CN103499285A - Method and device for calibrating optically biaxial compensation and gas bath type linear displacement laser interferometer - Google Patents

Method and device for calibrating optically biaxial compensation and gas bath type linear displacement laser interferometer Download PDF

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CN103499285A
CN103499285A CN201310475556.1A CN201310475556A CN103499285A CN 103499285 A CN103499285 A CN 103499285A CN 201310475556 A CN201310475556 A CN 201310475556A CN 103499285 A CN103499285 A CN 103499285A
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laser interferometer
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CN103499285B (en
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胡鹏程
谭久彬
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Harbin Institute of Technology
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Abstract

The invention relates to a method and a device for calibrating an optically biaxial compensation and gas bath type linear displacement laser interferometer and belongs to the technical field of laser measurement. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a biaxial hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position between two parallel standard measurement beams; vertical distances between the standard measurement beams and the measurement beam of the calibrated laser interferometer are very small and the average value of the air refractive indexes of the two standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the air temperature, the humidity and the air pressure to be approximately and uniformly distributed and enables the average value of the air refractive indexes of the two standard measurement beams to be more approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; and a measurement error caused by the surface morphology of the reflecting surface of a target reflector is compensated into a linear displacement measurement result so as to ensure accuracy of the linear displacement measurement value.

Description

Double-optical axis compensation and gas bath type displacement of the lines laser interferometer calibration steps and device
Technical field
The invention belongs to the laser measuring technique field, relate generally to a kind of laser interferometer calibration steps and device.
Background technology
Laser interferometry displacement of the lines technology is the canonical measure technology that precision is very high, be widely used in the accurate and fields such as ultraprecise machining, microelectronics equipment, nanometer technology industrial equipment and defence equipment, in order to guarantee the accuracy of laser interferometer measurement displacement of the lines, need scientific and effective displacement of the lines laser interferometer calibration steps and device.The general thinking of lubber-line displacement lasers interferometer is to adopt the higher displacement of the lines laser interferometer of accuracy class to calibrate, and when both precision is close, is called comparison.In actual alignment work, the displacement of the lines laser interferometer has suitable precision mostly, thereby the calibration of displacement of the lines laser interferometer is realized by comparison.At present, the general calibration steps of displacement of the lines laser interferometer has parallel type, formula and light path formula (Liao Chengqing face-to-face altogether, Zhu little Ping, Wang Weichen, Du Hua. the research of laser interferometer length measurement precision calibration steps. modern surveying and laboratory room managing, 2005,1:6-7).
Fig. 1 is parallel type laser interferometer calibrating installation structural representation, canonical measure mirror and be calibrated and measure mirror and be arranged on same movable platform, and when sports platform moves, the light paths of two cover laser interferometer measurement light beams increase simultaneously and reduce.Because two cover laser interferometer are parallel, place, two-way light is affected by environment similar, and air refraction is less to the two-way influence of light, but, because the vertical range between two-way light is larger, when therefore two cover laser interferometer are calibrated, Abbe error is larger.
Fig. 2 is face-to-face formula laser interferometer calibrating installation structural representation, canonical measure mirror and being calibrated measures that mirror is aspectant to be arranged on sports platform, its advantage is that two cover laser interferometer measurement beam axis can tune to almost on same measurement axis, both Abbe errors are very little, shortcoming is that the near-end due to an interferometer is another far-end, both light paths do not wait, and are subject to the interference difference of environment, and air refraction is inconsistent on the light path impact of two cover laser interferometer.
2011, China National Measuring Science Research Inst. sets up domestic first 80 meters big-length laser interfering meter measuring devices (cold beautiful state, Tao Lei, Xu Jian, two-frequency laser interferometer system accuracy and analysis of Influential Factors based on the 80m measurement mechanism. metering and measuring technology, 2011, 38 (9): 47-49), the accepted standard device is that the length of three Agilent5530 types is put apart from two-frequency laser interferometer is parallel, become three path laser interferometers, the laser interferometer be calibrated is placed in the middle of them, thereby calibration, this scheme belongs to the derivative schemes of parallel type calibration steps, and measure owing to adopting three road light simultaneously, therefore the Abbe error in the time of can compensating measure, but put owing to being that three laser instruments are parallel, therefore three road sign locating tab assembly light locus are far away, the every road sign locating tab assembly of the measurement electrical distance electrical distance that is calibrated laser interferometer is also far away, all optical paths are subject to the difference that affects of environment, air refraction is inconsistent on all optical path impacts, cause the calibration measurement result inaccurate.
