CN103163087A - Method of adopting photoacoustic spectrometry method to detect concentration of sulfuryl fluoride residual gas - Google Patents

Method of adopting photoacoustic spectrometry method to detect concentration of sulfuryl fluoride residual gas Download PDF

Info

Publication number
CN103163087A
CN103163087A CN2013100412261A CN201310041226A CN103163087A CN 103163087 A CN103163087 A CN 103163087A CN 2013100412261 A CN2013100412261 A CN 2013100412261A CN 201310041226 A CN201310041226 A CN 201310041226A CN 103163087 A CN103163087 A CN 103163087A
Authority
CN
China
Prior art keywords
sulfuryl fluoride
gas
light
photoacoustic
fluoride gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2013100412261A
Other languages
Chinese (zh)
Other versions
CN103163087B (en
Inventor
陈默
安德里亚斯·何斯特
李茂�
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Sigas Measurement And Control Equipment Co ltd
Original Assignee
SCHUTZ MEASUREMENT ENGINEERING Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SCHUTZ MEASUREMENT ENGINEERING Co Ltd filed Critical SCHUTZ MEASUREMENT ENGINEERING Co Ltd
Priority to CN201310041226.1A priority Critical patent/CN103163087B/en
Publication of CN103163087A publication Critical patent/CN103163087A/en
Application granted granted Critical
Publication of CN103163087B publication Critical patent/CN103163087B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The invention discloses a method of adopting a photoacoustic spectrometry method to detect concentration of sulfuryl fluoride residual gas. The method includes the following steps: monochromatic light with adjustable strength is obtained through adoption of a non-interference thermal radiation source and through light chopping of a chopper and filtering of an optical filter; adjustable spectrum is irradiated on trace sulfuryl fluoride gas in a photoacoustic cell, and molecules of the sulfuryl fluoride gas absorb electromagnetic radiation, are excited to jump to a higher-level excited state and then return the ground state through stretching vibration and deformation vibration; the temperature of the gas is raised through vibration, the gas releases heat energy, the released heat energy can enable the molecules of the sulfuryl fluoride gas to generate periodic heating according to modulation frequency of the light so as to generate periodic pressure fluctuation; and the pressure fluctuation is detected through adoption of a silicon micro microphone with the vibration sensitiveness of smaller than 1dB, signals are amplified through a conversion circuit to obtain photoacoustic signals, the photoacoustic signals are converted into electric signals through a periphery circuit, the electric signals are amplified through a lock-in amplifier in the periphery circuit and sent into a data acquisition circuit, and finally the concentration of sulfuryl fluoride residual gas is obtained through calculation.

