CN103625876B - Roller device - Google Patents

Roller device Download PDF

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Publication number
CN103625876B
CN103625876B CN201310367352.6A CN201310367352A CN103625876B CN 103625876 B CN103625876 B CN 103625876B CN 201310367352 A CN201310367352 A CN 201310367352A CN 103625876 B CN103625876 B CN 103625876B
Authority
CN
China
Prior art keywords
roller
transmission object
transfer
band
torque
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201310367352.6A
Other languages
Chinese (zh)
Other versions
CN103625876A (en
Inventor
宋旭
朴明进
姜明成
郑基泽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SNU Precision Co Ltd
Original Assignee
SNU Precision Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SNU Precision Co Ltd filed Critical SNU Precision Co Ltd
Publication of CN103625876A publication Critical patent/CN103625876A/en
Application granted granted Critical
Publication of CN103625876B publication Critical patent/CN103625876B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00Roller-ways
    • B65G13/02Roller-ways having driven rollers
    • B65G13/06Roller driving means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt

Abstract

The invention disclsoes a guide roller device, which comprises a transfer part, multiple first rollers, multiple second rollers, a belt, a second roller moving part, a first roller rotating part, a torque sensor, and a control part. The transfer part transfers objects along a transfer direction. The first rollers are separately arranged in the side parts of the objects along the transfer direction to transfer the objects in the transfer direction. The second rollers are arranged between the first rollers neighboring along the side parts of the objects. The belt is wound on the first and second rollers. The second roller moving part reciprocates the second rollers in a direction to be closed to or to be escaped from the objects.

