CN103439960B - The air-path control system of vacuum absorbing platform - Google Patents
The air-path control system of vacuum absorbing platform Download PDFInfo
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- CN103439960B CN103439960B CN201310380097.9A CN201310380097A CN103439960B CN 103439960 B CN103439960 B CN 103439960B CN 201310380097 A CN201310380097 A CN 201310380097A CN 103439960 B CN103439960 B CN 103439960B
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Abstract
A kind of air-path control system of vacuum absorbing platform, comprise vacuum-adsorption working table, the first gas separating seat, straight-wavy valve, the first vortex pump, the second gas separating seat, pressure regulation filtrator, gas cleaning cover, the second vortex pump and solenoid valve, vacuum-adsorption working table, the first gas separating seat, straight-wavy valve, the first vortex pump, the second gas separating seat, pressure regulation filtrator, gas cleaning cover and the second vortex pump are sequentially connected in series by some tracheaes; The two ends of solenoid valve are connected on the first gas separating seat and pressure regulation filtrator; Add man-hour, vacuum-adsorption working table is in negative pressure state; After completing materials processing, the gas that the first vortex pump blows out enters vacuum-adsorption working table from solenoid valve.After preventing etching frame from machining, affect by negative pressure, the phenomenon being difficult to feeding occurs.
Description
Technical field
The present invention relates to a kind of air-path control system, be specifically related to a kind of air-path control system of vacuum absorbing platform.
Background technology
Material carries out cutting, etch or the process of other form time, prevent material from shaking or position offsets, shape rings crudy, and material is first fixed by normal needs, remakes processing and processes.
In prior art, when processing process done by material, normal employing vacuum absorbing platform is fixed frivolous flaky material, the gas circuit of vacuum absorbing platform controls usually to utilize vacuum generator or vacuum pump directly to produce negative pressure to carry out the flat and absorption of suctions to the material on platform, also has employing vortex pump to bleed outward formation negative-pressure adsorption.When user needs blowing, platform in the raw, can not produce absorption affinity to material, places after material until user, and vortex pump starts to bleed, and vacuum absorbing platform cavity produces negative pressure and sucked by material.
But, in the air-path control system of above-mentioned vacuum absorbing platform, when carrying out rewinding after materials processing completes, now because vacuum is not destroyed, easily cause the phenomenon of feeding difficulty to occur.
Summary of the invention
Based on this, be necessary, for deficiency of the prior art, to provide a kind of air-path control system of vacuum absorbing platform.
The present invention is achieved in the following ways: a kind of air-path control system of vacuum absorbing platform, comprise vacuum-adsorption working table, the first gas separating seat, straight-wavy valve, the first vortex pump, the second gas separating seat, pressure regulation filtrator, gas cleaning cover, the second vortex pump and solenoid valve, described vacuum-adsorption working table, the first gas separating seat, straight-wavy valve, the first vortex pump, the second gas separating seat, pressure regulation filtrator, gas cleaning cover and the second vortex pump are sequentially connected in series by some tracheaes; The two ends of described solenoid valve are connected on the first gas separating seat and pressure regulation filtrator; Add man-hour, straight-wavy valve power-off is communicated with, described solenoid valves is died, the first vortex pump, the second vortex pump all work and bleed; Described first vortex pump is bled to vacuum-adsorption working table by the first gas separating seat, makes vacuum-adsorption working table be in negative pressure state, and the gas flow that the first vortex pump is extracted out is extracted out by the second vortex pump after pressure regulation filtrator and gas cleaning cover; After completing materials processing, straight-wavy valve energising disconnects, described solenoid valve power-off is ventilated, the first vortex pump work is bled, the second vortex pump quits work, and the gas that the first vortex pump blows out enters vacuum-adsorption working table from solenoid valve.
Further, described vacuum-adsorption working table is provided with four gas ports, and described first gas separating seat divides that four road tracheaes are corresponding with four gas ports of vacuum-adsorption working table to be connected.