Description

Utilize photocaustic spectroscopy to detect the method for sulfuryl fluoride gas residual concentration
Technical field
The invention belongs to the trace gas detection technical field, be specifically related to a kind of method of utilizing photocaustic spectroscopy to detect Determination of Trace Sulfur acyl fluorides gas concentration, be applicable to such as the residual detection of inspection and quarantine fumigating gas.
Background technology
Vikane, molecular formula SO 2F 2, be colourless, odorless under normal temperature and pressure.Vikane has that diffusion permeability is strong, broad spectrum disinfestation, dosage are economized, residual quantity is low, desinsection speed fast, the loose gas time is short, low temperature is easy to use, on germination percentage not impact and the characteristics such as toxicity is lower, therefore be widely used in the survive the winter control of insect, the tree moth dryness insect that lives of warehouse, freighter, container and buildings, reservoir dam, termite control and gardens, for example, in customs inspection quarantine field, vikane is as fumigant, is used for stifling etc. to control, crops and the secondary product of harmful organism.
But residual sulfuryl fluoride gas has certain toxic action to human body, if vikane content surpasses 0.02g/m in air 3, human body can cause nervous centralis impaired after sucking, and causes convulsions, even can cause breath stopped and death when serious.Therefore, we will strictly monitor sulfuryl fluoride gas concentration residual, trace, to ensure personal safety.
Simultaneously, vikane is also a kind of potent greenhouse gases, the serious greenhouse effect that can cause environment, and people need to monitor the vikane of trace, prevent the pollution of the environment.
For the detection of micro-sulfuryl fluoride gas, China's standard has mainly defined three kinds of detection methods: vapor-phase chromatography, thermal conductivity method and infrared detection method.
Aforesaid chromatographic ultimate principle is sample gas to be injected in chromatographic column analyze.The gas sample that contains vikane is carried down by inert carrier gas, slowly by arriving detecting device after chromatographic column, need control the temperature of chromatographic column therebetween so that the gas sample during by chromatographic column classes of compounds separate out asynchronism(-nization) and reach purpose to its separation.Subsequently, obtain its concentration value after will separating out the parameter such as time, area of collection of illustrative plates and the contrast of this compound concentration known collection of illustrative plates by the compound that detecting device obtains.This method is domestic experimental determination vikane method commonly used, its advantage be highly sensitive, antijamming capability good.Shortcoming is can not Site Detection, analysis time is long, bulky, need to rely on and pass into continuously carrier gas.
Aforesaid thermal conductivity method is based on the characteristic that gas with various has different thermal conductivities, detects gas concentration according to the variation of thermal conductivity.The thermal conductivity method core is thermal conductivity sensor, at the inner integrated resistive heater of thermal conductivity sensor.When sulfuryl fluoride gas is flowed through resistance wire, because sulfuryl fluoride gas has certain thermal conductivity, can take away heat to a certain degree, cause the resistance wire temperature to change.The heat that the sulfuryl fluoride gas of variable concentrations is taken away can be different, can cause the resistance wire temperature that different changes occurs, and by detection resistance wire temperature variations, thereby obtains concentration value corresponding to sulfuryl fluoride gas.The advantage of this detection method is highly sensitive; Shortcoming is poor anti jamming capability, and sensor is short serviceable life, needs frequent calibrating instrument.
Aforesaid Infrared Detection Method is to utilize sulfuryl fluoride gas to carry out measurement of concetration in the light absorption of mid infrared region (6.82 ~ 9 μ m), when the infrared light of a branch of constant 6.82~9 μ m when containing the medium of sulfuryl fluoride gas, the energy of light is absorbed by sulfuryl fluoride gas, luminous flux is attenuated, measure the luminous energy that attenuates, can obtain the concentration of sulfuryl fluoride gas.This method is used comparatively general, but also there is the absorption spectra of other gases when measuring due to mid infrared region, moisture for example, carbon dioxide etc., cause accuracy of detection and the lower limit of vikane to be interfered, so the concentration that the method can't the micro-sulfuryl fluoride gas of fine detection.