Fig. 3 is common light path formula laser interferometer calibrating installation structural representation, and altogether the light path formula is different from parallel type laser interferometer calibrating installation is that two laser instruments become the 90 degree mode of turning back with receiver, and two cover laser interferometer share interference mirror group and measurement mirror.Because two cover laser interferometer share an interference mirror group and measure mirror, can't determine shared interference mirror group and measure mirror and belong to the standard laser interferometer component or belong to and be calibrated the standard laser interferometer component, therefore, not that on accurate meaning, two calibrations of overlapping laser interferometer are calibrated.
1985, Dr-Ing H.-H.Schussler takes full advantage of space distribution (Dr-Ing H.-H.Schussler.Comparison and calibration of laser interferometer systems.Measurement, 1985,3 (4): 175-184), multipair displacement of the lines laser interferometer is carried out to common light path calibration.Owing to just increasing the quantity of light path laser interferometer altogether, so the method also has the shortcoming of light path formula laser interferometer calibrating installation altogether above-mentioned.
Summary of the invention
For Abbe error larger in above-mentioned existing displacement of the lines laser interferometer calibrating installation, serious air refraction inconsistency be not the problem that on accurate meaning, two cover laser interferometer are calibrated, the present invention proposes and has researched and developed double-optical axis compensation and gas bath type displacement of the lines laser interferometer calibration steps and device, this invention makes the canonical measure light beam and is calibrated laser interferometer measurement light beam vertical range very little, thereby can reduce Abbe error, reduce the impact of air refraction inconsistency, and be that on accurate meaning, two cover laser interferometer are calibrated.
Purpose of the present invention is achieved through the following technical solutions:
A kind of double-optical axis compensation and gas bath type displacement of the lines laser interferometer calibration steps, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two canonical measure light beams that are parallel to each other through twin shaft hollow laser interference mirror group, article two, the canonical measure light beam incides on the level crossing of interstitial hole, after being reflected back toward twin shaft hollow laser interference mirror group with the part light of level crossing displacement information in every canonical measure light beam, distinguish two corresponding interference signals according to what obtain with two canonical measure light beams from twin shaft hollow laser interference mirror group, can obtain two shift values that the level crossing of interstitial hole moves along the canonical measure beam direction, the level crossing of remainder light through interstitial hole is arranged of every canonical measure light beam is transmitted on two light-beam position detectors,
(2) the output light that is calibrated the laser interferometer laser instrument forms and is calibrated the laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes of laser interferometer measurement light beam through twin shaft hollow laser interference mirror group, parallel and coplanar with two canonical measure light beams, being calibrated the laser interferometer measurement light beam incides and is calibrated on the laser interferometer catoptron, after being reflected back toward and being calibrated laser interferometer interference mirror group, according to the interference signal obtained from be calibrated laser interferometer interference mirror group, can obtain being calibrated the shift value that the laser interferometer catoptron moves along the canonical measure beam direction,
(3) the gas bath device is along perpendicular to two canonical measure beam directions, blowing uniform speed airflow, form stable gas bath environment, on the plane perpendicular to two canonical measure light beams, in the line segment zone formed at this plane projection point by two canonical measure light beams, the gas bath environment makes that air themperature, humidity and air pressure are approximate to be uniformly distributed, and makes the air refraction mean value of two canonical measure light beams more approach the air refraction value that is calibrated the laser interferometer measurement light beam;
Article (4) two, canonical measure light beam and be calibrated laser interferometer measurement light beam initial incoming position coordinate separately on the target mirror plane of incidence and be respectively (x 1, y 1), (x 2, y 2) and (x 3, y 3), on the target mirror plane of incidence, the position coordinates of every measuring beam is through after the coordinate displacement (x, y) of two-dimensional directional, and the displacement measurement caused because of target mirror reflecting surface shape characteristic is respectively function z 1(x 1+ x, y 1+ y), z 2(x 2+ x, y 2+ y) and z 3(x 3+ x, y 3+ y);
(5) sports platform along in canonical measure beam direction to-and-fro movement process with the derivative displacement of random two-dimensional direction in perpendicular to the canonical measure beam plane, with at the uniform velocity or non-at the uniform velocity sampling rate, two of synchronized sampling standard laser interferometers are measured shift value and are calibrated the laser interferometer measurement shift value, are respectively S 1, S 2and S 3the derivative coordinate displacement value of two light-beam position detectors synchronizing detection to two canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for two coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every measuring beam, the displacement measurement errors that target mirror reflecting surface shape characteristic is caused compensates to be measured in shift value, obtains S 1-z 1(x 1+ x ', y 1+ y '), S 2-z 2(x 2+ x ', y 2+ y ') and S 3-z 3(x 3+ x ', y 3+ y '), get S 1-z 1(x 1+ x ', y 1+ y ') and S 2-z 2(x 2+ x', y 2+ y ') mean value and S 3-z 3(x 3+ x ', y 3+ y ') poor, obtain some sampled measurements error amounts.
