CN103231418A - Method utilizing electrode-modularized atmospheric plasma to process silicon carbide sealing ring part - Google Patents
Method utilizing electrode-modularized atmospheric plasma to process silicon carbide sealing ring part Download PDFInfo
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- CN103231418A CN103231418A CN2013101770678A CN201310177067A CN103231418A CN 103231418 A CN103231418 A CN 103231418A CN 2013101770678 A CN2013101770678 A CN 2013101770678A CN 201310177067 A CN201310177067 A CN 201310177067A CN 103231418 A CN103231418 A CN 103231418A
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Abstract
A method utilizing electrode-modularized atmospheric plasma to process a silicon carbide sealing ring part belongs to the technical field of utilizing plasma to process the silicon carbide sealing ring part and aims at solving the problem of processing difficulty of the silicon carbide sealing ring part. The method comprises: firstly, arranging a plurality of mounting holes of a sheet electrode module on a disc-shaped electrode rack; secondly, mounting the silicon carbide sealing ring part to be processed on a ground electrode; thirdly, enabling the lower end surface of the sheet electrode module to be close to the surface of the silicon carbide sealing ring part to be processed; fourthly, preheating the silicon carbide sealing ring part to be heated; fifthly, inletting mixed gas and starting a radio-frequency power supply; sixthly, controlling the motion trail of the sheet electrode module; and lastly, taking out the silicon carbide sealing ring part to be processed. The method utilizing the electrode-modularized atmospheric plasma to process the silicon carbide sealing ring part can subject the surface of the silicon carbide sealing ring part with high surface requirements, huge processing difficulty and multiple processing procedures to a high-precision and high-efficiency process which includes uniform rough surface removal, then fine surface removal of local figuration, and finally microstructure etching.
Description
Technical field
The invention belongs to plasma process silicon carbide sealed ring class technical field of parts.
Background technology
Along with quick development of modern science and technology, in industrial circles such as nuclear industry, petroleum industry, chemical engineering industry, chemical fibre, chemical fertilizer, atomic energy, Aero-Space and machine-building, mechanical seal is had higher requirement.
The chemical resistance of carborundum (SiC) is good, intensity is high, hardness is high, and anti-wear performance is good, coefficient of friction is little, under strong, the high temperature of non-oxidizability good dimensional stability, low, the Heat stability is good of thermal coefficient of expansion is arranged.In addition, carbofrax material has moderate density, higher characteristics such as specific stiffness, better heat conductivity coefficient, resistance to sudden heating, anti-thermal shock, isotropic mechanical performance, high elastic modulus and long service life.Can be used for many complex working condition conditions such as radioactivity, corrosivity, severe toxicity, inflammable, explosive, high temperature, high-purity, ultra-clean.Thereby be the ideal material of making sealing ring.
But while carbofrax material hardness height, fragility is big, and the difficulty of processing on surface is big.With traditional processing method processing, process is quite consuming time and efficient is quite low, face type finishing difficulty, expense height; Crudy is uncontrollable in addition, and the crudy uniformity is poor; And precision is low, and tool wear is very fast, serious wear.This makes that the processing of silicon carbide sealed ring class part is very difficult.
In order to make sealing ring can play the better seal effect, the sealing ring surface need process micro-structural.In this case, during the fitting tight ring, the micro-structural that exists on the sealing ring surface can remedy the distortion that produces in the assembling process, thereby plays better sealing function.But this can increase the complexity of process algorithm and the complexity of control procedure, increases the requirement to process stability, makes difficulty of processing bigger.
Summary of the invention
The method that the purpose of this invention is to provide a kind of modularization electrode atmosphere plasma processing silicon carbide sealed ring class part is in order to solve the difficult processing problems of silicon carbide sealed ring class part.