In view of above-mentioned prior art, be necessary to be explored more preferably the detection method of sulfuryl fluoride gas residual concentration, for this reason, the present invention has done a large amount of and useful research, and technical scheme described below produces under this background.
Summary of the invention
The object of the present invention is to provide a kind of photocaustic spectroscopy to detect the method for sulfuryl fluoride gas residual concentration.Photocaustic spectroscopy is based on the novel spectral technique of optoacoustic effect, is different from traditional infrared spectrum technology, and it is effectively converted into acoustical signal with light signal, and by accurate microphone, the detection computations of voice signal is obtained final gas concentration.Due to the special optical structure of optoacoustic spectroscopy and the specific calculations process in signals collecting, signal processing, make the method energy highly effective gathering faint light acoustical signal, and effectively reject the interference of background signal, be highly suitable for trace gas concentration detection field, and the noiseless detection in complex environment.
The objective of the invention is to complete like this: a kind of device that utilizes photocaustic spectroscopy to detect the sulfuryl fluoride gas residual concentration comprises light source, chopper, optical filter, photoacoustic cell, microphone and infrared humidity sensor; Wherein light source connects chopper, is arranged on photoacoustic cell one side with optical filter; Infrared humidity sensor is arranged on the opposite side of photoacoustic cell; Microphone is arranged on the bottom of photoacoustic cell, and light source sends light source and is transmitted into chopper, cuts light by chopper, forms light modulated; After light modulated shines on optical filter, but form the arrowband modulated spectrum, be irradiated into photoacoustic cell.
A kind of method of utilizing photocaustic spectroscopy to detect the sulfuryl fluoride gas residual concentration said method comprising the steps of:
Step 1, light source adopt non-interference infrared source, cut light and optical filter optical filtering by chopper, obtain the monochromatic light that intensity can be modulated;
Step 2, can modulate spectral illumination the sealing photoacoustic cell in micro-sulfuryl fluoride gas on, be excited after the electromagnetic radiation of sulfuryl fluoride gas molecule absorption, transit to the excited state of higher level, and get back to ground state by stretching vibration and deformation vibration;
Step 3, vibrations cause the rising of gas temperature, and discharge heat energy, and the heat energy of release makes the vikane molecule produce periodically heating by the modulating frequency of light, thereby produces the periodic pressure fluctuation;
Step 4, pressure surge adopt the vibration sensing degree to survey less than the little microphone of silicon of<1dB, and obtain photoacoustic signal by the change-over circuit amplifying signal, photoacoustic signal converts electric signal to by peripheral circuit, by sending into data acquisition circuit after the lock-in amplifier amplification signal in peripheral circuit, calculate at last and complete the vikane residual concentration again.
In a specific embodiment of the present invention, described non-interference heat radiation light source works in 850 degrees centigrade, to obtain larger infrared power density.
In another specific embodiment of the present invention, described optical filter 3 is 860 for wave number, centre wavelength is the narrow band pass filter of 11.6 microns, only the absorption line intensity between wave number 800 to 900 is very low due to steam, and this narrow band pass filter can effectively shield steam and detect the undesired signal that produces for sulfuryl fluoride gas concentration.
In another specific embodiment of the present invention, described microphone is the little formula microphone of silicon.
Compared with prior art, advantage of the present invention is: provide a kind of photocaustic spectroscopy to detect the method for sulfuryl fluoride gas residual concentration.Photocaustic spectroscopy is that light signal is effectively converted into acoustical signal, and by accurate microphone, the detection computations of voice signal is obtained final gas concentration.Due to the special optical structure of optoacoustic spectroscopy and the specific calculations process in signals collecting, signal processing, make the method energy highly effective gathering faint light acoustical signal, and effectively reject the interference of background signal, be highly suitable for trace gas concentration detection field, and the noiseless detection in complex environment.
Description of drawings
Fig. 1 is the present invention's blackbody radiation light source used spectral radiance under different temperatures.
Fig. 2 is the structural representation of equipment therefor of the present invention.
Fig. 3 is steam and the absorption spectrogram of sulfuryl fluoride gas in 400 to 1700 wave-number ranges.
