CN103085185B - Scroll saw controls system and scroll saw - Google Patents

Scroll saw controls system and scroll saw Download PDF

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Publication number
CN103085185B
CN103085185B CN201110459141.6A CN201110459141A CN103085185B CN 103085185 B CN103085185 B CN 103085185B CN 201110459141 A CN201110459141 A CN 201110459141A CN 103085185 B CN103085185 B CN 103085185B
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China
Prior art keywords
line
scroll saw
linear velocity
photographing unit
saw
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CN201110459141.6A
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CN103085185A (en
Inventor
菲利普·那斯卡
吉恩-马克·罗斯特
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Toyo Advanced Machine Tool Co., Ltd.
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Applied Materials Inc
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Priority to EP11187049.9 priority Critical
Priority to EP11187049.9A priority patent/EP2586582B1/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064Devices for the automatic drive or the program control of the machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

Abstract

Disclosure one scroll saw controls system and scroll saw.It is supplied to a kind of scroll saw for operating scroll saw (100) and controls system (1).Scroll saw is applicable to by being moved and cut crystal (304,304,306,308) relative to wafer by line (230) with selectable linear velocity.Scroll saw controls system and includes the photographing unit (20) for checking line;With the camera control unit (25) for operating photographing unit according to linear velocity.Further it is provided that a kind of scroll saw that includes controls the scroll saw of system and the method for checking the line of scroll saw.The method includes with variable linear velocity portable cord;And check line according to linear velocity, be derived from checking result.

Description

Scroll saw controls system and scroll saw
Technical field
The present invention relates to be particularly useful for check scroll saw line scroll saw control system, scroll saw, for checking the method for the line of scroll saw and the method for operating scroll saw.Existing scroll saw can control system with the scroll saw according to the present invention and transform.More particularly, the present invention relate to the scroll saw of the detection defect of line of scroll saw, abrasion or damage and control system.It is particularly related to multi-wire saw.The scroll saw of the present invention is particularly suitable for the hard material of cutting or sawing such as silico briquette or quartz wedge, for instance, it is used for cutting silicon wafer, for excavation machine, for section machine etc..
Background technology
Scroll saw for cutting block or brick, the thin slice of such as semiconductor wafer from the hard material of a piece of such as silicon.In this device, line is from spool fed, and is guided and tensioning by line guide barrel.Line for sawing is typically provided with grinding-material.As a selection, grinding-material is provided that as slurry.This not long ago can complete at the material that linear contact lay is to be cut.Thus, grinding-material is brought to cutting position by the line for cutting material.Alternately, grinding-material can be arranged on cated line, for instance as diamond wire.Such as, diamond particles can be arranged on the cated metal wire of tool, and wherein, diamond particles is embedded in the coating of line.Thus, grinding-material is connected with line securely.
Line is guided by wire conductor and/or maintains tensioning.These wire conductors are generally covered with a lamination resin, and are carved with groove, and groove has very accurate geometry and size.Wire-wound wire conductor and be wound around, and form net or gauze.In saw singulation, line moves with sizable speed.Net produces will by the contrary power of advancing supporting beam or support member of the workpiece of sawing with maintenance.In saw singulation, will being moved through gauze by the workpiece of sawing, wherein, this translational speed is determined cutting speed and/or can effectively be cut area by sawing in given time quantum.
Usually, in order to reduce the thickness of cutting and thus reduce the material of waste, there is the trend using thinner line.It is also expected to use diamond wire.These thinner lines and diamond wire are generally more easy to impaired, and roll off the production line can be more easily broken off at Large strain.Additionally, it is desirable to increase cutting speed to improve the yield of take-up saw.For making workpiece be moved through the maximal rate of net and maximum effective cutting area in given time quantum is limited by several factors, including linear velocity, will by the hardness of the material of sawing, interference effect, expectation quality etc..When the speed increases, the strain on line generally also increases.Thus, the above-described problem avoiding the damage of line, excessive wear or fracture is more important under higher sawing speed.
The advantage (such as, higher attainable sawing speed) of diamond wire can along with such as problem to the higher price of less resistance to fracture and unit length etc.When adopting diamond wire, can take measures to ensure that higher fracture trend will not cause the loss of production due to downtime.
If at saw singulation midline, then after fracture occurs, the movement of detection of broken and stop line immediately is critically important as quickly as possible.At the same time, it is desirable to whether detection occurs in that undue wear at saw singulation center line or occurs in that in the trend ruptured along one or more position of its length.In worst case, if it occur that fracture, then there will be undesired result.The unclamping end and can be wound around in the machine in out of contior mode of line, line can be guided other parts of system or machine cause damage by this.If additionally, thread breakage and continuing to move to, then it is by be pulled by the object of sawing.
Additionally, it is desirable to by considering that following trade-off relationship optimizes the use of line.If when other objects of line still sufficiently efficiently and safely sawing such as wafer, line be wrapped in the bobbin for used line, then line does not use best, causes fiscal loss.On the other hand, if although but line is no longer appropriate for carrying out sawing process is further continuing with this line, then line can rupture or cause unsatisfied sawing result.Thus, equally, such selection is also unacceptable economically.
Summary of the invention
In view of more than, it is provided that a kind of for operate scroll saw scroll saw control system.Scroll saw is applicable to by line being moved cut crystal relative to wafer with selectable linear velocity.Scroll saw controls system and includes the photographing unit for checking line and for operating the camera control unit of photographing unit according to linear velocity.
According to an aspect, it is provided that include the scroll saw described in this specification and control the scroll saw of system.Specifically, scroll saw can be multi-wire saw.
According to another aspect, existing scroll saw can control system with the scroll saw described in this specification and transform.A kind of method for transforming scroll saw is disclosed, including the scroll saw providing the scroll saw having described in this specification to control system.
