CN103219270A - Robot positioning means - Google Patents

Robot positioning means Download PDF

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Publication number
CN103219270A
CN103219270A CN 201310088631 CN201310088631A CN103219270A CN 103219270 A CN103219270 A CN 103219270A CN 201310088631 CN201310088631 CN 201310088631 CN 201310088631 A CN201310088631 A CN 201310088631A CN 103219270 A CN103219270 A CN 103219270A
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CN
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Prior art keywords
block body
hole
positioning
centering block
observing
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CN 201310088631
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Chinese (zh)
Inventor
姜葳
廉杰
芦佳
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沈阳拓荆科技有限公司
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Abstract

The invention discloses a mechanical arm positioning device and mainly solves the problems that an existing plasma reinforced chemical vapor deposition device is not high in positioning accuracy and low in efficiency. The mechanical arm positioning device comprises a centering block body, wherein flanges are arranged on three of four sides of the centering block body, a processing hole is formed in the centering block body, and an observing hole is formed in the processing hole. The processing hole is of a rectangle shape, and the observing hole is of a circular shape. When the mechanical arm positioning device is used, at the moment the three flanges of the centering block body is aligned at fingers of a vacuum mechanical arm, the center of the observing hole is the center when a wafer is placed on the fingers. When positioning is carried out, the observing hole of the centering block body is made to be concentric with a circular ring on an EFEM finger and a circular hole on a heating disc positioning tool respectively, and then the positioning is finished. The mechanical arm positioning device has the advantages that no wafer is needed for auxiliary positioning, and efficiency is improved; only one position is needed to be watched, and due to the fact that the observing hole of the centering block body is small, convenience is brought for observing, and accuracy is improved.

