CN103466628A - Backlash type spray nozzle of polycrystalline silicon reduction furnace - Google Patents
Backlash type spray nozzle of polycrystalline silicon reduction furnace Download PDFInfo
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- CN103466628A CN103466628A CN2013103936377A CN201310393637A CN103466628A CN 103466628 A CN103466628 A CN 103466628A CN 2013103936377 A CN2013103936377 A CN 2013103936377A CN 201310393637 A CN201310393637 A CN 201310393637A CN 103466628 A CN103466628 A CN 103466628A
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- nozzle
- reduction furnace
- polycrystalline silicon
- backpulsing
- main jet
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Abstract
The invention relates to an adjustable backlash type spray nozzle of a polycrystalline silicon reduction furnace. The adjustable backlash type spray nozzle comprises a main spray nozzle, a chassis, a set screw, a diversion cover and a spray head, wherein the main spray nozzle is mounted on a gas inlet of the chassis by welding or through a thread, a gas inlet channel is arranged at the center of the main spray nozzle, the gas inlet channel is communicated with the spray head, the spray head is connected with the main spray nozzle, the diversion cover is connected with the main spray nozzle, and the set screw is mounted on the outer side of the diversion cover. The structure can not only meet the gas inlet demands at the lower end of a silicon core, but also prevent the downfallen phenomenon caused by vibration of the silicone core due to gas inlet by arranging the backlash type spray nozzle of the polycrystalline silicon reduction furnace at the gas inlet of the chassis of the reduction furnace to regulate the gas distribution in the furnace, and simultaneously, the spray nozzle can also enable one part of high-speed gas to directly go to the top of the furnace to perform material supply and cooling at the upper end of the silicon core so as to prevent the generation of a corn cob.
Description
Technical field:
The present invention relates to technical field of polysilicon production, particularly control the nozzle of air supply that the reduction furnace gas stream in the stove distributes.
Background technology:
At present, producing the main Technology of polysilicon both at home and abroad is siemens's improved method, so the production of polysilicon producer equipment used of most domestic is the CVD reduction furnace.The principle of work of reduction furnace is trichlorosilane to be reacted with the mixed gas of hydrogen and generate polysilicon and be deposited on the silicon core by energising high temperature silicon core, because final product is the polysilicon be deposited on the silicon core, so each blow-on all needs experience dress silicon core and blow-on to get rod motion.
During due to blow-on, the silicon core diameter that fills generally only has 8～10mm, under the impact of the factors such as electromagnetic induction, air inlet disturbance, installation error, excellent phenomenon easily occurs down.The blow-on initial stage often adopts less air input to avoid the air inlet disturbance to cause that silicon rod vibration causes down rod, and blow-on silicon rod in early stage long slowly, less air input has extended single furnace operating time of reduction furnace greatly.
In order to generate the polycrystalline silicon material of high-quality, also should keep the homogeneity of gas field in reduction furnace simultaneously.So, in order to address the above problem, need to a kind ofly can either keep larger air input, can avoid again the resonance of silicon core to fall excellent, can also make the equally distributed nozzle in the interior gas field of stove simultaneously.
Summary of the invention:
The present invention is a kind of backpulsing nozzle of polycrystalline silicon reduction furnace, mainly by the chassis of reducing furnace inlet mouth, the backpulsing nozzle of polycrystalline silicon reduction furnace being set, carry out gas distribution in regulating stove, can meet the air inlet demand of silicon core lower end, can prevent that again air inlet from causing that the vibration of silicon core causes down rod, this nozzle can also make a part of high-speed gas furnace roof that goes directly simultaneously, feed and cooling is carried out in silicon core upper end, prevent that corn ear from generating.
In order to realize above-mentioned effect, the technical solution used in the present invention is: a kind of backpulsing polysilicon nozzle mainly comprises main jet, chassis, holding screw, pod and shower nozzle.Main jet is arranged on the inlet mouth on chassis by welding or screw thread, the main jet center is induction trunk, and described induction trunk is communicated with described shower nozzle, and described shower nozzle is connected with described main jet, described pod is connected with described main jet, and described holding screw is arranged on the described pod outside.
Further, this induction trunk be in cylindrical surface, cone surface, Polygons cylinder, arc any one or multiple around forming, form straightthrough port passage, necking passage or diffusing opening passage.