Embodiment:
With non-interference infrared source as light source 1, the narrow band pass filter and the mechanical chopper that coordinate 11.6 microns of centre wavelengths, 860 wave numbers, obtaining the monochromatic light that intensity can modulate is irradiated in the photoacoustic cell 4 of sealing, be excited after the interior gas molecule absorption of electromagnetic radiation of photoacoustic cell 4, transit to the excited state of higher level.The electronic state of molecule, vibrations and rotary state are all quantized.Usually, gas molecule can be got back to ground state by emitting fluorescence or vibrations, and vibrations cause the rising of gas temperature, and transferring energy, are referred to as radiationless relaxation phenomena.The prerequisite that this Non-radiative relaxation processes by generation of vibration occurs is, the relaxation time is than fast many of lifetime of excited state.Attenuation is 10 in the common time of visible light -7S is 10 at the 10um place -2s。Be to produce radiationless decay, the relation of relaxation time and pressure is close (die-away time, t and pressure were inversely proportional to) and can under atmospheric pressure produce great changes (10 very -3– 10 -8S).
Radiation source is modulated to the acoustic frequency that makes the temperature cycle variation, causes the cyclical variation of pressure, this variation can produce voice signal, and in gas detected, this voice signal was detected by highly sensitive microphone.
Utilize the optoacoustic spectroscopy sensor to detect the vikane residual concentration and just be based on this optoacoustic effect, this optoacoustic spectroscopy sensor as shown in Figure 2, comprise: light source 1, chopper 2, optical filter 3, photoacoustic cell 4, microphone 5, infrared humidity sensor 6 and peripheral circuit, wherein light source 1 connects chopper 2; Be embedded in photoacoustic cell 4 one sides with optical filter 3; Infrared humidity sensor 6 is embedded in the opposite side of photoacoustic cell 4; Microphone 5 is embedded in the bottom of photoacoustic cell 4.
light source 1 of the present invention uses non-interference infrared source, and non-interference infrared source sends broad spectrum light source, after broad spectrum light source is transmitted into chopper 2, cuts light by chopper 2, forms light modulated, after this light modulated shines on the optical filter 3 of 11.6 microns, the optical source wavelength scope is filtered, forming wave number is 860, centre wavelength is that monochromatic light that the intensity of 11.6 microns can be modulated is irradiated on the photoacoustic cell 4 of the sealing sulfuryl fluoride gas in interior, be excited after the electromagnetic radiation of sulfuryl fluoride gas molecule absorption, transit to the excited state of higher level, and get back to ground state by vibrations, vibrations cause the rising of gas temperature, and release heat energy, the heat energy that discharges makes the vikane molecule produce periodically heating by the modulating frequency of light, thereby produce the periodic pressure fluctuation, this pressure surge can be surveyed with sensitive microphone 5, and obtain photoacoustic signal by the change-over circuit amplifying signal, photoacoustic signal converts electric signal to by peripheral circuit, again by sending into data acquisition circuit after the lock-in amplifier amplification signal in peripheral circuit, last through type (1) formula (2) formula (3) formula calculates the quantitative test of completing the vikane residual concentration, complete the detection of vikane concentration with this.
The non-interference infrared source that the present invention adopts is operated in 850 degree.The continuous spectrum that IR thermal emitter generally has near blackbody radiation distributes, as shown in Figure 1.Be characterized in the utilizing emitted light spectrum width, easy to use in conjunction with narrow band pass filter, working stability is reliable.When light beam during with audio frequency (tens hertz to several KHz) modulation, air pressure is just modulated with same frequency and form sound wave, for the amplitude A that is operated in the photoacoustic signal under low frequency off-resonance state 0(w)
Be expressed as:
Figure BDA0000281223381
Be wherein the absorption coefficient of gas, Pa is the dividing potential drop of gas, and v is ratio of the molar heat capacities of gas, and v=Cp/Cv, w are the modulating frequency of light, and T is for disappearing the excitation life-span, and I is beam intensity, and wherein r is the radial distance of photon; W is spot radius, and V is the volume of photoacoustic cell 4, and i is imaginary unit.For specific gas, the amplitude of photoacoustic signal is relevant with the factors such as modulating frequency of the light intensity of exciting light and spectral characteristic, photoacoustic cell 4 structures and light.
