CN103575443B - A kind of device for bonding wire tensile test - Google Patents
A kind of device for bonding wire tensile test Download PDFInfo
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- CN103575443B CN103575443B CN201210254534.8A CN201210254534A CN103575443B CN 103575443 B CN103575443 B CN 103575443B CN 201210254534 A CN201210254534 A CN 201210254534A CN 103575443 B CN103575443 B CN 103575443B
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Abstract
本发明公开了一种用于键合引线拉力测试的装置，包括拉钩、待测件安装机构、拉钩位置调整机构和拉伸机，待测件安装机构包括待测件固定板和水平底座，该待测件固定板垂直水平底座，待测件可拆卸地安装在待测件固定板的第一面上；拉钩位置调整机构包括水平轨道和与其垂直的竖直轨道，该竖直轨道的轨道开口与待测件固定板的第一面相对，拉钩安装在竖直轨道中，并能沿竖直轨道上下移动；拉伸机具有两个滑块、位移传感器和设置在第一滑块上的拉力传感器；水平底座安装在第一滑块上的拉力传感器上；水平轨道安装在第二滑块上，使得安装在竖直轨道上的拉钩能够相对待测件左右移动。本发明实现了对拉钩位置的调整，从而提高了键合引线拉力测试的灵活性。
The invention discloses a device for tensile testing of bonding wires, which includes a pull hook, a mounting mechanism for a piece to be tested, a position adjustment mechanism for the pull hook, and a stretching machine. The mounting mechanism for the piece to be tested includes a fixing plate for the piece to be tested and a horizontal base. The fixed plate of the test piece is vertical to the horizontal base, and the test piece is detachably installed on the first surface of the fixed plate of the test piece; the hook position adjustment mechanism includes a horizontal track and a vertical track perpendicular to it, and the track opening of the vertical track Opposite to the first surface of the fixed plate of the test piece, the pull hook is installed in the vertical track and can move up and down along the vertical track; the stretching machine has two sliders, a displacement sensor and a tension force set on the first slider The sensor; the horizontal base is installed on the tension sensor on the first slider; the horizontal track is installed on the second slider, so that the pull hook installed on the vertical track can move left and right relative to the DUT. The invention realizes the adjustment of the position of the pulling hook, thereby improving the flexibility of the bonding wire tension test.
Description
技术领域technical field
本发明涉及半导体测试技术领域，特别涉及一种用于键合引线拉力测试的装置。The invention relates to the technical field of semiconductor testing, in particular to a device for bonding wire tension testing.
背景技术Background technique
引线键合是集成电路封装、微机电系统(MEMS，Micro-Electro-MechanicalSystems)封装和功率半导体器件封装中实现芯片之间、芯片和散热基板以及芯片和外部电气互连的主要技术。由于键合工艺质量,特别是键合引线的拉力大小，直接关系到产品的可靠性和寿命，因此对于键合工艺参数的检测就显得尤为重要。Wire bonding is the main technology for interconnection between chips, chips and heat dissipation substrates, and chips and external electrical interconnections in integrated circuit packaging, micro-electromechanical systems (MEMS, Micro-Electro-Mechanical Systems) packaging and power semiconductor device packaging. Since the quality of the bonding process, especially the tension of the bonding wire, is directly related to the reliability and life of the product, it is particularly important to detect the bonding process parameters.
引线键合拉力是衡量/评价键合工艺质量的重要参数之一，因此需要引线键合拉力测试仪对完成键合工艺后的试件/样品的键合引线进行拉力测试，通过评估引线键合拉力值来确定键合工艺是否满足产品可靠性要求。所以引线键合拉力测试装置非常重要。Wire bonding tension is one of the important parameters to measure/evaluate the quality of bonding process. Therefore, a wire bonding tensile tester is required to perform tensile test on the bonding wire of the test piece/sample after the bonding process is completed. By evaluating the wire bonding The tensile value is used to determine whether the bonding process meets the product reliability requirements. So the wire bond pull test device is very important.
