CN103055600A - Wastewater recycling method and system - Google Patents

Wastewater recycling method and system Download PDF

Info

Publication number
CN103055600A
CN103055600A CN2012105946222A CN201210594622A CN103055600A CN 103055600 A CN103055600 A CN 103055600A CN 2012105946222 A CN2012105946222 A CN 2012105946222A CN 201210594622 A CN201210594622 A CN 201210594622A CN 103055600 A CN103055600 A CN 103055600A
Authority
CN
China
Prior art keywords
water
link
water quality
filter
liquid level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012105946222A
Other languages
Chinese (zh)
Other versions
CN103055600B (en
Inventor
田欢
朱峰
梁宏建
崔嘉轩
陈志军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yingli Group Co Ltd
Original Assignee
Yingli Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yingli Group Co Ltd filed Critical Yingli Group Co Ltd
Priority to CN201210594622.2A priority Critical patent/CN103055600B/en
Publication of CN103055600A publication Critical patent/CN103055600A/en
Application granted granted Critical
Publication of CN103055600B publication Critical patent/CN103055600B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The invention provides a wastewater recycling method and a wastewater recycling system, which aims to solve the problem that in the prior art the manufacturing of single and polycrystalline silicon sheets consumes a great amount of tape water. The method comprises the following steps: according to requirements on water quality of various water use procedures in the single and polycrystalline silicon sheet manufacturing process, classifying the water use procedures into a high-class water quality use procedure, a middle-class water quality use procedure and a low-class water quality use procedure; conducting purification treatment on the wastewater discharged in the high-class water quality use procedure; and using the purified wastewater in the middle-class water quality use procedure and the low-class water quality use procedure. According to the technical scheme, the wastewater in the polycrystalline silicon sheet manufacturing process is recycled and treated by using a primary sedimentation basin and a secondary sedimentation basin and is subsequently applied to the manufacturing process, and no extra tape water is used in the middle-class water quality use procedure and the low-class water quality use procedure, so that the tape water consumption in the single and polycrystalline silicon sheet manufacturing process is reduced.

Description

Wastewater recycling method and system
Technical field
The present invention relates to silicon chip and make the field, relate to especially a kind of wastewater recycling method and system.
Background technology
In the manufacture of solar cells field, the solar cell of making take polysilicon chip as matrix always is the main product in photovoltaic market, and single polysilicon chip production link is a water rich and influential family in whole crystal silicon solar energy battery industrial chain, advocate in country under the overall background of energy-saving and emission-reduction, how significantly to reduce the water resource unit consumption under the prerequisite that guarantees the normal operation of production technology and equipment is a problem demanding prompt solution.
At present, the production link of single polysilicon block and silicon chip substantially all utilizes the multi-wire saw mode to realize in the industry, be that the steel wire of high-speed cruising carries the mortar that contains the SiC particle silicon ingot is cut into silico briquette and silico briquette is cut into silicon chip, well imagine on the silico briquette of finishing cutting and the silicon chip surface and be stained with mortar, so carry out following process, need to carry out the spray irrigation operation with a large amount of water, the silico briquette that is stained with mortar and silicon chip are carried out preliminary treatment, water consumption is very big.
Simultaneously, grind in chamfering and the band saw link at silico briquette, in order to make edge of a knife cooling, also need a large amount of water.In the prior art, above-mentioned water mainly adopts running water, and is therefore larger to the consumption of running water.
Summary of the invention
The object of the invention is to provide a kind of wastewater recycling method and system, and single polysilicon chip manufacturing need to consume in a large number from the beginning water problem in the prior art to reduce.
For achieving the above object, according to an aspect of the present invention, a kind of wastewater recycling method is provided, be applied to single polysilicon chip manufacturing, the method comprises: to the requirement of water quality, the water link is divided into high water quality water link, medium water quality water link and the water quality water link such as low according to each water link in the polysilicon chip manufacture process; The waste water that high water quality water link is discharged carries out purified treatment, then as the water of medium water quality water link and the water quality water link such as low.