Further, also comprise a pressure sensor, described pressure sensor is connected by a Y type four tracheae Zhong mono-road, the road tracheaes that slotting three-way plug is connected with the first gas separating seat and vacuum-adsorption working table soon.
Further, described solenoid valve one end is inserted three-way plug soon by a Y type and is connected to a road tracheae between the first gas separating seat and vacuum-adsorption working table, and this solenoid valve other end is inserted three-way plug soon by a Y type and connected with the tracheae being connected pressure regulation filtrator and gas cleaning cover
Further, be also provided with ion wind rod in described gas cleaning cover, described gas cleaning cover employing Y type is inserted three-way plug soon and is connected with pressure regulation filtrator, and gas cleaning cover carries out the input of upper and lower side two-way by adopting Y type to insert three-way plug soon.
Further, described tracheae is PU pipe.
In sum, the air-path control system of vacuum absorbing platform of the present invention is by changing the state of straight-wavy valve and solenoid valve, and add man-hour, the first vortex pump is bled to vacuum-adsorption working table, form negative pressure, thus material to be processed is adsorbed on securely make on vacuum suction workbench.After completing materials processing, the gas that the first vortex pump blows out enters vacuum suction workbench from solenoid valve, destroys the negative pressure state of vacuum adsorption table, take out Material Processing easily, structure is simple, practical, after preventing etching frame from machining, affect by negative pressure, the phenomenon being difficult to feeding occurs.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the air-path control system of vacuum absorbing platform of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
As shown in Figure 1, the present embodiment provides a kind of air-path control system of vacuum absorbing platform, adds man-hour for etching machine to lamellar material, carries out absorption fix this lamellar material.The air-path control system of described vacuum absorbing platform comprises vacuum-adsorption working table 10, first gas separating seat 20, straight-wavy valve 30, first vortex pump 40, second gas separating seat 50, pressure regulation filtrator 60, gas cleaning cover 70, second vortex pump 80, solenoid valve 90 and pressure transducer 100.Described vacuum-adsorption working table 10, first gas separating seat 20, straight-wavy valve 30, first vortex pump 40, second gas separating seat 50, pressure regulation filtrator 60, gas cleaning cover 70 and the second vortex pump 80 are sequentially connected in series by tracheae 110, and the two ends of described solenoid valve 90 are connected on the output terminal of the first gas separating seat 20 and pressure regulation filtrator 60.
Described vacuum-adsorption working table 10 is provided with four gas ports 11, and described first gas separating seat 20 point of four road tracheae 110 is corresponding with four gas ports 11 of vacuum-adsorption working table 10 to be connected.Described pressure transducer 100 is connected by the Y type road tracheae 110 that slotting three-way plug 120 is connected with the first gas separating seat 20 and vacuum-adsorption working table 10 soon.Described solenoid valve 90 one end is inserted three-way plug 130 soon by a Y type and is connected to a road tracheae 110 between the first gas separating seat 20 and vacuum-adsorption working table 10, and this solenoid valve 90 other end is inserted three-way plug 140 soon by a Y type and connected with the tracheae 110 being connected pressure regulation filtrator 60 and gas cleaning cover 70; Preferably, ion wind rod 71 is also provided with in described gas cleaning cover 70, the input end employing Y type of described gas cleaning cover 70 is inserted three-way plug 150 soon and is connected with pressure regulation filtrator 60, and gas cleaning cover 70 carries out the input of upper and lower side two-way, enhancing smoke discharging effect by adopting Y type to insert three-way plug 150 soon.In the present invention, described tracheae 110 is PU pipe (PolyurethaneTubing, polycarbamate pipe), described vacuum-adsorption working table 10, first gas separating seat 20, solenoid valve 90, gas cleaning cover 70 are installed in etching machine inside, and described straight-wavy valve 30, first vortex pump 40, second gas separating seat 50, pressure regulation filtrator 60, second vortex pump 80 and pressure transducer 100 are installed in etching machine outside.