目前，对于引线键合拉力测试一般使用专用的拉力测试仪。该拉力测试仪具有机箱、显示器、测试平台、设置在机箱上与测试平台位置对应的观测目镜。测试过程通常为：At present, a special tensile tester is generally used for wire bonding tensile testing. The tensile tester has a case, a display, a test platform, and an observation eyepiece arranged on the case and corresponding to the position of the test platform. The testing process is usually:
1)将待测件水平固定在测试平台上；1) Fix the DUT horizontally on the test platform;
2)用观测目镜观察待测件位置，并人工调整待测件位置；2) Use the observation eyepiece to observe the position of the test piece, and manually adjust the position of the test piece;
3)用连接有拉力传感器的挂钩垂直钩住待测件的引线，并为其施加垂直向上的拉力；3) Use the hook connected with the tension sensor to vertically hook the lead wire of the test piece, and apply a vertical upward pulling force to it;
4)该拉力传感器将力信号传递到机箱中的控制单元，经过信号处理之后将拉力值通过显示器显示。4) The tension sensor transmits the force signal to the control unit in the chassis, and after signal processing, the tension value is displayed on the display.
这种方式拉钩的位置固定，仅能调整待测件的位置，实际测试时不够灵活。In this way, the position of the pull hook is fixed, and only the position of the DUT can be adjusted, which is not flexible enough for actual testing.
发明内容Contents of the invention
有鉴于此，本发明的主要目的在于提供一种用于键合引线拉力测试的装置，使得拉钩的位置能够调整，以提高测试的灵活性。In view of this, the main purpose of the present invention is to provide a device for bonding wire pull test, so that the position of the pull hook can be adjusted, so as to improve the flexibility of the test.
为达到上述目的，本发明提供了一种用于键合引线拉力测试的装置，包括拉钩、待测件安装机构、拉钩位置调整机构和拉伸机。To achieve the above purpose, the present invention provides a device for tensile testing of bonding wires, which includes a pull hook, a device to be tested installation mechanism, a pull hook position adjustment mechanism and a stretching machine.
所述待测件安装机构包括待测件固定板和水平底座，该待测件固定板垂直设置在水平底座上，待测件可拆卸地平行安装在待测件固定板的第一面上；The installation mechanism of the test piece includes a fixed plate of the test piece and a horizontal base, the fixed plate of the test piece is vertically arranged on the horizontal base, and the test piece is detachably mounted on the first surface of the fixed plate of the test piece in parallel;
所述拉钩位置调整机构包括水平轨道和与其垂直的竖直轨道，该竖直轨道通过底部的安装片安装在水平轨道中，并能沿水平轨道移动，该竖直轨道的轨道开口与待测件固定板的第一面相对，拉钩通过其一端的固定块安装在竖直轨道中，并能沿竖直轨道上下移动；The draw hook position adjustment mechanism includes a horizontal track and a vertical track perpendicular to it. The vertical track is installed in the horizontal track through the mounting piece at the bottom and can move along the horizontal track. The track opening of the vertical track is connected to the test piece The first side of the fixed plate is opposite, and the draw hook is installed in the vertical track through the fixed block at one end, and can move up and down along the vertical track;
所述拉伸机具有能够在水平方向相对滑动的两个滑块、与两个滑块相连的位移传感器和设置在第一滑块上的拉力传感器；所述待测件安装机构的水平底座安装在第一滑块上的拉力传感器上；所述拉钩位置调整机构的水平轨道安装在第二滑块上，使得安装在竖直轨道上的拉钩能够相对待测件左右移动。The stretching machine has two sliders that can relatively slide in the horizontal direction, a displacement sensor connected to the two sliders, and a tension sensor arranged on the first slider; On the tension sensor on the first slider; the horizontal track of the drag hook position adjustment mechanism is installed on the second slider, so that the drag hook installed on the vertical track can move left and right relative to the DUT.
较佳地，所述待测件安装机构还包括待测件固定块；所述待测件固定板上具有四个独立的一字孔组成的十字孔；所述的待测件固定块具有压块和与之相连的螺柱，当有待测件安装在所述待测件固定板时，所述压块压住所述待测件，螺柱穿过所述十字孔，通过螺母固定。Preferably, the installation mechanism of the test piece also includes a fixed block of the test piece; the fixed plate of the test piece has a cross hole composed of four independent straight holes; the fixed block of the test piece has a pressing block and the studs connected thereto, when a piece to be tested is installed on the fixing plate of the piece to be tested, the pressure block presses the piece to be tested, and the stud passes through the cross hole and is fixed by a nut.