Described purpose realizes by following scheme: the method for described a kind of modularization electrode atmosphere plasma processing silicon carbide sealed ring class part, and its step method is:
Step 1: the upper surface insulation of disc arc-spark stand is connected in the vertical motion work rotating shaft of gantry machining tool, the upper surface of disc arc-spark stand is provided with the installing hole of a plurality of thin slice shape electrode modules, when thin slice shape electrode module is installed in installing hole on the disc arc-spark stand, the diameter place straight line conllinear of thin slice shape electrode module and disc arc-spark stand is selected the number of thin slice shape electrode module according to the requirement of silicon carbide sealed ring class part micro-structural face type to be processed; Make every plate sheet shape electrode module all pass through the disc arc-spark stand and be connected the anode that discharges as atmosphere plasma with the output of radio-frequency power supply; Gas port, tracheae that a plurality of ventholes on the disc arc-spark stand all pass through disc arc-spark stand center are communicated with the air guide of hybrid plasma source of the gas, and the port of export of each venthole on the disc arc-spark stand is separately positioned near every plate sheet shape electrode module;
Step 2: silicon carbide sealed ring class part to be processed is installed on the ground electrode, and ground electrode is fixed on the workbench of gantry machining tool; With the negative electrode of ground electrode ground connection as the atmosphere plasma discharge; Gantry machining tool is arranged in the airtight work chamber;
Step 3: the revolution axial line of disc arc-spark stand overlaps with the axial line of silicon carbide sealed ring class part to be processed, the lower surface that makes every plate sheet shape electrode module is all near the work surface of silicon carbide sealed ring class part to be processed, and make and all keep certain discharging gap between them, the discharging gap scope is 1mm-5mm;
Step 4: the preheating radio-frequency power supply, be 5-10 minute preheating time; Open the hybrid plasma source of the gas then, the hybrid plasma source of the gas comprises reacting gas, atmosphere plasma excited gas and assist gas, the flow that makes the atmosphere plasma excited gas is 1 liter/minute ~ 40 liters/minute, and the flow-rate ratio of reacting gas and atmosphere plasma excited gas is 1:10 ~ 1:1000; Assist gas is 1:10 ~ 1:1 with the flow rate of reactive gas ratio;
Step 5: in the zone between the work surface of every plate sheet shape electrode module and silicon carbide sealed ring class part to be processed, be full of the atmosphere plasma excited gas, behind the mist of reacting gas and assist gas, start radio-frequency power supply, progressively increase the power of radio-frequency power supply, make power reach 100W-400W, the reflection power of controlling radio-frequency power supply simultaneously is zero, continual and steady feeding mist in the process of radio-frequency power supply work, make the region of discharge between the work surface of all thin slice shape electrode modules and silicon carbide sealed ring class part to be processed all produce stable plasma discharge, the rotating shaft that starts gantry machining tool is rotated, make the disc arc-spark stand do gyration, do gyration thereby drive all thin slice shape electrode module wraparounds commentaries on classics axial lines;
Step 6: according to the requirement of removal amount, control the movement locus of all thin slice shape electrode modules and at the residence time of piece surface, with the atmosphere plasma of above-mentioned generation piece surface is processed;
Step 7: after to be processed the finishing, close the power supply of radio-frequency power supply, close the hybrid plasma source of the gas, the rotating shaft that stops gantry machining tool is rotated, take out silicon carbide sealed ring class part to be processed, the degree of depth is removed in processing measured, to judge whether to reach processing request.
The present invention can carry out earlier high accuracy, the high efficiency processing of the little removal of big removal, local figuration then, last etching micro-structural uniformly than sealing lopps piece surface higher, that difficulty of processing is bigger, that need a plurality of operations just can finish processing to those surface requirements.
The present invention compared with prior art also has following advantage:
1. plasma electrode is simple in structure, and electrode is that common metal is made, and makes simply, and the atmosphere plasma process is very little to the damage of electrode, so the process stable and controllable, the crudy high conformity, and expense is low;
2. this method is utilized the finished surface of plasma electrode at micro-structure surface, calculates residence time, and only the gyration of a direction of needs just can realize the processing of micro-structural, and algorithm and numerical control process are simple;
3. the generation of plasma is to realize under open atmospheric conditions, has avoided employing vacuum reaction container, greatly reduces use cost.