A kind of double-optical axis compensation and gas bath type displacement of the lines laser interferometer calibrating installation, comprising that standard laser interferometer laser instrument and two are configured in can receive the locational receiver of standard laser interferometer interference signal, and wire is connected two receivers respectively with standard laser interferometer signal disposal system; Dispose can allowing of intermediate throughholes and be calibrated the twin shaft hollow standard laser interference mirror group that the laser interferometer measurement light beam passes on standard laser interferometer laser instrument output light path; Twin shaft hollow standard laser interference mirror group one side arrangement guide rail, sports platform is fitted on guide rail, the level crossing of interstitial hole is installed on sports platform, install in the level crossing interstitial hole and be calibrated the laser interferometer catoptron, be calibrated the laser interferometer catoptron and form by the level crossing of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Two light-beam position detector configuration are in the level crossing regional transmission back that interstitial hole is arranged, and lay respectively on two parallel standards measuring beam transmitted light paths; At two parallel standards measuring beam sidepiece configuration gas bath devices; Be calibrated laser interferometer interference mirror group and be calibrated the laser interferometer laser instrument in twin shaft hollow standard laser interference mirror group opposite side configuration, the described laser interferometer interference mirror group that is calibrated is positioned at and is calibrated on laser interferometer laser instrument output light path; Be calibrated the laser interferometer receiver and be configured in and can receive on the position that is calibrated the laser interferometer interference signal, wire will be calibrated the laser interferometer receiver and be calibrated the laser interferometer signal disposal system and be connected.
The present invention has following characteristics and good result:
(1) with parallel type laser interferometer calibrating installation, compare, owing to being calibrated the laser interferometer measurement light beam by the intermediate throughholes of twin shaft hollow laser interference mirror group, the vertical range be calibrated between laser interferometer measurement optical axis and parallel standards optical axis is shorter, both light paths are more approaching, and when therefore two cover laser interferometer are calibrated, Abbe error is very little.
(2) with face-to-face formula laser interferometer calibrating installation, compare, in the plane perpendicular to two canonical measure light beams, in the line segment zone formed at this plane projection point by two canonical measure light beams, article two, canonical measure light beam and be calibrated the laser interferometer measurement light beam and be subject to the degree difference of environmental interference very little, the air refraction mean value of two canonical measure light beams approaches the air refraction value that is calibrated the laser interferometer measurement light beam.
(3) light path formula laser interferometer calibrating installation is compared together, shares the interference mirror group and measures mirror, and standard laser interferometer component and to be calibrated standard laser interferometer component ownership clear and definite, be that on accurate meaning, two cover laser interferometer are calibrated.
(4) two light-beam position detectors can be measured the derivative displacement of two relative target mirrors of canonical measure light beam random two-dimensional direction in perpendicular to the canonical measure beam plane, derivative displacement occurs after, the measurement displacement error that target mirror reflecting surface surface topography causes compensates in the linear movement measuring result, guarantees the accuracy of linear movement measuring value.