For optical filter 3 we to select wave number 860, centre wavelength be the narrow band pass filter of 11.6 microns.Absorb the absorption spectrogram of spectrogram and steam as Fig. 3 vikane, the Absorption Line of sulfuryl fluoride gas has relatively high intensity and density in wave number 500 to 550,800 to 900,1250 to 1300,1450 to 1550 base band.And steam only the absorption line intensity between wave number 800 to 900 is very low, be 860 so we select wave number, centre wavelength is that the narrow band pass filter of 11.6 microns can effectively shield the undesired signal that steam detect to produce for sulfuryl fluoride gas concentration.
For photoacoustic cell 4, the present invention uses the disresonance cylindrical structure, in the situation that absorb a little less than gas, can think that light intensity I is evenly distributed in photoacoustic cell 4, i.e. I (r, w)=I (w).The power that light beam is set again is W, I=Wl/V, and wherein l is the length of photoacoustic cell 4, V is volume.Light intensity in formula (1) is carried out can drawing after space integral:
Figure BDA0000281223382
Can be found out by formula (2) formula, the xsect that reduces photoacoustic cell 4 cavitys is conducive to obtain higher photoacoustic signal amplitude.But the installation site of also depending on microphone 5 due to the size of photoacoustic cell 4 more needs to consider the effect of light beam coupling and the collimation adjustment difficulty of light beam.If the too small transverse heat transfer effect that also can make of the volume of photoacoustic cell 4 descends and the excitation life-span T increase that causes disappearing, result reduces photoacoustic signal.The present invention gets photoacoustic cell 4 internal diameter 15 mm in native system, and length is 50 mm, to reduce the coherent noise that is produced because of the window absorption.
For microphone 5, the present invention selects the little microphone of silicon.Because traditional capacitor microphone suppresses ability without any power supply, very little mains fluctuations just will cause intermittent noise.And aspect Machine Design, the conventional condenser microphone not only can detect voice signal, can also detect mechanical vibration, and finally vibration is converted to the low-frequency sound signal, like this, when this type of microphone is placed in vibration environment, vibration will become the main noise source of audio system.The little microphone of the silicon that the present invention uses is to utilize silicon thin film to detect acoustic pressure, it can be on chip an integrated analog to digital converter, form the microphone with numeral output.Compare with traditional capacitor microphone, the little microphone sound pressure level of silicon is high, and chip internal generally has the pre-amplification circuit, so sensitivity is very high; Its Hz-KHz is wide, generally at 100~10KHZ; And distortion is little, total harmonic distortion<1% (at 1KHZ, 500mV p-p); The vibration sensing degree is less than<1dB.In addition, the little microphone of silicon also has excellent anti-emi characteristics, and humidity environment and temperature shock.We are with the little microphonic acoustic-electric conversion coefficient S of this silicon m(w) can obtain the amplitude A of photoacoustic signal in substitution formula (2) m(w):
Figure BDA0000281223383
Formula can find out in (3), and the lower photoacoustic signal amplitude of the modulating frequency of light beam is larger, but for general microphone, during w<100 H z, and acousto-electric-index S m(w) just have obvious decline, when modulating frequency was too low in addition, 1/ f noise of electronic amplification system also obviously increased.Be the intrinsic standoff ratio of gas due to tested concentration C, C=Pa/P 0, this formula substitution formula (3) can be calculated final tested gas concentration.
In sum, technical scheme provided by the invention has high sensitivity, wide dynamic range, high stability, the shielding interference is good and device volume is little strong point.The principle that photocaustic spectroscopy is surveyed vikane need not to add any chemical substance, and this inventive method once dispatch from the factory demarcate calibration after, optical texture is stable, need not to do secondary or repeatedly calibration, has also avoided the shortcoming of electrical conductivity method.Compare with the non-dispersion infrared analytic approach, it is effectively converted into acoustical signal with light signal, and by accurate microphone, the detection computations of voice signal is obtained final gas concentration.Due to the special optical structure of optoacoustic spectroscopy and the specific calculations process in signals collecting, signal processing, make the method energy highly effective gathering faint light acoustical signal, and effectively reject the interference of background signal, be highly suitable for trace gas concentration detection field, and the noiseless detection in complex environment.