According to another aspect, it is provided that for the method checking the line of scroll saw.Scroll saw is applicable to carry out cut crystal by the relative movement of line and wafer.The method includes with variable linear velocity portable cord;And check line according to linear velocity, be derived from checking result.
According to another aspect, it is provided that for the method operating scroll saw.Method for operating scroll saw includes the method for checking line described in this specification.
According to dependent claims, description and accompanying drawing, other advantages, feature, aspect and details are apparent from.
Embodiment further relates to the equipment for performing disclosed method, and includes the part of appliance for performing each described method step.These method steps can by hardware component, by the computer of the software programming being suitable for, by the combination of both modes or perform in any other manner.Additionally, the method further relating to described equipment operation according to embodiments of the invention.The method includes the method step of each function for performing this equipment.
Accompanying drawing explanation
In the way of understanding the characteristic features described above of the present invention in detail, the present invention summarized briefly above is more specifically described with reference to embodiment.Accompanying drawing is about embodiments of the invention, and describes as follows:
Fig. 1 illustrates that the scroll saw of the embodiment according to this specification description controls the schematic perspective side view of system and scroll saw.
Fig. 2 illustrates that the scroll saw of the embodiment according to this specification description controls the schematic perspective top view of system and scroll saw.
Fig. 3 illustrates that the scroll saw of the embodiment according to this specification description controls the schematic perspective front view of system and scroll saw.
Fig. 4 illustrates that the scroll saw of the embodiment according to this specification description controls the schematic perspective front view of system and scroll saw.
Fig. 5 illustrates that the scroll saw of the embodiment according to this specification description controls the schematic perspective view of system and scroll saw.
Fig. 6 illustrates the perspective illustration of the embodiment of the line for checking scroll saw.
Detailed description of the invention
Now will in detail with reference to various embodiments of the present invention, one or more example illustration of this embodiment is in the accompanying drawings.In the following description to accompanying drawing, identical reference number refers to identical parts.Usually, the difference of each embodiment is only described.Each example is provided by the mode that the present invention will be described, is not meant to be limitation of the present invention.Additionally, the feature illustrating as a part for an embodiment or describing can be combined use to produce another embodiment with other embodiments.This description is intended to include such amendment and deformation.
Additionally, in the following description, " scroll saw control system " or simply " control system " can be understood as the system of some or all functions controlling scroll saw.Usually, the scroll saw understood in this specification can be section machine, excavation machine or wafer cutting line saw.Generally, in order to monitor the parameter in machine operation and saw singulation, control system is connected to sensor.Scroll saw controls system and includes photographing unit and camera control unit.Camera control unit is applicable to such as control photographing unit when being shot one or more image by photographing unit by triggering.Photographing unit or camera control unit are commonly available to perform the image recognition algorithm of the image for assessing imaging.Scroll saw controls system and may be also connected to actuator and device to control the motor of portable cord.Usually, scroll saw controls system and can include for the device interactive with individual, with in order to receive instruction and report the state of saw singulation.Control unit described in this specification may be also connected to computer network directly or remotely to be controlled by individual or automatic system (such as, computer).
Embodiment described in this specification, the method of operation scroll saw can carry out by means of computer program, software, computer software product and relevant controller, and relevant controller generally can have input and the output device that CPU, memorizer, user interface and the corresponding component with scroll saw communicate.These parts can be with one or more in lower component: motor, thread breakage detection unit, sightline tracking device etc., this will described in detail below.
Generally, scroll saw includes the wire conductor of conveying and guiding on online moving direction.Scroll saw controls system can provide the control to line tensioning.The line provided forms gauze in the cutting zone of scroll saw.Thus, term " gauze " is usually directed to by line the repeatedly net that formed around line guide barrel.It should be appreciated that gauze can comprise more than one working region, this working region is defined to perform the region of saw singulation.Thus, some embodiments described in this specification, gauze can have the multiple working regions formed by line.
For the modern scroll saw of such as section machine, excavation machine or scroll saw etc, there is the expectation of hard material with high-speed cutting such as semi-conducting material (such as, silicon, quartz etc.).Maximum line velocity (that is, is moved through the maximal rate of the line of scroll saw) and can be such as 10m/s or higher.Generally, maximum line velocity can in the scope of 10 to 15m/s.But, higher linear velocity (such as 20m/s, 25m/s or 30m/s) is also desired.In an embodiment, the movement of the line of scroll saw includes the movable of line.Term " front and back " movement understood in this specification should include at least one change on the moving direction of line.Generally, the moving direction of line repeatedly changes with selectable interval.
In order to desired linear velocity solution coiling, the feeding bobbin of untapped line rotates with the rotary speed of up to several thousand revolutions per minute.Such as, in order to solution bursts at the seams, it is possible to provide 1000 to 2000rpm.
In the embodiment that can combine with other embodiments described in this specification, line can have different diameters according to the type of device.In the embodiment belonging to excavation machine, linear diameter can from about 250 μm to about 450 μm, for instance, 300 μm to 350 μm.Belong to wafer cutting line saw embodiment in, linear diameter can from 80 μm to 180 μm, more generally from 120 μm to 140 μm.For all of the former, the torsion of line can increase line fracture or damage coating risk so that not have torsion operation be advantageous for.
By using diamond wire, compared with traditional steel line, yield can increase 2 times or more.Feed material speed is properly termed as relative to the speed that portable cord moves by the material of sawing.Feed material speed in embodiment described in this specification can in the scope of 2 μm/s to 15 μm/s for wafer cutting line saw, ordinarily be about 6 μm/s to 10 μm/s, for belong to excavation machine embodiment can from 20 μm/s to 40 μm/s, generally from 28 μm/s to 36 μm/s.
