CN103203548A - Measuring and welding device in metal mask assembling machine and moving mechanism thereof - Google Patents

Measuring and welding device in metal mask assembling machine and moving mechanism thereof Download PDF

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Publication number
CN103203548A
CN103203548A CN2012100068518A CN201210006851A CN103203548A CN 103203548 A CN103203548 A CN 103203548A CN 2012100068518 A CN2012100068518 A CN 2012100068518A CN 201210006851 A CN201210006851 A CN 201210006851A CN 103203548 A CN103203548 A CN 103203548A
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China
Prior art keywords
motion
principal axis
welder
metal mask
mask plate
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CN2012100068518A
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Chinese (zh)
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CN103203548B (en
Inventor
魏志凌
高小平
潘世弥
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Kunshan Power Stencil Co Ltd
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Kunshan Power Stencil Co Ltd
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Abstract

The invention relates to a measuring and welding device in a metal mask assembling machine and a moving mechanism thereof. The measuring and welding device comprises a pluralistic integration device, wherein the pluralistic integration device consists of a measuring unit and a welding unit; the moving mechanism comprises an x-axis moving mechanism, a y-axis moving mechanism, z-axis moving mechanism, a control mechanism and a drag chain mechanism; and the measuring and welding device can move freely in a certain space by using the moving mechanisms along x, y and z directions in a matching way. According to the measuring and welding device, template quality detection and template fixing at the later stage of an OLED (Organic Light Emitting Diode) mask are integrated into an integral mechanism, so that space occupation of a station is saved, the operation complexity is lowered, labor cost is saved, and the production period of the OLED mask is shortened.

