CN103469267A - 一种表面处理电解铜箔的工艺方法及其处理的铜箔 - Google Patents
一种表面处理电解铜箔的工艺方法及其处理的铜箔 Download PDFInfo
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- CN103469267A CN103469267A CN2013103411468A CN201310341146A CN103469267A CN 103469267 A CN103469267 A CN 103469267A CN 2013103411468 A CN2013103411468 A CN 2013103411468A CN 201310341146 A CN201310341146 A CN 201310341146A CN 103469267 A CN103469267 A CN 103469267A
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- copper foil
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- copper
- processing method
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 99
- 239000011889 copper foil Substances 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 title claims abstract description 40
- 230000008569 process Effects 0.000 title claims abstract description 25
- 238000004381 surface treatment Methods 0.000 title abstract description 12
- 238000005868 electrolysis reaction Methods 0.000 title abstract 3
- 239000011888 foil Substances 0.000 title 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 44
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000000654 additive Substances 0.000 claims abstract description 30
- 230000000996 additive effect Effects 0.000 claims abstract description 30
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 21
- 239000000956 alloy Substances 0.000 claims abstract description 21
- 238000002156 mixing Methods 0.000 claims abstract description 18
- 238000009713 electroplating Methods 0.000 claims abstract description 17
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims abstract description 16
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims abstract description 15
- 238000002360 preparation method Methods 0.000 claims abstract description 15
- 238000002161 passivation Methods 0.000 claims abstract description 10
- 239000008234 soft water Substances 0.000 claims abstract description 10
- 238000005507 spraying Methods 0.000 claims abstract description 10
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 claims abstract description 10
- 229910000368 zinc sulfate Inorganic materials 0.000 claims abstract description 10
- 229960001763 zinc sulfate Drugs 0.000 claims abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 9
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims abstract description 6
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 claims abstract description 5
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052802 copper Inorganic materials 0.000 claims description 17
- 239000010949 copper Substances 0.000 claims description 17
- 150000003839 salts Chemical class 0.000 claims description 17
- 238000003672 processing method Methods 0.000 claims description 14
- 239000004094 surface-active agent Substances 0.000 claims description 13
- 238000007788 roughening Methods 0.000 claims description 12
- 230000003647 oxidation Effects 0.000 claims description 10
- 238000007254 oxidation reaction Methods 0.000 claims description 10
- -1 Natvosol Substances 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 claims description 8
- 238000004090 dissolution Methods 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 claims description 8
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 4
- 239000007822 coupling agent Substances 0.000 claims description 4
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 4
- 150000002910 rare earth metals Chemical class 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- 235000006491 Acacia senegal Nutrition 0.000 claims description 3
- DJHGAFSJWGLOIV-UHFFFAOYSA-N Arsenic acid Chemical compound O[As](O)(O)=O DJHGAFSJWGLOIV-UHFFFAOYSA-N 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 claims description 3
- 108010010803 Gelatin Proteins 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 241000978776 Senegalia senegal Species 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 229940000488 arsenic acid Drugs 0.000 claims description 3
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims description 3
- 239000012964 benzotriazole Substances 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 229920000159 gelatin Polymers 0.000 claims description 3
- 239000008273 gelatin Substances 0.000 claims description 3
- 235000019322 gelatine Nutrition 0.000 claims description 3
- 235000011852 gelatine desserts Nutrition 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 125000004646 sulfenyl group Chemical group S(*)* 0.000 claims description 3
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 239000011135 tin Substances 0.000 claims description 2
- 239000000243 solution Substances 0.000 abstract description 53
- 239000000203 mixture Substances 0.000 abstract description 6
- 238000007747 plating Methods 0.000 abstract description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052725 zinc Inorganic materials 0.000 abstract description 3
- 239000011701 zinc Substances 0.000 abstract description 3
- 230000000704 physical effect Effects 0.000 abstract description 2
- 229910000365 copper sulfate Inorganic materials 0.000 abstract 4
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 abstract 4
- 239000000853 adhesive Substances 0.000 abstract 3
- 230000001070 adhesive effect Effects 0.000 abstract 3
