CN103671041A - Bellows pump - Google Patents

Bellows pump Download PDF

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Publication number
CN103671041A
CN103671041A CN201310403659.7A CN201310403659A CN103671041A CN 103671041 A CN103671041 A CN 103671041A CN 201310403659 A CN201310403659 A CN 201310403659A CN 103671041 A CN103671041 A CN 103671041A
Authority
CN
China
Prior art keywords
pump
telescopic pipe
diapire
plate
pump chamber
Prior art date
Application number
CN201310403659.7A
Other languages
Chinese (zh)
Inventor
足立智大
中野笃
Original Assignee
日本皮拉工业株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2012198289A priority Critical patent/JP2014051950A/en
Priority to JP2012-198289 priority
Application filed by 日本皮拉工业株式会社 filed Critical 日本皮拉工业株式会社
Publication of CN103671041A publication Critical patent/CN103671041A/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009Special features
    • F04B43/0036Special features the flexible member being formed as an O-ring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/08Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/084Machines, pumps, or pumping installations having flexible working members having tubular flexible members the tubular member being deformed by stretching or distortion
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/08Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10Pumps having fluid drive
    • F04B43/113Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/1136Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/022Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows with two or more bellows in parallel

Abstract

The present invention provides a bellows pump that is capable of reliably preventing deformation of the bottom wall of a bellows due to pressure fluctuations in the pump chamber and that can achieve proper pump functionality, providing stable flow rates and circulating-fluid volumes. The bellows pump is configured as follows: plastic bellows (6) expand and contract in the axial direction to alternatively execute an output stroke that sends fluid out of pump chambers (7) defined by the bellows (6) and a suction stroke that supplies fluid to the pump chambers (7). Metal actuation plates (10) are supported in the pump case (5) so as to be movable in the axial direction. Said actuation plates (10) are fixedly connected to the bottom walls (6c) of the bellows (6) in peripheral portions thereof. A central portion of the bottom walls (6c) of the bellows (6), i.e., a fluid-contact portion (6f) in contact with the fluid in the pump chamber (7), is in close contact with opposed end faces (6g, 10c) of the actuation plates (10), and the close-contact portions (6g, 10c) are sealed with O-rings (15) sealing member.

Description

Expansion pump

Technical field

The invention relates to a kind of for to liquid (such as the liquid using in manufacturing process such as semiconductor, liquid crystal, organic EL etc.) or contain solid become the to grade lapping liquid etc. of use in the slurry liquid (such as the skiving treatment device that utilizes the semiconductor crystal wafer of CMP device (CMP(Chemical Mechanical Polishing) method) of paste composition) etc. liquid carry out liquor charging, make the expansion pump of its circulation.

Background technique

As this kind of expansion pump, be known to form as follows: the plastic cement that makes the opening portion be installed on pump case is shaped with round-ended cylinder shape telescopic pipe and stretches in axial direction, alternately carry out whereby from utilize telescopic pipe around and the pump chamber that forms via exhaust end safety check to the step that spues of the path liquor charging that spues, with from suck path via suction side safety check the suction step (for example,, with reference to Fig. 1 of patent documentation 1 or Fig. 2 of patent documentation 2) to pump chamber feed flow.

In this expansion pump, there are the following problems: because of in the step that spues to pump chamber pressurization and/or because of in sucking step to pump chamber decompression (negative pressure), and make the diapire of plastic cement telescopic pipe processed produce the distortion such as bending.For example, at telescopic pipe, dwindle spuing during step of action, the diapire of telescopic pipe is pushed and is convex curvature by the pressure of pump chamber, on the contrary, when telescopic pipe carries out the suction step of stretching, because pump chamber is negative pressure, the diapire that therefore has a telescopic pipe is attracted and is the problem of concavity bending.Or, during the situation that is cylinder mechanism in the mechanism that makes telescopic pipe carry out expanding-contracting action, exist owing to being supplied to the forced air of exhaust space, make the diapire of plastic cement telescopic pipe processed produce the crooked problem that waits distortion.For example, at telescopic pipe, dwindle spuing in step of action, when being less than the situation of pressure of pump chamber for the pressure of exhaust space, exist owing to being supplied to the forced air of exhaust space, the diapire that makes telescopic pipe is pushed and is bent into the problem towards the concavity of pump chamber.So if the diapire of telescopic pipe so deforms, the liquor charging amount of this expansion pump (liquid measure spues) or circulating fluid volume can be unstable, produce deviation etc., and cannot bring into play suitable pumping function.

In this expansion pump, owing in the step that spues, pump chamber being pressurizeed and/or owing in sucking step, pump chamber being reduced pressure (negative pressure), waiting the problem of being out of shape therefore exist the diapire of plastic cement telescopic pipe processed to produce bending.For example, in telescopic pipe, dwindle spuing in step of action, existence is because the pressure of pump chamber makes the diapire of telescopic pipe be pushed the problem that is convex curvature, on the contrary, at telescopic pipe, carry out in the suction step of stretching, pump chamber is negative pressure, and the diapire that therefore has a telescopic pipe is attracted and is bent into the problem of concavity.So if the diapire of telescopic pipe so produces distortion, the volume of pump chamber produces substantial variation, the liquor charging amount of this expansion pump (liquid measure spues) or circulating fluid volume can be unstable, produce deviation etc., cannot bring into play suitable pumping function.