Laser etching machine adds man-hour to material, and the air-path control system of vacuum absorbing platform of the present invention is started working.Now, straight-wavy valve 30 power-off is communicated with, and solenoid valve 90 is energized and disconnects, and the first vortex pump 40, second vortex pump 80 works.When described first vortex pump 40 works, the second gas separating seat 50 is blown to the first gas separating seat 20 air-breathing by straight-wavy valve 30; Outwards to blow when described second vortex pump 80 works and to gas cleaning cover 70 air-breathing; Straight-wavy valve 30 internal piston after power-off is opened, and makes the first vortex pump 40 and the first gas separating seat 20 be in connected state; Solenoid valve 90 after energising is in closed condition, described first vortex pump 40 is bled by the first gas separating seat 20 pairs of vacuum-adsorption working tables 10, make vacuum-adsorption working table 10 be in negative pressure state, thus material to be processed is adsorbed on securely make on vacuum-adsorption working table 10.The gas that first vortex pump 40 is taken out is under the effect of the second vortex pump 80, through pressure regulation filtrator 60 gas cleaning cover 70, carry out pressure regulation by pressure regulation filtrator 60 and tentatively filter and be discharged to gas cleaning cover 70, by gas cleaning cover 70, further udst separation process is carried out to this gas again, last by being discharged to outside etching machine from the second vortex pump 80, pressure transducer 100 detects the atmospheric pressure value of vacuum-adsorption working table 10, and shown by exterior display device, make staff understand the force value of vacuum suction workbench.
After completing materials processing, now, straight-wavy valve 30 is energized and disconnects, and solenoid valve 90 power-off is communicated with, and the first vortex pump 40 works, the second vortex pump 80 quits work.Described first vortex pump 40 works and only blows to the second gas separating seat 50; Straight-wavy valve 30 internal piston after energising is in closed condition, and the second vortex pump 80 is in closure state, and namely gas cannot flow out from the second vortex pump 80.Solenoid valve 90 after power-off is in open mode, the gas that first vortex pump 40 blows out enters vacuum-adsorption working table 10 from solenoid valve 90 after the second gas separating seat 50 is blown, destroy the negative pressure state of vacuum-adsorption working table 10, and the air mass with electric charge that ion wind rod 71 produces, removes material electrostatic.
In sum, the air-path control system of vacuum absorbing platform of the present invention is by changing the state of straight-wavy valve 30 and solenoid valve 90, add man-hour, first vortex pump 40 pairs vacuum suction workbench is bled, form negative pressure, thus material to be processed is adsorbed on securely make on vacuum-adsorption working table 10.After completing materials processing, the gas that first vortex pump 40 blows out enters vacuum-adsorption working table 10 from solenoid valve 90, destroy the negative pressure state of vacuum-adsorption working table 10, take out Material Processing easily, structure is simple, practical, after preventing etching frame from machining, affect by negative pressure, cause the phenomenon of feeding to occur.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. the air-path control system of a vacuum absorbing platform; it is characterized in that: comprise vacuum-adsorption working table, the first gas separating seat, straight-wavy valve, the first vortex pump, the second gas separating seat, pressure regulation filtrator, gas cleaning cover, the second vortex pump and solenoid valve, described vacuum-adsorption working table, the first gas separating seat, straight-wavy valve, the first vortex pump, the second gas separating seat, pressure regulation filtrator, gas cleaning cover and the second vortex pump are sequentially connected in series by some tracheaes; The two ends of described solenoid valve are connected on the first gas separating seat and pressure regulation filtrator; Add man-hour, straight-wavy valve power-off is communicated with, described solenoid valves is died, the first vortex pump, the second vortex pump all work and bleed; Described first vortex pump is bled to vacuum-adsorption working table by the first gas separating seat, makes vacuum-adsorption working table be in negative pressure state, and the gas flow that the first vortex pump is extracted out is extracted out by the second vortex pump after pressure regulation filtrator and gas cleaning cover; After completing materials processing, straight-wavy valve energising disconnects, described solenoid valve power-off is ventilated, the first vortex pump work is bled, the second vortex pump quits work, and the gas that the first vortex pump blows out enters vacuum-adsorption working table from solenoid valve.