According to usual embodiment, use multi-wire saw.Multi-wire saw can realize for the silicon wafer high production rate of quasiconductor and photovoltaic industry with high-quality cut into slices.Multi-wire saw generally includes high strength steel line, and this high strength steel line can move to perform cutting action unidirectional (that is, only in a forward direction) or two-way (that is, fore-and-aft direction).Line can be provided with diamond in its surface.
Line can in the upper winding of wire conductor (can also be called guide barrel in this manual), and generally with constant pitch cutting on guide, line forms horizontal net or the gauze of parallel lines.Wire conductor rotates with the driver of relatively higher speed (such as, 5 to 20m/s) movement by making whole gauze.If so desired, several high flow rate nozzles can provide slurry to the line of movement.The slurry understood in this specification refers to the liquid-carrier with suspension abrasive grains (such as, silicon-carbide particle).In cutting action process, blank is pushed through gauze.Alternatively, blank can be static, and gauze is pushed through blank simultaneously.Usually, not by the restriction of any specific embodiment described in this specification, phrase " cut crystal " specifically includes " blank is cut into wafer ".Line feeding bobbin provides required new line, and line take-up bobbin stores used line.
Generally, after being advanced through whole scroll saw, line exits the operating area of scroll saw with the diameter of reduction compared with the initial diameter before saw singulation.Process is depended in the abrasion of line.Specifically, rate of cutting is more high, and line abrasion is more high.Further, line uses (length for the line used by given application) more high, weares and teares more low.Owing to the abrasion of one side line increases the probability of thread breakage, and the opposing party's upper thread uses and increases the cost manufacturing wafer, so present invention contemplates that the process in order to obtain the best with minimum holistic cost, and the use of control line.
Thus, the ultimate principle of the present invention is the optimization that line uses.It is particularly related to multi-wire saw, i.e. several sawings process the process carried out at a time point.Equally, as will be apparent from from the following discussion to accompanying drawing, processing generally for several sawings and simply using a line at a time point.
It is expected that by reducing the change number of bobbin (being provided in particular in the line feeding bobbin of untapped line) and by avoiding the downtime caused due to line fault, and makes productivity ratio (such as overall yield or the feed rate) optimization of scroll saw.At the same time, it is desirable to avoid the unsatisfied sawing result caused due to excessive wear, and safe clearance is maintained for thread breakage.
Due to generation more line abrasion of cutting into slices faster, this increases the probability of thread breakage in turn, it is desirable to find one or more optimal operation parameter.According to the present invention, on-the-spot one or more optimal operation parameter of discovery in saw singulation.Generally, one or more optimal operation parameter is measured according to reality wire condition and (such as at predetermined intervals) update consistently.
According to embodiment, saw singulation checks line.For example, it is possible to measure the abrasion of actual line.Measure and possible with post analysis can generation effect immediately (in such as amendment operating parameter one or more), with in order to make process optimizing.For example, it is possible to increase the speed of line and/or reduce the speed of workbench.Thus, lowering abrasion, this reduces again the probability of thread breakage in turn.The result that line is measured and/or analyzed is it is also possible that think that the situation of line is suitable for longer use and/or carries out sawing with feed rate.
Fig. 1 illustrates the diagrammatic side view including the scroll saw 100 that scroll saw controls system 1, and Fig. 2 illustrates the top schematic view including the scroll saw 100 that scroll saw controls system 1.Scroll saw controls system 1 can include at least one photographing unit 20 of at least one image for pickup leads.Thus, photographing unit can shoot the image of several adjacent lines simultaneously.Photographing unit 20 is typically connected to camera control unit 25 via cable or wireless connections 15.Control unit 25 could be for controlling a part for the scroll saw controller of saw singulation or with acting on the scroll saw controller controlling saw singulation.
Scroll saw 100 has the line guide including four line guide barrel 112,114,116,118.Generally, line guide barrel 112,114,116,118 is coated with a lamination resin, and is carved with groove, and groove has very accurate geometry and size.The pitch between distance or groove between groove determines the distance D1 between two adjacent column or the row of line 230.Distance D1 deducts the upper limit that linear diameter is set as the thickness of the thin slice for saw blade cutting.
Such as, when using three medium of such as slurry, thin slice is about 10 μm to 40 μm, and the difference than distance D1 and linear diameter is thinner.Generally, line thickness between 120 μm and 140 μm, and distance D1 from 230 μm to 450 μm (generally the scope of 330 μm to 370 μm).Exemplarily, groove can have pitch or the distance of less than 300 μm.According to some embodiments that can combine with other embodiments described in this specification, the pitch of groove or distance cause the interval between adjacent lines to be about 110 μm to 350 μm, usual 190 μm to 250 μm.In view of more than, the embodiment described in this specification can provide big cutting area and high rate of cutting.
According to the different embodiments that can combine from other embodiments described in this specification, pitch (that is, the distance between groove) can in the scope of 330 μm to 370 μm, for instance, 350 μm or following;Distance between adjacent lines can in the scope of 110 μm to 350 μm, for instance, 190 μm to 250 μm or even less than 220 μm;And/or the wafer thickness obtained can in the scope of 120 μm to 250 μm, for instance, 180 μm to 220 μm or even 200 μm or following.Thus, it should be noted that notching joint is from being commonly available to line thickness and line type with groove geometry, and is applicable to wafer thickness.
Additionally, each line guide barrel 112,114,116,118 may be coupled to motor or driver 122,124,126,128 (shown in broken lines in FIG).Each motor goes for performing the movable of line.The movable of line represents with the Ref. No. 215,225 in accompanying drawing.In an embodiment, as depicted in figs. 1 and 2, line guide barrel 112,114,116,118 is directly driven by motor 122,124,126,128.As in figure 2 it is shown, each line guide barrel 112,114 can be mounted directly to the motor reel 123,125 of phase induction motor 122,124.In certain embodiments, one or more motor is water-cooled.One or more motor controls usually by scroll saw controller.Information about electromotor velocity is used by the camera control unit being used for operating photographing unit.
