CN103466628B - Backlash type - Google Patents

Backlash type Download PDF

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Publication number
CN103466628B
CN103466628B CN201310393637.7A CN201310393637A CN103466628B CN 103466628 B CN103466628 B CN 103466628B CN 201310393637 A CN201310393637 A CN 201310393637A CN 103466628 B CN103466628 B CN 103466628B
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China
Prior art keywords
main burner
hole
kuppe
backlash type
shower nozzle
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CN201310393637.7A
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Chinese (zh)
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CN103466628A (en
Inventor
吴海龙
茅陆荣
沈刚
缪锦泉
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Morimatsu (Jiangsu) Heavy Industry Co., Ltd.
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SHANGHAI MORIMATSU CHEMICAL EQUIPMENT CO Ltd
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Abstract

The present invention is a kind of adjustable Backlash type, including main burner, chassis, holding screw, kuppe and shower nozzle, main burner is by welding or is threadably mounted on the air inlet on chassis, main burner center is inlet channel, described inlet channel connects with described shower nozzle, described shower nozzle is connected with described main burner, and described kuppe is connected with described main burner, and described holding screw is arranged on outside described kuppe.This structure mainly by chassis of reducing furnace air inlet arrange Backlash type regulate furnace gas be distributed, the air inlet demand of silicon core lower end can be met, can prevent again air inlet from causing the vibration of silicon core to cause down rod, this nozzle can also make a part of high-speed gas go directly furnace roof simultaneously, silicon core upper end is carried out feed and cooling, prevents corncob from generating.