较佳地，所述待测件固定板的第一面上设置有与待测件长度或宽度相配合的平行轨道，待测件沿长度方向或宽度方向插入平行轨道进行固定。Preferably, parallel tracks matching the length or width of the test piece are provided on the first surface of the test piece fixing plate, and the test piece is inserted into the parallel track along the length direction or the width direction for fixing.
较佳地，所述水平轨道的开口截面为凸字形；所述水平轨道的底部，沿长度方向向外延伸一安装部，该安装部上设置有螺孔，通过螺钉安装到第二滑块上表面；所述竖直导轨底部的安装片上与平行轨道开口截面对应的位置设置有螺孔，通过螺钉将该安装片安装到平行轨道中。Preferably, the opening cross-section of the horizontal track is convex; the bottom of the horizontal track extends outward along the length direction with a mounting part, and the mounting part is provided with a screw hole, which is mounted on the second slider through screws Surface: screw holes are provided on the mounting piece at the bottom of the vertical guide rail corresponding to the opening section of the parallel track, and the mounting piece is installed into the parallel track through screws.
较佳地，所述拉钩包括钩体和拉钩固定块；该钩体第一端为钩状，第二端为具有外螺纹的柱状；该拉钩固定块包括一具有两个以上螺孔的圆柱块，和伸出该圆柱块中央位置的具有内螺纹的安装柱；所述钩体通过其第二端的外螺纹和拉钩固定块的安装柱的内螺纹相连；所述竖直轨道的开口截面为凸字形；所述拉钩通过螺钉穿过竖直轨道的开口及所述圆柱块的螺孔，固定到竖直轨道上。Preferably, the pull hook includes a hook body and a pull hook fixing block; the first end of the hook body is hook-shaped, and the second end is a column with external threads; the pull hook fixing block includes a cylindrical block with more than two screw holes , and protrude from the central position of the cylindrical block with an internal threaded mounting column; the hook body is connected through the external thread at its second end to the internal thread of the mounting column of the draw hook fixing block; the opening section of the vertical track is convex ; The drag hook passes through the opening of the vertical track and the screw hole of the cylindrical block through a screw, and is fixed on the vertical track.
较佳地，该装置还包括一带色彩激光源，在测试前，该激光源置于拉钩固定块的安装柱的内螺纹中，用于对准被测件。Preferably, the device also includes a colored laser source. Before the test, the laser source is placed in the internal thread of the mounting column of the hook fixing block for aligning the tested object.
较佳地，所述待测件安装机构的水平底座为与待测件固定板垂直的长方形片状结构，该长方形片状结构设置有螺孔，通过螺钉将该水平底座安装到所述第一滑块上的拉力传感器的上表面。Preferably, the horizontal base of the installation mechanism of the test piece is a rectangular sheet structure perpendicular to the fixing plate of the test piece, and the rectangular sheet structure is provided with screw holes, and the horizontal base is mounted on the first Pull the upper surface of the sensor on the slider.
较佳地，所述拉伸机还包括滑块连接轴和步进电机；所述连接轴设置有外螺纹；所述第一滑块和第二滑块中部设置有内螺纹孔，所述第一滑块和第二滑块通过所述连接轴的外螺纹和内部的内螺纹，相对安装于该连接轴上；所述步进电机与连接轴相连，控制连接轴旋转带动第一滑块和第二滑块相对运动。Preferably, the stretching machine also includes a slider connecting shaft and a stepping motor; the connecting shaft is provided with an external thread; the middle part of the first slider and the second slider is provided with an internal thread hole, and the first slider A slider and a second slider are relatively installed on the connecting shaft through the external thread and the internal internal thread of the connecting shaft; the stepper motor is connected with the connecting shaft, and the rotation of the connecting shaft is controlled to drive the first slider and the connecting shaft. The second slider moves relatively.
由上述的技术方案可见，本发明的这种用于键合引线拉力测试的装置，通过拉钩位置调整机构，实现了对拉钩位置的调整，从而提高了键合引线拉力测试的灵活性。It can be seen from the above technical solution that the device for bonding wire pull test of the present invention realizes the adjustment of the position of the pull hook through the pull hook position adjustment mechanism, thereby improving the flexibility of the bond wire pull test.