Description

Measure welder and motion thereof in the metal mask plate kludge
Technical field
The present invention relates to a kind of mechanical device, be specifically related to measure in a kind of metal mask plate kludge welder and motion thereof.
Background technology
Characteristics such as self-luminous, the ultralight of OLED is thin, response speed is fast, wide visual angle, low-power consumption make the mobile phone that carries the OLED screen make us pursuing.At present, OLED has tentatively established the status as third generation display leading nucleus, and along with the maturation of technology and the breakthrough of large scale batch production technique, the OLED product will be to more large scale extension.
The vacuum mask evaporation is the main method of preparation OLED luminescent layer, and the used material of OLED mask is the extremely low invar of thermal coefficient of expansion (Invar) alloy, and the thickness of mask has only 40 μ m usually, has millions of small rectangular pixels.Because it is use the color OLED of three-color light-emitting material in manufacture process, to need successively to use several masks, thereby very high to the required precision of mask.Therefore, each link in the making of OLED mask plate is very crucial, wherein the mask plate of making is carried out the detection of positional precision, openings of sizes and mask plate is fixed on the later stage work of making as the OLED mask plate on the screen frame, it is the decisive link of the quality quality of final OLED mask plate.
Because of the development of OLED industry still in the elementary step, in it produces each link of chain, have the improved place of various urgent need, wherein the Quality Detection of OLED mask plate and fixing operation step are numerous and diverse, have a strong impact on production efficiency.Therefore industry is being sought a kind of manipulating approach that Quality Detection and the fixing operation of OLED mask plate can be fused to together and can realize automation always.
Summary of the invention
The purpose of this invention is to provide a kind of motion of measuring welder, Quality Detection and the fixing operation step that can solve OLED mask plate in the prior art are numerous and diverse, have a strong impact on the problem of production efficiency, the present invention can realize the polynary integration that Quality Detection and mask plate are fixed.
At above problem, the present invention proposes following scheme:
A kind of motion of the measurement welder for the metal mask plate kludge, measure welder and comprise polynary integrating apparatus, described polynary integrating apparatus is made of measuring unit and welding unit, measuring welder is fixed on the motion, adjust the position of measuring welder by the motion of motion, it is characterized in that, motion comprises x direction of principal axis motion, y direction of principal axis motion and z direction of principal axis motion, described measurement welder can pass through described x, y, motion is used freely-movable in certain space on three directions of z.
Preferably, described x, y, z direction of principal axis are vertical mutually in twos.
Preferably, described x direction of principal axis motion is made of an axial fixed cross beam of x and a slide block that moves at crossbeam.
Preferably, described y direction of principal axis motion is made of the track on the y direction of principal axis and supporting mechanism, and supporting mechanism supports described metal mask plate base station, and it is matched with track.
Preferably, described z direction of principal axis motion is made of the slide block that constitutes described x direction of principal axis motion and measurement welder module.
Preferably, also comprise controlling organization and towing chain mechanism, described controlling organization moves lead and connects the wire rod of integrating apparatus, and described lead and described wire rod are combined by towing chain mechanism, is beneficial to the cabling of telecontrol equipment and polynary integrating apparatus.
Measurement welder in a kind of metal mask plate kludge is characterized in that, comprises the motion of claim 1 to the claim 5.
The later stage template quality that the present invention makes the OLED mask plate detects and template fixedly is incorporated into integral mechanism, can save the occupy-place of board space greatly, and has reduced the loaded down with trivial details property of operating, artificial cost and the production cycle of OLED mask plate; And this motion provides a kind of feasible motion mode for integrating later polynary integrating apparatus, can satisfy the multiple function application demand of polynary integrating apparatus.
Description of drawings
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail.
Fig. 1 is the overall schematic of metal mask plate kludge involved in the present invention;
Fig. 2 is I part enlarged diagram among Fig. 1;
Fig. 3 A is the schematic diagram of observing the metal mask plate kludge along the y direction of principal axis;
Fig. 3 B is the structural representation of y direction of principal axis motion.
Wherein: a is slide block; A1 is rail mechanism; A2 is linear electric machine; B is fixed cross beam; C is frame; C1 is guide rail; D is towing chain mechanism; 1 is metal mask plate; 20 for measuring welder; 21 is metal mask plate precision measure subelement; 22 is metal mask plate surface shape measurement subelement; 23 are welding stator unit; 31 are the moving track of Y-axis; 32 is y direction of principal axis motion; 321 is the track on the Y direction; 322 is supporting mechanism; 4 is metal mask plate; 5 are the net mechanism of stretching tight.
The specific embodiment
Embodiment
Figure 1 shows that the overall structure schematic diagram of metal mask plate kludge, motion wherein, it comprises: x direction of principal axis motion, y direction of principal axis motion and z direction of principal axis motion.Described measurement welder can be by the freely-movable in certain space that is used of motion on described x, y, three directions of z.
Shown in Fig. 1 reference axis, x, y, z direction of principal axis are vertical mutually, and it is not defined as a certain concrete direction in the space, but comparatively speaking, x, y direction of principal axis are the orthogonal both direction of horizontal direction, and the z direction of principal axis is vertical direction; The direction of motion of x direction of principal axis motion, y direction of principal axis motion and z direction of principal axis motion that institute metal mask plate kludge is measured the welder motion is consistent with x, y, z direction of principal axis respectively.
Fig. 2 is I part enlarged diagram among Fig. 1, and it is depicted as a kind of fit system schematic diagram of x axle and z shaft movement mechanism.Described x direction of principal axis motion can constitute at the slide block a that crossbeam b moves by an axial fixed cross beam b of x and with one, and fixed cross beam b is fixed on the frame c shown in Figure 1; Described z direction of principal axis motion is made of the slide block a that constitutes described x direction of principal axis motion and measurement welder 20.Described measurement welder 20 is made of surface shape measurement unit 21, precision measure unit 22 and welding fixed cell 23, described surface shape measurement unit 21 can be contactless laser elevation sensor, also can be the various mechanisms that can be suitable for measuring face shape such as amesdial of contact, described precision measure unit 22 can be the components and parts that CCD camera etc. can truly reflect key element precision such as object being measured opening, and the components and parts of described formation welding fixed cell 23 can be the mechanisms that laser-welding machine etc. can weld together two objects.
Fig. 3 A is depicted as the schematic diagram of observing the metal mask plate kludge along the y direction of principal axis, Fig. 3 B is depicted as the structural representation of y direction of principal axis motion 32, described y direction of principal axis motion is by the track 321 on the y direction of principal axis and supporting mechanism 322, and supporting mechanism 322 supports described metal mask plate base station and matches with track.Needs according to practical application can design many y direction of principal axis tracks that are parallel to each other, as comprising two y axles moving track, i.e. 31 parts shown in Figure 3 and 32 parts among Fig. 3 A.
Further, described x, y, z direction motion in the present embodiment, are all controlled the motion of the motion bit in-migration realization motion of linear electric machine accurately by driven by motor by control system.As measuring welder 20 among Fig. 2 by the motion of control linear electric machine a2, it can move on rail mechanism a1, namely can regulate and measure welder 20 at the axial moving displacement of z, thus the spacing of control survey welder 20 and the metal mask plate 4 that draws of being stretched tight by the net mechanism 5 of stretching tight.Move by the motion cooperation of three-dimensional spatially, can be comprehensive adjustment measure the relative position of welder and the metal mask plate 4 that draws of being stretched tight by the net mechanism 5 of stretching tight, thereby satisfy the various demands in the practical operation.
Further, as shown in Figure 1, described controlling organization moves lead and connects the wire rod of integrating apparatus, described lead and described wire rod are combined by towing chain mechanism d, be beneficial to the cabling of motion and polynary integrating apparatus, be used for putting the lead of controlled motion mechanism kinematic and the wire rod of controlling other mechanism's work in order standardization, thereby too much wire rod can not influence the board normal operation during work of assurance.
Above embodiment purpose is to illustrate the present invention, and unrestricted protection scope of the present invention, drops in protection scope of the present invention but replace relating among the embodiment cellular construction by the cellular construction of other equivalent action.