Description

Backlash type
Technical field:
The present invention relates to technical field of polysilicon production, particularly to controlling entering of air flow method in reduction furnace Gas jets.
Background technology:
At present, the Technology producing polysilicon main both at home and abroad is Siemens's improved method, so most domestic The equipment used by production of polysilicon producer be CVD reduction furnace.The operation principle of reduction furnace is by energising height The mixed air precursor reactant of trichlorosilane with hydrogen is generated polysilicon and is deposited on silicon core, due to finally by temperature silicon core Product is deposited on the polysilicon on silicon core, so blow-on is required for experience dress silicon core and blow-on takes rod mistake every time Journey.
Due to silicon core diameter filled during blow-on typically only 8~10mm, in electromagnetic induction, air inlet disturbance, install by mistake Easily occurs rod phenomenon under the influence of the factors such as difference.The blow-on initial stage often use less air inflow with avoid into Gas disturbance causes silicon rod vibration to cause down rod, and blow-on early stage silicon rod length is slow, and less air inflow is greatly prolonged Grow single furnace operating time of reduction furnace.
Simultaneously in order to generate the polycrystalline silicon material of high-quality, the uniformity of gas field in reduction furnace also should be kept.Institute Think solution the problems referred to above, needed one can either keep bigger air inflow, be avoided that again the resonance of silicon core is fallen excellent, The equally distributed nozzle in gas field in stove can also be made simultaneously.
Summary of the invention:
The present invention is a kind of Backlash type, main by arranging at chassis of reducing furnace air inlet Backlash type regulates furnace gas distribution, can meet the air inlet demand of silicon core lower end, Can prevent again air inlet from causing the vibration of silicon core to cause down rod, this nozzle can also make a part of high-speed gas go directly stove simultaneously Top, carries out feed and cooling to silicon core upper end, prevents corncob from generating.
In order to realize the effect above, the technical solution used in the present invention is: a kind of backpulsing polysilicon nozzle is main Including main burner, chassis, holding screw, kuppe and shower nozzle.Main burner is by welding or is threadably mounted at the end On the air inlet of dish, main burner center is inlet channel, and described inlet channel connects with described shower nozzle, described spray Head is connected with described main burner, and described kuppe is connected with described main burner, and described holding screw is arranged on described Outside kuppe.
Further, this inlet channel is any by the face of cylinder, taper seat, polygon cylinder, arcwall face One or more are around forming, and form straightthrough port passage, necking passage or diffusing opening passage.
Further, main burner sidewall uniformly has several inclined hole that Open Side Down, and inclined hole connects with inlet channel.
Further, main burner lower end is provided with location and the hex nut ring installed;Shower nozzle is installed by screw thread In main burner outer upper end.
Further, shower nozzle center has 1 or the fumarole of more than 1, fumarole can be straight hole, inclined hole, Any one or a combination thereof of undergauge hole or diffusion hole.Fumarole and main burner eye form are to silicon rod Gas flow rate and the temperature of middle epimere play a decisive role, i.e. shape and main burner air feeding in center by fumarole is led to The shape in road is respectively combined, and the number of openings, according to actual needs, it is achieved impact and the control on change in flow Make, and then the temperature of epimere especially middle to the silicon rod in reduction furnace also functions to decisive action.
Further, kuppe is by being threadably mounted at the outer middle side part of main burner, and is fixed on by holding screw On main burner, it is achieved need to be fixed according to physical location.
Further, the opening upwards of kuppe, kuppe opening can be cylindricality, taper or spherical.Lead The gas of main burner sidewall inclined hole ejection is played buffering, the effect with water conservancy diversion of slowing down by stream cover;The opening of kuppe End shape can have multiple combination convert, the flowing of guiding reacting gas, and in the shape of fumarole and main burner The shape cooperation of heart inlet channel is considered as a whole.
The operation principle of the present invention is: process gas is introduced into the inlet channel at main burner center, a part of gas Sprayed the middle epimere of through silicon rod by the fumarole on main burner top showerhead, epimere in silicon rod is played confession Material, the function cooling down and promoting furnace gas to circulate.
Owing to entering the drag effect by shower nozzle of the gas in main burner passage, a part of gas passes through main burner The inclined hole of sidewall sprays downwards, and the gas of ejection is stopped by kuppe, upwards sprays under kuppe effect.
