CN103068142A - Center electrode and accelerating tube applying the same - Google Patents

Center electrode and accelerating tube applying the same Download PDF

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Publication number
CN103068142A
CN103068142A CN 201210573411 CN201210573411A CN103068142A CN 103068142 A CN103068142 A CN 103068142A CN 201210573411 CN201210573411 CN 201210573411 CN 201210573411 A CN201210573411 A CN 201210573411A CN 103068142 A CN103068142 A CN 103068142A
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CN
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Prior art keywords
accelerating tube
electrode
center electrode
shaped
intermediate electrode
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CN 201210573411
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Chinese (zh)
Inventor
朱锦华
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江苏达胜加速器制造有限公司
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Abstract

The invention discloses a center electrode and an accelerating tube applying the same. The center electrode is composed of two mutually symmetrical V-shaped electrodes and the center electrode is in a shape of double V-discs. Two V-shaped corrosion resistant plates are located on the same horizontal line and an open mouth is formed between the two V-shaped corrosion resistant plates. The center electrode and the accelerating tube applying the same solve the problems that the accelerating tube is low in anti-pressure level and the axial electric field distribution is extremely not uniform in the prior art. The double-V-shaped center electrode is installed between two adjacent alumina ceramics loops so as to enable the accelerating tube to acquire a better and uniform axial electric field distribution. The anti-pressure level of the accelerating tube is improved and a secondary electron emission can be avoided. The interior electro-discharge can be brought about to affect the normal working of the accelerating tube.

Description

—种中间电极及应用该中间电极的加速管 - application of this kind of the intermediate electrode and the intermediate electrode accelerating tube

技术领域 FIELD

[0001] 本发明涉及了一种中间电极及应用该中间电极的加速管,属于加速器技术领域。 [0001] The present invention relates to an application of the intermediate electrode and the accelerating tube intermediate electrode, the accelerator technical field belongs. 背景技术 Background technique

[0002] 加速管是加速器的一个重要关键部件,其管壁是由焊接起来的氧化铝瓷环组成。 [0002] The accelerating tube is an important key accelerator member, which is welded to the wall of the alumina ceramic rings.

[0003] 在未加中间电极的加速管中,轴向电位分布是极不均匀的。 [0003] In the intermediate electrode is not applied in the accelerating tube, the axial potential distribution is very uneven. 在电极附近的电场强度比整个加速管的平均电场强度要大得多,特别在电子枪附近。 In the electric field intensity near the electrode than the overall average electric field strength of the accelerating tube is much greater, particularly in the vicinity of the electron gun. 为了提高加速管的耐压水平,改变轴向电场分布极不均匀的状态,其主要途径是对加速管采取强制性的均匀措施。 In order to improve the withstand voltage level of the accelerating tube, changing the axial electric field is very unevenly distributed state, which is the main route of the accelerating tube uniformly coercive measures.

发明内容 SUMMARY

[0004] 本发明所要解决的技术问题是提供一种中间电极及应用该中间电极的加速管,使加速管能够获得较好的均匀的轴向电场分布,提高了加速管的耐压水平。 [0004] The present invention solves the technical problem of providing an intermediate electrode and the intermediate electrode is applied accelerating tube, so that the accelerating tube to obtain a better uniformity of distribution of the axial electric field to improve the pressure level of the accelerating tube.

[0005] 为了解决上述技术问题,本发明所采用的技术方案是: [0005] To solve the above technical problem, the technical solution employed in the present invention:

一种中间电极,由两个相互对称的V型电极组成,呈双V碟形式,所述两个V型不锈钢板位于同一水平线,且两者之间设有开口。 An intermediate electrode, the two electrodes are symmetrical V-type composition, a double V shape disc form, the two V-shaped stainless steel plate is in the same level, and is provided with an opening therebetween.

[0006] 前述的一种中间电极,其特征在于:所述两个V型电极相靠近的两个端口均安装有铝环。 [0006] An intermediate of the electrode, characterized in that: the two ports near the two V-shaped electrodes are attached to an aluminum ring.

[0007] 前述的一种中间电极,其特征在于:所述V型电极为无磁不锈钢材质,厚度为 [0007] one of the intermediate electrode, wherein: said V-shaped electrode is a non-magnetic stainless steel, of a thickness

[0008] 一种应用如权利要求1-3中任意一项所述中间电极的加速管,包括多个焊接而成的氧化铝瓷环,所述相邻两个氧化铝瓷环之间安装有中间电极,所述中间电极与所述氧化铝瓷环上的外电极片相连接。 [0008] A use as claimed in any one of claims 1-3 in the intermediate accelerating electrode tube comprising a plurality of alumina ceramic ring welded, between the two adjacent mounting ring having an alumina ceramic intermediate electrode, said intermediate sheet and outer electrodes on said alumina ceramic ring is connected.