Yet, in expansion pump, as Fig. 2 of Fig. 1 of patent documentation 1 and patent documentation 2 discloses, as the axial direction of guiding telescopic pipe, move the mechanism of (expanding-contracting action) or as for the synchronous mechanism of expanding-contracting action that makes two telescopic pipes at two ejector half expansion pumps, in the diapire of telescopic pipe, link and have the start plate that can be supported by pump case movably in axial direction.Therefore, by making this start plate, be metal system, and can the diapire due to for the easily deformable telescopic pipe of plastic cement system be strengthened.

Yet, the link of the diapire of telescopic pipe and start plate is as shown in Fig. 2 of Fig. 1 of patent documentation 1 or patent documentation, because the outer peripheral portion of Yu Qi etc. only carries out, therefore for the part not linking with start plate for the middle body of the diapire of telescopic pipe, the above-mentioned step and/or suck the distortion that the pressure oscillation because of pump chamber in step causes and cannot prevent of spuing.For example, if pump chamber is negative pressure in sucking step, exist the attraction force that the middle body of the diapire of the telescopic pipe that is not fixed on start plate produces due to negative pressure effect and to the problem that bloats distortion (being deformed into concavity) in pump chamber.

[look-ahead technique document]

[patent documentation]

[patent documentation 1] TOHKEMY 2002-174180 communique

[patent documentation 2] TOHKEMY 2012-122380 communique

Summary of the invention

The object of the present invention is to provide a kind of step and/or suck the distortion such as the diapire of the telescopic pipe that the pressure oscillation because of pump chamber in step causes is crooked of can positively preventing from spuing, and liquor charging amount (liquid measure spues) or circulating fluid volume can not produce deviation, and can stablize and suitably bring into play the expansion pump of pumping function.

The object of the invention to solve the technical problems realizes by the following technical solutions.The present invention is a kind of expansion pump, it forms as follows: the plastic cement that makes the opening portion be installed on pump case is shaped with round-ended cylinder shape telescopic pipe and stretches in axial direction, alternately carry out whereby from utilize telescopic pipe around and the pump chamber that forms via exhaust end safety check to the step that spues of the path liquor charging that spues, with from suck path via suction side safety check the suction step to pump chamber feed flow, and in order to reach above-mentioned purpose, special proposition forms as (1) or (2).

(1) outer peripheral portion of metal being made to the diapire Yu Qi etc. of moving plate and telescopic pipe links to be fixed, it is to be supported on pump case can be displaced into the mode of axial direction that this metal is made moving plate, make to connect airtight between the subtend end face of portion in contact with the electrolyte that middle body of the diapire of telescopic pipe contact with the liquid of pump chamber and start plate, and with annular seal member, seal this and connect airtight part.

(2) outer peripheral portion of metal being made to the diapire Yu Qi etc. of moving plate and telescopic pipe links to be fixed, it is to be supported on pump case can be displaced into the mode of axial direction that this metal is made moving plate, make to be formed with the seal space sealing by annular seal member between the subtend end face of portion in contact with the electrolyte that middle body of the diapire of telescopic pipe contact with the liquid of pump chamber and start plate, and be filled with incompressible fluid in sealing space.

The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.

Aforesaid expansion pump, wherein above-mentioned annular seal member is O ring, this O ring engaging is held in and is formed at the diapire of telescopic pipe or the O annular groove of start plate.

By technique scheme, expansion pump of the present invention at least has following advantages and beneficial effect: in expansion pump of the present invention, when the situation forming as (1), because the middle body of the diapire of telescopic pipe is that portion in contact with the electrolyte is to connect airtight under sealed state in start plate, therefore no matter the pressure oscillation of pump chamber how, all the time this portion in contact with the electrolyte and start plate can be remained to the state that cannot connect airtight discretely, again, when the situation forming as (2), because the middle body of the diapire at telescopic pipe is to be filled with incompressible fluid in the seal space forming between portion in contact with the electrolyte and start plate, and the seal space that is filled with incompressible fluid is as a kind of rigid body performance function, therefore no matter the pressure oscillation of pump chamber how, all the time can be by this portion in contact with the electrolyte, seal space and start plate as rigid body performance function remain the state that mutually cannot connect airtight discretely.Therefore, during any in (1) and (2) forms, for the pressure of pump chamber, with metal, make moving plate the portion in contact with the electrolyte of the diapire of telescopic pipe is strengthened, can positively prevent the distortion of this portion in contact with the electrolyte that the pressure oscillation because of pump chamber causes.Or, in expansion pump of the present invention, during situation that the mechanism that makes telescopic pipe carry out expanding-contracting action is cylinder mechanism, owing to preventing that diapire and metal that the forced air that is supplied to exhaust space for making telescopic pipe carry out expanding-contracting action enters plastic cement telescopic pipe processed from making between moving plate, can positively prevent because being supplied to the distortion of the diapire of the plastic cement telescopic pipe processed that the forced air of exhaust space causes.Therefore, suck step and spue in step, the volume of pump chamber can not change due to the diapire distortion of telescopic pipe, and the liquor charging amount of this expansion pump (liquid measure spues) or circulating fluid volume stable, can bring into play suitable pumping function.Again, due to the diapire of telescopic pipe himself without the intensity with the distortion that can prevent that the pressure oscillation because of pump chamber from causing, no matter be therefore the situation forming as (2), or as (1) as form situation time, can be thin-walled as far as possible, thereby can realize the significantly lightweight of telescopic pipe.

Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of specification, and for above and other object of the present invention, feature and advantage can be become apparent, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, be described in detail as follows.

Accompanying drawing explanation

Fig. 1: the vertical profile side view that represents an example of expansion pump of the present invention.

Fig. 2: along the vertical profile front elevation of the major component of the II-II line of Fig. 1.

Fig. 3: the vertical profile side view that represents the variation of expansion pump of the present invention.

The enlarged view of the major component of Fig. 4: Fig. 3.

Fig. 5: along the vertical profile front elevation of the V-V line of Fig. 3.

Fig. 6: the vertical profile side view that represents another variation of expansion pump of the present invention.

The enlarged view of the major component of Fig. 7: Fig. 6.

Fig. 8: along the vertical profile front elevation of the VIII-VIII line of Fig. 6.

[primary component symbol description]

1: path 2 spues: suck path

3: pump head 4: cylinder shell

4a: supply relief opening 4b: for exhaust space

4c: forced air 4d: for exhaust space

5: pump case 6: telescopic pipe

6a: perisporium 6b: open end

6c: diapire 6d: the end of paddy portion

6e: outer peripheral portion 6f: portion in contact with the electrolyte

6g: subtend end face 6h: positioning convex portion

7: pump chamber 8: exhaust end safety check

8a: spring 8b: valve body

9: suction side safety check 9a: spring

9b: valve body 10: start plate

10a: main body portion 10b: linking department

10c: subtend end face 10d: circular depressions

10e: outer peripheral portion 10f: box thread recess

11: mounting plate 12: connecting rod

12a: end screw 13:O ring

14: nut component 15: annular seal member (O ring)

15a:O annular groove 15b:O annular groove

16: screw 17: mounting plate

18:O ring 19: bearer ring

20: action shaft 20a: screw section

21: web 22: seal space

23: incompressible fluid 24:O ring

Embodiment

For further setting forth the present invention, reach technological means and the effect that predetermined goal of the invention is taked, below in conjunction with accompanying drawing and preferred embodiment, embodiment, structure, feature and effect thereof to a kind of expansion pump proposing according to the present invention, be described in detail as follows.

In graphic to being specifically described for implementing form of the present invention.

Fig. 1 represents the vertical profile side view of an example of expansion pump of the present invention, and Fig. 2 represents along the vertical profile front elevation of the major component of the II-II line of Fig. 1.Moreover in the following description, left and right refers to the left and right in Fig. 1.

Expansion pump shown in Fig. 1 (hereinafter referred to as " the first pump ") is for liquid (such as the liquid using in semiconductor, liquid crystal, organic ELDeng manufacturing process etc.) being carried out to liquor charging and making its circulation and laterally two ejector half expansion pumps of using, it forms as follows: possess: pump case 5, and it is to consist of with the pairing left and right cylinder shell 4 that is arranged at its both sides the pump head 3 that is formed with spue path 1 and suction path 2; Pairing left and right telescopic pipe 6, it is disposed in each cylinder shell 4, and in the flexible pump head 3 that is mounted freely on of axial direction (substantially horizontal); Pairing left and right pump chamber 7, its by each telescopic pipe 6 around and form; Pairing left and right exhaust end safety check 8, it is to be installed on pump head 3 to the outstanding state of each pump chamber 7; And pairing left and right suction side safety check 9, it is to be installed on pump head 3 to the outstanding state of each pump chamber 7; And by making two telescopic pipes 6 alternately carry out expanding-contracting action, carry out simultaneously by liquid from a pump chamber 7 via exhaust end safety check 8 to the step that spues of path 1 liquor charging that spues, with from suck path 2 via suction side safety check 9 the suction step to another pump chamber 7 feed flows.Moreover two cylinder shell 4, two telescopic pipes 6, two pump chambers 7, two exhaust end safety check 8 and the two suction side safety check 9 that form expansion pump except being the aspect of symmetrical structure, are same configuration separately.

Pump head 3 be become be formed be connected with liquor charging line spue path 1 and with the disc-shape of the suction path 2 being connected for liquidus, therefore as shown in Figure 1, on its two sides, left and right, diverge respectively and offer the downstream of upstream extremity and the suction path 2 of the path 1 that spues.

Each cylinder shell 4 as shown in Figure 1 to 4, has a round-ended cylinder shape for what be installed on pump head 3.By two cylinder shell 4, form pump case 5 with pump head 3, and by pump head 3, be divided into left and right two-part in the inside of pump case 5.