In cutting action process, one or more blank 302,304,306,308 can be pushed by gauze, so that it to be cut into slices.This is represented by the arrow being clipped in respectively between blank 302,304 and 306,308.Generally, one or more blank is supported by workbench (not shown), and this workbench can the speed to be called " speed of table " in this manual move.The speed of table can also be called feed rate.Usually, not limited by any specific embodiment described in this specification, the speed of table can be synchronize with linear velocity.Specifically, line is made to stop once in order to change direction that line moves, it is also possible to the speed of table to be temporarily reduced to zero or close to zero.
Alternatively, blank 302,304,306,308 can be static, and gauze is pushed through blank simultaneously.According to embodiment, one or more blank can be cut into multiple wafer, and such as at least 500 or even more.The common length of blank when polysilicon up in the scope of 250mm, when monocrystal silicon up in the scope of 500mm.
According to common embodiment, line feeding bobbin 134 arranges wired 230 bins.Line feeding bobbin 134 (if still complete) generally remains the line of hundreds of kilometer.Line 230 is fed to bobbin 134 from line and is fed to guide barrel 112,114,116,118.Can arranging line take-up bobbin 138, the line 230 used is again wrapped around on bobbin 138.In the embodiment shown in fig. 1, line feeding bobbin 134 is parallel with the rotation axis of line guide barrel 112,114,116,118 with the rotation axis of take-up bobbin 138.Thus, it is often necessary to without bending pulley or similar device for line being fed to wire conductor 110.Due to the zero degree angle on line, the risk of thread breakage can be reduced.Generally, it is provided that other devices, such as low inertia pulley (not shown) and have above optional digital encoder for line tensioning regulate tensioner arm (not shown).
In operation, for instance, in saw singulation, motor 122,124,126,128 can drive line guide barrel 112,114,116,118 so that line guide barrel rotates around their longitudinal axis.According to common embodiment, line moves forward and backward, with in order to perform sawing.Thus, generally, producing to move forward at very first time interval or the first distance, produce to be moved rearwards by the second interval or second distance, very first time interval or the first distance are longer than the second interval or second distance.Thus, although line is alternately movable, but line is fed to bobbin 134 from line is transported to line take-up bobbin 138 at leisure.
Line 230 coiling guide barrel 112,114 spiral winding, and between two line guide barrel, form line one layer parallel.This layer is commonly referred to gauze 200.In accordance with the embodiments illustrated, it is provided that four gauzes.Use at least one gauze (usual two gauzes) to carry out sawing (as shown in Figure 1) simultaneously.The quantity of parallel lines part generally corresponds to the quantity of slicing treatment.Such as, line can be wound around by this way so that the gauze obtained includes 100 the line parts being arranged in parallel.The wafer being pushed the net by these 100 lines is cut into 101.
The transporting velocity of line is such as in the scope of up to 20m/s or even 25m/s.The motor driving line usually has the motor of little momentum, with in order to stop in short time period and accelerate.This is particularly useful in providing movable embodiments of the invention.Such as, the direction of the movement of line can be changed at least every 10 seconds, at least every 30 seconds or at least every 1 minute.
According to embodiment, in the process of one blank of sawing (or several blanks of sawing abreast), line moving direction has been changed at least 10 times, typically at least 100 times or at least 500 times.The process of sawing blank changes line moving direction and reduces the overall tapering of the wafer obtained.If for complete blank, line is moved through blank in a same direction, then the wafer that can obtain has trapezoidal shape, and this is owing to carrying more slurry at the line entering blank side than at the line leaving blank side.But, if changing the moving direction by blank every now and then, then can compensate this effect.
In one embodiment, one of them motor (such as, motor 122) is as main motor, and all the other motor 124,126,128 are used as from motor 124,126,128.It is to say, main motor 122 can control the operation from motor 124,126,128 so that follow main motor 122 from motor 124,126,128.Thus, in saw singulation, the synchronicity of the operation of motor 122,124,126,128 is improved, and can maintain.In addition, about several motor or the mode of operation of main motor information (namely, the actual speed of some motor or main motor) camera control unit 25 can be transferred to, with in order to make electromotor velocity Tong Bu with the operation of photographing unit.
According to some embodiments that can combine with other embodiments described in this specification, it is provided that two or more bobbin, it is used for forming at least one gauze.Such as, two, three or even four bobbins can be used to provide line.Thus, according to different embodiments, it is provided that the method that such as the more LED reverse mounting type in 100 μm to 170 μ m carries out sawing.Generally, moreover it is possible to the wafer that sawing is thinner at a higher speed, such as feed material speed, in 2 μm/s to 12 μm/s scope, ordinarily be about 5 μm/s to 7 μm/s.
Compared with single wire system, by there is two or more bobbin and thus there is two or more line, the load reduction on each line.Typically, for single line net, compared with two-wire net, due to wafer surface, to the increase of line surface area, load increases.The load increased can cause less cutting speed.Thus, use two or more line can increase cutting speed, for instance to make it possible to provide and effectively cut area or 12m2/ h or more cutting area speed.
Fig. 3 illustrates the front view of the embodiment of the saw control system 1 for scroll saw.In figure 3, for illustration purposes, it is shown that in the line part (shown in dotted line) in device front.Camera control unit 25 is commonly available to detect the change of at least one physical condition of line 230 by analyzing the image of photographing unit shooting.If line 230 ruptures, or when Real time displaying goes out unacceptable slimming, control unit detects this change, and generally starts reaction.This reaction can be generally the control that (not by the restriction of the present embodiment) increase of linear velocity, the reduction of the speed of table and/or line by this way move, in this approach compared with the operation before detection, the part moved forward increase compared with the part being moved rearwards by.