(5) in perpendicular to two canonical measure beam planes the line segment zone that formed in its plane projection by two canonical measure light beams, the stable gas bath environment formed by the gas bath device of two parallel standards measuring beam sidepieces configuration makes that air themperature, humidity and air pressure are approximate to be uniformly distributed, and makes the more approaching air refraction value that is calibrated the laser interferometer measurement light beam of air refraction mean value of two canonical measure light beams.
The accompanying drawing explanation
Fig. 1 is parallel type laser interferometer calibrating installation structural representation
Fig. 2 is face-to-face formula laser interferometer calibrating installation structural representation
Fig. 3 is for being total to light path formula laser interferometer calibrating installation structural representation
Fig. 4 is double-optical axis compensation and gas bath type displacement of the lines laser interferometer calibrating installation structural representation
Fig. 5 is hot spot position distribution schematic diagram on the level crossing by interstitial hole and the plane of incidence that is calibrated the target mirror that the laser interferometer catoptron forms
In figure: 1 standard laser interferometer laser instrument, 2 twin shaft hollow standard laser interference mirror groups, 3, article 4 two, parallel standards measuring beam, 5 have the level crossing of interstitial hole, 6, 7 standard laser interferometer receivers, 8 standard signal disposal systems, 9 are calibrated the laser interferometer laser instrument, 10 are calibrated laser interferometer interference mirror group, 11 are calibrated the laser interferometer measurement light beam, 12 intermediate throughholes, 13 are calibrated the laser interferometer catoptron, 14 are calibrated the laser interferometer receiver, 15 are calibrated the laser interferometer signal disposal system, 16 sports platforms, 17 guide rails, 18 gas bath devices, 19, 20 two light-beam position detectors, 21, article 22 two, parallel standards measuring beam facula position, 23 are calibrated laser interferometer beam and focus position.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
A kind of double-optical axis compensation and gas bath type displacement of the lines laser interferometer calibrating installation, comprising that standard laser interferometer laser instrument 1 and two are configured in can receive the locational receiver 6,7 of standard laser interferometer interference signal, and wire is connected two receivers 6,7 respectively with standard laser interferometer signal disposal system 8; Dispose can allowing of intermediate throughholes 12 and be calibrated the twin shaft hollow standard laser interference mirror group 2 that laser interferometer measurement light beam 11 passes on standard laser interferometer laser instrument 1 output light path; Twin shaft hollow standard laser interference mirror group 2 one side arrangement guide rails 17, sports platform 16 is fitted on guide rail 17, the level crossing 5 of interstitial hole is installed on sports platform 16, install in level crossing 5 interstitial holes and be calibrated laser interferometer catoptron 13, be calibrated laser interferometer catoptron 13 and form by the level crossing 5 of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Two light-beam position detectors 19,20 are configured in the level crossing 5 regional transmission back of interstitial hole, and lay respectively on two parallel standards measuring beams, 3,4 transmitted light paths; At two parallel standards measuring beams, 3,4 sidepiece configuration gas bath devices 18; Be calibrated laser interferometer interference mirror group 10 and be calibrated laser interferometer laser instrument 9 in the 2 opposite sides configurations of twin shaft hollow standard laser interference mirror group, the described laser interferometer interference mirror group 10 that is calibrated is positioned at and is calibrated on laser interferometer laser instrument 9 output light paths; Be calibrated laser interferometer receiver 14 and be configured in and can receive on the position that is calibrated the laser interferometer interference signal, wire will be calibrated laser interferometer receiver 14 and be calibrated laser interferometer signal disposal system 15 and be connected.
Described two parallel standards measuring beams 3,4 are with to be calibrated laser interferometer measurement light beam 11 all vertical with the target mirror plane of incidence.
The intermediate throughholes 12 of described twin shaft hollow standard laser interference mirror group 2 comprises arbitrary shape, and number is one or more.
Described every parallel standards measuring beam 3,4 and be calibrated laser interferometer measurement light beam 11 and the level crossing 5 of interstitial hole arranged respectively and be calibrated laser interferometer catoptron 13 reflection once or once.