Claims (5)

1. method of utilizing photocaustic spectroscopy to detect the sulfuryl fluoride gas residual concentration said method comprising the steps of:
Step 1, light source (1) adopt non-interference infrared source, cut light and optical filter (3) optical filtering by chopper (2), obtain the monochromatic light that intensity can be modulated;
Step 2, can modulate spectral illumination the sealing photoacoustic cell (4) in micro-sulfuryl fluoride gas on, be excited after the electromagnetic radiation of sulfuryl fluoride gas molecule absorption, transit to the excited state of higher level, and get back to ground state by stretching vibration and deformation vibration;
Step 3, vibrations cause the rising of gas temperature, and discharge heat energy, and the heat energy of release makes the vikane molecule produce periodically heating by the modulating frequency of light, thereby produces the periodic pressure fluctuation;
Step 4, pressure surge adopt the vibration sensing degree to survey less than the little microphone of silicon of<1dB, and obtain photoacoustic signal by the change-over circuit amplifying signal, photoacoustic signal converts electric signal to by peripheral circuit, by sending into data acquisition circuit after the lock-in amplifier amplification signal in peripheral circuit, calculate at last and complete the vikane residual concentration again.
2. the method for utilizing photocaustic spectroscopy to detect the sulfuryl fluoride gas residual concentration according to claim 1, is characterized in that described non-interference heat radiation light source works in 850 degrees centigrade.
3. the method for utilizing photocaustic spectroscopy to detect the sulfuryl fluoride gas residual concentration according to claim 1, is characterized in that described optical filter (3) is 860 for wave number, and centre wavelength is the narrow band pass filter of 11.6 microns.
4. the method for utilizing photocaustic spectroscopy to detect the sulfuryl fluoride gas residual concentration according to claim 1, is characterized in that described photoacoustic cell (4) uses the disresonance cylindrical structure.
5. the method for utilizing photocaustic spectroscopy to detect the sulfuryl fluoride gas residual concentration according to claim 1, is characterized in that the residual concentration of the sulfuryl fluoride gas described in step 4 passes through formula
Figure 1
Obtain, in formula,
Figure FDA0000281223372
Be the amplitude of photoacoustic signal, be the absorption coefficient of gas, Pa is the dividing potential drop of gas,
Figure FDA0000281223373
Be ratio of the molar heat capacities of gas,
Figure FDA0000281223374
Be the modulating frequency of light, For disappearing the excitation life-span, I is beam intensity, and W is spot radius, and V is the volume of photoacoustic cell (4), and i is imaginary unit, Be acousto-electric-index.
CN201310041226.1A 2013-02-03 2013-02-03 Method of adopting photoacoustic spectrometry method to detect concentration of sulfuryl fluoride residual gas Active CN103163087B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310041226.1A CN103163087B (en) 2013-02-03 2013-02-03 Method of adopting photoacoustic spectrometry method to detect concentration of sulfuryl fluoride residual gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310041226.1A CN103163087B (en) 2013-02-03 2013-02-03 Method of adopting photoacoustic spectrometry method to detect concentration of sulfuryl fluoride residual gas