As another kind of preferred version, main burner sidewall uniformly has an inclined hole of several opening upwards, and now Open Side Down for kuppe.The gas entered in main burner passage in this priority scheme is made by the resistance of shower nozzle With, a part of gas is upwards sprayed by the inclined hole of main burner sidewall, and the gas of ejection is stopped by kuppe, Spray downwards under kuppe effect.
Gas kinetic energy is consumed and under the effect that outlet increases, from kuppe owing to gas flow changes The gas flow rate of ejection is the lowest, can meet silicon rod hypomere feed, cooling requirement, be greatly reduced again gas The vibration impact on silicon rod, greatly reduces down the probability of rod.Simultaneously as shower nozzle and kuppe all pass through spiral shell Stricture of vagina is connected on main burner, it is possible to according to actually used silicon rod height and blow-on effect, changes difference The shower nozzle of bore size and form and the kuppe of multi-form, or adjust the height of kuppe as required, And position with holding screw.
Accompanying drawing illustrates:
Fig. 1 is the Backlash type structural representation of the present invention.
Fig. 2 is the schematic diagram of nozzle another kind preferred version of the present invention.
Fig. 3 is the fumarole example in the present invention.
In figure, 1 be main burner, 2 be chassis, 3 be holding screw, 4 be kuppe, 5 be shower nozzle, 1-1 be six Angle nut ring, 1-2 be inclined hole, 1-3 be inlet channel, 5-1 be fumarole.
Detailed description of the invention:
Below in conjunction with the accompanying drawings the specific works principle of the present invention is further described.
Embodiment 1:
As it is shown in figure 1, the present invention is mainly by main burner 1, chassis 2, holding screw 3, kuppe 4 and shower nozzle 5 Composition.Main burner 1 is by welding or is threadably mounted on the air inlet on chassis 2, and main burner 1 center is that air inlet is led to Road 1-3, this inlet channel 1-3 are around forming by 2 faces of cylinder and 1 taper seat, form necking passage.
Main burner 1 sidewall uniformly has several the inclined hole 1-2 that Open Side Down, inclined hole 1-2 and inlet channel 1-3 even Logical.Main burner 1 lower end is provided with location and the hex nut ring 1-2 installed.
Shower nozzle 5 is by being threadably mounted at main burner 1 outer upper end, and shower nozzle 5 center has 1 fumarole 5-1, spray Pore 5-1 is straight hole.
The entrance total sectional area of the fumarole 5-1 discharge area less than inlet channel 1-3.Fumarole 5-1 and master Gas flow rate and the temperature of epimere in silicon rod are played a decisive role by the form of nozzle 1 eye 1-3.
Kuppe 4 is by being threadably mounted at the outer middle side part of main burner 1, the opening upwards of kuppe 4, kuppe 4 Opening is taper.The gas that main burner 1 sidewall inclined hole 1-2 is sprayed by kuppe 4 plays buffering, slows down and lead The effect of stream.Holding screw 3 is arranged on outside kuppe 4, for kuppe 4 is fixed on main burner 1.
Embodiment 2:
As in figure 2 it is shown, as another kind of preferred version, enter the gas in main burner 1 passage by shower nozzle 5 Drag effect, a part of gas is upwards sprayed by the inclined hole 1-2 of main burner 1 sidewall, and the gas of ejection is opened The downward kuppe 4 of mouth stops, sprays downwards under kuppe 4 acts on.
Main burner 1 center is inlet channel 1-3, and this inlet channel 1-3 is around forming by arcwall face and the face of cylinder, Form straightthrough port passage.
Shower nozzle 5 is by being threadably mounted at main burner 1 outer upper end, and shower nozzle 5 center has 1 fumarole 5-1, spray Pore 5-1 is diffusion hole.
Enforcement 3:
As it is shown on figure 3, as another kind of preferred version, shower nozzle 5 center has 1 or the fumarole of more than 1 5-1, fumarole is undergauge hole or diffusion hole.
The work process of the present embodiment is: process gas is introduced into the inlet channel at main burner 1 center, a part Epimere in silicon rod, by the middle epimere of the through silicon rod of fumarole ejection on main burner 1 top showerhead 5, is risen by gas To feed, the function that cools down and promote furnace gas to circulate.It is subject to owing to entering the gas in main burner 1 passage To the drag effect of shower nozzle 5, a part of gas is sprayed downwards by the inclined hole 1-1 of main burner 1 sidewall, ejection Gas is stopped by kuppe 4, upwards sprays under kuppe 4 acts on.
Gas kinetic energy is consumed and under the effect that outlet increases, from kuppe owing to gas flow changes The gas flow rate of 4 ejections is the lowest, can meet silicon rod hypomere feed, cooling requirement, be greatly reduced again gas The body vibration impact on silicon rod, greatly reduces down the probability of rod.
Simultaneously as shower nozzle 5 and kuppe 4 are all threadedly attached on main burner 1, it is possible to according to reality The silicon rod height of border use and blow-on effect, change different bore size and the shower nozzle 5 of form and multi-form Kuppe 4, or adjust the height of kuppe 4 as required, and position with holding screw 3.
Under the effect of this nozzle, furnace gas is distributed more uniform in the height direction, makes temperature field in furnace equal Even, decrease the ratio of corncob, improve the quality of silicon rod.Simultaneously because the gas disturbance bottom silicon rod is little, Make blow-on early stage that bigger air inflow can be used to improve throughput rate, can prevent from again leading because air inflow is excessive Falling of causing is excellent.