Such as, the image according to photographing unit shooting, line can show the physical condition of such as abrasion, linear diameter, line homogeneity, diamond concentration and/or diamond distribution, and this physical condition exceedes first threshold.Thus, in the case, scroll saw controls system and can program linear velocity increases selectable value (such as increasing at least 10%), the tension force of line is increased selectable value (in order to reduce the probability of fracture) (such as increasing at least 10%), by line be moved rearwards by increase selectable value (such as at least 20%).Additionally or alternatively, scroll saw control system can program the speed of table reduces selectable value (such as reducing at least 10%).Thus, line processes for less sawing.
According to some embodiments, at least one physical condition, detect line continuously." physical condition " in this regard relates generally to whether line demonstrates big abrasion or homogeneity, or the problem whether line has any kind of defect, gap, fracture, the change of structure (such as particle size), high-caliber use (such as, big slimming) etc..That understands in this context is interpreted as with selectable interval repeatedly continuously.It is identical that duration is generally moved with line in one direction in this time interval.Once make line stop to be moved along opposite direction by line, according to embodiment, detect line.When online physical condition exceedes threshold value, as reaction, the pattern of operation changes.Once the parameters of detection or all parameters turn again in admissible scope, then the pattern operated can be reset to common pattern.
The photographing unit understood in this specification generally includes the ability processing visible radiation.According to other embodiments, photographing unit goes for processing the radiation in extra optical scope, such as infrared ray, ultraviolet radiation, X-ray, Alpha's particular radiation, electric particles radiation and/or gamma ray.According to common embodiment, it is the part arranged for one or more the source in listed emission types.Such as, when being applicable to the photographing unit processing radiation in optical range (400-800nm), the environment light of the use of LED can be used as respective light source.Photographing unit can be applied with the form of photoelectric sensor or ccd sensor (charge-coupled image sensor).
Photographing unit is generally disposed adjacent with the part that should be monitored or supervise of line.In the scroll saw of gauze used as described above, photographing unit can be disposed adjacent with the part of the projection parallel to each other of line as shown in Figure 2.In an embodiment, photographing unit 20 is installed to support member, generally, is installed to the surface of plate, solid or housing, and these plates, solid or housing can be made up of plastics, metal or any other material being suitable for.
According to some embodiments, many photographing units are set.This scroll saw being particularly suited for including two or more line.In the case, generally, each line provides at least one photographing unit.In operation, each line is detected by least one photographing unit.Two or more photographing unit can be operated by identical camera control unit according to respective linear velocity, or each photographing unit can have the camera control unit for operating photographing unit.In any case, each in many photographing units according to each photographing unit for the speed of line and operate.
Additionally, according to another embodiment that can combine with other embodiments, thinner line can be used, for instance, there is the line of the thickness of maximum 120 μm or maximum 80 μm.Thus, cutting area increases.Generally, when sawing is supported by slurry, the thickness of online use procedure center line reduces.Thus, if single line for bigger cutting area, then exists, line is quickly thinning until the risk of fracture occurs line.Thus, the load that two lines reduce on line on the one hand is used in order to set up gauze (such as, continuous print gauze), it is possible to realize higher cutting speed, and on the other hand, it is possible to realize thinner line, this allows less linear distance, thus increases cutting area.
Usually, not by the restriction of any embodiment, each photographing unit is applicable to check at least one line part.Generally, many (such as two, three or more) photographing units are generally arranged to row.If the distance between parallel line part less (this is common for some scroll saws for semiconductor processes), then each photographing unit can cover many line parts, generally from 4 to 100 parallel lines parts, more generally from 20 to 50 line parts.Fig. 4 schematically shows the embodiment wherein providing four photographing units.Although embodiment illustrates simply uses a line as mentioned, but use and check two or four lines in the illustrated embodiment it is also possible that.
In the embodiment described in this manual, the distance between line is from 110 μm to 310 μm.Distance between photographing unit 20 and line 230 part depends on multiple factor, for instance, type that photographing unit adopts, their technical specification, line type and thickness etc..Generally, this distance is generally from 1cm to 20cm, more specifically between 5 cm and 15 cm, and such as 10cm+/-2.5cm.According to embodiment, the net of up to 10mm (especially between 1 mm and 5 mm) is in the visual field of photographing unit.Generally, this is corresponding to the imaging of once up to 30 lines, specifically in the imaging between 5 and 20 lines.
The signal of one or more photographing unit 20 communicates with control unit 25 via connecting line 15.As discussed, camera control unit is usually the controller of scroll saw, but it may also is that independent device.Controller is suitable in the signal checking and analyzing one or more photographing unit the operating process of scroll saw.As discussed, if line shows is defined as abnormal any physical condition, then control unit detects this change, and triggers reaction.
In an embodiment, camera control unit makes the operation of scroll saw stop immediately when defect occurs in the line detected, with the less desirable result caused to prevent operation owing to being undertaken by above-described line defect.Camera control unit can also additionally send alarm signal.Alarm signal generally such as sends in the way of acoustics by means of calling set, loudspeaker or speaker, and can also send in an optical manner by means of luminescent device.Signal can also be sent to operator's screen or external device (ED) by this unit via computer network etc..The position of abnormal wire part can represent via the figure of the gauze including multiple line part and graphically show.
In an embodiment, camera control unit can distinguish the different brackets of the deterioration (such as defect, abrasion, abrasion, inhomogeneity etc.) of line.This means to may identify which the slightly change of the camera signal that the little change (the reduction amount over-limit condition of the diameter of line) of at least one performance of line causes.Then, it can as extremely carrying out labelling.In an embodiment, the control unit of this device is applicable to the change of one or more operating parameter determining whether the change of the performance of line can cause scroll saw.The change of one or more operating parameter can include one or more in following action:
According to embodiment, linear velocity can increase as reaction.According to common embodiment, increase linear velocity along with reducing the speed of table.Alternatively, while not changing linear velocity, the speed of table is only reduced.