Description

机械手定位装置技术领域[0001] 本发明涉及一种机械手定位装置,主要应用于等离子体增强化学气象沉积设备中,用于完成真空机械手在反应腔和加热盘的定位,或在过渡腔和设备前端模块机械手的定位。 TECHNICAL FIELD The robot positioning [0001] The present invention relates to a manipulator positioning means is mainly used in a plasma enhanced chemical vapor deposition apparatus for performing a vacuum robot positioned in the reaction chamber and the heating pan, or a transition chamber and the front end of the device positioning module robot. 属于半导体薄膜沉积应用及制备技术领域。 Belonging to the technical field of semiconductor deposition applications and film was prepared. 背景技术[0002] 在12寸转8寸的PECVD (等离子体增强化学气象沉积)设备中,EFEM机械手的手指是经处理的一头为圆角的平板,该平板在和真空机械手手指交接时,为了避免干涉,真空机械手手指需要做成叉形的。 [0002] In the 12-inch transfer 8-inch PECVD (Plasma Enhanced Chemical Vapor Deposition) apparatus, the EFEM robot finger is a rounded flat plate processed, the plate when the vacuum robot finger transfer, for avoid interference, vacuum robot finger needs to make fork. 在进行定位时,传统方法是在EFEM的手指上放一片晶圆,伸入LoadLock真空机械手的上方,目视晶圆与下面手指四周的距离大致相等时,定位完成。 During positioning, the conventional method is to put a wafer in the EFEM finger, projects into the upper vacuum robot LoadLock visually when the wafer is substantially equal distances below and around the finger, the positioning is completed. 真空机械手与加热盘定位时,在真空机械手上放一片晶圆,手指伸入加热盘上方,使晶圆与加热盘同心时,定位完成。 When the robot vacuum heating coil is positioned in a vacuum robot arm to put a wafer fingers into the top of the heating plate, heating plate concentric with the wafer, positioning is completed. 由于晶圆尺寸较大,两种定位方法都需要反复观察晶圆四周的位置,由于观察角度不同等原因,而造成定位误差较大,其工作效率也不高。 Due to the large wafer size, both targeting methods require repeated around the observation position of the wafer, since the angle of viewing and other reasons, caused by the positioning error is large, its working efficiency is not high. 发明内容[0003] 本发明以解决上述问题为目的,主要解决现有等离子体增强化学气象沉积设备定位精度不高,效率低下的问题。 [0003] In the present invention, for the purpose of solving the above problems, mainly to solve the conventional plasma enhanced chemical vapor deposition apparatus positioning accuracy is not high, the problem of low efficiency. [0004] 为实现上述目的,本发明采用下述技术方案:机械手定位装置,该装置包括对中块主体(I),对中块主体(I)的四个边中有三条边制有挡边,[0005] 上述对中块主体(I)上制有工艺孔(3),在工艺孔(3)间制有观察孔(4)。 [0004] To achieve the above object, the present invention adopts the following technical solution: a robot positioning means, the apparatus comprising a pair of body blocks (I), (I) on the four sides of the block body has three sides formed with ribs , [0005] the observation hole of the upper block body (I) formed with holes process (3), formed with a hole in the inter-process (3) (4). [0006] 上述工艺孔(3)为长方形;上述观察孔(4)为圆形。 [0006] The process orifice (3) is rectangular; the observation hole (4) is circular. [0007] 上述对中块主体(I)的四个边中的挡边,其相对的两个短边上制有长挡边(2),在另外的一条长边上制有短挡边(11)。 [0007] The four sides of the block body (I) in the wall, the two opposite shorter sides formed with a long flange (2), in another one of the long sides is formed with short ribs ( 11). [0008] 上述对中块主体(I)上的观察孔(4)设在两个工艺孔(3)中间的位置。 [0008] The observation hole (4) on the body block (I) is provided in the middle of the process two holes (3) position. [0009] 上述对中块主体上的观察孔的位置是经过精心设计的,当对中块主体的三个挡边与真空机械手手指对齐时,观察孔的圆心也就是手指上放晶圆时的圆心。 [0009] the position of the observation holes in the block body is carefully designed, when the three ribs of the block body is aligned with the vacuum robot fingers, i.e. the center of the peephole put the finger on the wafer center. 在定位时,使对中块的观察孔分别与EFEM手指上的圆环,加热盘定位工装上的圆孔同心,则定位完成。 When positioning the viewing aperture of the block respectively the EFEM ring finger, the circular heating plate positioned concentrically tooling, the positioning is completed. [0010] 本发明的有益效果是:1、不需要准备晶圆来辅助定位。 [0010] Advantageous effects of the present invention are: 1, no need to prepare the wafer to assist in positioning. 2、效率提高,只需要观察一个位置。 2, efficiency, you need only observe a position. 3、由于对中块观察孔小,便于观察,精度提高。 3, since the viewing aperture of the small block, to facilitate observation accuracy. 附图说明[0011] 图1是本发明的结构示意图。 BRIEF DESCRIPTION [0011] FIG. 1 is a structural diagram of the present invention. [0012] 图2是图1的后视图。 [0012] FIG. 2 is a rear view of FIG. [0013] 图3是EFEM机械手的手指结构示意图。 [0013] FIG. 3 is a schematic structural EFEM robot finger. [0014] 图4是真空机械手手指与EFEM手指定位示意图。 [0014] FIG. 4 is a vacuum robot fingers and finger positioning EFEM FIG. [0015] 图5是真空机械手手指与EFEM手指定位俯视图[0016] 图6是真空机械手手指与加热盘定位示意图。 [0015] FIG. 5 is a vacuum robot fingers and the finger positioning EFEM plan view [0016] FIG. 6 is a vacuum robot fingers and the heating plate positioned FIG. [0017] 图7是真空机械手手指与加热盘定位俯视图具体实施方式[0018] 实施例:[0019] 由图1、图2可见,机械手定位装置,该装置包括对中块主体I,对中块主体I的四个边中有三条边制有挡边,上述对中块主体I上制有工艺孔3,在工艺孔3间制有观察孔4。 [0017] FIG. 7 is a vacuum robot fingers and the heating plate positioned plan view DETAILED DESCRIPTION [0018] Example: [0019], FIG. 2 seen from Figure 1, robot positioning means, the apparatus comprising block body I, to block four sides of the body I of the wall has three sides formed with the hole 3 have the braking process on the I block body, an observation hole 4 made in the process of the hole 3. [0020] 上述工艺孔3为长方形;上述观察孔4为圆形。 [0020] The process is rectangular aperture 3; the observation hole 4 is circular. [0021] 上述对中块主体I的四个边中的挡边,其相对的两个短边上制有长挡边2,在另外的一条长边上制有短挡边11。 [0021] The four sides of the block body I in the wall, two opposite short sides of flange 2 is formed with long, in other long side is formed with a short rib 11. [0022] 上述对中块主体I上的观察孔4设在两个工艺孔3中间的位置。 [0022] the position of the observation holes in the block body 3 I 4 provided in the middle of two holes process. [0023] 所述长挡边2和短挡边11的作用是和真空机械手手指7对齐;工艺孔3的作用减轻结构重量,减少真空机械手手指7的变形;观察孔4的作用是观察、定位。 [0023] The effect of the long and short ribs 2 and the flange 11 are aligned with the fingers vacuum robot 7; effect process reduce the structural weight of the hole 3, the deformation reducing vacuum robot fingers 7; role is to observe the observation hole 4, the positioning . [0024] 由图3、图4可见,真空机械手与EFEM手指定位时,将对中块主体I放在真空机械手手指7上并对齐。 [0024], FIG. 4 seen from Figure 3, the vacuum robot finger positioning and EFEM, I will block the body 7 is placed on and aligned vacuum robot fingers. EFEM手指5从对中块的下方伸入。 5 EFEM finger extending into the block from underneath on. [0025] 由图5可见,对中块主体I上的观察孔4与下方EFEM手指5的圆环6同心时,定位完成。 [0025] seen from Figure 5, when the ring 46 is concentric viewing aperture 5 of the block body below the finger I and EFEM, positioning completion. [0026] 由图6可见,真空机械手与加热盘定位时,将加热盘定位工装8放在加热盘10上并对齐。 [0026] seen in Figure 6, the vacuum robot positioned with the heating plate, the heating coil 8 positioned on the fixture 10 and aligned on the heating pan. 对中块主体I放在真空机械手手指7上并对齐。 In block I on the body of the robot in vacuo and the fingers 7 aligned. 真空机械手手指7伸入加热盘定位工装8和加热盘10之间的空隙。 Vacuum robot finger 7 extends into the gap between the heating coil 8 is positioned tooling plate 10 and the heating. [0027] 由图7可见,加热盘定位工装8的圆孔9与下方对中块主体I的观察孔4同心时,定位完成。 [0027] When seen from Figure 7, the heating plate 9 is positioned with tooling circular aperture 8 in the lower block body of the viewing aperture 4 I of concentric, positioning completion.