[0009] 本发明的有益效果是:双V型中间电极具有改善加速管整体电场均匀性的功能,能起到一定程度的屏蔽作用,使发散的电子不至于轰击到氧化铝瓷环的内壁上;通过在相邻两个氧化铝瓷环之间安装双V型中间电极,使加速管可以获得较好的均匀的轴向电场分布,提高了加速管的耐压水平,避免发生二次电子发射,导致内部放电而影响加速管正常工作。 [0009] Advantageous effects of the present invention are: a double V-shaped intermediate electrode has an effect of improving the shielding function of the accelerating tube uniformly the whole field, can play a certain extent, so that electrons would not impinge upon the diverging inner walls of the alumina ceramic ring ; double-V by installing an intermediate electrode between the adjacent two alumina ceramic ring, so that the accelerating tube can produce good uniform axial electric field distribution to improve the pressure level of the accelerating tube, avoid secondary electron emission , resulting in the acceleration tube internal discharge affecting normal work.

附图说明 BRIEF DESCRIPTION

[0010] 图1是本发明中间电极的结构示意图; [0010] FIG. 1 is a schematic diagram of the structure of the intermediate electrode of the present invention;

图2是本发明应用该中间电极的加速管的结构示意图。 FIG 2 is a schematic diagram of the accelerating tube structure of the present invention is applied to the intermediate electrode.

具体实施方式 detailed description

[0011] 下面将结合说明书附图,对本发明做进一步的说明。 [0011] The following description in conjunction with the accompanying drawings, the present invention is further illustrated.

[0012] 如图1所示,一种中间电极,由两个相互对称的V型电极21组成,呈双V碟形式,所述两个V型不锈钢板21位于同一水平线,且两者之间设有开口22,双V型中间电极具有改善加速管整体电场均匀性的功能,能起到一定程度的屏蔽作用,使发散的电子不至于轰击到氧化铝瓷环的内壁上,开口22作为电子的加速通到。 [0012] As shown in FIG. 1, an intermediate electrode, the two electrodes are symmetrical V-type 21 composition was in the form of a double disc V, the two V-shaped stainless steel plate 21 in the same horizontal line, and between An opening 22, the intermediate electrode has a double-V acceleration improved overall uniformity of the electric field function pipe, can play a certain degree of shielding effect, so that electrons would not impinge upon the diverging inner walls of the alumina ceramic ring, the opening 22 as the electronic It accelerated to pass.

[0013] 所述两个V型电极21相靠近的两个端口均安装有铝环4,以减少二次电子的产生,所述V型电极21为无磁不锈钢材质,厚度为lmm-2mm。 [0013] The V-type two-port two electrodes 21 are mounted near the aluminum ring 4, to reduce the generation of secondary electrons, said V-shaped electrode 21 of non-magnetic stainless steel, having a thickness of lmm-2mm.

[0014] 一种应用前述中间电极的加速管,包括多个焊接而成的氧化铝瓷环1,所述相邻两个氧化铝瓷环I之间安装有中间电极2,所述中间电极2与所述氧化铝瓷环I上的外电极片3相连接。 [0014] An application of the accelerating intermediate electrode tube comprising a plurality of welded alumina ceramic ring 1, the intermediate electrode is mounted between the adjacent two I-alumina ceramic ring 2, the intermediate electrode 2 3 is connected to the outer electrode chip on the aluminum oxide ceramic ring I. 通过在相邻两个氧化铝瓷环I之间安装双V型中间电极2,使加速管可以获得较好的均匀的轴向电场分布,提高了加速管的耐压水平,避免发生二次电子发射,导致内部放电而影响加速管正常工作。 By mounting the adjacent intermediate electrode between the double V-I two alumina ceramic ring 2, so that the accelerating tube can produce good uniform axial electric field distribution to improve the pressure level of the accelerating tube, avoid secondary electrons emission, leading to inside the discharge tube affects the acceleration work.

[0015] 综上所述,本发明提供的一种中间电极及应用该中间电极的加速管,使加速管能够获得较好的均匀的轴向电场分布,提高了加速管的耐压水平。 [0015] In summary, the present invention provides an intermediate electrode and the intermediate electrode of the accelerating tube application, so that the accelerating tube to obtain a good uniform axial electric field distribution to improve the pressure level of the accelerating tube.

[0016] 以上显示和描述了本发明的基本原理、主要特征及优点。 [0016] The above and described the principles of the invention, the main features and advantages. 本行业的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的只是说明本发明的原理,在不脱离本发明精神和范围的前提下,本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明范围内。 The industry the art will appreciate, the present invention is not limited to the above embodiment, the above-described examples and embodiments described in the specification are only illustrative of the principles of the present invention, without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, changes and modifications which fall within the scope of the claimed invention. 本发明要求保护范围由所附的权利要求书及其等效物界。 The scope of the invention as claimed or the equivalents thereof bounded by the appended claims.

