can be drawn thus

Further, suppose that for scanning large figure upper left corner end points be true origin (0,0), to the right for horizontal ordinate increases progressively, downwards for ordinate increases progressively.The upper left corner extreme coordinates of note scanning n-th little image block, i.e. starting point coordinate, is (Xn, Yn).Scan the 1st little image block, its scan start point is (0,0), and scanning length and width are L 2; 2nd little image block, starting point is scanning length and width are L 2; 3rd width starting point is by that analogy; N+1 width is owing to reaching the flex point of zigzag scanning, so changes in coordinates is in y-axis, its starting point is n+2 width starting point is the like, a to the last little image block scan start point on the whole, for the n-th width image of scanning, note namely a is that n rounds divided by after N, and note b=(n) mod (N), namely n is divided by remainder after N.If a is even number, then the starting point of the n-th width image is if a is odd number, then the starting point of the n-th width image is n, n are positive integer.

Further, described step 3 is specially: by the overlapping region cut and extract of the little image block that scans out and upper piece image out, for the drift between the n-th width image block and the (n-1)th width image block, note b=(n) mod (N).When a is even number and b is not equal to 1, lap be horizontal ordinate Xn extremely ordinate is Yn to Yn+L 2part; When a is odd number and b is not equal to 1, lap is horizontal ordinate to Xn+L 2, ordinate is Yn to Yn+L 2part; When b equals 1, lap is horizontal ordinate Xn to Xn+L 2, ordinate be Yn extremely part.

The invention has the beneficial effects as follows, method of the present invention effectively can be estimated and compensate under the environment not having strict Temperature and Humidity Control, the problem that in the large figure of scanning probe microscopy scanning high precision longer caused image consuming time, drift is serious.The method that the method utilizes the little image block of scanning to splice again, reaches the object suppressing temperature drift effectively.The method can be used to the micromorphology presenting sample surfaces more truly, for being that instrument carries out scientific research and made better place mat with scanning probe microscopy.

Accompanying drawing explanation

Fig. 1 is the present invention for image in the brief description figure of warm drift problem;

Fig. 2 is the entire block diagram of suppression drift compensation method proposed by the invention;

Fig. 3 is the method and zigzag scanning sequency (representing with the digital number) schematic diagram that divide scan image region in the embodiment of the present invention;

Fig. 4 is image little interblock temperature drift key diagram in the embodiment of the present invention.

Fig. 5 is that in the embodiment of the present invention, phase correlation method calculates temperature drift process schematic, in figure, and (a) (b).

Fig. 6 is that the splicing after using the method in the embodiment of the present invention is schemed greatly.

Specific implementation method

The present invention suppresses scanning probe microscopy to scan the method for large Tu Shiwen drift impact, comprises the following steps:

Step 1, will be N*N square little image block for scan image Region dividing, each little image block and adjacent image block overlap.Often in row, adjacent image lap is perpendicular strip rectangle, and often in row, adjacent image lap is bar shaped rectangle of growing crosswise.

Specifically, note is L1 for scanning square-shaped image peak width, remembers that the width of little image block is L 2, division methods is: often in row, adjacent isles overlaps, and note overlapping widths is L 3; In addition, often also overlap between adjacent isles in row, overlapping widths is also L 3.Be L by the length of side 1square area to be divided into N*N the length of side be L 2little square image blocks, have length and width to be respectively L between each little image block 2and L 3rectangular overlapping region.Hereinafter described method is applicable to different L 3selection, without loss of generality, the present invention advise can calculate thus

Step 2, adopts zigzag to scan little image block successively.Namely the first row from left to right scans successively, and the second row scans from right to left successively, and the third line from left to right scans successively, by that analogy.