As shown in Figures 1 and 2, each telescopic pipe 6 is that to make perisporium 6a be that the plastic cement of section wave mode snake structure is shaped with round-ended cylinder body, by the volume of the flexible and scalable pump chamber 7 of axial direction (left and right horizontal direction).Each telescopic pipe 6 is that its open end 6b is connected airtight and is fixed on pump head 3, and makes to be configured in this telescopic pipe 6 pump chamber 7 by pump head 3 obturations.As the constituent material of each telescopic pipe 6, according to proterties of liquid etc., can use fluororesin (for example, polytetrafluoroethylene (PTFE), perfluoroalkoxy resin (PFA)) etc., but use PTFE in this example.In each telescopic pipe 6, diapire 6c is for to have the discoideus of certain wall thickness (thickness of axial direction), and its external diameter is consistent with the external diameter (external diameter on top) of perisporium 6a, and the end 6d of the paddy portion of perisporium 6a is linked to diapire 6c.

In the diapire 6c of each telescopic pipe 6, as shown in Figure 1, link the discoid start plate 10 that is fixed with metal system (for example stainless steel).Each start plate 10 is by the main body portion 10a of thin-wall circular plate-like, forms with the thick ring shape linking department 10b that is formed at its peripheral part, and makes it with the main body portion 10a with start plate 10, converge, connect airtight and the state that is embedded in linking department 10b is fixedly linked on the diapire 6c of telescopic pipe 6., the wall thickness of the diapire 6c of telescopic pipe 6 be set as identical or slightly thick with the wall thickness (thickness of axial direction) of the linking department 10b of start plate 10, by being installed on the outer peripheral portion of oppressing the diapire 6c of telescopic pipe 6 between the mounting plate 11 of linking department 10b of start plate 10 and the main body portion 10a of start plate 10 (in diapire 6c, compared with the linking department of the end 6d of the paddy portion with perisporium 6a, more lean on the part of outer circumferential side) 6e, and as shown in Figure 1, so that the diapire 6c of telescopic pipe 6 connects airtight in the state of the main body portion 10a of start plate 10, the diapire 6c of telescopic pipe 6 and start plate 10 are linked in its outer peripheral portion, and integrated.

Two telescopic pipes 6 are for example, by utilizing many (4) connecting rods 12 to link start plate 10, and synchronously to opposite direction, carry out expanding-contracting action.That is, example as shown in Figure 1, with in a telescopic pipe 6 during for deflated state, another telescopic pipe 6 be the mode of elongation state, and interlock links two telescopic pipes 6, in a telescopic pipe 6, dwindles while moving, and another telescopic pipe 6 and its extend action linkedly.

With regard to many connecting rods 12, by the peripheral part of two start plates 10, be that linking department 10b separates the link of equally spaced position in circumferencial direction, and by utilizing described many connecting rods 12 to link two start plates 10, and side by side carry out diapire 6c and the 10 ground links of start plate of each telescopic pipe 6 with this link.; each connecting rod 12 is disposed in cylinder shell 4 and via O ring 13 can insert logical being held in pump case 5 movably in axial direction; and the end screw 12a that connects the linking department 10b of mounting plate 11 and start plate 10 is screwed together in to nut component 14; and fastening; link whereby two start plates 10, and link diapire 6c and the start plate 10 of fixing each telescopic pipe 6.Moreover, the wall thickness of the main body portion 10a of start plate 10 is to set as follows: at least have not and can, owing to sucking step and the pressure of the pump chamber 7 in step that spues produces the intensity of the degree of distortion, be preferably in the scope with this intensity and compared with unfertile land, set as far as possible.

As making telescopic pipe 6 carry out the actuating mechanism of expanding-contracting action, the formations such as general Shi Yi piston-cylinder mechanism, crank mechanism or air cylinder mechanism, but in this embodiment, Shi Yi air cylinder mechanism forms.; actuating mechanism is to form as follows: idiomorphism be formed in each cylinder shell 4 diapire for relief opening 4a to the confession exhaust space 4b supply and discharge forced air 4c being formed between telescopic pipe 6 and start plate 10 and cylinder shell 4, make whereby telescopic pipe 6 carry out expanding-contracting action in axial direction.From two replacing and synchronously carrying out for exhaust for relief opening 4a, by with from one for relief opening 4a to for exhaust space 4b, supply with forced air 4c side by side from another for relief opening 4a exhaust, and the i.e. scalable action of two pump chambers 7 of the expanding-contracting action that makes two telescopic pipes 6 is to synchronously carrying out in the other direction.; suction step in one pump chamber 7 (or the step that spues) is synchronizeed and is carried out with the step that spues in another pump chamber 7 (or sucking step), and the step that spues in two pump chambers 7 (liquid from pump chamber 7 via exhaust end safety check 8 step to path 1 feed flow that spues), carries out with the switching that sucks step (liquid self-absorbing enter path 2 via suction side safety check 9 step to pump chamber 7 feed flows) simultaneously.Moreover, the done state of the step that spues in the suction step in the pump chamber 7 on the left of Fig. 1 represents and the pump chamber 7 on right side.