Further, method provided by the invention also comprises: the waste water that medium water quality water link and the water quality water link such as low are discharged carries out purified treatment, then as the water of medium water quality water link and the water quality water link such as low.
Further, the water quality water link such as low comprises the link that the link that the resulting silico briquette of cutting silicon ingot is washed, single polysilicon chip that the cutting silico briquette is obtained wash in advance, and, the link that used frock in the cutting is washed; Medium water quality water link comprises carries out shape and surface grinding adds the link that man-hour, water cooled off to single polysilicon block; High water quality water link comprises the link that single polysilicon chip of adopting deionized water that the cutting silico briquette is obtained cleans.
Further, in the high water quality water link, adopt multi-groove type ultrasonic wave silicon wafer cleaner that single polysilicon chip that the cutting silico briquette obtains is cleaned; The step that the waste water that high water quality water link is discharged carries out purified treatment comprises: the waste water that pre-potcher and the smart potcher of multi-groove type ultrasonic wave silicon wafer cleaner are discharged carries out purified treatment.
The step that the waste water of further, high water quality water link being discharged carries out purified treatment comprises: the waste water that high water quality water link is discharged successively carries out one-level precipitation and filtration; The step that the waste water that medium water quality water link and the water quality water link such as low are discharged carries out purified treatment comprises: the waste water that medium water quality water link and the water quality water link such as low are discharged successively carries out the two-stage precipitation and filters.
According to another aspect of the present invention, also provide a kind of wastewater recycling system, be applied to single polysilicon chip manufacturing, this system comprises: first order sedimentation basin; Second level sedimentation basin; Filter; Wherein, first order sedimentation basin, second level sedimentation basin, filter are connected successively; First order sedimentation basin have the first order waste water receiving port that links to each other with the wastewater outlet of medium water quality water link and the water quality water link such as low and will precipitate after the waste water first order sedimentation basin outlet of discharging; Second level sedimentation basin has the second level sedimentation basin entrance that links to each other with the outlet of first order sedimentation basin and the second level waste water receiving port that links to each other with the wastewater outlet of high water quality water link; High water quality water link, medium water quality water link and the water quality water link such as low are according to each water link in single polysilicon chip manufacture process the requirement of water quality to be divided.
Further, system provided by the invention also comprises aqua storage tank, booster pump and pressurized tank after filter front pump, the filter, wherein: link to each other by filtering front pump between second level sedimentation basin and the filter, the input of filter front pump links to each other with second level sedimentation basin, and delivery side of pump links to each other with filter before the filter; The rear aqua storage tank of filter is set between filter and the pressurized tank, and aqua storage tank is used for the water after the stored filter device filters after the filter; Link to each other by booster pump between aqua storage tank and the pressurized tank after the filter, the input of booster pump and filter afterwards aqua storage tank link to each other, and the supercharging delivery side of pump links to each other with the input of pressurized tank; The output of pressurized tank and medium water quality water link link to each other with the water supply input of the water quality water link such as low.
Further, system provided by the invention also comprises controller, is provided with from high to low liquid level sensor and first low three liquid level sensors of liquid level sensor in the first high liquid level sensor, first after the filter in the aqua storage tank, wherein,
Controller links to each other with the filter front pump with the first high liquid level sensor respectively, is used for stopping to filter when liquid level reaches the first high liquid level sensor front pump; Controller respectively with first in liquid level sensor link to each other with booster pump, be used for when liquid level reaches the first liquid level sensor, starting booster pump; Controller links to each other with booster pump with the first low liquid level sensor respectively, is used for being lower than the first low liquid level sensor in liquid level and stops booster pump.
Further, system provided by the invention also comprises the first triple valve, and booster pump and pressurized tank are connected to respectively the two ends of the first triple valve, and the 3rd end of this first triple valve is connected with the backwash water route of filter; The backwash blowdown outlet of filter is connected with the entrance of first order sedimentation basin.