Publications (2)

Publication Number Publication Date
CN103163087A true CN103163087A (en) 2013-06-19
CN103163087B CN103163087B (en) 2015-07-01

Family

ID=48586353

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310041226.1A Active CN103163087B (en) 2013-02-03 2013-02-03 Method of adopting photoacoustic spectrometry method to detect concentration of sulfuryl fluoride residual gas

Country Status (1)

Country Link
CN (1) CN103163087B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103954578A (en) * 2014-05-14 2014-07-30 江苏舒茨测控设备有限公司 Photoacoustic spectrum detection device for detecting residual concentration of sulfuryl fluoride gas
CN106769973A (en) * 2017-03-03 2017-05-31 江苏舒茨测控设备股份有限公司 Ammonia gas detection means and method are detected using photocaustic spectroscopy
CN109490215A (en) * 2019-01-03 2019-03-19 江苏舒茨测控设备股份有限公司 Utilize the system and method for photocaustic spectroscopy detection methyl bromide gas concentration
CN117517240A (en) * 2024-01-08 2024-02-06 新仟意能源科技(成都)集团有限责任公司 Light hydrocarbon component on-line detection method and system based on infrared light

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4051371A (en) * 1976-04-26 1977-09-27 Massachusetts Institute Of Technology Opto-acoustic spectroscopy employing amplitude and wavelength modulation
EP1346684A1 (en) * 2002-03-20 2003-09-24 Samsung Electronics Co., Ltd. Apparatus and method for non-invasively measuring bio-fluid concentrations by using photoacoustic spectroscopy
CN1928531A (en) * 2006-09-12 2007-03-14 西南科技大学 Method for detecting methane gas concentration with opto-acoustic spectroscopic method
CN101936879A (en) * 2010-07-28 2011-01-05 山东大学 Photoacoustic spectroscopy gas detecting system based on Mach-Zehnder interferometer
CN102226752A (en) * 2011-04-08 2011-10-26 常熟舒茨电子科技发展有限公司 Method for detecting concentration of sulfur dioxide by using photoacoustic spectrometry
CN102495017A (en) * 2011-11-09 2012-06-13 山东惠工电气股份有限公司 Detecting instrument of sulfur hexafluoride gas decomposition products
CN102661918A (en) * 2012-05-28 2012-09-12 中国科学院电工研究所 Off-resonance photoacoustic spectrometric detection and analysis device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4051371A (en) * 1976-04-26 1977-09-27 Massachusetts Institute Of Technology Opto-acoustic spectroscopy employing amplitude and wavelength modulation
EP1346684A1 (en) * 2002-03-20 2003-09-24 Samsung Electronics Co., Ltd. Apparatus and method for non-invasively measuring bio-fluid concentrations by using photoacoustic spectroscopy
CN1928531A (en) * 2006-09-12 2007-03-14 西南科技大学 Method for detecting methane gas concentration with opto-acoustic spectroscopic method
CN101936879A (en) * 2010-07-28 2011-01-05 山东大学 Photoacoustic spectroscopy gas detecting system based on Mach-Zehnder interferometer
CN102226752A (en) * 2011-04-08 2011-10-26 常熟舒茨电子科技发展有限公司 Method for detecting concentration of sulfur dioxide by using photoacoustic spectrometry
CN102495017A (en) * 2011-11-09 2012-06-13 山东惠工电气股份有限公司 Detecting instrument of sulfur hexafluoride gas decomposition products
CN102661918A (en) * 2012-05-28 2012-09-12 中国科学院电工研究所 Off-resonance photoacoustic spectrometric detection and analysis device

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
G.R.HUNT,ET AL.: "The infrared spectrum of sulfuryl fluoride", 《SPECTROCHIMICA ACTA》, vol. 16, 31 December 1960 (1960-12-31), pages 570 - 574, XP026597576, DOI: 10.1016/0371-1951(58)80027-2 *
STEVEN W.SHARPE, ET AL.: "Gas-Phase Databases for Quantitative Infrared Spectroscopy", 《APPLIED SPECTROSCOPY》, vol. 58, no. 12, 31 December 2004 (2004-12-31), pages 1452 - 1461 *
吕小虎: "光声光谱法及其应用", 《分析仪器》, no. 2, 28 February 1993 (1993-02-28), pages 37 - 41 *
柳正良 等: "光声光谱法的原理及其应用", 《国外医学.药学分册》, no. 04, 31 December 1987 (1987-12-31), pages 230 - 235 *
王书涛 等: "基于光声光谱法的光纤气体传感器研究", 《中国激光》, vol. 31, no. 8, 31 August 2004 (2004-08-31), pages 979 - 982 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103954578A (en) * 2014-05-14 2014-07-30 江苏舒茨测控设备有限公司 Photoacoustic spectrum detection device for detecting residual concentration of sulfuryl fluoride gas
CN106769973A (en) * 2017-03-03 2017-05-31 江苏舒茨测控设备股份有限公司 Ammonia gas detection means and method are detected using photocaustic spectroscopy
CN109490215A (en) * 2019-01-03 2019-03-19 江苏舒茨测控设备股份有限公司 Utilize the system and method for photocaustic spectroscopy detection methyl bromide gas concentration
CN117517240A (en) * 2024-01-08 2024-02-06 新仟意能源科技(成都)集团有限责任公司 Light hydrocarbon component on-line detection method and system based on infrared light
CN117517240B (en) * 2024-01-08 2024-03-19 新仟意能源科技(成都)集团有限责任公司 Light hydrocarbon component on-line detection method and system based on infrared light