As shown in Figure 1, each exhaust end safety check 8 is to form as follows: (volume of pump chamber 7 occurs to expand and changes) of at telescopic pipe 6, extending action sucks in step, the application of force by spring 8a, valve body 8b is held in to pass valve position, and (volume of pump chamber 7 dwindles variation) of at telescopic pipe 6, dwindling action spues in step, by the pressure rise of pump chamber 7, the application of force of antagonistic spring 8a and make valve body 8b move to out valve position.As shown in Figure 1, each suction side safety check 9 is to form as follows: at telescopic pipe 6, dwindle spuing in step of action, the application of force by back pressure (pressure of pump chamber 7) and spring 9a, make valve body 9b be held in pass valve position, and extend in the suction step of action at telescopic pipe 6, by the pressure drop of pump chamber 7, the application of force of antagonistic spring 9a and make valve body 9b move to out valve position.

Moreover, about the member that must contact with liquid among the pump member of formation such as pump head and telescopic pipe 6, can be according to the selected suitable material such as the proterties of liquid, in this embodiment, be that the fluororesin such as teflon by corrosion resistance and chemically-resistant medicament excellence are that plastic cement forms.

And, in the first pump, as shown in Figure 1, the portion in contact with the electrolyte contacting with the liquid of pump chamber 7 in the middle body of the diapire 6c of telescopic pipe 6 (in diapire 6c and the linking department of the end 6d of the paddy portion of perisporium 6a more by the part of inner circumferential side) connect airtight between 6f and subtend end face 6g, the 10c of start plate 10, and with annular seal member 15, seal this and connect airtight part 6g, 10c.In this embodiment, as annular seal member 15, use the O ring being formed by incompressibility elastic material (fluorine rubber etc.), and this O ring 15 is O annular groove 15a that engaging is held in the diapire 6c that is formed at telescopic pipe 6.

Therefore, in the expanding-contracting action along with telescopic pipe 6 (the scalable variation of pump chamber volume), and while making situation that the pressure of pump chamber 7 changes, the diapire 6c of telescopic pipe 6 also can not produce distortion, and can not produce the described problem of beginning, thereby can bring into play suitable pumping function.

; with regard to the pump chamber in sucking step (pump chamber in example left side as shown in Figure 1) 7; the suction step of carrying out due to the stretching by telescopic pipe 6; make the pressure minimizing of pump chamber 7 and become negative pressure; it is that portion in contact with the electrolyte 6f is the diastrophic problem of concavity by the interior pulling of pump chamber 7 to negative pressure that the diapire 6c of the telescopic pipe 6 that therefore, only outer peripheral portion 6e and start plate 10 link deposits part in the central.Yet the portion in contact with the electrolyte 6f of the diapire 6c of telescopic pipe 6 connects airtight with the main body portion 10a of start plate 10, and it connects airtight part 6g, 10c and seals by O ring 15, therefore can from the main body portion 10a of start plate 10, not leave due to the formed attraction force of above-mentioned negative pressure.That is, the portion in contact with the electrolyte 6f of the diapire 6c of telescopic pipe 6 is retained as the state that cannot connect airtight discretely with the main body portion 10a of start plate 10.Therefore, the attraction force of portion in contact with the electrolyte 6f that acts on the diapire 6c of telescopic pipe 6 is that the main body portion 10a that makes moving plate 10 by metal bears, and the problem that does not exist this portion in contact with the electrolyte 6f to deform when sucking step.

Again, with regard to the pump chamber in the step that spues (pump chamber on example right side as shown in Figure 1) 7, due to the step that spues that action is carried out of dwindling by telescopic pipe 6, make the pressure rise of pump chamber 7 and become high pressure, it is portion in contact with the electrolyte 6f because the formed pushing force of pressure of pump chamber 7 is the problem of convex curvature distortion that the diapire 6c of the telescopic pipe 6 that therefore, only outer peripheral portion 6e and start plate 10 links deposits part in the central.Yet, because the portion in contact with the electrolyte 6f of the diapire 6c of telescopic pipe 6 connects airtight with the main body portion 10a of start plate 10, therefore the above-mentioned pushing force that acts on this portion in contact with the electrolyte 6f is that the main body portion 10a that makes moving plate 10 by metal bears, and the problem that does not exist this portion in contact with the electrolyte 6f to deform when spuing step.

So, by the first pump, in arbitrary steps when sucking step and while spuing step, all can there is not to make due to the pressure of pump chamber 7 situation of the diapire 6c distortion of telescopic pipe 6, and can not produce the volume generation substantial variation of pump chamber and cause liquor charging amount (liquid measure spues) or circulating fluid volume unstable, produce the problems such as deviation, thereby can bring into play suitable pumping function.

Again, in the first pump, because the portion in contact with the electrolyte 6f of the diapire 6c of telescopic pipe 6 is enhanced by start plate 10 as mentioned above, therefore the diapire 6c of telescopic pipe 6 is without being made as the heavy wall with the intensity that can resist mutually with the pressure of pump chamber 7, as long as can be just enough with necessary and sufficient wall thickness for 10 links of start plate with regard to the end screw 12a by mounting plate 11, connecting rod 12 and nut component 14 for having.Therefore, compare with the previous expansion pump that beginning is described, the diapire 6c that can make telescopic pipe 6 is the structure of thin-walled as far as possible, thereby can realize the lightweight of telescopic pipe 6.

Yet the formation of expansion pump of the present invention is not limited to above-mentioned example, can in the scope that does not depart from basic principle of the present invention, make suitable improvement, change.