Description of drawings
Fig. 1 is overall structure schematic diagram of the present invention;
Fig. 2 is disc arc-spark stand 1 among Fig. 1, thin slice shape electrode module 1-1 and silicon carbide sealed ring class part 4 relative position structural representations to be processed;
Fig. 3 is the plan structure schematic diagram of Fig. 2.
The specific embodiment
The specific embodiment one: in conjunction with Fig. 1, Fig. 2, shown in Figure 3, its step method is:
Step 1: the upper surface insulation of disc arc-spark stand 1 is connected on the vertical motion work rotating shaft 2-1 of gantry machining tool 2, the upper surface of disc arc-spark stand 1 is provided with the installing hole 1-4 of a plurality of thin slice shape electrode module 1-1, when thin slice shape electrode module 1-1 is installed in installing hole 1-4 on the disc arc-spark stand 1, the diameter place straight line conllinear of thin slice shape electrode module 1-1 and disc arc-spark stand 1 is selected the number of thin slice shape electrode module 1-1 according to the requirement of silicon carbide sealed ring class part 4 micro-structural face types to be processed; Make every plate sheet shape electrode module 1-1 all pass through disc arc-spark stand 1 and be connected the anode that discharges as atmosphere plasma with the output of radio-frequency power supply 3; Gas port 1-3, tracheae 6-1 that a plurality of venthole 1-2 on the disc arc-spark stand 1 pass through disc arc-spark stand 1 center are communicated with 6 air guides of hybrid plasma source of the gas, and the port of export of each the venthole 1-2 on the disc arc-spark stand 1 is separately positioned near every plate sheet shape electrode module 1-1;
Step 2: silicon carbide sealed ring class part 4 to be processed is installed on the ground electrode 2-3, and ground electrode 2-3 is fixed on the workbench 2-2 of gantry machining tool 2; With the negative electrode of ground electrode 2-3 ground connection as the atmosphere plasma discharge; Gantry machining tool 2 is arranged in the airtight work chamber 5;
Step 3: the revolution axial line of disc arc-spark stand 1 overlaps with the axial line of silicon carbide sealed ring class part 4 to be processed, the lower surface that makes every plate sheet shape electrode module 1-1 is all near the work surface of silicon carbide sealed ring class part 4 to be processed, and make and all keep certain discharging gap between them, the discharging gap scope is 1mm-5mm;
Step 4: preheating radio-frequency power supply 3, be 5-10 minute preheating time; Open hybrid plasma source of the gas 6 then, hybrid plasma source of the gas 6 comprises reacting gas, atmosphere plasma excited gas and assist gas, the flow that makes the atmosphere plasma excited gas is 1 liter/minute ~ 40 liters/minute, and the flow-rate ratio of reacting gas and atmosphere plasma excited gas is 1:10 ~ 1:1000; Assist gas is 1:10 ~ 1:1 with the flow rate of reactive gas ratio;
Step 5: in the zone between the work surface of every plate sheet shape electrode module 1-1 and silicon carbide sealed ring class part 4 to be processed, be full of the atmosphere plasma excited gas, behind the mist of reacting gas and assist gas, start radio-frequency power supply 3, progressively increase the power of radio-frequency power supply 3, make power reach 100W-400W, the reflection power of controlling radio-frequency power supply 3 simultaneously is zero, continual and steady feeding mist in the process of radio-frequency power supply 3 work, make the region of discharge between the work surface of all thin slice shape electrode module 1-1 and silicon carbide sealed ring class part 4 to be processed all produce stable plasma discharge, the rotating shaft 2-1 that starts gantry machining tool 2 rotates, make disc arc-spark stand 1 do gyration, do gyration thereby drive all thin slice shape electrode module 1-1 wraparounds commentaries on classics axial lines;
Step 6: according to the requirement of removal amount, control the movement locus of all thin slice shape electrode module 1-1 and at the residence time of piece surface, with the atmosphere plasma of above-mentioned generation piece surface is processed;
Step 7: after to be processed the finishing, close the power supply of radio-frequency power supply 3, close hybrid plasma source of the gas 6, the rotating shaft 2-1 that stops gantry machining tool 2 rotates, take out silicon carbide sealed ring class part 4 to be processed, the degree of depth is removed in processing measured, to judge whether to reach processing request.
