CN103399176B - Test system for acceleration sensor - Google Patents

Test system for acceleration sensor Download PDF

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Publication number
CN103399176B
CN103399176B CN201310311229.2A CN201310311229A CN103399176B CN 103399176 B CN103399176 B CN 103399176B CN 201310311229 A CN201310311229 A CN 201310311229A CN 103399176 B CN103399176 B CN 103399176B
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hole
groove
rod
pin
chip
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CN103399176A (en
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杨东
李广
钟利强
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Suzhou Good Ark Electronics Co Ltd
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Suzhou Good Ark Electronics Co Ltd
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Priority to CN201510232189.1A priority Critical patent/CN104914374B/en
Priority to CN201510232767.1A priority patent/CN104880658B/en
Priority to CN201310311229.2A priority patent/CN103399176B/en
Publication of CN103399176A publication Critical patent/CN103399176A/en
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  • Testing Of Individual Semiconductor Devices (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)

Abstract

The invention discloses a test system for an acceleration sensor. The test system comprises an upper clamping plate, a lower clamping plate, a locating mechanism, a PCB (Printed Circuit Board) and an upper computer, wherein the upper surface and the lower surface of the upper clamping plate are respectively provided with an upper groove and a lower groove; T-shaped through holes are sequentially arranged between the upper groove and the lower groove of the upper clamping plate, and the lower clamping plate is provided with through holes corresponding to the T-shaped through holes; an elastic test bar is embedded in the T-shaped through holes and the through holes, an upper needle body of the elastic test bar sequentially penetrates through a first needle hole and a second needle hole and is exposed out of a chip groove, and a lower needle body of the elastic test bar penetrates through the through holes and is exposed; the locating mechanism comprises a cover body of which the center is provided with a through hole, and two bolt bodies which are formed by rod bars and head parts, wherein the through hole is internally and sequentially provided with a button cover, a second spring and a T-shaped ejector rod from top to bottom, and the head parts of the bolt bodies are used for being embedded in installation through holes of a left arc-shaped strip hole and a right arc-shaped strip hole. The test system disclosed by the invention can be used for accurately locating and adaptively fixing MEMS (Micro Electro Mechanical System) chips and can be used for particularly and correspondingly adjusting the contact pressure between the elastic test bar and MEMS chip pins according to each MEMS chip.