For example, in the first pump, as shown in Figure 1, form as follows: with the connecting rod 12 that can be supported by pump case 5 movably in axial direction, link two start plates 10, each start plate 10 can be supported by pump case 5 in axial direction movably via connecting rod 12, and by linking each start plate 10 and connecting rod 12, and this start plate 10 and the diapire 6c of telescopic pipe 6 are linked via mounting plate 11, but the support mechanism of 10 pairs of pump cases 5 of each start plate and each start plate 10 can, as shown in Fig. 3~Fig. 5, be also indivedual independence with the connect mechanism of the diapire 6c of telescopic pipe 6.

; Fig. 3 represents the vertical profile side view of the variation of expansion pump of the present invention; Fig. 4 is the enlarged view of the major component of Fig. 3; Fig. 5 is the vertical profile front elevation along the V-V line of Fig. 3; expansion pump shown in Fig. 3 (hereinafter referred to as " the second pump ") is laterally two ejector half expansion pumps; it is identical with the formation of the first pump except following aspect.Moreover, for the member of formation identical with the first pump, the mark symbol identical with Fig. 1 and Fig. 2 in Fig. 3~Fig. 5, description is omitted whereby.

In the second pump, as shown in Figures 3 and 4, the diapire 6c of each telescopic pipe 6 and start plate 10 is for having same diameter discoideus of certain wall thickness (thickness of axial direction), and make diapire 6c and the start plate 10 of telescopic pipe 6, under the state connecting airtight by a plurality of screws 16 that are inserted through outer peripheral portion 6e, the 10e of its grade are screwed togather, are anchored on mounting plate 17, link.Moreover, in this embodiment, as shown in Figure 5, the outer peripheral portion 10e of the outer peripheral portion 6e of the diapire 6c of telescopic pipe 6 and start plate 10 is used in to circumferencial direction separates uniformly-spaced and 8 screws 16 of configuring link.Again, the wall thickness of start plate 10 is that be set as at least having not can be owing to sucking step and the intensity of the degree that the pressure of the pump chamber 7 in step that spues is out of shape, and is preferably in the scope with this intensity and sets as far as possible thinlyyer.

In the central part of each start plate 10, at the diapire of cylinder shell 4, via O ring 18 and bearer ring 19, be formed with and connect movably the action shaft 20 that is supported on axial direction.In the end of each action shaft 20, in cylinder shell 4 outside sets, have discoid web 21, and two webs 21 are disposed at cylinder shell 4 outsides and link by the connecting rod 12 of the suitable radical being supported by pump case 5 movably in axial direction (in this example being 2).Therefore,, because two start plates 10 link via action shaft 20, web 21 and connecting rod 12, therefore two telescopic pipes 6 can synchronously carry out expanding-contracting action to opposite direction.That is, as illustrated in Fig. 3, with in a telescopic pipe 6 during for deflated state, another telescopic pipe 6 links two telescopic pipes 6 for the mode interlock of elongation state, and when a telescopic pipe 6 dwindles action, another telescopic pipe 6 extends action linkedly with it.

The actuating mechanism that makes telescopic pipe 6 carry out expanding-contracting action be with the first pump similarly, form as follows: idiomorphism be formed in each cylinder shell 4 diapire for relief opening (not shown) to the confession exhaust space 4d supply and discharge forced air being formed between telescopic pipe 6 and start plate 10 and cylinder shell 4, make whereby telescopic pipe 6 carry out expanding-contracting action in axial direction.And, replace and synchronously carry out for two exhausts that supply for exhaust space 4d, whereby, the expanding-contracting action of the two telescopic pipes 6 i.e. scalable action of two pump chambers 7 synchronously carries out to opposite direction.; suction step in one pump chamber 7 (or the step that spues) is to synchronize to carry out with the step that spues in another pump chamber 7 (or sucking step), and can carry out the step that spues in two pump chambers 7 (liquid from pump chamber 7 via exhaust end safety check 8 step to path 1 liquor charging that spues) simultaneously and suck step (liquid self-absorbing enter path 2 via suction side safety check 9 step to pump chamber 7 feed flows) and switch.Moreover, the done state of the step that spues in the suction step in the pump chamber 7 on the left of Fig. 3 represents and the pump chamber 7 on right side.

And, in the second pump, as shown in Figures 3 and 4, with the first pump similarly, the portion in contact with the electrolyte contacting with the liquid of pump chamber 7 in the middle body of the diapire 6c of telescopic pipe 6 (in diapire 6c, and the linking department of the end 6d of the paddy portion of perisporium 6a more by the part of inner circumferential side) connect airtight between 6f and subtend end face 6g, the 10c of start plate 10, and with annular seal member 15, seal this and connect airtight part 6g, 10c.In this embodiment, as annular seal member 15, with the first pump similarly, use the O ring being formed by incompressibility elastic material (fluorine rubber etc.), and make these O ring 15 engagings be held in the O annular groove 15b that is formed at start plate 10.Moreover, in the central part of the portion in contact with the electrolyte 6f of the diapire 6c of telescopic pipe 6, be formed with and be formed at the tight chimeric circular positioning convex portion 6h of circular depressions 10d of the central part of start plate 10, and so that the diapire 6c of telescopic pipe 6 and start plate 10 are the mode that concentric shape converges designs.