附图说明Description of drawings
图1为本发明一较佳实施例的用于键合引线拉力测试的装置的装配示意图；Fig. 1 is the assembly schematic diagram of the device that is used for bonding wire tension test of a preferred embodiment of the present invention;
图2为图1所示实施例中拉伸机的结构示意图；Fig. 2 is the structural representation of drawing machine in the embodiment shown in Fig. 1;
图3a为图1所示实施例中待测件安装机构安装待测件前的结构示意图；Fig. 3 a is a structural schematic view before the installation mechanism of the test piece in the embodiment shown in Fig. 1 installs the test piece;
图3b为图3a所示待测件安装机构安装待测件后的结构示意图；Fig. 3b is a structural schematic diagram of the installation mechanism of the UUT shown in Fig. 3a after the UUT is installed;
图4a为图1所示实施例中水平轨道的结构示意图；Fig. 4 a is the structural representation of horizontal track in the embodiment shown in Fig. 1;
图4b为图1所示实施例中竖直轨道的结构示意图；Fig. 4b is a schematic structural view of the vertical track in the embodiment shown in Fig. 1;
图5为图1所示实施例中拉钩的结构示意图；Fig. 5 is a schematic structural view of the drag hook in the embodiment shown in Fig. 1;
图6为图5所示拉钩的拉钩固定块的结构示意图；Fig. 6 is a structural schematic diagram of a hook fixing block of the hook shown in Fig. 5;
具体实施方式Detailed ways
以下参照附图并举具体实施例对本发明进行详细地说明。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
本发明提供了一种用于键合引线拉力测试的装置，通过拉钩位置调整机构，实现了对拉钩位置的调整，从而提高了键合引线拉力测试的灵活性。The invention provides a device for the tension test of bonding wires, which realizes the adjustment of the position of the hooks through the position adjustment mechanism of the hooks, thereby improving the flexibility of the tension testing of bonding wires.
如图1所示，本实施例的用于键合引线拉力测试的装置包括：拉钩(图1中未示出)、待测件安装机构10、拉伸机20和拉钩位置调整机构30。As shown in FIG. 1 , the device for tensile testing of bonding wires in this embodiment includes: a pull hook (not shown in FIG. 1 ), a DUT mounting mechanism 10 , a stretching machine 20 and a pull hook position adjustment mechanism 30 .
其中，待测件安装机构10如图1、图3a和图3b所示，包括：待测件固定板11、水平底座12和待测件固定块13。待测件固定板11垂直设置在水平底座12上，待测件14(图1中未示出键合引线)通过待测固定块13可拆卸地平行安装在待测件固定板11的第一面上。Wherein, as shown in FIG. 1 , FIG. 3 a and FIG. 3 b , the DUT installation mechanism 10 includes: a DUT fixing plate 11 , a horizontal base 12 and a DUT fixing block 13 . The DUT fixing plate 11 is vertically arranged on the horizontal base 12, and the DUT 14 (bonding wires are not shown in FIG. face.
拉钩位置调整机构30包括水平轨道31和与其垂直的竖直轨道32，该竖直轨道32通过底部的安装片安装在水平轨道31中，并能沿水平轨道31移动，该竖直轨道32的轨道开口与待测件固定板11的第一面相对，拉钩通过其一端的固定块安装在竖直轨道32中，并能沿竖直轨道32上下移动。Draw hook position adjustment mechanism 30 comprises horizontal track 31 and vertical track 32 perpendicular thereto, and this vertical track 32 is installed in the horizontal track 31 by the mounting plate of bottom, and can move along horizontal track 31, and the track of this vertical track 32 The opening is opposite to the first surface of the fixed plate 11 of the test piece, and the draw hook is installed in the vertical track 32 through a fixed block at one end thereof, and can move up and down along the vertical track 32 .
拉伸机20具有能够在水平方向相对滑动的两个滑块25、26、与两个滑块25、26相连的位移传感器(图1中未示出)和设置在第一滑块25上的拉力传感器21。待测件安装机构10的水平底座12安装在第一滑块25上的拉力传感器21上。拉钩位置调整机构30的水平轨道31安装在第二滑块26上，使得安装在竖直轨道32上的拉钩能够相对待测件14左右移动。Stretching machine 20 has two slide blocks 25,26 that can slide relative to each other in the horizontal direction, a displacement sensor (not shown in Fig. 1 ) that links to each other with two slide blocks 25,26 and is arranged on the first slide block 25 Pull sensor 21. The horizontal base 12 of the DUT installation mechanism 10 is installed on the tension sensor 21 on the first slider 25 . The horizontal track 31 of the drag hook position adjustment mechanism 30 is installed on the second slider 26 , so that the drag hook installed on the vertical track 32 can move left and right relative to the DUT 14 .