Description

Roller device
Technical field
The present invention relates to a kind of Roller device, and more specifically, relate to a kind of Roller device transmission object normally can being transmitted along direction of transfer at relative sidepiece place guiding transmission object.
Background technology
When manufacturing the display base plate of such as flat display board and so on, perform the various techniques such as such as deposit, cleaning, drying, etching, exposure to form pattern on substrate.In addition, most of this technique performs in the process chamber for performing corresponding technique, and therefore, must enter in corresponding process chamber or when the technique in the process chamber in correspondence completes substrate transmission and transmit to take out substrate from this process chamber.
As the current substrate transmission method used in substrate transmission equipment, there is the horizontal transmission method for transmitting the substrate that on even keel supports, for transmitting the vertical transmission method of the substrate vertically supported and the inclination transmission method etc. for transmitting the substrate supported obliquely.
In the transmittance process of substrate, if substrate normally transmits, then substrate is advanced as the crow flies along direction of transfer.But due to the unbalanced rotational force of substrate transmission equipment, the defective planeness etc. of substrate transmission equipment, substrate may not be advanced as the crow flies along direction of transfer.Therefore, in order to the situation of not advancing along direction of transfer to substrate is as the crow flies prepared, Roller device is installed to guide the straight line transmission of substrate at the opposite side portion place of substrate, thus substrate is normally transmitted.
Fig. 1 is the view of the example showing traditional Roller device.
With reference to Fig. 1, traditional Roller device comprises along direction of transfer A1 with the isolated multiple deflector roll 20 of preset distance, and each deflector roll 20 freely can not rotate by power.If transmit object 10 a little on the skew advance when moving along direction of transfer A1 and bump against with deflector roll 20, then deflector roll 20 carries out rotating transmission object 10 can be advanced in the opposite direction, thus again transmits along direction of transfer A1 transmission object 10.
But, as shown in (b) of Fig. 1, excessively on the skew advance relative to direction of transfer A1 if transmit object 10 and bump against with deflector roll 20, then occurring that deflector roll 20 no longer carries out rotating and transmits object 10 and be stuck in the problem stopped in deflector roll 20 and by deflector roll 20.In order to solve this problem, workman manually must control deflector roll 20 and can normally transmit to make transmission object 10.
Therefore, if transmit object to be stuck in deflector roll and no longer along direction of transfer transmission, due to must stop process equipment, so reduce the production efficiency of product, and because external force is exceedingly applied on transmitted transmission object, transmitting object may be damaged.
Summary of the invention
Therefore, the present invention's imagination solves the problem, and aspect of the present invention is to provide a kind of Roller device, it is except comprising the roller of the normal delivery for guiding transmission object, also comprising can at the roller moved up near the side transmitting object, even if thus when transmitting object and excessively on the skew advancing relative to direction of transfer, still prevent transmitting object and to be stuck in roller and to prevent from transmitting object not along direction of transfer transmission.
According to aspects of the present invention, provide a kind of Roller device, comprising: transfer unit, it transmits along direction of transfer transmission object; Multiple first roller, it is arranged in the lateral side place, spaced apart and guide transmission object to be passed along direction of transfer along direction of transfer transmitting object; Second roller, the lateral side place that it is transmitting object is arranged between the first contiguous roller; Band, it is wound on and is arranged on both first roller at the second roller rear and the second roller about direction of transfer among the first contiguous roller; Second roller mobile unit, it makes the second roller at crank motion between the direction and the direction leaving transmission object of transmission object; First roller rotating driver, it rotates the band be wound on the first roller and the second roller is rotated to the first roller, wherein, the torque of the first roller rotating driver when transmitting object and to be stuck in band and being stopped by band is defined as reference torque, and Roller device also comprises: torque sensor, it detects the torque of the first roller rotating driver; And controller, when the torque detected by torque sensor is more than or equal to reference torque, controller controls the side that the second roller is leaving transmission object is moved up to the second roller mobile unit, and makes the second roller move up near the side transmitting object subsequently.
Roller device also can comprise and enters sensor, and it detects and transmits entering of object, and wherein, entering after sensor detects entering of sensing objects, the second roller is being moved up near the side transmitting object by the second roller mobile unit.
Roller device also can comprise spring member, and it to be arranged in the second roller and flexibly to urge the second roller along the direction transverse to direction of transfer towards transmission object, thus when bumping against when transmission object and the second roller or be with absorbing vibration.
Accompanying drawing explanation