The described laser interferometer catoptron 13 that is calibrated comprises level crossing, prism of corner cube, right-angle prism.
A kind of double-optical axis compensation and gas bath type displacement of the lines laser interferometer calibration steps, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument 1 forms through twin shaft hollow laser interference mirror group 2 two canonical measure light beams 3 that are parallel to each other, 4, article two, canonical measure light beam 3, 4 incide on the level crossing 5 of interstitial hole, after being reflected back toward twin shaft hollow laser interference mirror group 2 with the part light of level crossing 5 displacement informations in every canonical measure light beam, according to from twin shaft hollow laser interference mirror group 2, obtain with two canonical measure light beams 3, two interference signals corresponding to 4 difference, can obtain the level crossing 5 of interstitial hole along canonical measure light beam 3, two shift values of 4 direction motions, the level crossing 5 of the remainder light of every canonical measure light beam through interstitial hole is arranged is transmitted to two light-beam position detectors 20, on 21,
(2) the output light that is calibrated laser interferometer laser instrument 9 forms and is calibrated laser interferometer measurement light beam 11 through being calibrated laser interferometer interference mirror group 10, be calibrated the intermediate throughholes 12 of laser interferometer measurement light beam 11 through twin shaft hollow laser interference mirror group 10, with two canonical measure light beams 3, 4 is parallel and coplanar, being calibrated laser interferometer measurement light beam 11 incides and is calibrated on laser interferometer catoptron 13, after being reflected back toward and being calibrated laser interferometer interference mirror group 10, according to the interference signal obtained from be calibrated laser interferometer interference mirror group 10, can obtain being calibrated laser interferometer catoptron 13 along canonical measure light beam 3, the shift value of 4 direction motions,
(3) gas bath device 18 is along perpendicular to two canonical measure light beams, 3,4 directions, blowing uniform speed airflow, form stable gas bath environment, on the plane perpendicular to two canonical measure light beams 3,4, in the line segment zone formed at this plane projection point by two canonical measure light beams 3,4, the gas bath environment makes that air themperature, humidity and air pressure are approximate to be uniformly distributed, and makes the air refraction mean value of two canonical measure light beams 3,4 more approach the air refraction value that is calibrated laser interferometer measurement light beam 11;
Article (4) two, canonical measure light beam 3,4 and be calibrated laser interferometer measurement light beam 11 initial incoming position coordinate separately on the target mirror plane of incidence and be respectively (x 1, y 1), (x 2, y 2) and (x 3, y 3), on the target mirror plane of incidence, the position coordinates of every measuring beam is through after the coordinate displacement (x, y) of two-dimensional directional, and the displacement measurement caused because of target mirror reflecting surface shape characteristic is respectively function z 1(x 1+ x, y 1+ y), z 2(x 2+ x, y 2+ y) and z 3(x 3+ x, y 3+ y);
(5) sports platform 16 along in canonical measure light beam 3,4 direction to-and-fro movement processes with the derivative displacement of random two-dimensional direction in perpendicular to canonical measure light beam 3,4 planes, with at the uniform velocity or non-at the uniform velocity sampling rate, two of synchronized sampling standard laser interferometers are measured shift value and are calibrated the laser interferometer measurement shift value, are respectively S 1, S 2and S 3the derivative coordinate displacement value of two light-beam position detector 19,20 synchronizing detections to two a canonical measure light beam 3,4 hot spots two-dimensional directional on the target mirror plane of incidence, ask for two coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every measuring beam, the displacement measurement errors that target mirror reflecting surface shape characteristic is caused compensates to be measured in shift value, obtains S 1-z 1(x 1+ x', y 1+ y '), S 2-z 2(x 2+ x', y 2+ y ') and S 3-z 3(x 3+ x', y 3+ y '), get S 1-z 1(x 1+ x ', y 1+ y ') and S 2-z 2(x 2+ x', y 2+ y ') mean value and S 3-z 3(x 3+ x', y 3+ y ') poor, obtain some sampled measurements error amounts.