Claims (4)

  1. 1.一种机械手定位装置,其特征在于:该装置包括对中块主体(1),对中块主体(I)的四个边中有三条边制有挡边,上述对中块主体(I)上制有工艺孔(3),在工艺孔(3)间制有观察孔(4)。 1. A manipulator positioning device, characterized in that: the apparatus includes a pair of block body (1), of the block body (I) of the four sides has three sides formed with ribs, for the above-described block body (I the system) with a process orifice (3), the hole made in the process of an observation hole (4) between (3).
  2. 2.如权利要求1所述的机械手定位装置,其特征在于:上述工艺孔(3)为长方形;上述观察孔(4)为圆形。 2. The manipulator positioning apparatus according to claim 1, wherein: the above-described process orifice (3) is rectangular; the observation hole (4) is circular.
  3. 3.如权利要求1所述的机械手定位装置,其特征在于:所述对中块主体(I)的四个边中的挡边,其相对的两个短边上制有长挡边(2 ),在另外的一条长边上制有短挡边(11)。 3. The manipulator positioning apparatus according to claim 1, wherein: the four sides of the block body (I) in the wall, two opposite short sides thereof made of long ribs (2 ), in other long side is formed with a short rib (11).
  4. 4.如权利要求1所述的机械手定位装置,其特征在于:所述对中块主体(I)上的观察孔(4)设在两个工艺孔(3)中间的位置。 4. The manipulator positioning apparatus according to claim 1, wherein: said viewing aperture of the block body (I) (4) provided in the process two holes (3) in an intermediate position.
CN 201310088631 2013-03-19 2013-03-19 Robot positioning means CN103219270A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000353475A (en) * 1999-06-10 2000-12-19 Hitachi Chiba Electronics Kk Shadow mask assembly
US6746196B1 (en) * 1999-01-12 2004-06-08 Tokyo Electron Limited Vacuum treatment device
CN101542711A (en) * 2007-02-13 2009-09-23 东京毅力科创株式会社 Substrate position detecting apparatus and method for adjusting position of imaging component of the substrate position detecting apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6746196B1 (en) * 1999-01-12 2004-06-08 Tokyo Electron Limited Vacuum treatment device
JP2000353475A (en) * 1999-06-10 2000-12-19 Hitachi Chiba Electronics Kk Shadow mask assembly
CN101542711A (en) * 2007-02-13 2009-09-23 东京毅力科创株式会社 Substrate position detecting apparatus and method for adjusting position of imaging component of the substrate position detecting apparatus

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