By hereinafter by reference to the accompanying drawings to the explanation of illustrative embodiments, above-mentioned and/or other aspect of the present invention will become obvious and be easier to understand, in the accompanying drawings:
Fig. 1 is the view of the example showing traditional Roller device;
Fig. 2 is the view of the Roller device shown according to the embodiment of the present invention;
Fig. 3 shows the view being carried out the first roller, the second roller and the band rotated by the first roller rotating driver of the Roller device of Fig. 2;
Fig. 4 is the view of the operation of the second roller of the Roller device describing Fig. 2 when transmitting object and not transmitting along direction of transfer; And
Fig. 5 is the view of the spring member of the Roller device showing Fig. 2.
Detailed description of the invention
Below, the embodiment according to Roller device of the present invention is described with reference to the accompanying drawings.
Fig. 2 is the view of the Roller device shown according to embodiment of the present invention; Fig. 3 shows the view being carried out the first roller, the second roller and the band rotated by the first roller rotating driver of the Roller device of Fig. 2; Fig. 4 is the view of the operation of the second roller of the Roller device describing Fig. 2 when transmitting object and not transmitting along direction of transfer; And Fig. 5 is the view of the spring member of the Roller device showing Fig. 2.
With reference to Fig. 2 to Fig. 5, Roller device 100 in this embodiment comprises transfer unit 110, multiple first roller 120, second roller 130, band the 140, second roller mobile unit (not shown), the first roller rotating driver (not shown), controller (not shown), enters sensor 160 and spring member 170, and this Roller device 100 guides transmission object normally to transmit along direction of transfer to enable transmission object in opposite side portion.
Transfer unit 110 supports the bottom of transmission object 10 and transmits transmission object 10 along direction of transfer A1.The ball-screw that transfer unit 110 can comprise motor, arrange along direction of transfer A1 and straight-line motion guidance unit etc., motor supply is used for the rotary power of swing roller leading screw.Transfer unit 110 can transmit transmission object 10 along direction of transfer A1 according to the hand of rotation of motor, or transmits along the direction contrary with direction of transfer A1 transmitting object 10 where necessary.
In this manual, transmitting the substrate itself that object 10 both can refer to carry out when not having substrate tray transmitting, also can refer to the substrate be contained in substrate tray.
Guide multiple first rollers 120 of transmission object 10 to be passed to be arranged in transmit the lateral side place of object 10 and spaced apart along direction of transfer A1 along direction of transfer A1.First roller 120 can transmit object 10 and the material not making transmission object 10 produce electrostatic and makes by not damaging.Such as, the first roller 120 can be made up of polyetheretherketone (PEEK) etc.
First roller 120 is rotatably installed about the S. A. vertically penetrating central portion.
The lateral side place that second roller 130 is transmitting object 10 is arranged between the first contiguous roller 120.Similarly, the second roller 130 can transmit object 10 and the material not making transmission object 10 produce electrostatic and makes by not damaging.Such as, the second roller 130 can be made up of polyetheretherketone (PEEK) etc.Second roller 130 is rotatably installed about the S. A. vertically penetrating central portion.
Second roller 130 can be arranged between the roller 120 of all vicinities along direction of transfer A1.Alternatively, the second roller 130 can be mounted to discontinuously: in some regions, and the second roller 130 is arranged between the first contiguous roller 120; But in some other region, the second roller 130 is not arranged between the first contiguous roller 120.
Band 140 is wound on the first roller 120 and the second roller 130, and rotates together with the second roller 130 with the first roller 120.As shown in Figure 2,140 are with to be wound on being positioned on first roller 120 at the second roller 130 rear about direction of transfer A1 among the first contiguous roller 120.
Similarly, 140 are with can to transmit object 10 and the material not making transmission object 10 produce electrostatic and make by not damaging.
Second roller mobile unit (not shown) makes the second roller 130 along the direction of the direction of transfer A1 transverse to transmission object, at crank motion on the direction B1 transmitting object or on the direction B2 leaving transmission object.
At the second roller 130 under the state of movement on the direction B1 transmitting object, the dummy line that the S. A. of the first roller 120 is connected with the S. A. of the second roller 130 is favoured direction of transfer A1.On the other hand, the second roller 130 leave transmit object direction B2 on movement state under, the dummy line that the S. A. of the first roller 120 is connected with the S. A. of the second roller 130 and direction of transfer A1 almost parallel.
Second roller mobile unit can be realized by air cylinder, the structure being combined with ball-screw and rotation motor, linear motor or similar straight spur unit.This straight spur unit easily can be constructed by the personnel with ordinary skill and form, and therefore will omit detailed description thereof.
Second roller mobile unit can be configured to move corresponding second roller 130 individually, or is all moved together by this multiple second roller 130.