Understanding according to the present invention, has several option to increase linear velocity.One option is that the minimum speed of line is increased such as at least 10% or at least 20%.The speed of table can be reduced with identical percentage ratio (it represents the increase of linear velocity).Such as, if line with such as at least the speed of 15m/s move, then linear velocity can increase at least 18m/s (its corresponding to linear velocity increase 20%).
Can be the deceleration reducing line after direction changes with another option of aforementioned options combination.The reduction of deceleration is particularly useful when sensing crack.
According to embodiment, another reaction can increase the length of the line moved forward, and/or reduces the length of the line being moved rearwards by.
Usually, being not restricted by the embodiments, line can move forward First Line length, and line can be moved rearwards by the second line length subsequently.Some embodiments according to the generally operation referring generally to line, First Line length is slightly larger than the second line length." summary " understood within a context refers in particular to the difference up to 10%, and more specifically up to 5% or only 1%.According to other embodiments, First Line length such as reaches between 5m and 50m more than the second line length, generally between 5m and 20m, such as between 5m and 10m.Thus, after one moves forward and is moved rearwards by, line has moved forward the length of the difference being defined between the first length and the second length.Generally, this length difference winds on take-up bobbin, because it has generally been thought that it is not suitable for further use.
As extra reaction, this operation can stop.That is, in this embodiment, testing result makes scroll saw stop.Alarm signal can trigger, with in order to by expiry notification operator.If such as linear diameter gets lower than outage threshold, and causes the stopping of line.The general effect of the present invention is to avoid operation to stop.
According to some embodiments, photographing unit and take-up bobbin adjacent positioned.The term " adjacent " understood in this specification is understood as photographing unit and is positioned at the position of line after sawing.Thus, after photographing unit, line can cross one or more guide reel etc., and after this, the coil of wire is wound on take-up bobbin place.This embodiment is schematically illustrated in Figure 5.
In some embodiments of the invention, scroll saw is controlled so that line forwardly and rearwardly moves in an alternating fashion.As discussed, generally, the line length moved forward is bigger than the length of the line being moved rearwards by such as between 0.5% and 5%, between more generally big 0.5% and 3%.Generally, each moving direction (that is, forwardly and rearwardly) operation continues the interval of (between 10s and 1min) between 10s and 5min.As discussed, the interval moved forward is than the large interval such as at least 0.5% or 1% being moved rearwards by.
Synchronize according to various aspects of the invention, the operation of photographing unit and the operation of line.Thus, it is possible to check line when the picture quality obtained maximizes.Such as, according to some embodiments, trigger photographing unit with always on-line velocity for zero or substantially zeroed time shooting image.Term " substantially zeroed " can include up to the speed of +/-1m/s.Generally, when the moving direction of line changes, for instance be moved rearwards by from moving forward to or move forward from moving backward to, the operation of photographing unit is triggered.
According to some embodiments, photographing unit is one image of shooting when its operation is triggered, according to other embodiments, photographing unit is shooting at least two, three or even more image when its operation is triggered, and according to another embodiment, photographing unit may be adapted to shoot consistently image, such as per second at least 30 or 50 images (such as, photographing unit can be video camera).Usually, analyzing the image of all shootings, with in order to check line, or alternatively, use the only one image in image set to be further analyzed, specifically, one image surpasses other images in picture quality (such as contrast).Alternatively or in addition to, the scroll saw described in this specification controls system can also at least include the second photographing unit, and this second photographing unit may be adapted to and the image of the first photographing unit shooting line simultaneously.The image of the first photographing unit shooting and the image of the second photographing unit shooting may be used for the analysis checked, or simply use an image, and specifically, one image surpasses at least one other image in picture quality (such as contrast).
The feature that photographing unit operates according to linear velocity is generally not excluded for the probability that photographing unit shoots consistently.Such as, photographing unit can be video camera.But, in the case, generally analyze only in being capable of being suitable under the linear velocity of outcome quality those images of shooting.In other words, according to embodiment, it is possible to abandon the image shot at high speeds, and analyze at the linear velocity reduced or the even image of shooting under zero line speed.
The feature that photographing unit operates according to linear velocity is generally not excluded for the probability that photographing unit shoots consistently and analyzes all images.But, according to embodiment, only in the linear velocity reduced or even the analysis result of those images of shooting can cause the change of at least one operating parameter of scroll saw under zero line speed.
The inspection to line understood in this specification specifically includes the analysis to such as linear diameter and/or the line parameter of line homogeneity (that is, the change of diameter).Can defining the threshold value being storable in data storage cell, this data storage cell can be that scroll saw controls a part for system or is connected with scroll saw control system.Such as, the camera control unit 25 illustrated in the accompanying drawings can be provided with this data storage (not shown).Scroll saw controls system and goes for the measured value of linear diameter compared with stored threshold value.According to this as a result, it is possible to trigger action.
For example, it is possible to definition sets of threshold values, for instance this sets of threshold values includes first threshold and Second Threshold.Threshold value can refer to linear diameter thus indicate that the abrasion of outlet.
Second Threshold can define diameter, wherein, causes the operation of scroll saw to be switched to the second operator scheme lower than this diameter.Second operator scheme generally includes the linear velocity higher than normal operating.Term " normal operating " thus refers to that wherein scroll saw is not subject to the operator scheme of any impact lower than any threshold value with the speed operation wanted.Such as, the speed of the second operator scheme can increase at least 5% or at least 10% compared with normal operating.