Claims (13)

1. a Backlash type, including main burner (1), chassis (2), holding screw (3), water conservancy diversion Cover (4) and shower nozzle (5), connect main burner (1), it is characterised in that described main burner on described chassis (2) (1) center is provided with inlet channel (1-3), connects with described shower nozzle (5), described shower nozzle (5) and described main jet Mouth (1) connects, and described kuppe (4) is connected with described main burner (1);When described main burner (1) sidewall When having the several inclined hole that Open Side Down (1-2), described inclined hole (1-2) connects with described inlet channel (1-3), The opening upwards of described kuppe;When described main burner (1) sidewall has the inclined hole (1-2) of several opening upwards Time, described inclined hole (1-2) connects with described inlet channel (1-3), and Open Side Down for described kuppe;Described Kuppe is for the gas flow guiding sprayed from inclined hole (1-2).
A kind of Backlash type the most according to claim 1, it is characterised in that: described main burner (1) By welding or being threadably mounted on the air inlet of chassis (2), described holding screw (3) is arranged on described water conservancy diversion Cover (4) outside.
A kind of Backlash type the most according to claim 1, it is characterised in that: described inlet channel (1-3) it is around forming by any one or more in the face of cylinder, taper seat, polygon cylinder, arcwall face, Form straightthrough port passage, necking passage or diffusing opening passage.
A kind of Backlash type the most according to claim 1, it is characterised in that: described main burner (1) Sidewall has several inclined hole that Open Side Down (1-2).
A kind of Backlash type the most according to claim 1, it is characterised in that: described main burner (1) Sidewall uniformly has the inclined hole (1-2) of several opening upwards.
6. according to a kind of Backlash type described in claim 4 or 5, it is characterised in that: described downwards Or inclined hole (1-2) upwards is uniformly distributed according to certain rules at sidewall.
A kind of Backlash type the most according to claim 1, it is characterised in that: described main burner (1) Lower end is provided with location and the hex nut ring installed.
A kind of Backlash type the most according to claim 1, it is characterised in that: described shower nozzle (5) By being threadably mounted at described main burner (1) outer upper end.
A kind of Backlash type the most according to claim 1, it is characterised in that: described shower nozzle (5) Center has the fumarole (5-1) of 1 or more than 1.
A kind of Backlash type the most according to claim 9, it is characterised in that: described fumarole (5-1) It is any one or a combination thereof of straight hole, inclined hole, undergauge hole or diffusion hole.
11. a kind of Backlash type according to claim 9, it is characterised in that: described fumarole (5-1) Entrance total sectional area less than the discharge area of described inlet channel (1-3).
12. a kind of Backlash type according to claim 1, it is characterised in that: described kuppe (4) By being threadably mounted at described main burner (1) outer middle side part, described kuppe (4) passes through described holding screw (3) It is fixed on described main burner (1).
13. a kind of Backlash type according to claim 1, it is characterised in that: described kuppe (4) Opening is cylindricality, taper or spherical any one.
CN201310393637.7A 2013-09-02 2013-09-02 Backlash type Active CN103466628B (en)

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CN103466628B true CN103466628B (en) 2016-09-28

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104401998B (en) * 2014-11-25 2016-04-13 中国恩菲工程技术有限公司 Nozzle
CN107098349A (en) * 2017-05-05 2017-08-29 中国矿业大学 Observe visor and polycrystalline silicon reducing furnace
CN112062130A (en) * 2020-09-09 2020-12-11 云南通威高纯晶硅有限公司 Suction type nozzle for reduction furnace in polycrystalline silicon production

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201678458U (en) * 2010-04-09 2010-12-22 上海森松新能源设备有限公司 Nozzle of polysilicon reduction furnace
CN202164125U (en) * 2011-07-01 2012-03-14 中国恩菲工程技术有限公司 Polysilicon reduction furnace and nozzle thereof
CN102417181A (en) * 2011-09-15 2012-04-18 中国恩菲工程技术有限公司 Polycrystal silicon reduction furnace with novel nozzles
CN203498098U (en) * 2013-09-02 2014-03-26 上海森松化工成套装备有限公司 Kick type polycrystalline silicon reduction furnace nozzle

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201678458U (en) * 2010-04-09 2010-12-22 上海森松新能源设备有限公司 Nozzle of polysilicon reduction furnace
CN202164125U (en) * 2011-07-01 2012-03-14 中国恩菲工程技术有限公司 Polysilicon reduction furnace and nozzle thereof
CN102417181A (en) * 2011-09-15 2012-04-18 中国恩菲工程技术有限公司 Polycrystal silicon reduction furnace with novel nozzles
CN203498098U (en) * 2013-09-02 2014-03-26 上海森松化工成套装备有限公司 Kick type polycrystalline silicon reduction furnace nozzle

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Effective date of registration: 20181101

Address after: 226532 Changjiang town (Rugao port area), Rugao, Jiangsu, 1

Patentee after: Morimatsu (Jiangsu) Heavy Industry Co., Ltd.

Address before: 201315 -17, 1 Cambridge East Road, Pudong New Area, Shanghai.

Patentee before: Shanghai Morimatsu Chemical Equipment Co., Ltd.

TR01 Transfer of patent right