First roller rotating driver (not shown) rotates the first roller 120 and therefore makes the band 140 be wound on the first roller 120 and the second roller 130 rotate.First roller rotating driver can comprise motor and power transmission unit, the rotary power that motor supply rotates for making the first roller 120, and power transmission unit is used for rotary power to transfer to the first roller 120 from motor.This structure easily can be realized by the personnel with ordinary skill, and therefore will omit detailed description thereof.
First roller rotating driver can be configured to rotate corresponding first roller 120 individually, or rotates multiple first roller 120 simultaneously.
Controller (not shown) controls the second roller mobile unit, even if thus transmitting under the state that object 10 is stuck in band 140, when the first roller 120 rotate and transmit object 10 transmit on direction of transfer A1 yet but be stopped time, normally transmission object 10 is transmitted.
First roller rotating driver is provided with the torque sensor (not shown) of the torque for detecting the first roller rotating driver.Under the state that transmission object 10 does not bump against with band 140, there is not the factor of the rotation of interference fringe 140, and therefore, band 140 can rotate with the torque rating of the first roller rotating driver.But, as as shown in (a) of Fig. 4, under transmission object 10 and band 140 bump against and be stuck in the state stopped in band 140 and by band 140, the rotation of band 140 is interfered, and the torque therefore, needed for the rotating band 140 of the first roller rotating driver increases.
Now, under transmission object 10 is stuck in the state stopped in band 140 and by band 140, the torque being greater than the torque rating of the first roller rotating driver will be called reference torque.
If the torque detected by torque sensor is more than or equal to as being stuck at transmission object 10 the undefined reference torque of state stopped in band 140 and by band 140 above, then controller controls with the second roller 130 mobile on the direction B2 leaving transmission object shown in (b) at Fig. 4 to the second roller mobile unit, and subsequently, again at mobile second roller 130 on the direction B1 transmitting object shown in (c) of Fig. 4.
With reference to (c) of Fig. 4, second roller 130 promotes the edge part transmitting object 10 when moving on the direction B1 transmitting object, and therefore, the distortion angle transmitting object 10 is offset to a certain extent, makes to transmit object 10 and can return its normal orbit and can transmit along direction of transfer A1.
Enter sensor 160 and detect entering of transmission object 10.
Detecting transmit after object 10 enters by entering sensor 160, controller controls with at the second roller 130 mobile on the direction B1 transmitting object to the second roller mobile unit.
Transfer unit 110 can be provided with in the end relative with being provided with the end that enters sensor 160 and take out sensor (not shown).After taking-up sensor detects that transmitting object 10 takes out, controller can control to leave mobile second roller 130 on the direction B2 transmitting object to the second roller mobile unit.
In order at transmission object 10 and the second roller 130 or absorbing vibration when being with 140 to bump against, in the second roller 130, be provided with spring member 170.
Spring member 170 flexibly force the second roller 130 along transverse to direction of transfer A1 direction, towards transmit object 10 direction B1 on promoted.When transmission object 10 and the second roller 130 or when being with 140 to bump against, the elasticity of spring member 170 works on the direction B1 promoting the second roller 130 towards transmission object 10, and thus the distortion angle transmitting object 10 is offset, thus make transmission object 10 turn back to direction of transfer A1.
Except comprising the first roller for guiding transmission object normally to transmit, have and also comprise the second roller according to the Roller device of the previous constructions of embodiment, second roller can move up near transmitting the side of object, even if thus have and transmit object and excessively on the skew advance relative to direction of transfer and also prevent transmitting object and be stuck in the effect stopped in roller and by roller.
And, have and according to the Roller device of the previous constructions of embodiment, the band be wound on the first roller and the second roller is rotated, thus enable on the skew to advance and normally return direction of transfer with being with the transmission object bumped against.
And, have according to the Roller device of the previous constructions of embodiment when transmitting object and to be stuck in band and being stopped by band, second roller retracted and advances forward with relief second roller, thus to enable to be stuck in band and easily to be returned direction of transfer by the transmission object that band stops.
And, have and comprise according to the Roller device of the previous constructions of embodiment the spring member flexibly urging the second rod towards transmission object, thus enable easily to return direction of transfer with the transmission object with collision.
According to the present invention, even if when transmitting object and excessively on the skew advancing relative to direction of transfer, Roller device prevents transmitting object and to be stuck in roller and to be stopped by roller.
And, in Roller device according to the present invention, not only on the skew advance and be with the transmission object that bumps against but also be stuck in band and be with the transmission object that stops also can normally and easily return direction of transfer.
Although illustrated and depicted illustrative embodiments more of the present invention, but one of ordinary skill in the art will appreciate that, can make change in these embodiments without departing from the principles and spirit of the present invention, the scope of principle of the present invention and spirit is by appended claim and equivalents thereof.