Suppose that for scanning large figure upper left corner end points be true origin (0,0), to the right for horizontal ordinate increases progressively, downwards for ordinate increases progressively.The upper left corner extreme coordinates (being hereinafter designated as starting point) of note scanning n-th little image block is (Xn, Yn).Scan the 1st little image block, its scan start point is (0,0), and scanning length and width are L 2; 2nd little image block, starting point is scanning length and width are L 2; Similar, the 3rd width starting point is by that analogy; N+1 width is owing to reaching the flex point of zigzag scanning, so changes in coordinates is in y-axis, its starting point is n+2 width starting point is the like, a to the last little image block scan start point on the whole, for the n-th width image of scanning, note namely a is that n rounds divided by after N, and note b=(n) mod (N), namely n is divided by remainder after N.If a is even number, then the starting point of the n-th width image is if a is odd number, then the starting point of the n-th width image is n, n are positive integer.

Step 3, often scans out a little image block, by the overlapping region cut and extract of itself and upper piece image out, calculates its temperature drift with phase correlation method.

By the overlapping region cut and extract of the little image block that scans out and upper piece image out, such as the overlapping region of the 2nd width image block and the 1st width is horizontal ordinate to L 2, ordinate is 0 to L 2part; And the overlapping region of N+1 width image block and N width image block is horizontal ordinate ordinate is to L 2part.On the whole, for the drift between the n-th width image block and the (n-1)th width image block, note b=(n) mod (N).When a is even number and b is not equal to 1, lap be horizontal ordinate Xn extremely ordinate is Yn to Yn+L 2part; When a is odd number and b is not equal to 1, lap is horizontal ordinate to Xn+L 2, ordinate is Yn to Yn+L 2part; When b equals 1, lap is horizontal ordinate Xn to Xn+L 2, ordinate be Yn extremely part.

Several the little image blocks scanned are stitched together according to its initial sweep position set and actual temperature drift amount thereof by step 4.Piece image is first placed, after image block place successively, placing the origin coordinates of image is that the scanning origin coordinates of setting adds that each image block temperature floats sum above; When placing, running into lap, covering the lap of last width with rear piece image.

Be stitched together by the little image block scanned, first the first width image block is placed on the position of starting point (0,0), the starting point of successive image block is placed on when placing, running into lap, covering last width with rear piece image.

For making having further understanding in the present invention, related embodiment and accompanying drawing is hereinafter coordinated to elaborate:

The present invention solves warm drift problem as shown in fig. 1, is for scanning area in dotted line frame, and under considering the directed situation of the simplest temperature drift constant speed, the image-region that actual scanning goes out is solid line quadrilateral institute enclosing region.

For drift problem warm in above-mentioned image, the suppression bleach-out process that we propose as shown in Figure 2, sets for behind scan image region, is divided into N*N square-shaped image fritter.As shown in Figure 3, large square is for scan image region, is divided into 3*3 less square-shaped image fritter.Each image fritter and adjacent image block overlap.Often in row, adjacent image lap is perpendicular strip rectangle, and often in row, adjacent image lap is bar shaped rectangle of growing crosswise.In Fig. 3 indicate L 1, L 2and L 3be respectively the image fritter width for scanning area width, division and overlapping region width.

Namely the scanning of image fritter is started after setting.Due to temperature drift sustainable existence, scan the actual overlapping region size of image fritter and previous image fritter and be not equal to setting size, have certain deviation, differential location is as shown in Figure 4.Wherein dash area is the overlapping region of setting.Adopt Z-type scan image fritter, order is as figure denote in Fig. 3.

Except first image fritter, the temperature calculating itself and a upper little interblock of image is needed to float and record after each image fritter end of scan, a to the last image fritter end of scan.Adopt calculate warm bleaching method be phase correlation method.Wherein two image fritters calculate the computation process of overlapping region temperature drift as shown in Figure 5.

Finally carry out the splicing of image fritter, piece image is first placed, after image block place successively, place coordinate for setting scanning origin coordinates and add that each image block temperature floats sum above.First width image block is placed on the position of starting point (0,0), and the starting point of successive image block is placed on when placing, running into lap, covering last width with rear piece image.Spliced image just can cover for scanning area and inhibit temperature drift in image well.