Canonical measure beam and focus position 21,22 is respectively the position that two parallel standards measuring beams 3,4 incide the level crossing 5 of interstitial hole successively, being calibrated laser interferometer beam and focus position 23 is to be calibrated the position that 11 incidents of laser interferometer measurement light beam are calibrated laser interferometer catoptron 13, can find out and be calibrated the centre position that laser interferometer beam and focus position 23 is in canonical measure beam and focus position 21,22 from position distribution, two parallel standards measuring beams 3,4 will be calibrated laser interferometer measurement light beam 11 and be clamped in centre position.

Claims (6)

1. a double-optical axis compensation and gas bath type displacement of the lines laser interferometer calibration steps is characterized in that the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two canonical measure light beams that are parallel to each other through twin shaft hollow laser interference mirror group, article two, the canonical measure light beam incides on the level crossing of interstitial hole, after being reflected back toward twin shaft hollow laser interference mirror group with the part light of level crossing displacement information in every canonical measure light beam, distinguish two corresponding interference signals according to what obtain with two canonical measure light beams from twin shaft hollow laser interference mirror group, can obtain two shift values that the level crossing of interstitial hole moves along the canonical measure beam direction, the level crossing of remainder light through interstitial hole is arranged of every canonical measure light beam is transmitted on two light-beam position detectors,
(2) the output light that is calibrated the laser interferometer laser instrument forms and is calibrated the laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes of laser interferometer measurement light beam through twin shaft hollow laser interference mirror group, parallel and coplanar with two canonical measure light beams, being calibrated the laser interferometer measurement light beam incides and is calibrated on the laser interferometer catoptron, after being reflected back toward and being calibrated laser interferometer interference mirror group, according to the interference signal obtained from be calibrated laser interferometer interference mirror group, can obtain being calibrated the shift value that the laser interferometer catoptron moves along the canonical measure beam direction,
(3) the gas bath device is along perpendicular to two canonical measure beam directions, blowing uniform speed airflow, form stable gas bath environment, on the plane perpendicular to two canonical measure light beams, in the line segment zone formed at this plane projection point by two canonical measure light beams, the gas bath environment makes that air themperature, humidity and air pressure are approximate to be uniformly distributed, and makes the air refraction mean value of two canonical measure light beams more approach the air refraction value that is calibrated the laser interferometer measurement light beam;
Article (4) two, canonical measure light beam and be calibrated laser interferometer measurement light beam initial incoming position coordinate separately on the target mirror plane of incidence and be respectively (x 1, y 1), (x 2, y 2) and (x 3, y 3), on the target mirror plane of incidence, the position coordinates of every measuring beam is through after the coordinate displacement (x, y) of two-dimensional directional, and the displacement measurement caused because of target mirror reflecting surface shape characteristic is respectively function z 1(x 1+ x, y 1+ y), z 2(x 2+ x, y 2+ y) and z 3(x 3+ x, y 3+ y);
(5) sports platform along in canonical measure beam direction to-and-fro movement process with the derivative displacement of random two-dimensional direction in perpendicular to the canonical measure beam plane, with at the uniform velocity or non-at the uniform velocity sampling rate, two of synchronized sampling standard laser interferometers are measured shift value and are calibrated the laser interferometer measurement shift value, are respectively S 1, S 2and S 3the derivative coordinate displacement value of two light-beam position detectors synchronizing detection to two canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for two coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every measuring beam, the displacement measurement errors that target mirror reflecting surface shape characteristic is caused compensates to be measured in shift value, obtains S 1-z 1(x 1+ x ', y 1+ y '), S 2-z 2(x 2+ x ', y 2+ y ') and S 3-z 3(x 3+ x ', y 3+ y '), get S 1-z 1(x 1+ x ', y 1+ y ') and S 2-z 2(x 2+ x ', y 2+ y ') mean value and S 3-z 3(x 3+ x ', y 3+ y ') poor, obtain some sampled measurements error amounts.