Claims (3)

1. a Roller device, comprising: transfer unit, and described transfer unit transmits along direction of transfer transmission object; Multiple first roller, described multiple first roller is arranged in the lateral side place, spaced apart and guide described transmission object to be passed along described direction of transfer along described direction of transfer of described transmission object; Second roller, described second roller is arranged between contiguous described first roller at the described lateral side place of described transmission object; Band, on described first roller being arranged in described second roller rear about described direction of transfer of described tape wrapping among contiguous described first roller and described both second rollers; Second roller mobile unit, described second roller mobile unit makes described second roller at crank motion between the direction and the direction leaving described transmission object of described transmission object; First roller rotating driver, described first roller rotating driver rotates the described band be wound on described first roller and described second roller is rotated to described first roller;
Wherein, the torque of the described first roller rotating driver when described transmission object to be stuck in described band and to be stopped by described band is defined as reference torque, and
Described Roller device also comprises:
Torque sensor, described torque sensor detects the torque of described first roller rotating driver; And
Controller, when the torque detected by described torque sensor is more than or equal to described reference torque, described controller controls to move up described second roller and subsequently at described second roller that moves up near the side of described transmission object in the side leaving described transmission object to described second roller mobile unit.
2. Roller device according to claim 1, also comprises and enters sensor, described in enter sensor and detect entering of described transmission object;
Wherein, enter after sensor detects entering of described sensing objects described, described second roller is moved up in the side near described transmission object by described second roller mobile unit.
3. Roller device according to claim 1, also comprise spring member, described spring member to be arranged in described second roller and flexibly to urge described second roller along the direction transverse to described direction of transfer towards described transmission object, thus when described transmission object bumps against with described second roller or described band absorbing vibration.
CN201310367352.6A 2012-08-22 2013-08-21 Roller device Expired - Fee Related CN103625876B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2012-0091910 2012-08-22
KR1020120091910A KR101201702B1 (en) 2012-08-22 2012-08-22 Guide Roller Apparatus

Publications (2)

Publication Number Publication Date
CN103625876A CN103625876A (en) 2014-03-12
CN103625876B true CN103625876B (en) 2015-06-03

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CN201310367352.6A Expired - Fee Related CN103625876B (en) 2012-08-22 2013-08-21 Roller device

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JP (1) JP5459748B2 (en)
KR (1) KR101201702B1 (en)
CN (1) CN103625876B (en)
TW (1) TWI460808B (en)

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CN104477634A (en) * 2014-11-28 2015-04-01 苏州晟成光伏设备有限公司 Guide structure of final inspection blanking device
CN104528312B (en) * 2015-01-04 2016-12-14 东晶锐康晶体(成都)有限公司 A kind of lift-launch machine finished product material tray fixing device
KR101833883B1 (en) * 2016-06-21 2018-03-05 (주)소닉스 Pressure roller for curved display panel manufacturing device
KR102036066B1 (en) * 2019-06-06 2019-11-26 이순선 Multifunctional workbench
CN111591684B (en) * 2020-05-20 2023-09-19 徐州鑫路达配送服务有限公司 Conveyer belt baffle
JP7350029B2 (en) 2021-06-15 2023-09-25 キヤノントッキ株式会社 Transport equipment and film forming equipment
JP2023071456A (en) * 2021-11-11 2023-05-23 株式会社ダイフク Carried object posture adjusting device
CN114935842A (en) * 2022-06-17 2022-08-23 广东江粉高科技产业园有限公司 Novel Mylar pressing roller jig process

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Also Published As

Publication number Publication date
KR101201702B1 (en) 2012-11-15
TWI460808B (en) 2014-11-11
CN103625876A (en) 2014-03-12
JP2014040328A (en) 2014-03-06
JP5459748B2 (en) 2014-04-02
TW201409597A (en) 2014-03-01

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