Therefore, in the second pump, also with the first pump similarly, in the expanding-contracting action along with telescopic pipe 6 (the scalable variation of pump chamber volume), and during the situation that the pressure that makes pump chamber 7 changes, the diapire 6c of telescopic pipe 6 also makes moving plate 10 and is enhanced by metal, can not produce distortion, thereby can not produce the described problem of beginning, can bring into play suitable pumping function.Moreover in the second pump, owing to connecting rod 12 being disposed to cylinder shell 4 outsides, therefore the volume of confession exhaust space 4d is less than the confession exhaust space 4b of the first pump, and can reduce for making telescopic pipe 6 carry out the forced air amount of expanding-contracting action.

Again, in the first pump, because the portion in contact with the electrolyte 6f of the diapire 6c of telescopic pipe 6 is enhanced by start plate 10 as mentioned above, therefore the diapire 6c of telescopic pipe 6 is without for having the heavy wall of the intensity that can resist mutually with the pressure of pump chamber 7, as long as can link with start plate 10 by screw 16 and mounting plate 17 for having just that speech is necessary and wall thickness is just enough fully.Therefore, with the first pump similarly, compare with the previous expansion pump that beginning is described, the diapire 6c that can make telescopic pipe 6 is the structure of thin-walled as far as possible, thereby can realize the lightweight of telescopic pipe 6.

Again, in first and second pump, to make to connect airtight between the portion in contact with the electrolyte 6f of diapire 6c of telescopic pipe 6 and subtend end face 6g, the 10c of start plate 10, and this connects airtight part 6g, 10c with annular seal member (O ring) 15 sealings, but also can be as shown in Figure 6 to 8, between this subtend end face 6g, 10c, form by annular seal member 15 and the seal space 22 of sealing, and incompressible fluid 23 is filled in sealing space 22.

; Fig. 6 represents the vertical profile side view of another variation of expansion pump of the present invention; Fig. 7 is the major component enlarged view of Fig. 6; Fig. 8 is the vertical profile front elevation along the VIII-VIII line of Fig. 6; expansion pump shown in Fig. 6 (hereinafter referred to as " the 3rd pump ") is laterally two ejector half expansion pumps; it is all identical with the formation of the second pump except following aspect.Moreover, for the member of formation identical with the second pump, the mark symbol identical with Fig. 3~Fig. 5 in Fig. 6~Fig. 8, description is omitted whereby.

In the 3rd pump, as shown in FIG. 6 and 7, outer surface in the portion in contact with the electrolyte 6f of the diapire 6c of each telescopic pipe 6 is formed with circular depressions,, the middle body that makes the diapire 6c of telescopic pipe 6 is the wall thickness that the wall thickness (thickness of axial direction) of portion in contact with the electrolyte 6f is thinner than outer peripheral portion 6e, and is formed with by the formed space 22 of above-mentioned circular depressions between subtend end face 6g, the 10c of portion in contact with the electrolyte 6f and start plate 10.And, by being equipped on the outer peripheral portion 6e of diapire 6c of telescopic pipe 6 and the annular seal member 15 between start plate 10 and making this space 22 become seal space.Moreover, as annular seal member 15, with the second pump similarly, use O ring, and this O ring 15 is that engaging is held in the O annular groove 15b that is formed at start plate 10.

And, in seal space 22, be filled with incompressible fluid (for example wet goods liquid) 23 densely.

Again, in the 3rd pump, as shown in FIG. 6 and 7, action shaft 20 separates formation with start plate 10, and the screw section 20a that is formed at action shaft 20 front ends is bolted in the box thread recess 10f that is formed on start plate 10, and utilize O ring 24 to make this part sealing that is spirally connected, make whereby both start plates 10, action shaft 20 one link.

And, in the 3rd pump, with regard to the pump chamber in sucking step (pump chamber in example left side as shown in Figure 6) 7, the suction step of carrying out due to the stretching by telescopic pipe 6, and the pressure that makes pump chamber 7 reduces and become negative pressure, therefore, by a plurality of screws 16, making the diapire 6c of the telescopic pipe 6 that only outer peripheral portion 6e and start plate 10 links deposit part is in the central that portion in contact with the electrolyte 6f is the diastrophic problem of concavity by the interior pulling of pump chamber 7 to negative pressure.Yet, by wet goods incompressible fluid 23 dense be filled in the seal space 22 between the portion in contact with the electrolyte 6f of the diapire 6c that is formed on telescopic pipe 6 and subtend end face 6g, the 10c of start plate 10, be filled with the seal space 22 of this incompressible fluid 23 as a kind of rigid body performance function.Therefore, during the situation that is negative pressure at pump chamber 7, the portion in contact with the electrolyte 6f of the diapire 6c of telescopic pipe 6, as the seal space that is filled with incompressible fluid 23 22 and the start plate 10 of rigid body performance function, remain the state that mutually cannot connect airtight discretely, this portion in contact with the electrolyte 6f can not pulled by the interior side to pump chamber 7 and be deformed into concavity, and the volume of pump chamber 7 can not change in sucking step.