2. a double-optical axis compensation and gas bath type displacement of the lines laser interferometer calibrating installation, comprising that standard laser interferometer laser instrument (1) and two are configured in can receive the locational receiver of standard laser interferometer interference signal (6,7), and wire is connected two receivers (6,7) respectively with standard laser interferometer signal disposal system (8); It is characterized in that disposing can allowing of intermediate throughholes (12) and be calibrated the twin shaft hollow standard laser interference mirror group (2) that laser interferometer measurement light beam (11) passes on standard laser interferometer laser instrument (1) output light path; Twin shaft hollow standard laser interference mirror group (2) one side arrangement guide rails (17), sports platform (16) is fitted on guide rail (17), the level crossing (5) of interstitial hole is installed on sports platform (16), install and be calibrated laser interferometer catoptron (13) in level crossing (5) interstitial hole, be calibrated laser interferometer catoptron (13) and have the level crossing (5) of interstitial hole to form the target mirror that the plane of incidence is coplanar and relative position is fixing; Two light-beam position detectors (19,20) are configured in level crossing (5) the regional transmission back of interstitial hole, and lay respectively on two parallel standards measuring beams (3,4) transmitted light path; At two parallel standards measuring beams (3,4) sidepiece configuration gas bath device (18); Be calibrated laser interferometer interference mirror group (10) and be calibrated laser interferometer laser instrument (9) in twin shaft hollow standard laser interference mirror group (2) opposite side configuration, the described laser interferometer interference mirror group (10) that is calibrated is positioned at and is calibrated on laser interferometer laser instrument (9) output light path; Be calibrated laser interferometer receiver (14) and be configured in and can receive on the position that is calibrated the laser interferometer interference signal, wire will be calibrated laser interferometer receiver (14) and be calibrated laser interferometer signal disposal system (15) and be connected.
3. double-optical axis compensation according to claim 2 and gas bath type displacement of the lines laser interferometer calibrating installation, is characterized in that described two parallel standards measuring beams (3,4) and to be calibrated laser interferometer measurement light beam (11) all vertical with the target mirror plane of incidence.
4. double-optical axis compensation according to claim 2 and gas bath type displacement of the lines laser interferometer calibrating installation, the intermediate throughholes (12) that it is characterized in that described twin shaft hollow standard laser interference mirror group (2) comprises that arbitrary shape, number are one or more.
5. double-optical axis compensation according to claim 2 and gas bath type displacement of the lines laser interferometer calibrating installation, is characterized in that described every parallel standards measuring beam (3,4) and be calibrated laser interferometer measurement light beam (11) level crossing (5) of interstitial hole being arranged respectively and being calibrated laser interferometer catoptron (13) reflection once or once.
6. double-optical axis compensation according to claim 2 and gas bath type displacement of the lines laser interferometer calibrating installation, is characterized in that the described laser interferometer catoptron (13) that is calibrated comprises level crossing, prism of corner cube, right-angle prism.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107367221A (en) * 2016-05-12 2017-11-21 哈尔滨工业大学 Supersonic motor drives host-guest architecture inductance sensor calibration method and device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4236993A1 (en) * 1992-03-11 1993-11-18 Gerald Dipl Ing Sparrer Arrangement for direct comparison and for the calibration of laser interferometers and for precision measurement with a laser interferometer
CN1657865A (en) * 2004-02-20 2005-08-24 安捷伦科技有限公司 System and method of using a side-mounted interferometer to acquire position information
CN103267581A (en) * 2013-05-17 2013-08-28 中山大学 Spectrum shearing interferometer suitable for measuring shaped pulses

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4236993A1 (en) * 1992-03-11 1993-11-18 Gerald Dipl Ing Sparrer Arrangement for direct comparison and for the calibration of laser interferometers and for precision measurement with a laser interferometer
CN1657865A (en) * 2004-02-20 2005-08-24 安捷伦科技有限公司 System and method of using a side-mounted interferometer to acquire position information
CN103267581A (en) * 2013-05-17 2013-08-28 中山大学 Spectrum shearing interferometer suitable for measuring shaped pulses

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
冷玉国等: "《基于80m测量装置的双频激光干涉仪系统精度及影响因素分析》", 《计量与测试技术》 *
廖澄清等: "《激光干涉仪测长精度校准方法的研究》", 《现代测量与实验室管理》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107367221A (en) * 2016-05-12 2017-11-21 哈尔滨工业大学 Supersonic motor drives host-guest architecture inductance sensor calibration method and device
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