Further, system provided by the invention, also comprise the second triple valve, the front aqua storage tank of filter and controller, wherein, the first end of the second triple valve is connected with the wastewater outlet of medium water quality water link and water quality water links such as being connected, the second end is connected with sewage network, and the 3rd end is connected with the entrance of the first sedimentation basin; Aqua storage tank is connected by downflow weir with second level sedimentation basin before the filter, be provided with from high to low liquid level sensor and the second low liquid level sensor in the second high liquid level sensor, second before the filter in the aqua storage tank, wherein, controller links to each other with the second triple valve with the second high liquid level sensor respectively, is used for controlling the second triple valve when liquid level reaches the second high liquid level sensor the waste water of medium water quality water link and the water quality water link such as low is switched between the entrance of sewage network and the first sedimentation basin; Controller respectively with second in liquid level sensor link to each other with the filter front pump, also be used for when liquid level reaches the second liquid level sensor, starting and filter front pump; Controller is respectively with the second low liquid level sensor be connected front pump and be connected, and stops to filter front pump when hanging down liquid level sensor for be lower than second in liquid level; Have through hole on the downflow weir, on this through hole valve be installed, before the height of through hole and the filter in second in the aqua storage tank height of liquid level sensor identical or be lower than the height of liquid level sensor in second.
The invention provides a kind of wastewater recycling method and system, the method comprises: to the requirement of water quality, described water link is divided into high water quality water link, medium water quality water link and the water quality water link such as low according to each water link in single polysilicon chip manufacture process; The waste water that described high water quality water link is discharged carries out purified treatment, then as the water of described medium water quality water link and the described water quality water link such as low; This system comprises: first order sedimentation basin; Second level sedimentation basin; Filter; Wherein, described first order sedimentation basin, described second level sedimentation basin, described filter are connected successively; Described first order sedimentation basin and described second level sedimentation basin are for the treatment of the waste water of medium water quality water link and the water quality water link such as low; Described second level sedimentation basin is also for the treatment of the waste water of high water quality water link.Wastewater recycling method provided by the invention and system utilize first order sedimentation basin and second level sedimentation basin to be applied to this manufacture process after the waste water in single polysilicon chip manufacture process is reclaimed and processes, make wherein medium water quality water link and the water quality water link such as low need not additionally to use running water, reduced the running water consumption in the polysilicon chip manufacture process.The cost of water treatment of the wastewater recycling system in the embodiment of the invention is also lower, and for a long time automatic stabilisation operation, and for diamond wire cutting manufacturing technology of future generation, this system is still very applicable, need not upgrading.
Except purpose described above, feature and advantage, the present invention also has other purpose, feature and advantage.Below with reference to accompanying drawings, embodiments of the present invention are illustrated.
Description of drawings
The accompanying drawing that consists of the application's a part is used to provide a further understanding of the present invention, and illustrative examples of the present invention and explanation thereof are used for explaining the present invention, do not consist of improper restriction of the present invention.In the accompanying drawings:
Fig. 1 is the schematic diagram according to the basic principle of the wastewater recycling system of the embodiment of the invention;
Fig. 2 is the schematic diagram according to a kind of preferred structure of the wastewater recycling system of the embodiment of the invention;
Fig. 3 is the schematic diagram according to the sand filter backwash procedure of the embodiment of the invention;
Fig. 4 is at medium water quality water link and the water quality water link such as low schematic diagram with a kind of control flow under the water state according to the wastewater recycling system of the embodiment of the invention; And
Fig. 5 is stopping schematic diagram with a kind of control flow under the water state according to the wastewater recycling system of the embodiment of the invention in medium water quality water link and the water quality water link such as low.
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated, but the multitude of different ways that the present invention can be defined by the claims and cover is implemented.
In embodiments of the present invention, to the requirement of water quality, these water links are divided into high water quality water link, medium water quality water link and the water quality water link such as low according to each water link in single polysilicon chip manufacture process; The waste water that high water quality water link is discharged carries out purified treatment, then as the water of medium water quality water link and the water quality water link such as low, the waste water that can utilize preferably so high water quality water link to discharge reduces medium water quality water link and the water quality water link such as low to the use amount of running water.If the water consumption of medium water quality water link and the water quality water link such as low is larger, the waste water that these two links can also be discharged also carry out purified treatment then as the water of these two links, helps equally to reduce the running water use amount of these two links.