The material of described thin slice shape electrode module 1-1 is aluminium.The following finished surface of described thin slice shape electrode module 1-1 can be designed to plane, interior inclined ladder shape or outer inclined ladder shape.
Described gantry machining tool 2 is planer-type milling machine or metal-planing machine.
The frequency of described radio-frequency power supply 3 is 13.56MHz or 27.12MHz, and peak power is 2KW.
Described hybrid plasma source of the gas 6 is the ternary gas hybrid system, and gas supply flow is 1-100L/min.
Atmosphere plasma excited gas in the described hybrid plasma source of the gas 6 is helium or argon gas; Reacting gas is sulfur hexafluoride, carbon tetrafluoride or Nitrogen trifluoride; Assist gas is oxygen, hydrogen or nitrogen.
Operation principle: connect thin slice shape electrode module 1-1 as the anode of atmosphere plasma discharge by radio-frequency power supply 3 outputs, part ground electrode ground connection is as the ground electrode of atmosphere plasma discharge, the gas that produces plasma by being excited of providing of hybrid plasma source of the gas 6 is full of the gap between thin slice shape electrode module 1-1 and the part, provide the output electric energy by radio-frequency power supply 3, discharging gap at thin slice shape electrode module 1-1 and silicon carbide sealed ring class part 4 to be processed produces plasma, reacting gas is excited simultaneously, generation has the atom of reactivity and chemical reaction takes place on the surface of silicon carbide sealed ring class part 4 to be processed, the thin slice shape electrode band that generates volatile product and be rotated is realized the not damaged rapid processing to silicon carbide sealed ring class part thus from piece surface.
Carbon tetrafluoride is under the effect of plasma, ionization takes place, produce the active F atom of excitation state, the sealing ring parts generation chemical reaction of the active F atom of excitation state and carbofrax material, generate volatile products, can very successfully volatilize from piece surface, thereby the atom level that realizes material is removed, final generation super-smooth surface, and can not produce new damage layer at piece surface;
The design principle of described thin slice shape electrode module 1-1: the length range of plasma electrode is that 2 mm are optional to 100 mm according to the inside and outside semidiameter of silicon carbide sealed ring class part 4 to be processed.The plasma electrode width range is determined by the wavelength of micro-structural to be processed, since electrode width be about unit remove function halfwidth 1/2nd, and for the accuracy that guarantees to process, require unit to remove the halfwidth of function less than 1/5th of wavelength to be processed, therefore the width range of electrode requires less than 1/10th of the inner ring wavelength to be processed of silicon carbide sealed ring class part 4 to be processed, and suggested range is that 0.5mm is to 2mm.
Claims (3)
1. the method for modularization electrode atmosphere plasma processing silicon carbide sealed ring class part is characterized in that comprising the steps:
Step 1: the upper surface insulation of disc arc-spark stand (1) is connected in the vertical motion work rotating shaft (2-1) of gantry machining tool (2), the upper surface of disc arc-spark stand (1) is provided with the installing hole (1-4) of a plurality of thin slice shape electrode modules (1-1), when thin slice shape electrode module (1-1) is installed in installing hole (1-4) on the disc arc-spark stand (1), the diameter place straight line conllinear of thin slice shape electrode module (1-1) and disc arc-spark stand (1) is selected the number of thin slice shape electrode module (1-1) according to the requirement of silicon carbide sealed ring class part to be processed (4) micro-structural face type; Make every plate sheet shape electrode module (1-1) all pass through disc arc-spark stand (1) and be connected the anode that discharges as atmosphere plasma with the output of radio-frequency power supply (3); Gas port (1-3), tracheae (6-1) that a plurality of ventholes (1-2) on the disc arc-spark stand (1) all pass through disc arc-spark stand (1) center are communicated with hybrid plasma source of the gas (6) air guide, and the port of export of each venthole (1-2) on the disc arc-spark stand (1) is separately positioned near every plate sheet shape electrode module (1-1);