2. the air-path control system of vacuum absorbing platform according to claim 1, is characterized in that: described vacuum-adsorption working table is provided with four gas ports, and described first gas separating seat divides that four road tracheaes are corresponding with four gas ports of vacuum-adsorption working table to be connected.
3. the air-path control system of vacuum absorbing platform according to claim 2, it is characterized in that: also comprise a pressure sensor, described pressure sensor is connected by a Y type four tracheae Zhong mono-road, the road tracheaes that slotting three-way plug is connected with the first gas separating seat and vacuum-adsorption working table soon.
4. the air-path control system of vacuum absorbing platform according to claim 2, it is characterized in that: described solenoid valve one end is inserted three-way plug soon by a Y type and is connected to a road tracheae between the first gas separating seat and vacuum-adsorption working table, this solenoid valve other end is inserted three-way plug soon by a Y type and is connected with the tracheae being connected pressure regulation filtrator and gas cleaning cover.
5. the air-path control system of vacuum absorbing platform according to claim 2, it is characterized in that: in described gas cleaning cover, be also provided with ion wind rod, described gas cleaning cover employing Y type is inserted three-way plug soon and is connected with pressure regulation filtrator, and gas cleaning cover carries out the input of upper and lower side two-way by adopting Y type to insert three-way plug soon.
6. the air-path control system of vacuum absorbing platform according to claim 1, is characterized in that: described tracheae is PU pipe.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310380097.9A CN103439960B (en) | 2013-08-27 | 2013-08-27 | The air-path control system of vacuum absorbing platform |
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| CN201310380097.9A CN103439960B (en) | 2013-08-27 | 2013-08-27 | The air-path control system of vacuum absorbing platform |
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| CN103439960A CN103439960A (en) | 2013-12-11 |
| CN103439960B true CN103439960B (en) | 2015-12-23 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI645192B (en) * | 2017-10-23 | 2018-12-21 | 由田新技股份有限公司 | A semiconductor wafer leveling device and method thereof |
| CN116460766B (en) * | 2023-03-22 | 2024-05-17 | 深圳市大族数控科技股份有限公司 | Vacuum air pressure method, vacuum air pressure system, adsorption platform, PCB processing equipment and medium |
| CN116715021B (en) * | 2023-07-26 | 2024-03-15 | 果栗智造(上海)技术股份有限公司 | Vacuum adsorption active cell |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101256363A (en) * | 2007-12-28 | 2008-09-03 | 上海微电子装备有限公司 | Pneumatic vacuum control system for silicon slice bench |
| CN101671122A (en) * | 2009-08-18 | 2010-03-17 | 济南德佳玻璃机器有限公司 | Vacuum control system of hollow glass roller pressing machine |
| CN203414815U (en) * | 2013-08-27 | 2014-01-29 | 广东大族粤铭激光科技股份有限公司 | Gas channel control system of vacuum adsorption platform |
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- 2013-08-27 CN CN201310380097.9A patent/CN103439960B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101256363A (en) * | 2007-12-28 | 2008-09-03 | 上海微电子装备有限公司 | Pneumatic vacuum control system for silicon slice bench |
| CN101671122A (en) * | 2009-08-18 | 2010-03-17 | 济南德佳玻璃机器有限公司 | Vacuum control system of hollow glass roller pressing machine |
| CN203414815U (en) * | 2013-08-27 | 2014-01-29 | 广东大族粤铭激光科技股份有限公司 | Gas channel control system of vacuum adsorption platform |
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Address after: 523808 Guangdong, Dongguan Songshan Lake high tech Industrial Development Zone Industrial Road, No. 28 Patentee after: GD HAN'S YUEMING LASER GROUP CO., LTD. Address before: 523000 Guangdong, Dongguan Songshan Lake high tech Industrial Development Zone Industrial Road, No. 28 Patentee before: Guangdong Han's Yueming Laser Technology Co., Ltd. |