本实施例采用的拉伸机如图2所示，该拉伸机除了能够在水平方向上相对滑动的两个滑块25和26、拉力传感器21及位移传感器22外，还包括齿轮箱23、滑块连接轴24、拉伸机底板27和步进电机28。The stretching machine used in this embodiment is shown in Figure 2. In addition to two slide blocks 25 and 26 that can relatively slide in the horizontal direction, a tension sensor 21 and a displacement sensor 22, the stretching machine also includes a gear box 23, The slide block connects the shaft 24, the stretching machine base plate 27 and the stepper motor 28.
其中，位移传感器22为圆柱状，其穿过第一滑块25和第二滑块26，用于测量第一滑块25和第二滑块26之间的位移。齿轮箱23、第一滑块25、第二滑块26和步进电机28均安装在拉伸机底板27上。Wherein, the displacement sensor 22 is cylindrical and passes through the first slider 25 and the second slider 26 for measuring the displacement between the first slider 25 and the second slider 26 . Gear box 23, first slide block 25, second slide block 26 and stepper motor 28 are all installed on the stretching machine base plate 27.
滑块连接轴24设置有外螺纹，第一滑块25和第二滑块26中部设置有内螺纹孔，该第一滑块25和第二滑块26通过滑块连接轴24的外螺纹和内部的内螺纹，相对安装于该滑块连接轴24上。步进电机28通过齿轮箱23与滑块连接轴24相连，控制滑块连接轴24旋转，带动第一滑块25和第二滑块26相对运动，使得第一滑块25和第二滑块26靠近或远离。Slide block connecting shaft 24 is provided with external thread, first slide block 25 and second slide block 26 middle parts are provided with internally threaded hole, and this first slide block 25 and second slide block 26 pass external thread of slide block connecting shaft 24 and The internal internal thread is relatively installed on the slider connecting shaft 24 . The stepper motor 28 is connected with the slider connecting shaft 24 through the gear box 23, controls the rotation of the slider connecting shaft 24, and drives the first slider 25 and the second slider 26 to move relative to each other, so that the first slider 25 and the second slider 26 to move closer or farther away.
本实施例中待测件安装机构如图3a和图3b所示，待测件固定板11上具有四个独立的一字孔组成的十字孔。待测件固定块13具有压块和与之相连的螺柱。当有待测件14安装在所述待测件固定板11时，使用3个或4个压块压住所述待测件14，螺柱穿过所述十字孔，在测件固定板11的背面通过螺母固定。通过调整压块在十字孔的位置，可以调整待测件14相对测件固定板11的上下和左右的位置。In this embodiment, the installation mechanism of the test piece is shown in FIG. 3 a and FIG. 3 b . The test piece fixing plate 11 has cross holes composed of four independent slotted holes. The DUT fixing block 13 has a pressure block and a stud connected thereto. When the test piece 14 is installed on the test piece fixed plate 11, use 3 or 4 briquetting blocks to press the described test piece 14, the studs pass through the cross hole, and place on the test piece fixed plate 11 The back is fixed with nuts. By adjusting the position of the pressing block in the cross hole, the up, down, left and right positions of the test piece 14 relative to the test piece fixing plate 11 can be adjusted.
实际应用中，将待测件14平行安装于待测件固定板11上还可以有其他方式实现。例如：在待测件固定板的第一面上，即安装待测件的面上，设置有与待测件长度或宽度相配合的平行轨道，待测件沿长度方向或宽度方向插入平行轨道进行固定。In practical applications, there are other ways to install the DUT 14 in parallel on the DUT fixing plate 11 . For example: on the first surface of the fixed plate of the test piece, that is, the surface on which the test piece is installed, there are parallel tracks matching the length or width of the test piece, and the test piece is inserted into the parallel track along the length or width direction to fix.
如图1、图3a和图3b所示，待测件安装机构10的水平底座12为与待测件固定板11垂直的长方形片状结构，该长方形片状结构设置有螺孔，通过螺钉将该水平底座12安装到所述第一滑块上的拉力传感器的上表面。As shown in Figure 1, Figure 3a and Figure 3b, the horizontal base 12 of the DUT mounting mechanism 10 is a rectangular sheet structure perpendicular to the DUT fixing plate 11, and the rectangular sheet structure is provided with screw holes, and the The horizontal base 12 is mounted on the upper surface of the tension sensor on the first slider.