Step 2: silicon carbide sealed ring class part to be processed (4) is installed on the ground electrode (2-3), and ground electrode (2-3) is fixed on the workbench (2-2) of gantry machining tool (2); With the negative electrode of ground electrode (2-3) ground connection as the atmosphere plasma discharge; Gantry machining tool (2) is arranged in the airtight work chamber (5);
Step 3: the revolution axial line of disc arc-spark stand (1) overlaps with the axial line of silicon carbide sealed ring class part to be processed (4), the lower surface that makes every plate sheet shape electrode module (1-1) is all near the work surface of silicon carbide sealed ring class part to be processed (4), and make and all keep certain discharging gap between them, the discharging gap scope is 1mm-5mm;
Step 4: preheating radio-frequency power supply (3), be 5-10 minute preheating time; Open hybrid plasma source of the gas (6) then, hybrid plasma source of the gas (6) comprises reacting gas, atmosphere plasma excited gas and assist gas, the flow that makes the atmosphere plasma excited gas is 1 liter/minute ~ 40 liters/minute, and the flow-rate ratio of reacting gas and atmosphere plasma excited gas is 1:10 ~ 1:1000; Assist gas is 1:10 ~ 1:1 with the flow rate of reactive gas ratio;
Step 5: in the zone between the work surface of every plate sheet shape electrode module (1-1) and silicon carbide sealed ring class part to be processed (4), be full of the atmosphere plasma excited gas, behind the mist of reacting gas and assist gas, start radio-frequency power supply (3), progressively increase the power of radio-frequency power supply (3), make power reach 100W-400W, the reflection power of controlling radio-frequency power supply (3) simultaneously is zero, continual and steady feeding mist in the process of radio-frequency power supply (3) work, make the region of discharge between the work surface of all thin slice shape electrode modules (1-1) and silicon carbide sealed ring class part to be processed (4) all produce stable plasma discharge, the rotating shaft (2-1) that starts gantry machining tool (2) is rotated, make disc arc-spark stand (1) do gyration, do gyration thereby drive all thin slice shape electrode module (1-1) wraparounds commentaries on classics axial lines;
Step 6: according to the requirement of removal amount, control the movement locus of all thin slice shape electrode modules (1-1) and at the residence time of piece surface, with the atmosphere plasma of above-mentioned generation piece surface is processed;
Step 7: after to be processed the finishing, close the power supply of radio-frequency power supply (3), close hybrid plasma source of the gas (6), the rotating shaft (2-1) that stops gantry machining tool (2) is rotated, take out silicon carbide sealed ring class part to be processed (4), the degree of depth is removed in processing measured, to judge whether to reach processing request.
2. modularization electrode atmosphere plasma according to claim 1 is processed the method for silicon carbide sealed ring class part, and the material that it is characterized in that described thin slice shape electrode module (1-1) is aluminium.
3. the method for modularization electrode atmosphere plasma processing silicon carbide sealed ring class part according to claim 1 is characterized in that the atmosphere plasma excited gas in the described hybrid plasma source of the gas (6) is helium or argon gas; Reacting gas is sulfur hexafluoride, carbon tetrafluoride or Nitrogen trifluoride; Assist gas is oxygen, hydrogen or nitrogen.
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2013
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52115488A (en) * | 1976-03-25 | 1977-09-28 | Mitsubishi Heavy Ind Ltd | Plasma cutting process |
| JPH10337699A (en) * | 1997-06-04 | 1998-12-22 | Canon Inc | Drilling work method of wiring board |
| US20040159287A1 (en) * | 2000-03-17 | 2004-08-19 | Applied Materials, Inc. | Plasma reactor with overhead RF source power electrode having a resonance that is virtually pressure independent |
| CN101579821A (en) * | 2009-03-24 | 2009-11-18 | 大连机床集团有限责任公司 | Exchangeable workbench structure for large-sized gantry machine |
| CN101596641A (en) * | 2009-06-30 | 2009-12-09 | 哈尔滨工业大学 | The method of chemical finishing of surface defect of diamond cutter by atmosphere low-temperature plasma |
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| CN102744652A (en) * | 2012-07-19 | 2012-10-24 | 哈尔滨工业大学 | Device and method for machining large-area plane optical element |
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