Also Published As

Publication number Publication date
CN103163087B (en) 2015-07-01

Similar Documents

Publication Publication Date Title
CN106769973A (en) Ammonia gas detection means and method are detected using photocaustic spectroscopy
CN110044824B (en) Quartz tuning fork-based dual-spectrum gas detection device and method
US8584508B2 (en) Photoacoustic sensor with adaptive operating frequency
CN109490215A (en) Utilize the system and method for photocaustic spectroscopy detection methyl bromide gas concentration
US8085403B2 (en) Photoacoustic sensor
US7895880B2 (en) Photoacoustic cell incorporating a quantum dot substrate
CN109283141B (en) Exhaled gas spectrum detection system and method capable of removing water vapor interference
CN101887009B (en) Intrinsic safety photoacoustic spectrum gas monitoring system based on optical acoustic sensor
CN1928531A (en) Method for detecting methane gas concentration with opto-acoustic spectroscopic method
CN203658243U (en) C2H2 and CH4 detection device based on photoacoustic spectrometry
CN202974860U (en) High-precision infrared gas detection module
CN103163087B (en) Method of adopting photoacoustic spectrometry method to detect concentration of sulfuryl fluoride residual gas
US20040179200A1 (en) Gas identification device
CN109269999A (en) A kind of infrared photoacoustic spectra detection system
CN111077099A (en) Formaldehyde concentration detection method and device based on infrared absorption spectrum
CN203069507U (en) Device for detecting residual concentration of sulfuryl fluoride gas by photoacoustic spectrometry
CN102288574A (en) Device and method for quantitatively analyzing concentration of multi-component oil fume
CN206740639U (en) Ammonia gas detection means is detected using photocaustic spectroscopy
Chen et al. In situ gas filter correlation: photoacoustic CO detection method for fire warning
CN206450592U (en) Gas Detection System
CN102830084A (en) Sensor for online concentration detection of atmospherical inhalable particles
CN207472755U (en) A kind of twin-stage enhanced photo acoustic spectroscopic detector device
CN114397273B (en) Gas concentration measuring device and method based on combination of second harmonic wave and fourth harmonic wave
CN212111124U (en) NDIR (non-dispersive infrared radiation) detection water vapor concentration sensor and absolute humidity detector
CN114839148A (en) Miniature infrared photoacoustic CO 2 Sensor and detection method

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: Four 215513 Jiangsu Sea city of Suzhou province Changshu economic and Technological Development Zone No. 11 Branch Chong Park Building No. 5 507

Patentee after: JIANGSU SIGAS MEASUREMENT AND CONTROL EQUIPMENT Co.,Ltd.

Address before: Four 215513 Jiangsu Sea city of Suzhou province Changshu economic and Technological Development Zone No. 11 Branch Chong Park Building No. 5 507

Patentee before: JIANGSU SCHUTZ MEASUREMENT ENGINEERING CO.,LTD.

CP01 Change in the name or title of a patent holder
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of invention: Detection of residual concentration of sulfuryl fluoride gas by photoacoustic spectroscopy

Effective date of registration: 20221123

Granted publication date: 20150701

Pledgee: Bank of China Limited Changshu branch

Pledgor: JIANGSU SIGAS MEASUREMENT AND CONTROL EQUIPMENT Co.,Ltd.

Registration number: Y2022980023061

PE01 Entry into force of the registration of the contract for pledge of patent right