In single polysilicon chip manufacture process of reality, the link that single polysilicon chip that the cutting silico briquette is obtained washes in advance mainly is that the silicon chip that is stained with mortar is washed in advance, the water of this moment allows to contain a small amount of finely ground particles, so this link can be thought the water quality water links such as low; This link in the link that water cooled off when single polysilicon block was carried out shape and Surface Machining, allows to contain more solable matter, so can be thought medium water quality water link; And when after single polysilicon chip is finished processing, cleaning, needing to use deionized water, this moment is quite high to water quality requirement, so this link can be thought high water quality water link.When using deionized water that single polysilicon chip is cleaned, usually adopt multi-groove type ultrasonic wave silicon wafer cleaner, this cleaning machine has pre-potcher, liquid rinse bath and smart potcher.Contain more cleaning liquid in the waste water that its herb liquid rinse bath is discharged, purified treatment is comparatively complicated, and therefore in the present embodiment, only the waste water with pre-potcher and the discharge of smart potcher carries out purified treatment.
When the waste water that above-mentioned water link is discharged carries out purified treatment, for the waste water that high water quality water link is discharged, only carry out the one-level precipitation, then filter; When the waste water of discharging for medium water quality water link and the water quality water link such as low is processed, carry out two-stage precipitation, then filter.Above-mentioned filtration can share a filter, and the one-level precipitation can adopt the second level sedimentation basin in the two-stage precipitation.Specifically with reference to figure 1, Fig. 1 is the schematic diagram according to the basic principle of the wastewater recycling system of the embodiment of the invention.
As shown in Figure 1, first order sedimentation basin 11, second level sedimentation basin 12 and filter 13 are arranged in the wastewater recycling system of the embodiment of the invention, they are connected successively.First order sedimentation basin 11 have the first order waste water receiving port of the medium water quality water link that links to each other with the wastewater outlet A of medium water quality water link and the water quality water link such as low and the water quality water link such as low and will precipitate after the waste water first order sedimentation basin outlet of discharging; Second level sedimentation basin has the second level sedimentation basin entrance that links to each other with the outlet of first order sedimentation basin and the high water quality water link waste water receiving port that links to each other with the wastewater outlet of high water quality water link; High water quality water link, medium water quality water link and the water quality water link such as low are according to each water link in single polysilicon chip manufacture process the requirement of water quality to be divided.
The waste water of the medium water quality water link in above-mentioned single polysilicon chip manufacture process and the water quality water link such as low enters first order sedimentation basin 11 through wastewater outlet A, has finished two-stage precipitation thereby enter second level sedimentation basin 12 after first order sedimentation basin 11 precipitation process.The waste water of high water quality water link directly enters second level sedimentation basin 12 through wastewater outlet B, namely only carries out the one-level precipitation.The water that filters through filter 13 just can be as the water of medium water quality water link and the water quality water link such as low through delivery port C and delivery port D.Can find out the waste water that the wastewater recycling system that adopts the embodiment of the invention can effectively utilize the links in single polysilicon chip manufacture process to discharge, reduce wherein medium water quality water link and the running water use amount of the water quality water link such as low.
Fig. 2 is the schematic diagram according to a kind of preferred structure of the wastewater recycling system of the embodiment of the invention.As shown in Figure 2, first order sedimentation basin 11 second level sedimentation basin 12 filters, 13 first order sedimentation basins 11 and second level sedimentation basin 12 can be rectangular sedimentation tank, the waste water of medium water quality water link and the water quality water link such as low is introduced by the second triple valve 111 from wastewater outlet A, the first order waste water receiving port that is equivalent to first order sedimentation basin 11 through the intake chamber 113(that enters first order sedimentation basin 11 behind the coarse strainer 112), perhaps directly enter among the sewage network W in the enough situation at the water of medium water quality water link and the water quality water link such as low.Because the waste water quality of medium water quality water link and the water quality water link such as low is relatively poor and impurities easily precipitates, so conflux pipeline or channel must adopt the larger design and construction of the gradient.