Again, with regard to the pump chamber (pump chamber on example right side as shown in Figure 6) 7 spuing in step, due to the step that spues that action is carried out of dwindling by telescopic pipe 6, and make the pressure rise of pump chamber 7 and become high pressure, it is that portion in contact with the electrolyte 6f is deformed into the problem of convex to seal space 22 due to the formed pushing force of pressure of pump chamber 7 that the diapire 6c of the telescopic pipe 6 that therefore, only outer peripheral portion 6e and start plate 10 link deposits part in the central.Yet, because seal space 22 is brought into play function as a kind of rigid body that is filled with incompressible fluid 23 as mentioned above, the formed pushing force of pressure of pump chamber 7 of portion in contact with the electrolyte 6f of diapire 6c that therefore acts on telescopic pipe 6 is made and is moved plate 10 and bear by metal via the seal space 22 as rigid body performance function.Therefore, this portion in contact with the electrolyte 6f can not be present in the problem deforming while spuing step, and in the step that spues, the volume of pump chamber 7 also can not change.

So, according to the 3rd pump, with first and second pump similarly, in arbitrary steps when sucking step and while spuing step, all can there is not to make due to the pressure oscillation of pump chamber 7 situation of the diapire 6c distortion of telescopic pipe 6, and can not produce the volume generation substantial variation of pump chamber and cause liquor charging amount (liquid measure spues) and circulating fluid volume is unstable, produce the problems such as deviation, can bring into play suitable pumping function.

Again, in the 3rd pump, because the portion in contact with the electrolyte 6f of the diapire 6c of telescopic pipe 6 is enhanced by start plate 10 via seal space 22 as mentioned above, as long as therefore the diapire 6c of telescopic pipe 6 have with regard to by screw 16 and mounting plate 17, its outer peripheral portion 6e and start plate 10 can be linked speech necessary and fully wall thickness with regard to enough, for middle body is portion in contact with the electrolyte 6f, comparable first and second pump is thin-walled property by a larger margin, thereby can realize the significantly lightweight of telescopic pipe 6.

Moreover the present invention as two ejector half expansion pumps such as the first~three pump, also can preferably be applicable to single-action type expansion pump except being applicable to.

The above, it is only preferred embodiment of the present invention, not the present invention is done to any pro forma restriction, although the present invention discloses as above with preferred embodiment, yet not in order to limit the present invention, any those skilled in the art, do not departing within the scope of technical solution of the present invention, when can utilizing the technology contents of above-mentioned announcement to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solution of the present invention, any simple modification of above embodiment being done according to technical spirit of the present invention, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.

Claims (4)

1. an expansion pump, it forms as follows: the plastic cement that makes the opening portion be installed on pump case is shaped with round-ended cylinder shape telescopic pipe and stretches in axial direction, alternately carry out whereby from utilize telescopic pipe around and the pump chamber that forms via exhaust end safety check to the step that spues of the path liquor charging that spues, with from suck path via suction side safety check the suction step to pump chamber feed flow, it is characterized in that:
Metal is made to moving plate and can be displaced into the mode of axial direction, be supported on pump case, and the outer peripheral portion of the diapire Yu Qi of start plate and telescopic pipe etc. is linked fixing, make to connect airtight between the subtend end face of portion in contact with the electrolyte that middle body of the diapire of telescopic pipe contact with the liquid of pump chamber and start plate, and with annular seal member, seal this and connect airtight part.
2. expansion pump as claimed in claim 1, is characterized in that wherein this annular seal member is O ring, and this O ring engaging is held in and is formed at the diapire of telescopic pipe or the O annular groove of start plate.
3. an expansion pump, it forms as follows: the plastic cement that makes the opening portion be installed on pump case is shaped with round-ended cylinder shape telescopic pipe and stretches in axial direction, alternately carry out whereby from utilize telescopic pipe around and the pump chamber that forms via exhaust end safety check to the step that spues of the path liquor charging that spues, with from suck path via suction side safety check the suction step to pump chamber feed flow, it is characterized in that:
Metal is made to moving plate and can be displaced into the mode of axial direction, be supported on pump case, and the outer peripheral portion that makes the diapire Yu Qi etc. of this start plate and telescopic pipe links fixing, make the middle body of the diapire of telescopic pipe towards between the telescopic pipe bottom wall portion of pump chamber and the subtend end face of start plate, be formed with the seal space sealing by annular seal member, and be filled with incompressible fluid in sealing space.
4. expansion pump as claimed in claim 3, is characterized in that wherein this annular seal member is O ring, and this O ring engaging is held in and is formed at the diapire of telescopic pipe or the O annular groove of start plate.
CN201310403659.7A 2012-09-10 2013-09-06 Bellows pump CN103671041A (en)

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CN110192033A (en) * 2017-02-03 2019-08-30 伊格尔工业股份有限公司 Liquid-supplying system

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TWI626372B (en) 2015-04-13 2018-06-11 徐郁輝 A kind of floatable water bags which have foldable layer structure

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CN110192033A (en) * 2017-02-03 2019-08-30 伊格尔工业股份有限公司 Liquid-supplying system

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US20140072465A1 (en) 2014-03-13
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JP2014051950A (en) 2014-03-20
TW201410976A (en) 2014-03-16

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Application publication date: 20140326