Fig. 6 is the result figure of actual splicing after adopting the inventive method in embodiment.

Claims (5)

1. suppress scanning probe microscopy to scan large Tu Shiwen and float the method affected, it is characterized in that, comprise the following steps:
Step 1: will be N*N square little image block for scan image Region dividing, N be positive integer, and each little image block and adjacent image block overlap; Often in row, adjacent image lap is perpendicular strip rectangle, and in often arranging, adjacent image lap is for growing crosswise bar shaped rectangle;
Step 2, adopts zigzag to scan little image block successively; Namely the first row from left to right scans successively, and the second row scans from right to left successively, and the third line from left to right scans successively, by that analogy;
Step 3, often scans out a little image block, by the overlapping region cut and extract of itself and upper piece image out, calculates its temperature drift with phase correlation method;
Several the little image blocks scanned are stitched together according to its initial sweep position set and actual temperature drift amount thereof by step 4; Piece image is first placed, after image block place successively, placing the origin coordinates of image is that the scanning origin coordinates of setting adds that each image block temperature floats sum above; When placing, running into lap, covering the lap of last width with rear piece image.
2. suppress scanning probe microscopy to scan the method that large Tu Shiwen floats impact according to claim 1, it is characterized in that, described step 1 is specially: note is L for scanning square-shaped image peak width 1, remember that the width of little image block is L 2, division methods is: often in row, adjacent isles overlaps, and note overlapping widths is L 3; In addition, often also overlap between adjacent isles in row, overlapping widths is also L 3; Be L by the length of side 1square area to be divided into N*N the length of side be L 2little square image blocks, have length and width to be respectively L between each little image block 2and L 3rectangular overlapping region.
3. suppress scanning probe microscopy to scan the method that large Tu Shiwen floats impact according to claim 2, it is characterized in that, described overlapping widths the width of little image block can be drawn thus
4. suppress scanning probe microscopy to scan the method that large Tu Shiwen floats impact according to claim 3, it is characterized in that, described step 2 is specially: suppose that for scanning large figure upper left corner end points be true origin (0,0), to the right for horizontal ordinate increases progressively, downwards for ordinate increases progressively; The upper left corner extreme coordinates of note scanning n-th little image block, i.e. starting point coordinate, is (Xn, Yn); Scan the 1st little image block, its scan start point is (0,0), and scanning length and width are L 2; 2nd little image block, starting point is scanning length and width are L 2; 3rd width starting point is by that analogy; N+1 width is owing to reaching the flex point of zigzag scanning, so changes in coordinates is in y-axis, its starting point is n+2 width starting point is the like, a to the last little image block scan start point on the whole, for the n-th width image of scanning, note namely a is that n rounds divided by after N, note b=(n) mod (N), and namely n is divided by remainder after N; If a is even number, then the starting point of the n-th width image is if a is odd number, then the starting point of the n-th width image is n, n are positive integer.
5. suppress scanning probe microscopy to scan the method that large Tu Shiwen floats impact according to claim 4, it is characterized in that, described step 3 is specially: by the overlapping region cut and extract of the little image block that scans out and upper piece image out, for the drift between the n-th width image block and the (n-1)th width image block, note b=(n) mod (N); When a is even number and b is not equal to 1, lap be horizontal ordinate Xn extremely ordinate is Yn to Yn+L 2part; When a is odd number and b is not equal to 1, lap is horizontal ordinate to Xn+L 2, ordinate is Yn to Yn+L 2part; When b equals 1, lap is horizontal ordinate Xn to Xn+L 2, ordinate be Yn extremely part.
CN201310742930.XA 2013-12-30 2013-12-30 A kind of method suppressing scanning probe microscopy to scan large Tu Shiwen drift impact CN103728468B (en)

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