Description

For the test macro of acceleration transducer
Technical field
The present invention relates to chip testing technology field, be specifically related to a kind of test macro for acceleration transducer.
Background technology
In the research and development and large-scale production process of semi-conductor chip, all need to test all kinds of performances of chip, chip test base is the critical component in proving installation.The function of test bench is by the transmission of electric signal and electric current between chip positioning clamping and wiring board, and its function quality directly affects reliability and the accuracy of chip testing.Travelling speed along with chip improves with electronic product size Minus few day by day, also day by day improves the requirement of test bench performance.In general, the critical piece of test bench comprises spring probe, probe carriage, other electrical connections.Have pin cave in probe carriage to place the needle body of spring probe, needle body holds placement upper dynamic pin therein, spring and lower dynamic pin, and keeps good contact to guarantee the transmission of electric current and electric signal with dynamic pin.Dynamic pin moves to keep the electronics between chip and lower-class line plate to connect in needle body up and down, also can the dimensional tolerence of compensation chips and the another parts of proving installation.
Summary of the invention
The object of the invention is to provide a kind of test macro for acceleration transducer, this test macro for acceleration transducer can accurately be located and self-adaptation fixes MEMS chip, and can should adjust the contact of flexibility test rod and MEMS chip pin according to respective MEMS chip specific phase, thus improve measuring accuracy and accuracy.
For achieving the above object, the technical solution used in the present invention is: a kind of test macro for acceleration transducer, comprise train wheel bridge, lower plate, detent mechanism, PCB and host computer, the upper surface of described train wheel bridge and lower surface have upper groove and low groove, described lower plate to embed in low groove and is fixed in described PCB, in described PCB, some wire one end of plating are signal contact point, and the dry root wire other end is signal output point; Host computer for the electric signal analyzed is connected to the signal output point of described PCB;
Train wheel bridge is positioned at upper groove both sides and is respectively equipped with left arc slot, right arc slot, and left arc slot one end has installation through hole, and the right arc slot other end has another and installs through hole;
The upper groove of described train wheel bridge with offer several between low groove successively and be communicated with " T " through hole formed by the first pin hole with shrinkage pool, lower plate has the through hole corresponding with " T " through hole and the 3rd pin hole, the supporting plate of the one chip groove had for placing MEMS sensing chip embeds in described upper groove, is provided with several second pin holes in this chip groove.
One flexibility test rod embeds described " T " through hole, in through hole and the 3rd pin hole, this flexibility test rod comprises sleeve, be located at the upper pin in sleeve from top to bottom, first spring and the lower needle body contacted with PCB signal contact point, upper pin and lower needle body can move along in sleeve under external force, described first pin hole and the 3rd pinhole diameter are all less than through hole and shrinkage pool diameter, sleeve is seamlessly positioned at the shrinkage pool of train wheel bridge and the through hole of lower plate, the upper pin of flexibility test rod runs through the first pin hole successively, second pin hole exposed chip groove, the lower needle body of flexibility test rod runs through the 3rd pin hole and exposes, described sleeve height slightly larger than shrinkage pool and through-hole diameter and,
Described detent mechanism comprises center to be had in the lid of through hole and 2 keys be made up of rod and head, this through hole and is disposed with button lid, the second spring and for being pressed in the MEMS sensing chip back side and being positioned at the "T"-shaped push rod directly over chip groove from top to bottom, the rod of described 2 keys is installed on lid lower surface respectively, the head of key for embedding in the installation through hole of described left arc slot, right arc slot, thus realizes rod and moves in left arc slot, right arc slot.
In technique scheme, further improved plan is as follows:
1. in such scheme, the rod of described key embeds in the rod aperture of lid lower surface, and this lid side surface offers the threaded hole be communicated with rod aperture, and a threaded rod screws in threaded hole, for fastening described key.
2., in such scheme, the upper groove of described train wheel bridge is arranged with low groove is vertical in the horizontal direction.
3. in such scheme, the through hole upper diameter of described lid is greater than through hole lower diameter, and end plate and the push rod of described "T"-shaped push rod lay respectively at through hole upper and lower.
4. in such scheme, described supporting plate has a groove, and described chip slot is in this groove.
Because technique scheme is used, the present invention compared with prior art has following advantages and effect:
1. the present invention is used for the test macro of acceleration transducer, its detent mechanism comprises lid and 2 keys be made up of rod and head that center has through hole, button lid is disposed with from top to bottom in this through hole, second spring and for being pressed in the MEMS sensing chip back side and being positioned at the "T"-shaped push rod directly over chip groove, the rod of described 2 keys is installed on lid lower surface respectively, the head of key is for embedding described left arc slot, in the installation through hole of right arc slot, thus realize rod at left arc slot, mobile in right arc slot, knob lid regulates T-shaped push rod to withstand chip by the second spring to make the pin of chip just to the position of pin hole, every position of two pin hole grooves and the site error of chip pin are no more than 0.01MM, secondly, during operation, key need move along left and right arc slot, thus is conducive to the surface of contact adjusting MEMS chip and flexibility test rod.
2. the present invention is used for the test macro of acceleration transducer, its flexibility test rod embeds described " T " through hole, in through hole and the 3rd pin hole, this flexibility test rod comprises sleeve, be located at the upper pin in sleeve from top to bottom, first spring and the lower needle body contacted with PCB signal contact point, upper pin and lower needle body can move along in sleeve under external force, described first pin hole and the 3rd pinhole diameter are all less than through hole and shrinkage pool diameter, sleeve is seamlessly positioned at the shrinkage pool of train wheel bridge and the through hole of lower plate, the upper pin of flexibility test rod runs through the first pin hole successively, second pin hole exposed chip groove, the lower needle body of flexibility test rod runs through the 3rd pin hole and exposes, described sleeve height slightly larger than shrinkage pool and through-hole diameter and, sleeve is fixed in shrinkage pool and through hole, needle body is removable, also prevent the pin of damage chip, avoid the bending and distortion of flexibility test rod and through hole, and damage shrinkage pool and through hole.
Accompanying drawing explanation
Fig. 1 is the test system structure schematic diagram of the present invention for acceleration transducer;
Fig. 2 is detent mechanism structural representation of the present invention;
Fig. 3 is the test macro partial structurtes schematic diagram one of the present invention for acceleration transducer;
Fig. 4 is the test macro partial structurtes schematic diagram two of the present invention for acceleration transducer;
Fig. 5 is the test macro partial structurtes schematic diagram three of the present invention for acceleration transducer.
In above accompanying drawing: 1, train wheel bridge; 2, lower plate; 3, detent mechanism; 4, upper groove; 5, low groove; 6, left arc slot; 7, right arc slot; 81, through hole is installed; 82, through hole is installed; 9, " T " through hole; 91, the first pin hole; 92, shrinkage pool; 10, through hole; 11, chip groove; 111, the second pin hole; 12, supporting plate; 13, flexibility test rod; 131, sleeve; 132, upper pin; 133, the first spring; 134, lower needle body; 14, lid; 141, through hole; 142, rod aperture; 143, threaded hole; 15, key; 151, rod; 152, head; 16, button lid; 17, the second spring; 18, "T"-shaped push rod; 19, threaded rod; 20, PCB; 201, wire; 202, signal contact point; 203, signal output point; 21, host computer; 22, groove; 23, the 3rd pin hole.
Embodiment
Below in conjunction with embodiment, the invention will be further described:
Embodiment: a kind of test macro for acceleration transducer, comprise train wheel bridge 1, lower plate 2, detent mechanism 3, PCB 20 and host computer 21, the upper surface of described train wheel bridge 1 and lower surface have upper groove 4 and low groove 5, described lower plate 2 to embed in low groove 5 and is fixed in described PCB 20, in described PCB 20, some wires 201 one end of plating is signal contact point 202, and the dry root wire other end is signal output point 203; Host computer 21 for the electric signal analyzed is connected to the signal output point 203 of described PCB 20;
Train wheel bridge 1 is positioned at upper groove 4 both sides and is respectively equipped with left arc slot 6, right arc slot 7, and left arc slot 6 one end has installs through hole 81, and right arc slot 7 other end has another and installs through hole 82;
The upper groove 4 of described train wheel bridge 1 with offer several between low groove 5 successively and be communicated with " T " through hole 9 formed by the first pin hole 91 with shrinkage pool 92, lower plate 2 has the through hole 10 corresponding with " T " through hole 9 and the 3rd pin hole 23, the supporting plate 12 of the one chip groove 11 had for placing MEMS sensing chip embeds in described upper groove 4, is provided with several second pin holes 111 in this chip groove 11;
One flexibility test rod 13 embeds described " T " through hole 9, in through hole 10 and the 3rd pin hole 23, this flexibility test rod 13 comprises sleeve 131, be located at the upper pin 132 in sleeve 131 from top to bottom, first spring 133 and the lower needle body 134 contacted with PCB 20 signal contact point 202, upper pin 132 and lower needle body 134 under external force can along mobile in sleeve 131, described first pin hole 91 and the 3rd pin hole 23 diameter are all less than through hole 10 and shrinkage pool 92 diameter, sleeve 131 is seamlessly positioned at the shrinkage pool 92 of train wheel bridge 1 and the through hole 10 of lower plate 2, the upper pin 132 of flexibility test rod 13 runs through the first pin hole 91 successively, second pin hole 111 is exposed chip groove 11 also, the lower needle body 134 of flexibility test rod 13 runs through the 3rd pin hole 23 and exposes, described sleeve 131 height slightly larger than shrinkage pool 92 and through hole 10 diameter and,
Described detent mechanism 3 comprises lid 14 and 2 keys 15 be made up of rod 151 and head 152 that center has through hole 141, button lid 16 is disposed with from top to bottom in this through hole 141, second spring 17 and for being pressed in the MEMS sensing chip back side and being positioned at the "T"-shaped push rod 18 directly over chip groove 11, the rod 151 of described 2 keys 15 is installed on lid 14 lower surface respectively, the head 152 of key 15 is for embedding described left arc slot 6, the installation through hole 81 of right arc slot 7, in 82, thus realize rod 151 at left arc slot 6, mobile in right arc slot 7.
The rod 151 of above-mentioned key 15 embeds in the rod aperture 142 of lid 14 lower surface, and this lid 14 side surface offers threaded hole 143, threaded rod 19 be communicated with rod aperture 142 and screws in threaded hole 143, for fastening described key 15.
The upper groove 4 of above-mentioned train wheel bridge 1 is arranged with low groove 5 is vertical in the horizontal direction.
Through hole 141 upper diameter of above-mentioned lid 14 is greater than through hole 141 lower diameter, and end plate and the push rod of described "T"-shaped push rod 18 lay respectively at through hole 141 upper and lower.
Above-mentioned supporting plate 12 has a groove 22, and described chip groove 11 is positioned at this groove 22.
When adopting the above-mentioned test macro for acceleration transducer, its knob lid regulates T-shaped push rod to withstand chip by the second spring to make the pin of chip just to the position of pin hole, and every position of two pin hole grooves and the site error of chip pin are no more than 0.01MM; Secondly, during operation, key need move along left and right arc slot, thus is conducive to the surface of contact adjusting MEMS chip and flexibility test rod; Again, sleeve is fixed in shrinkage pool and through hole, and needle body is removable, also prevent the pin of damage chip, avoids the bending and distortion of flexibility test rod and through hole, and damages shrinkage pool and through hole.
Above-described embodiment, only for technical conceive of the present invention and feature are described, its object is to person skilled in the art can be understood content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences done according to Spirit Essence of the present invention change or modify, and all should be encompassed within protection scope of the present invention.