Come from waste water that high water quality water link discharges from the direct high water quality water link waste water receiving port that is equivalent to second level sedimentation basin 12 via coarse strainer 121(of wastewater outlet B) enter second level sedimentation basin 12.Water in the first order sedimentation basin 11 can enter second level sedimentation basin 12 by the mode of overflow (being equivalent to the first order sedimentation basin outlet of first order sedimentation basin 11 and the second-level settling pond entrance of second level sedimentation basin 12).The series arrangement mode of first order sedimentation basin 11 and second level level sedimentation basin 12 so that come from medium water quality water link and the waste water of the water quality water link such as low passed through the two-stage precipitation after most of impurity precipitated, and first order sedimentation basin 11 and second level sedimentation basin 12 can be for subsequent use each other flexibly.The top of first order sedimentation basin 11 and second level sedimentation basin 12 is scraped respectively mud car 114, is scraped mud car 122, and there are respectively cleaning shoe 115, cleaning shoe 123 in inside, and bucket 116, bucket 124 are deposited respectively in the bottom.So just can collect the silt of precipitation easily and deposit bucket, be taken away by sludge pump 14 again.
Downflow weir 151 between the aqua storage tank 15 enters the front aqua storage tank 15 of filter to waste water after the two-stage precipitation process by second level sedimentation basin 12 with before filtering.The major function of aqua storage tank 15 is to be filter front pump 16 and filter 13 retainings before the filter.Liquid level sensor 153 and the second low liquid level sensor 154 in the second high liquid level sensor 152, second are set in the aqua storage tank 15 before the filter.In fact, this system also comprises controller, and the first high liquid level sensor 191 links to each other by controller between the front pump 16 with filter, and controller is for stop to filter front pump 16 when liquid level reaches the first high liquid level sensor 191; Link to each other by controller between liquid level sensor 192 and the booster pump 17 in first, controller also is used for starting booster pump 17 when liquid level reaches the first liquid level sensor 192; Link to each other by controller between the first low liquid level sensor 193 and the booster pump 17, controller also is used for being lower than first in liquid level and hangs down liquid level sensor 193 and stop booster pump 17.
The second high liquid level sensor 152 is used for control the second triple valve 111, namely when arriving high liquid level, the liquid level of aqua storage tank 15 before the filter then sends signal, the control system (not shown) that is connected with each liquid level sensor and water pump, valve is according to this signal, controls the second triple valve 111 waste water that comes from medium water quality water link and the water quality water link such as low is drained into sewage network W.When liquid level sensor 153 sent signal in second, 16 beginnings of filter front pump were toward filter 13 internal pump waters.When the second low liquid level sensor 154 sent signal, filter front pump 16 quit work, and prevents from finding time.Link to each other by filter front pump 16 between second level sedimentation basin 12 and the filter 13, the input of filter front pump 16 links to each other with second level sedimentation basin 12, and the output of filtering front pump 16 links to each other with filter 13; The rear aqua storage tank 19 of filter is set between filter 13 and the pressurized tank 18, and aqua storage tank is used for the water after stored filter device 13 filters after the filter; Link to each other by booster pump 17 between aqua storage tank 19 and the pressurized tank 18 after the filter, aqua storage tank 19 links to each other the input of booster pump 17 with filtering afterwards, and the output of booster pump 17 links to each other with the input of pressurized tank 18; The output of pressurized tank 18 and medium water quality water link link to each other with the water supply input of the water quality water link such as low.
Have through hole on the downflow weir 151, valve 155 is installed on this through hole.The height of liquid level sensor 153 is basic identical or a little less than the height of liquid level sensor 153 in second in the height of through hole and second.If the insufficient water sources of filter 13 can directly be opened valve 155 and supply water like this.A plurality of through holes and valve 155 can be arranged, and can adopt hand sluice valve.
In fact, filter 13 is sand filter, this sand filter is designed to have the automatic back-washing function filter of pressure reduction induction control or fixed cycle control formula, the backwash water source adopts booster pump 17 that the water source is provided, backwash water route 131 connects the first end of the first triple valve 132, and the in addition two ends of the first triple valve 132 connect respectively booster pump 17 and pressurized tank 18.The blowdown outlet of sand filter can be connected with the entrance of first order sedimentation basin 11, also can directly access sewage network W.Backwash procedure can adopt flow process shown in Figure 3, and Fig. 3 is the schematic diagram according to the sand filter backwash procedure of the embodiment of the invention.