本实施例中拉钩位置调整机构30的水平轨道的结构如图4a所示，该水平轨道的开口截面为凸字形，该水平轨道的底部，沿长度方向向外延伸一安装部，该安装部上设置有螺孔，通过螺钉安装到第二滑块上表面。The structure of the horizontal track of the drag hook position adjustment mechanism 30 in this embodiment is shown in Figure 4a. The opening cross section of the horizontal track is a convex shape. Screw holes are provided, and are installed on the upper surface of the second slider through screws.
本实施例中拉钩位置调整机构30的竖直轨道的结构如图4b所示，该竖直轨道的开口截面为凸字形，其底部的安装片上与平行轨道开口截面对应的位置设置有螺孔，通过螺钉将该安装片安装到平行轨道中。In this embodiment, the structure of the vertical track of the drag hook position adjustment mechanism 30 is shown in Figure 4b. The opening cross section of the vertical track is convex, and screw holes are provided on the mounting piece at the bottom corresponding to the opening cross section of the parallel track. Mount the mounting plate into the parallel rails with screws.
本实施例中的拉钩如图5和图6所示，包括钩体51和拉钩固定块52。该钩体51第一端为钩状，第二端为具有外螺纹的柱状。该拉钩固定块52包括一具有两个以上螺孔的圆柱块521，和伸出该圆柱块521中央位置的具有内螺纹的安装柱522。As shown in FIG. 5 and FIG. 6 , the draw hook in this embodiment includes a hook body 51 and a draw hook fixing block 52 . The first end of the hook body 51 is hook-shaped, and the second end is column-shaped with external threads. The draw hook fixing block 52 includes a cylindrical block 521 with more than two screw holes, and a mounting column 522 with an internal thread protruding from the center of the cylindrical block 521 .
该钩体51通过其第二端的外螺纹和拉钩固定块52的安装柱522的内螺纹相连，螺钉穿过竖直轨道的开口及所述圆柱块521的螺孔，将拉钩固定到竖直轨道上。The hook body 51 is connected with the internal thread of the mounting column 522 of the draw hook fixing block 52 through the external thread of its second end, and the screw passes through the opening of the vertical track and the screw hole of the cylindrical block 521 to fix the draw hook to the vertical track superior.
另外，本实施例为了更准确地将拉钩和待测件对准，还包括一带色彩激光源，在测试前，先将该激光源置于拉钩固定块的安装柱的内螺纹中，用于对准被测件。对准后，将该激光源取出，将钩体安装于拉钩固定块上。In addition, in order to more accurately align the draw hook with the DUT, this embodiment also includes a colored laser source. Before the test, the laser source is placed in the internal thread of the mounting column of the draw hook fixing block for alignment quasi-tested piece. After alignment, take out the laser source, and install the hook body on the hook fixing block.
由上述的实施例可见，应用本发明的这种用于键合引线拉力测试的装置，能够实现对拉钩位置的调整，从而提高了键合引线拉力测试的灵活性。It can be seen from the above embodiments that the application of the device for the bonding wire pull test of the present invention can realize the adjustment of the position of the hook, thereby improving the flexibility of the bonding wire pull test.
以上所述仅为本发明的较佳实施例而已，并非用于限定本发明的保护范围。凡在本发明的精神和原则之内所作的任何修改、等同替换、改进等，均包含在本发明的保护范围内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present invention are included in the protection scope of the present invention.
Claims (8)
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| CN104374510B (en) * | 2014-11-27 | 2017-02-01 | 惠州住成电装有限公司 | Wiring harness tensile force test clamp capable of being moved and adjusted in multiple directions |
| CN110044684B (en) * | 2019-04-29 | 2022-04-01 | 中国电子科技集团公司第十三研究所 | Lead firmness test method |
| CN113933180B (en) * | 2020-07-09 | 2025-06-20 | 先进科技新加坡有限公司 | Apparatus and method for testing interconnect bonding portions |
| CN112284900B (en) * | 2020-10-23 | 2025-03-11 | 深圳市盛元半导体有限公司 | Semiconductor device inner lead bonding strength testing device and detection method |
| CN116429573B (en) * | 2023-04-17 | 2023-12-08 | 北京工业大学 | Welding type IGBT module bonding wire tensile testing device and method |
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