- 239000011259 mixed solution Substances 0.000 abstract 1
- 230000003064 anti-oxidating effect Effects 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000004532 chromating Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000005406 washing Methods 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 3
- 238000004380 ashing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 229910001297 Zn alloy Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910001453 nickel ion Inorganic materials 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000011188 CEM-1 Substances 0.000 description 1
- 101100257127 Caenorhabditis elegans sma-2 gene Proteins 0.000 description 1
- 208000003351 Melanosis Diseases 0.000 description 1
- 230000003712 anti-aging effect Effects 0.000 description 1
- 230000003026 anti-oxygenic effect Effects 0.000 description 1
- 229910001439 antimony ion Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 230000003699 hair surface Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 238000011536 re-plating Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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Abstract
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104372384A (zh) * | 2014-11-18 | 2015-02-25 | 安徽铜冠铜箔有限公司 | 一种超厚电子铜箔的制造方法 |
CN105132946A (zh) * | 2015-09-22 | 2015-12-09 | 太原工业学院 | 一种高纯阴极铜用复合添加剂 |
CN108505081A (zh) * | 2017-02-24 | 2018-09-07 | 南亚塑胶工业股份有限公司 | 具近似绒毛状铜瘤的电解铜箔与线路板组件的制造方法 |
CN108505075A (zh) * | 2017-02-24 | 2018-09-07 | 南亚塑胶工业股份有限公司 | 具近似橄榄球状铜瘤的电解铜箔与线路板组件的制造方法 |
CN109097751A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097748A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109234772A (zh) * | 2018-09-10 | 2019-01-18 | 南亚电子材料(昆山)有限公司 | 一种Zn-Cr抗氧化镀液制备方法及在锂离子电池铜箔上的应用 |
JP2019065400A (ja) * | 2015-11-09 | 2019-04-25 | ケイシーエフ テクノロジース カンパニー リミテッド | 電解銅箔、それを含む電極、それを含む二次電池、及びその製造方法 |
CN116970934A (zh) * | 2023-08-03 | 2023-10-31 | 广东盈华电子科技有限公司 | 一种电解铜箔双面黑化表面处理工艺 |
Citations (7)
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JP2001011689A (ja) * | 1999-06-30 | 2001-01-16 | Fukuda Metal Foil & Powder Co Ltd | 銅箔の表面処理方法 |
CN1551710A (zh) * | 2003-02-12 | 2004-12-01 | �źӵ�·ͭ����ʽ���� | 精密图形印刷布线用铜箔及其制造方法 |
CN1962944A (zh) * | 2006-11-28 | 2007-05-16 | 招远金宝电子有限公司 | 电解铜箔的灰色表面处理工艺 |
CN101067212A (zh) * | 2007-01-25 | 2007-11-07 | 湖北中科铜箔科技有限公司 | 电解铜箔表面低粗化处理方法 |
CN102482795A (zh) * | 2009-08-14 | 2012-05-30 | 古河电气工业株式会社 | 耐热性铜箔及其制备方法、电路板、覆铜箔层压板及其制备方法 |
CN102534710A (zh) * | 2012-03-12 | 2012-07-04 | 山东金宝电子股份有限公司 | 一种超低轮廓铜箔表面的黑色粗化处理工艺 |
CN103221583A (zh) * | 2010-11-22 | 2013-07-24 | 三井金属矿业株式会社 | 表面处理铜箔 |
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2013
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Patent Citations (7)
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JP2001011689A (ja) * | 1999-06-30 | 2001-01-16 | Fukuda Metal Foil & Powder Co Ltd | 銅箔の表面処理方法 |
CN1551710A (zh) * | 2003-02-12 | 2004-12-01 | �źӵ�·ͭ����ʽ���� | 精密图形印刷布线用铜箔及其制造方法 |
CN1962944A (zh) * | 2006-11-28 | 2007-05-16 | 招远金宝电子有限公司 | 电解铜箔的灰色表面处理工艺 |
CN101067212A (zh) * | 2007-01-25 | 2007-11-07 | 湖北中科铜箔科技有限公司 | 电解铜箔表面低粗化处理方法 |
CN102482795A (zh) * | 2009-08-14 | 2012-05-30 | 古河电气工业株式会社 | 耐热性铜箔及其制备方法、电路板、覆铜箔层压板及其制备方法 |
CN103221583A (zh) * | 2010-11-22 | 2013-07-24 | 三井金属矿业株式会社 | 表面处理铜箔 |
CN102534710A (zh) * | 2012-03-12 | 2012-07-04 | 山东金宝电子股份有限公司 | 一种超低轮廓铜箔表面的黑色粗化处理工艺 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104372384A (zh) * | 2014-11-18 | 2015-02-25 | 安徽铜冠铜箔有限公司 | 一种超厚电子铜箔的制造方法 |
CN104372384B (zh) * | 2014-11-18 | 2016-08-17 | 安徽铜冠铜箔有限公司 | 一种超厚电子铜箔的制造方法 |
CN105132946A (zh) * | 2015-09-22 | 2015-12-09 | 太原工业学院 | 一种高纯阴极铜用复合添加剂 |
JP2019065400A (ja) * | 2015-11-09 | 2019-04-25 | ケイシーエフ テクノロジース カンパニー リミテッド | 電解銅箔、それを含む電極、それを含む二次電池、及びその製造方法 |
CN108505081A (zh) * | 2017-02-24 | 2018-09-07 | 南亚塑胶工业股份有限公司 | 具近似绒毛状铜瘤的电解铜箔与线路板组件的制造方法 |
CN108505075A (zh) * | 2017-02-24 | 2018-09-07 | 南亚塑胶工业股份有限公司 | 具近似橄榄球状铜瘤的电解铜箔与线路板组件的制造方法 |
CN109097751A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097748A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109234772A (zh) * | 2018-09-10 | 2019-01-18 | 南亚电子材料(昆山)有限公司 | 一种Zn-Cr抗氧化镀液制备方法及在锂离子电池铜箔上的应用 |
CN116970934A (zh) * | 2023-08-03 | 2023-10-31 | 广东盈华电子科技有限公司 | 一种电解铜箔双面黑化表面处理工艺 |
CN116970934B (zh) * | 2023-08-03 | 2024-02-06 | 广东盈华电子科技有限公司 | 一种电解铜箔双面黑化表面处理工艺 |
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Effective date of registration: 20220311 Address after: 330000 No. 1129, Gaoxin Avenue, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee after: JIANGXI COPPER YATES FOIL Inc. Address before: 330000 No. 1129, Gaoxin Avenue, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee before: JIANGXI COPPER YATES FOIL Inc. Patentee before: Jiangxi Copper Co.,Ltd. |
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TR01 | Transfer of patent right | ||
CP01 | Change in the name or title of a patent holder |
Address after: 330000 No. 1129, Gaoxin Avenue, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee after: Jiangxi Jiangxi Jiangxi Copper Foil Technology Co.,Ltd. Address before: 330000 No. 1129, Gaoxin Avenue, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee before: JIANGXI COPPER YATES FOIL Inc. |
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CP01 | Change in the name or title of a patent holder |