Aqua storage tank 19 after water purification after sand filter filters flows into and filters, aqua storage tank 19 is provided with high, medium and low three liquid level sensors after the filter, is respectively liquid level sensor 192 and low liquid level sensor 193 in the first high liquid level sensor 191, first.Link to each other by controller between the second high liquid level sensor 152 and the second triple valve 111, controller is used for controlling the second triple valve 111 waste water of medium water quality water link and the water quality water link such as low is switched between the entrance of sewage network W and the first sedimentation basin 11 when liquid level reaches the second high liquid level sensor 152; Liquid level sensor 153 links to each other by controller between the front pump 16 with filter in second, and controller also is used for starting when liquid level reaches the second liquid level sensor 153 filters front pump 16; Is connected by controller between the second low liquid level sensor 154 and the filter front pump 16, controller also stops to filter front pump 16 when hanging down liquid level sensor 154 for be lower than second in liquid level.That is to say that the first high liquid level sensor 191 is used for control filter front pump 16 and stops pump water, to reach the purpose of how many water purification to produce how many water purification with, reduces to greatest extent system operation cost.Liquid level sensor 192 is used for the startup of control booster pump 17 in first, just can start booster pump 17 during liquid level during namely only the water level of aqua storage tank 19 arrives after filter.The water level that the first low liquid level sensor 193 is used for aqua storage tank 19 after filter stops booster pump 27 when arriving low liquid level, thereby can protect booster pump 17, prevents anhydrous idle running.Water level at aqua storage tank after the filter 19 meets under the entry condition of booster pump 17, the start and stop of the booster pump 17 pressure sensitives control in the tank 18 that is stressed fully.Be respectively medium water quality water link by pressurized tank 18 UNICOM's supply channels by delivery port C and delivery port D at last and the water quality water link such as low is carried out constant pressure water supply, finally reach the purpose of efficiently utilizing water resource.
When using wastewater recycling system shown in Figure 2, the control flow that can select as shown in Figure 4 and Figure 5.Fig. 4 is at medium water quality water link and the water quality water link such as low schematic diagram with a kind of control flow under the water state according to the wastewater recycling system of the embodiment of the invention.Fig. 5 is stopping schematic diagram with a kind of control flow under the water state according to the wastewater recycling system of the embodiment of the invention in medium water quality water link and the water quality water link such as low.
Technical scheme according to the embodiment of the invention, making overall process from single polysilicon chip has in mind, to each carries out analysis-by-synthesis with water spot in the technological process, ingenious utilize part with water spot to not high and all kinds of drainage point of water quality requirement institute effluent water quality to contain a large amount of Solid Suspension particulates as main characteristics, carry out waste water by class recycling and unified distribution, to realize efficient water.According to all kinds of othernesses with water spot institute effluent water quality in single polysilicon chip manufacture process, design the rectangular sedimentation tank of two-stage series connection, thereby precipitate to greatest extent solia particle in the waste water.For reducing to greatest extent system operation cost, realize how many water purification producing how many water purification with by the interoperation of sensors at different levels, water pump, automatic valve, reduce the operating cost of wastewater recycling system.Be to realize constant pressure water supply, adopt pressurized tank 18(to contain hydraulic inductor) and booster pump 17 interoperations realize that this booster pump 17 also uses as filter backwashing water source pump simultaneously.Sand filter adopts and carries pressure reduction induction mode, regular automatic backwash mode and manual backwashing function, and can automatically control booster pump 17 and branch road valve interoperation, for backwash provides the water source.Whether medium water quality water link and the water quality water link institute effluent such as low enter first order sedimentation basin 11, or directly drain into sewage network W, can control according to the moisture storage capacity of aqua storage tank 15 before the filter, aqua storage tank 15 water storages reach high liquid level before this filter, thereby the recovery of waste water that medium water quality water link and the water quality water link such as low are discharged is abandoned in the water route of then automaticallying switch, and only use high water quality with the effluent of water spot institute as reclaiming the water source.After tackling long-term stopping production, start shooting, this system water source can't start circulation fast, and the problem of local lack of water appears, the middle liquid level place of