First threshold can define diameter, wherein, causes the operation of scroll saw to be switched to the first operator scheme lower than this diameter.First operator scheme generally includes the linear velocity higher than normal operating.Additionally, the first operator scheme can include the linear velocity of the speed still less than the second operator scheme.Such as, the speed of the first operator scheme can increase at least 3% or at least 6% compared with normal operating.Alternatively or in addition to, the first and second operator schemes can include ratio bigger between the moving forward and be moved rearwards by of compared with normal operating line.
Although the present embodiment is with reference to discrete threshold value, but the function relevant with the operating parameter of scroll saw (such as, linear velocity) generally can also be defined into the line parameter (such as, linear diameter) of one or more measurement by it.Such as, if d is the linear diameter measured, and set v as operating the speed of scroll saw, then using as the speed of the function of linear diameter (that is, according to v=f (d))) operate scroll saw.Generally, function f (d) is incremented by function, for instance, v can be inversely proportional to d.It is apparent that these exemplary relation are generally about the situation more than minimum speed of scroll saw energy normal operating.
Phrase " according to linear velocity operation photographing unit " specifically includes the synchronization of linear velocity and photographing unit.Several embodiments described in this specification make the operation of photographing unit and the movable synchronization of line.But, the change synchronizing the moving direction without requiring line understood in this specification.On the contrary, line can only in a direction (such as, forward direction) upper mobile specific time period, and wherein, in this moving process, still expectation checks line.Linear velocity can be reduced at specific interval, with the operation in order to trigger photographing unit, and be thus able to realize high-quality image result.
Such as, line can move with First Speed.First Speed can be the maximal rate of scroll saw.After selectable interval, linear velocity is reduced to lower speed value, with the image of shooting line.Relatively low velocity can zero (containing) and maximal rate (without) between.Such as, maximal rate can 15 and 25m/s scope in, and shoot image relatively low velocity can in the scope between 0 and 10m/s, generally between 0 and 5m/s.Immediately after the image is captured, linear velocity increases again, generally increases to maximal rate.This mode of operation can repeat with selectable interval.
Perhaps after many selectable intervals (such as, after five or ten), thus it is possible to vary line moving direction.When changing the moving direction of line with other selectable intervals (its generally with in this paragraph before selectable interval of describing identical) in line moving process subsequently, it is possible to the operation of triggering photographing unit.
According to embodiment, the present invention relates to image analysis system, it is the image of shooting line (generally, diamond wire or steel line) in saw singulation.The ratio of the image related in this specification is microcosmic.Embodiment according to some diagrams, line moves in the way of movable by the speed of up to 20m/s, and wherein, generally, each moving forward followed by and be moved rearwards by (as long as at least line be not finished or process change due to other reasons).
In an embodiment, (moving forward from moving backward to or be moved rearwards by from moving forward to) in the change process of direction, the speed of line is equal to 0m/s.It is Tong Bus with for the image of shooting line the execution analysis to one or more captured image that the present invention proposes the operation making linear velocity and photographing unit.Analyzing from this, it is possible to obtain the information relevant with in the performance measuring position line, for instance, diamond concentration in abrasion, quality, homogeneity, line and diamond distribution.When steel line, abrasion is generally largely associated with the diameter of the line caused.
By checking line when linear velocity reduces even for zero, compared with wherein carrying out the technology that checks in normal (at full speed) operating process, the result of shooting image significantly improves.Therefore, it is possible to carry out high accuracy analysis, to allow to obtain the precise information about all one or more linear energy as the aforementioned.Thus, allow again the further operation using this information to control scroll saw in optimal manner.
Thus, as a result, according to some embodiments, be particularly advantageous by the line position place that photographing unit location is complete sawing process online.In other words, it is particularly advantageous that photographing unit is positioned adjacent to winding bobbin.This position can obtain be entirely through scroll saw after line states relevant full information, and described synchronization is capable of high accuracy analysis.Information that is that obtained and that analyze can be used for controlling further the operation of scroll saw, such as control line speed.
Thus, the invention provides the measurement to the actual line abrasion produced by continuing sawing to process.Generally allow to carry out action immediately to reduce abrasion.As discussed, photographing unit positions after leaving gauze generally online.Rapid image obtains system and is typically used as photographing unit.It can monitor the actual linear diameter leaving section space in real time.Then this information be used for maintaining operating parameter, to slow down or to accelerate rate of cutting and/or linear velocity, with in order to maintain constant abrasion, thus produces optimized line consumption and low thread breakage incidence rate.Special-purpose software can show diameter, and provides the device regulated for automaton.
Additionally, general photographing unit can also be positioned to adjacent with the bobbin providing untapped line.Thus, the present invention can be used for new linear diameter and measures, and specifically, checks tolerance state and chooses the line fallen short of specifications.The present invention can be used for print processing and controls the statistical report with certificate of quality.In the operating process of scroll saw, line tension can remain constant, for instance maintains 10-30N.But, according to embodiment of the disclosure, line tension temporarily changes in response to the inspection result of untapped line.Such as, if untapped line demonstrates crack etc., it is possible to reduce tension force, until each line part is again wrapped around on line bobbin.
According to embodiment, photographing unit is with being additionally provided with following exemplary with reference to Fig. 6 one or more feature discussed.Can arranging laser screening arrangement, according to specific embodiment, this laser screening arrangement is positioned in scroll saw place or scroll saw.It can include protective cover, to avoid the damage or the fault that such as cause due to such as slurry sputtering etc..
Graphical representation of exemplary referring more particularly to Fig. 6, it is possible to laser screening arrangement 680 is set.Laser screening arrangement is commonly arranged to check line 230.In the case, line 230 is contained in the recess 690 of device.Laser screening arrangement includes the reflecting mirror 600 rotated.The reflecting mirror rotated seems the cross section (but being small size) with circle, and reflecting mirror is made up of multiple surface plates being arranged in position adjacent one another are.Thus, once reflecting mirror pivots, then the reflection direction of reflecting mirror checker consistently.