Claims (5)

1. the test macro for acceleration transducer, it is characterized in that: comprise train wheel bridge (1), lower plate (2), detent mechanism (3), PCB (20) and host computer (21), the upper surface of described train wheel bridge (1) and lower surface have upper groove (4) and low groove (5), described lower plate (2) to embed in low groove (5) and is fixed in described PCB (20), in described PCB (20), some wires (201) one end of plating is signal contact point (202), the some wire other ends are signal output point (203), host computer (21) for analyzing electric signal is connected to the signal output point (203) of described PCB (20),
Train wheel bridge (1) is positioned at upper groove (4) both sides and is respectively equipped with left arc slot (6), right arc slot (7), and left arc slot (6) one end has installs through hole (81), and right arc slot (7) other end has another and installs through hole (82);
The upper groove (4) of described train wheel bridge (1) with offer several between low groove (5) successively and be communicated with " T " through hole (9) formed by the first pin hole (91) with shrinkage pool (92), lower plate (2) has the through hole (10) corresponding with " T " through hole (9) and the 3rd pin hole (23), the supporting plate (12) of the one chip groove (11) had for placing MEMS sensing chip embeds in described upper groove (4), is provided with several second pin holes (111) in this chip groove (11);
One flexibility test rod (13) embeds described " T " through hole (9), in through hole (10) and the 3rd pin hole (23), this flexibility test rod (13) comprises sleeve (131), be located at the upper pin (132) in sleeve (131) from top to bottom, first spring (133) and the lower needle body (134) contacted with PCB (20) signal contact point (202), upper pin (132) and lower needle body (134) under external force can be mobile in sleeve (131), described first pin hole (91) and the 3rd pin hole (23) diameter are all less than through hole (10) and shrinkage pool (92) diameter, sleeve (131) is seamlessly positioned at the shrinkage pool (92) of train wheel bridge (1) and the through hole (10) of lower plate (2), the upper pin (132) of flexibility test rod (13) runs through the first pin hole (91) successively, second pin hole (111) exposed chip groove (11), the lower needle body (134) of flexibility test rod (13) runs through the 3rd pin hole (23) and exposes, described sleeve (131) height slightly larger than shrinkage pool (92) and through hole (10) diameter with,
Described detent mechanism (3) comprises lid (14) and 2 keys (15) be made up of rod (151) and head (152) that center has through hole (141), button lid (16) is disposed with from top to bottom in this through hole (141), second spring (17) and for being pressed in the MEMS sensing chip back side and being positioned at the "T"-shaped push rod (18) directly over chip groove (11), the rod (151) of described 2 keys (15) is installed on lid (14) lower surface respectively, the head (152) of key (15) is for embedding described left arc slot (6), the installation through hole (81 of right arc slot (7), 82) in, thus realize rod (151) in left arc slot (6), mobile in right arc slot (7).
2. the test macro for acceleration transducer according to claim 1, it is characterized in that: the rod (151) of described key (15) embeds in the rod aperture (142) of lid (14) lower surface, this lid (14) side surface offers the threaded hole (143) be communicated with rod aperture (142), one threaded rod (19) screws in threaded hole (143), for fastening described key (15).
3. the test macro for acceleration transducer according to claim 1, is characterized in that: the upper groove (4) of described train wheel bridge (1) is arranged with low groove (5) is vertical in the horizontal direction.
4. the test macro for acceleration transducer according to claim 1, it is characterized in that: through hole (141) upper diameter of described lid (14) is greater than through hole (141) lower diameter, end plate and the push rod of described "T"-shaped push rod (18) lay respectively at through hole (141) upper and lower.
5. the test macro for acceleration transducer according to claim 1, is characterized in that: described supporting plate (12) has a groove (22), and described chip groove (11) is positioned at this groove (22).
CN201310311229.2A 2013-07-23 2013-07-23 Test system for acceleration sensor Active CN103399176B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201510232189.1A CN104914374B (en) 2013-07-23 2013-07-23 Device for the detection of acceleration transducer electrical property
CN201510232767.1A CN104880658B (en) 2013-07-23 2013-07-23 Test device for acceleration transducer
CN201310311229.2A CN103399176B (en) 2013-07-23 2013-07-23 Test system for acceleration sensor

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CN201310311229.2A CN103399176B (en) 2013-07-23 2013-07-23 Test system for acceleration sensor

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CN201510232767.1A Division CN104880658B (en) 2013-07-23 2013-07-23 Test device for acceleration transducer
CN201510232189.1A Division CN104914374B (en) 2013-07-23 2013-07-23 Device for the detection of acceleration transducer electrical property

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CN103399176B true CN103399176B (en) 2015-07-01

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CN201510232189.1A Active CN104914374B (en) 2013-07-23 2013-07-23 Device for the detection of acceleration transducer electrical property
CN201310311229.2A Active CN103399176B (en) 2013-07-23 2013-07-23 Test system for acceleration sensor

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CN104880658B (en) * 2013-07-23 2018-09-07 苏州固锝电子股份有限公司 Test device for acceleration transducer
CN105675120A (en) * 2016-04-26 2016-06-15 中国电子科技集团公司第二十六研究所 Wafer frequency test device
CN106680546B (en) * 2017-02-22 2023-05-12 西安派瑞功率半导体变流技术股份有限公司 Self-adaptive power semiconductor chip test adapter
CN109917199B (en) * 2017-12-12 2022-03-15 致茂电子(苏州)有限公司 Modular pressure welding device and electronic component detection equipment with same
CN109187224A (en) * 2018-10-08 2019-01-11 北方电子研究院安徽有限公司 A kind of chip pin detection device
CN112595413B (en) * 2021-03-03 2021-10-08 山东新港电子科技有限公司 Detection tool for vibration sensor
TWI796167B (en) * 2022-03-16 2023-03-11 四方自動化機械股份有限公司 Precisely positionable test sockets

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Publication number Publication date
CN104914374A (en) 2015-09-16
CN104914374B (en) 2018-04-27
CN103399176A (en) 2013-11-20
CN104880658B (en) 2018-09-07
CN104880658A (en) 2015-09-02

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