Claims (4)

  1. 1. 一种中间电极,其特征在于:由两个相互对称的V型电极(21)组成,呈双V碟形式,所述两个V型不锈钢板(21)位于同一水平线,且两者之间设有开口(22)。 An intermediate electrode, characterized in that: the two V-shaped electrode (21) are symmetrical composition was in the form of a double disc V, the two V-shaped stainless steel plate (21) located at the same level, and both of provided between an opening (22).
  2. 2.根据权利要求1所述的一种中间电极,其特征在于:所述两个V型电极(21)相靠近的两个端口均安装有铝环(4)。 An intermediate electrode according to claim 1, wherein: said two V-shaped electrode (21) with two ports are mounted near the aluminum ring (4).
  3. 3.根据权利要求1或2所述的一种中间电极,其特征在于:所述V型电极(21)为无磁不锈钢材质,厚度为lmm-2mm。 An electrode or the intermediate according to claim 1, wherein: said V-shaped electrode (21) is a non-magnetic stainless steel, having a thickness of lmm-2mm.
  4. 4. 一种应用如权利要求1-3中任意一项所述中间电极的加速管,包括多个焊接而成的氧化铝瓷环(I),其特征在于:所述相邻两个氧化铝瓷环(I)之间安装有中间电极(2),所述中间电极(2 )与所述氧化铝瓷环(I)上的外电极片(3 )相连接。 A use as claimed in any one of claims 1-3 accelerating intermediate electrode tube comprising a plurality of welded aluminum oxide ceramic ring (I), characterized in that: said two adjacent alumina ceramic ring is mounted between (I) an intermediate electrode (2), said intermediate electrode (2) and the outer ring of alumina ceramic electrode sheet (3) on the (I) is connected.
CN 201210573411 2012-12-26 2012-12-26 Center electrode and accelerating tube applying the same CN103068142A (en)

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06176621A (en) * 1992-12-08 1994-06-24 Ritsumeikan High voltage-resistant insulator for accelerating tube, and its manufacture
JPH08234698A (en) * 1995-02-27 1996-09-13 Casio Comput Co Ltd Liquid crystal display device and liquid crystal display method
EP0840345A1 (en) * 1996-11-01 1998-05-06 Nec Corporation Field-emission cathode capable of forming an electron beam having a high current density and a little ripple
US20060273732A1 (en) * 2005-06-01 2006-12-07 Xtreme Technologies Gmbh Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma
CN101728203A (en) * 2008-10-22 2010-06-09 北京中科信电子装备有限公司 High energy ion implanter accelerator designing mode
CN201967235U (en) * 2010-11-24 2011-09-07 无锡爱邦辐射技术有限公司 Disk-shaped electrode plate electron accelerating tube of electron accelerator
WO2012014370A1 (en) * 2010-07-29 2012-02-02 株式会社 日立ハイテクノロジーズ Charged particle beam emitting device
CN202496128U (en) * 2012-03-14 2012-10-17 中国原子能科学研究院 High voltage accelerating tube used for accelerating high intensity ion beams
CN203039995U (en) * 2012-12-26 2013-07-03 江苏达胜加速器制造有限公司 Intermediate electrode and accelerating tube using same

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06176621A (en) * 1992-12-08 1994-06-24 Ritsumeikan High voltage-resistant insulator for accelerating tube, and its manufacture
JPH08234698A (en) * 1995-02-27 1996-09-13 Casio Comput Co Ltd Liquid crystal display device and liquid crystal display method
EP0840345A1 (en) * 1996-11-01 1998-05-06 Nec Corporation Field-emission cathode capable of forming an electron beam having a high current density and a little ripple
US20060273732A1 (en) * 2005-06-01 2006-12-07 Xtreme Technologies Gmbh Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma
CN101728203A (en) * 2008-10-22 2010-06-09 北京中科信电子装备有限公司 High energy ion implanter accelerator designing mode
WO2012014370A1 (en) * 2010-07-29 2012-02-02 株式会社 日立ハイテクノロジーズ Charged particle beam emitting device
CN201967235U (en) * 2010-11-24 2011-09-07 无锡爱邦辐射技术有限公司 Disk-shaped electrode plate electron accelerating tube of electron accelerator
CN202496128U (en) * 2012-03-14 2012-10-17 中国原子能科学研究院 High voltage accelerating tube used for accelerating high intensity ion beams
CN203039995U (en) * 2012-12-26 2013-07-03 江苏达胜加速器制造有限公司 Intermediate electrode and accelerating tube using same

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