Claims (7)

1. motion that is used for the measurement welder of metal mask plate kludge, measure welder and comprise polynary integrating apparatus, described polynary integrating apparatus is made of measuring unit and welding unit, measuring welder is fixed on the motion, adjust the position of measuring welder by the motion of motion, it is characterized in that, motion comprises x direction of principal axis motion, y direction of principal axis motion and z direction of principal axis motion, described measurement welder can pass through described x, y, motion is used freely-movable in certain space on three directions of z.
2. the motion of the measurement welder in the metal mask plate kludge according to claim 1 is characterized in that, described x, y, z direction of principal axis are vertical mutually in twos.
3. the motion of the measurement welder in the metal mask plate kludge according to claim 1 is characterized in that, described x direction of principal axis motion is made of an axial fixed cross beam of x and a slide block that moves at crossbeam.
4. the motion of the measurement welder in the metal mask plate kludge according to claim 1, it is characterized in that, described y direction of principal axis motion is made of the track on the y direction of principal axis and supporting mechanism, and supporting mechanism supports described metal mask plate base station, and it is matched with track.
5. the motion of the measurement welder in the metal mask plate kludge according to claim 1 is characterized in that, described z direction of principal axis motion is made of the slide block that constitutes described x direction of principal axis motion and measurement welder module.
6. the motion of the measurement welder in the metal mask plate kludge according to claim 5, it is characterized in that, also comprise controlling organization and towing chain mechanism, described controlling organization moves lead and connects the wire rod of integrating apparatus, described lead and described wire rod are combined by towing chain mechanism, be beneficial to the cabling of motion and polynary integrating apparatus.
7. the measurement welder in the metal mask plate kludge is characterized in that, comprises the motion of claim 1 to the claim 5.
CN201210006851.8A 2012-01-11 2012-01-11 Measurement welder and its motion in metal mask plate kludge Expired - Fee Related CN103203548B (en)

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CN103203548B CN103203548B (en) 2017-03-15

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104294214A (en) * 2014-09-27 2015-01-21 昆山允升吉光电科技有限公司 Metal mask plate component assembly center
CN104289817A (en) * 2014-09-27 2015-01-21 昆山允升吉光电科技有限公司 Metal mask plate cutting equipment
CN104372290A (en) * 2013-08-15 2015-02-25 昆山思拓机器有限公司 Metal mask plate integrated assembly detection center
CN109211112A (en) * 2018-09-29 2019-01-15 京东方科技集团股份有限公司 Detection device, screen-tensioning machine

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5705789A (en) * 1995-09-29 1998-01-06 Litel Instruments, Inc. Stabilization of parallel transport mirror system
CN1215644A (en) * 1998-03-30 1999-05-05 中国科学院力学研究所 Laser working apparatus with flexible conveying and multiaxis linkage
JP2004105971A (en) * 2002-09-13 2004-04-08 Mitsubishi Heavy Ind Ltd Laser beam welding apparatus
US20090064832A1 (en) * 2005-10-07 2009-03-12 Eros Caretta Cutting Unit With Modular Structure
US20100301020A1 (en) * 2009-05-29 2010-12-02 Kiffer Industries Inc. Plasma torch cutting device and process
CN102717187A (en) * 2011-03-31 2012-10-10 昆山允升吉光电科技有限公司 Metal mask plate assembling machine

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5705789A (en) * 1995-09-29 1998-01-06 Litel Instruments, Inc. Stabilization of parallel transport mirror system
CN1215644A (en) * 1998-03-30 1999-05-05 中国科学院力学研究所 Laser working apparatus with flexible conveying and multiaxis linkage
JP2004105971A (en) * 2002-09-13 2004-04-08 Mitsubishi Heavy Ind Ltd Laser beam welding apparatus
US20090064832A1 (en) * 2005-10-07 2009-03-12 Eros Caretta Cutting Unit With Modular Structure
US20100301020A1 (en) * 2009-05-29 2010-12-02 Kiffer Industries Inc. Plasma torch cutting device and process
CN102717187A (en) * 2011-03-31 2012-10-10 昆山允升吉光电科技有限公司 Metal mask plate assembling machine

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104372290A (en) * 2013-08-15 2015-02-25 昆山思拓机器有限公司 Metal mask plate integrated assembly detection center
CN104294214A (en) * 2014-09-27 2015-01-21 昆山允升吉光电科技有限公司 Metal mask plate component assembly center
CN104289817A (en) * 2014-09-27 2015-01-21 昆山允升吉光电科技有限公司 Metal mask plate cutting equipment
CN104289817B (en) * 2014-09-27 2019-01-15 昆山允升吉光电科技有限公司 A kind of metal mask plate cutting equipment
CN109211112A (en) * 2018-09-29 2019-01-15 京东方科技集团股份有限公司 Detection device, screen-tensioning machine
CN109211112B (en) * 2018-09-29 2021-08-27 京东方科技集团股份有限公司 Detection device and net stretching machine

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