There is provided the light source of such as laser diode 640, for producing the light beam 650 of laser.The light beam of laser is incident on reflecting mirror 600 place of rotation.Light beam 650 is reflexed to reflecting mirror 610 and 611 by an alternating fashion.In the diagram shown in Fig. 6, light beam 650 reflects towards reflecting mirror 610.Light beam is reflected through other optional Optical devices (all as directed lens 630 and 631) by these reflecting mirrors respectively, and respectively through lens 670 and 671.Thus, the measured laser beam of line 230 surrounds in an alternating fashion from both sides.Laser beam record is in photographing unit 621 and 622.Photographing unit 621 and 622 can be the photographing unit described in this specification, and specifically, they can be photodiode.Photographing unit 621 and 622 is connected to video signal processing unit 660, and this video signal processing unit 660 is applicable to normally assessment of the measurement result.Camera control unit described in this specification can serve as video signal processing unit.
Though the aforementioned embodiments of the invention that relate to, can design other and the further embodiment of the present invention when without departing from the elemental range of the present invention, and the scope of the present invention is determined by claim.

Claims (20)

1. the scroll saw for operating scroll saw controls a system, and described scroll saw is adapted to pass through and cuts described wafer so that line is moved relative to wafer by selectable linear velocity, and described scroll saw controls system and includes:
A) for checking the photographing unit of described line;
B) for operating the camera control unit of described photographing unit according to linear velocity,
Wherein, described camera control unit is configured to distinguish the different brackets of the deterioration of described line, make identify the slightly change of the camera signal caused by little change of the performance of described line and slightly change as extremely carrying out labelling using described subsequently, thus determining whether the change of the performance of described line can cause the change of one or more operating parameter of described scroll saw.
2. scroll saw according to claim 1 controls system, and described scroll saw controls system and changes at least one operating parameter of described scroll saw according to the result checked.
3. scroll saw according to claim 2 controls system, and wherein, at least one operating parameter described is that one or more from following group selects: increase described linear velocity, reduce the speed of table and increase and move forward and be moved rearwards by between ratio.
4. scroll saw according to claim 1 controls system, wherein, checks that described line includes checking one or more in following performance: the diamond distribution of line abrasion, linear diameter, line homogeneity, the diamond concentration of described line and described line.
5. a scroll saw, including:
Scroll saw for operating scroll saw controls system, and described scroll saw is adapted to pass through and cuts described wafer so that line is moved relative to wafer by selectable linear velocity, and described scroll saw controls system and includes:
A) for checking the photographing unit of described line;
B) for operating the camera control unit of described photographing unit according to linear velocity,
Wherein, described camera control unit is configured to distinguish the different brackets of the deterioration of described line, make identify the slightly change of the camera signal caused by little change of the performance of described line and slightly change as extremely carrying out labelling using described subsequently, thus determining whether the change of the performance of described line can cause the change of one or more operating parameter of described scroll saw.
6. scroll saw according to claim 5, also includes take-up bobbin, wherein, and described photographing unit and described take-up bobbin adjacent positioned.
7. the scroll saw according to claim 5 or 6, also includes at least one driver, and described driver is used for driving described line, and wherein, described driver is adapted for carrying out moving forward and backward.
8. the scroll saw according to claim 5 or 6, wherein, described line is diamond wire.
9. the scroll saw according to claim 5 or 6, described scroll saw is suitable for changing at least one operating parameter of described scroll saw according to the result checked.
10. the scroll saw according to claim 5 or 6, wherein, at least one operating parameter described is that one or more from following group selects: increase described linear velocity, reduce the speed of table and increase and move forward and be moved rearwards by between ratio.
11. the scroll saw according to claim 5 or 6, wherein, check that described line includes checking one or more in following performance: the diamond distribution of line abrasion, linear diameter, line homogeneity, the diamond concentration of described line and described line.
12. a method for the line for checking scroll saw, described scroll saw is adapted to pass through the relative movement of described line and wafer to cut described wafer, and described method comprises the steps:
A) described line is moved with variable linear velocity;And
B) check described line according to described linear velocity, be derived from checking result,
Wherein, the different brackets of the deterioration of described line is distinguished by camera control unit, make identify the slightly change of the camera signal caused by little change of the performance of described line and slightly change as extremely carrying out labelling using described subsequently, thus determining whether the change of the performance of described line can cause the change of one or more operating parameter of described scroll saw.
13. method according to claim 12, wherein, check that described line includes shooting at least one image of described line with photographing unit.
14. the method according to claim 12 or 13, wherein, check that described line includes checking one or more in following performance: the diamond distribution of line abrasion, line mass, linear diameter, line homogeneity, the diamond concentration of described line and described line.
15. the method according to claim 12 or 13, also include operating described scroll saw.
16. method according to claim 15, wherein, operate described scroll saw and include moving described line along a first direction very first time interval, and described line is moved the second interval along second direction, wherein, described first direction and described second direction are opposite each other.
17. method according to claim 16, wherein, described second interval is less than described very first time interval.
18. method according to claim 15, wherein, check described line when described linear velocity is zero.
19. method according to claim 15, wherein, operate described scroll saw and include changing according to described inspection result at least one operating parameter of described scroll saw.
20. method according to claim 19, wherein, at least one operating parameter described is that one or more from following group selects: increase described linear velocity, reduce the speed of table and increase and move forward and be moved rearwards by between ratio.
CN201110459141.6A 2011-10-28 2011-12-23 Scroll saw controls system and scroll saw Active CN103085185B (en)

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