Further, the main jet sidewall evenly has several inclined holes that Open Side Down, and inclined hole is communicated with induction trunk.
Further, the main jet lower end is provided with location and the hex-nut ring that use is installed; Shower nozzle is arranged on the main jet outer upper end by screw thread.
Further, the shower nozzle center has the gas orifice more than 1 or 1, and gas orifice can be any one or its combination of straight hole, inclined hole, undergauge hole or diffusion hole.Gas orifice and main jet eye form play a decisive role to gas flow rate and the temperature of epimere in silicon rod, by the shape of gas orifice and the shape of main jet eye, combine respectively, and the number of openings, according to actual needs, impact and the control of realization on change in flow, and then the temperature of the especially middle epimere of the silicon rod in reduction furnace is also played a decisive role.
Further, pod is arranged on the outer middle side part of main jet by screw thread, and is fixed on main jet by holding screw, realizes need to being fixed according to physical location.
Further, the opening upwards of pod, the pod opening end can be cylindricality, taper or spherical.Pod plays the effect of buffering, deceleration and water conservancy diversion to the gas of main jet sidewall inclined hole ejection; The opening end shape of pod can have the multiple combination conversion, and flowing of directing reaction gas, consider as a whole with the shape of gas orifice and the shape cooperation of main jet eye.
Principle of work of the present invention is: process gas is introduced into the induction trunk at main jet center, part gas is by the middle epimere of the through silicon rod of the ejection of the gas orifice on the shower nozzle of main jet top, and epimere in silicon rod is played to feed, the cooling and function that promotes the furnace gas circulation.
Due to the drag effect that enters gas in the main jet passage and be subject to shower nozzle, a part of gas sprays downwards by the inclined hole of main jet sidewall, and the gas of ejection is subject to pod to be stopped, upwards ejection under the pod effect.
As another kind of preferred version, the main jet sidewall evenly has the inclined hole of several opening upwards, and pod now Open Side Down.Enter gas in the main jet passage in this priority scheme and be subject to the drag effect of shower nozzle, a part of gas is by the upwards ejection of inclined hole of main jet sidewall, and the gas of ejection is subject to pod to be stopped, ejection downwards under the pod effect.
Because gas flow changes under the effect that has consumed gas kinetic energy and increased in outlet, very low from the gas flow rate of pod ejection, can meet silicon rod hypomere feed, cooling requirement, reduce greatly again the impact of Gas Vibration on silicon rod, greatly reduce down excellent probability.Simultaneously, because shower nozzle and pod all are threaded connection on main jet, so silicon rod height and the blow-on effect that can use according to reality, change the shower nozzle of different bore size and form and multi-form pod, perhaps adjust as required the height of pod, and position with holding screw.
The accompanying drawing explanation:
Fig. 1 is backpulsing nozzle of polycrystalline silicon reduction furnace structural representation of the present invention.
Fig. 2 is the schematic diagram of the another kind of preferred version of nozzle of the present invention.
Fig. 3 is the gas orifice example in the present invention.
In figure, the 1st, main jet, the 2nd, chassis, the 3rd, holding screw, the 4th, pod, the 5th, shower nozzle, 1-1 are the hex-nut rings, 1-2 is that inclined hole, 1-3 are that induction trunk, 5-1 are gas orifices.
Embodiment:
Below in conjunction with accompanying drawing, specific works principle of the present invention is further described.
Embodiment 1:
As shown in Figure 1, the present invention mainly is comprised of main jet 1, chassis 2, holding screw 3, pod 4 and shower nozzle 5.Main jet 1 is arranged on the inlet mouth on chassis 2 by welding or screw thread, and main jet 1 center is induction trunk 1-3, this induction trunk 1-3 be by 2 cylindrical surface and 1 cone surface around forming, form the necking passage.
The entrance total sectional area of gas orifice 5-1 is less than the discharge area of induction trunk 1-3.The form of gas orifice 5-1 and main jet 1 eye 1-3 plays a decisive role to gas flow rate and the temperature of epimere in silicon rod.
Pod 4 is arranged on the outer middle side part of main jet 1 by screw thread, the opening upwards of pod 4, and pod 4 opening ends are taper.The gas of 4 pairs of main jets of pod, 1 sidewall inclined hole 1-2 ejection plays the effect of buffering, deceleration and water conservancy diversion.Holding screw 3 is arranged on pod 4 outsides, for pod 4 is fixed on to main jet 1.
Embodiment 2:
As shown in Figure 2, as another kind of preferred version, enter the drag effect that gas in main jet 1 passage is subject to shower nozzle 5, a part of gas is by the upwards ejection of inclined hole 1-2 of main jet 1 sidewall, the gas of ejection is subject to the pod 4 that Open Side Down to be stopped, ejection downwards under pod 4 effects.
Implement 3:
As shown in Figure 3, as another kind of preferred version, shower nozzle 5 centers have the gas orifice 5-1 more than 1 or 1, and gas orifice is undergauge hole or diffusion hole.
The working process of the present embodiment is: process gas is introduced into the induction trunk at main jet 1 center, part gas is by the middle epimere of the through silicon rod of the ejection of the gas orifice on main jet 1 top shower nozzle 5, and epimere in silicon rod is played to feed, the cooling and function that promotes the furnace gas circulation.Due to the drag effect that enters gas in main jet 1 passage and be subject to shower nozzle 5, a part of gas sprays downwards by the inclined hole 1-1 of main jet 1 sidewall, and the gas of ejection is subject to pod 4 to be stopped, upwards ejection under pod 4 effects.
Because gas flow changes under the effect that has consumed gas kinetic energy and increased in outlet, very low from the gas flow rate of pod 4 ejections, can meet silicon rod hypomere feed, cooling requirement, reduce greatly again the impact of Gas Vibration on silicon rod, greatly reduce down excellent probability.
Simultaneously, because shower nozzle 5 and pod 4 all are threaded connection on main jet 1, so silicon rod height and the blow-on effect that can use according to reality, change the shower nozzle 5 of different bore size and form and multi-form pod 4, perhaps adjust as required the height of pod 4, and position with holding screw 3.
Under the effect of this nozzle, furnace gas distributes more even on short transverse, makes temperature field in furnace even, has reduced the ratio of corn ear, has improved the quality of silicon rod.Because the gas disturbance of silicon rod bottom is little, make blow-on can adopt larger air input to improve throughput rate early stage simultaneously, can prevent again the rod that falls caused because air input is excessive.
Claims (15)
1. a backpulsing nozzle of polycrystalline silicon reduction furnace, comprise main jet (1), chassis (2), holding screw (3), pod (4) and shower nozzle (5), connect main jet (1) on described chassis (2), it is characterized in that described main jet (1) center is provided with induction trunk (1-3), with described shower nozzle (5), be communicated with, described shower nozzle (5) is connected with described main jet (1), and described pod (4) is connected with described main jet (1).
2. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 1 is characterized in that: described main jet (1) is arranged on the inlet mouth of chassis (2) by welding or screw thread, and described holding screw (3) is arranged on described pod (4) outside.
3. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 3, it is characterized in that: described induction trunk (1-3) be in cylindrical surface, cone surface, Polygons cylinder, arc any one or multiple around forming, form straightthrough port passage, necking passage or diffusing opening passage.
4. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 1, it is characterized in that: described main jet (1) sidewall has several inclined holes that Open Side Down (1-2), and described inclined hole (1-2) is communicated with described induction trunk (1-3).
5. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 1, it is characterized in that: described main jet (1) sidewall evenly has the inclined hole (1-2) of several opening upwards, and described inclined hole (1-2) is communicated with described induction trunk (1-3).
6. according to the described a kind of backpulsing nozzle of polycrystalline silicon reduction furnace of claim 4 or 5, it is characterized in that: described inclined hole (1-2) downward or upward is uniformly distributed according to certain rules at sidewall.
7. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 1 is characterized in that: described main jet (1) lower end is provided with location and the hex-nut ring (1-2) that use is installed.
8. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 1, it is characterized in that: described shower nozzle (5) is arranged on described main jet (1) outer upper end by screw thread.
9. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 1, it is characterized in that: described shower nozzle (5) center has the gas orifice (5-1) more than 1 or 1.
10. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 9 is characterized in that: described gas orifice (5-1) is any one or its combination of straight hole, inclined hole, undergauge hole or diffusion hole.
11. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 9 is characterized in that: the entrance total sectional area of described gas orifice (5-1) is less than the discharge area of described induction trunk (1-3).
12. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 1, it is characterized in that: described pod (4) is arranged on the outer middle side part of described main jet (1) by screw thread, and described pod (4) is fixed on described main jet (1) by described holding screw (3).
13., according to the described a kind of backpulsing nozzle of polycrystalline silicon reduction furnace of claim 1 or 4, it is characterized in that: the opening upwards of described pod (4).
14. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 1 or 5, it is characterized in that: Open Side Down for described pod (4).
15. a kind of backpulsing nozzle of polycrystalline silicon reduction furnace according to claim 1 is characterized in that: described pod (4) opening end is cylindricality, taper or spherical any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310393637.7A CN103466628B (en) | 2013-09-02 | 2013-09-02 | Backlash type |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310393637.7A CN103466628B (en) | 2013-09-02 | 2013-09-02 | Backlash type |
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| CN103466628A true CN103466628A (en) | 2013-12-25 |
| CN103466628B CN103466628B (en) | 2016-09-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310393637.7A Active CN103466628B (en) | 2013-09-02 | 2013-09-02 | Backlash type |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013203593A (en) * | 2012-03-28 | 2013-10-07 | Mitsubishi Materials Corp | Polycrystalline silicon reactor |
| CN104401998A (en) * | 2014-11-25 | 2015-03-11 | 中国恩菲工程技术有限公司 | Nozzle |
| CN107098349A (en) * | 2017-05-05 | 2017-08-29 | 中国矿业大学 | Observe visor and polycrystalline silicon reducing furnace |
| CN112062130A (en) * | 2020-09-09 | 2020-12-11 | 云南通威高纯晶硅有限公司 | Suction type nozzle for reduction furnace in polycrystalline silicon production |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201678458U (en) * | 2010-04-09 | 2010-12-22 | 上海森松新能源设备有限公司 | Nozzle of polysilicon reduction furnace |
| CN202164125U (en) * | 2011-07-01 | 2012-03-14 | 中国恩菲工程技术有限公司 | Polysilicon reduction furnace and nozzle thereof |
| CN102417181A (en) * | 2011-09-15 | 2012-04-18 | 中国恩菲工程技术有限公司 | Polycrystal silicon reduction furnace with novel nozzles |
| CN203498098U (en) * | 2013-09-02 | 2014-03-26 | 上海森松化工成套装备有限公司 | Kick type polycrystalline silicon reduction furnace nozzle |
-
2013
- 2013-09-02 CN CN201310393637.7A patent/CN103466628B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201678458U (en) * | 2010-04-09 | 2010-12-22 | 上海森松新能源设备有限公司 | Nozzle of polysilicon reduction furnace |
| CN202164125U (en) * | 2011-07-01 | 2012-03-14 | 中国恩菲工程技术有限公司 | Polysilicon reduction furnace and nozzle thereof |
| CN102417181A (en) * | 2011-09-15 | 2012-04-18 | 中国恩菲工程技术有限公司 | Polycrystal silicon reduction furnace with novel nozzles |
| CN203498098U (en) * | 2013-09-02 | 2014-03-26 | 上海森松化工成套装备有限公司 | Kick type polycrystalline silicon reduction furnace nozzle |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013203593A (en) * | 2012-03-28 | 2013-10-07 | Mitsubishi Materials Corp | Polycrystalline silicon reactor |
| CN104401998A (en) * | 2014-11-25 | 2015-03-11 | 中国恩菲工程技术有限公司 | Nozzle |
| CN107098349A (en) * | 2017-05-05 | 2017-08-29 | 中国矿业大学 | Observe visor and polycrystalline silicon reducing furnace |
| CN112062130A (en) * | 2020-09-09 | 2020-12-11 | 云南通威高纯晶硅有限公司 | Suction type nozzle for reduction furnace in polycrystalline silicon production |
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| Publication number | Publication date |
|---|---|
| CN103466628B (en) | 2016-09-28 |
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Effective date of registration: 20181101 Address after: 226532 Changjiang town (Rugao port area), Rugao, Jiangsu, 1 Patentee after: Morimatsu (Jiangsu) Heavy Industry Co., Ltd. Address before: 201315 -17, 1 Cambridge East Road, Pudong New Area, Shanghai. Patentee before: Shanghai Morimatsu Chemical Equipment Co., Ltd. |