the downflow weir 151 before second level sedimentation basin 12 and filter between the aqua storage tank 15 is equipped with manually-operated gate, can open a sluice gate and draw out some water to the front aqua storage tank 15 of filter temporarily, circulate with start-up system.Adopt the technical scheme of the embodiment of the invention, can comprehensively reclaim the waste water in single polysilicon chip manufacture process and process and be applied to this manufacture process afterwards, make wherein medium water quality water link and the water quality water link such as low need not additionally to use running water, reduced the running water consumption in single polysilicon chip manufacture process.The cost of water treatment of the wastewater recycling system in the embodiment of the invention is also lower, and for a long time automatic stabilisation operation, and for diamond wire cutting manufacturing technology of future generation, this system is still very applicable, need not upgrading.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (10)

1. a wastewater recycling method is applied to single polysilicon chip manufacturing, it is characterized in that the method comprises:
To the requirement of water quality, described water link is divided into high water quality water link, medium water quality water link and the water quality water link such as low according to each water link in the polysilicon chip manufacture process;
The waste water that described high water quality water link is discharged carries out purified treatment, then as the water of described medium water quality water link and the described water quality water link such as low.
2. method according to claim 1, it is characterized in that, also comprise: the waste water that described medium water quality water link and the described water quality water link such as low are discharged carries out purified treatment, then as the water of described medium water quality water link and the described water quality water link such as low.
3. method according to claim 1 and 2 is characterized in that,
The described water quality water link such as low comprises the link that the link that the resulting silico briquette of cutting silicon ingot is washed, single polysilicon chip that the cutting silico briquette is obtained wash in advance, and, the link that used frock in the cutting is washed;
Described medium water quality water link comprises carries out shape and surface grinding adds the link that man-hour, water cooled off to described single polysilicon block;
Described high water quality water link comprises the link that single polysilicon chip of adopting deionized water that described cutting silico briquette is obtained cleans.
4. method according to claim 3 is characterized in that,
In the described high water quality water link, adopt multi-groove type ultrasonic wave silicon wafer cleaner that single polysilicon chip that described cutting silico briquette obtains is cleaned;
The step that the waste water that described high water quality water link is discharged carries out purified treatment comprises: the waste water that pre-potcher and the smart potcher of described multi-groove type ultrasonic wave silicon wafer cleaner are discharged carries out purified treatment.
5. method according to claim 3 is characterized in that,
The step that the waste water that described high water quality water link is discharged carries out purified treatment comprises: the waste water of will described high water quality water link discharging successively carries out one-level precipitation and filtration;
The step that the waste water that described medium water quality water link and the described water quality water link such as low are discharged carries out purified treatment comprises: will described medium water quality water link and the described water quality water link such as the low waste water of discharging successively carry out two-stage precipitation and filtration.
6. a wastewater recycling system is applied to single polysilicon chip manufacturing, it is characterized in that this system comprises:
First order sedimentation basin (11);
Second level sedimentation basin (12);
Filter (13); Wherein,
Described first order sedimentation basin (11), described second level sedimentation basin (12), described filter (13) are connected successively;
Described first order sedimentation basin (11) have the first order waste water receiving port that links to each other with the wastewater outlet (A) of medium water quality water link and the water quality water link such as low and will precipitate after the waste water first order sedimentation basin outlet of discharging;
Described second level sedimentation basin (12) has the second level sedimentation basin entrance that links to each other with described first order sedimentation basin outlet and the second level waste water receiving port that links to each other with the wastewater outlet (B) of high water quality water link;
Described high water quality water link, described medium water quality water link and the described water quality water link such as low are according to each water link in single polysilicon chip manufacture process the requirement of water quality to be divided.
7. system according to claim 6 is characterized in that, also comprises filter front pump (16), the rear aqua storage tank (19) of filter, booster pump (17) and pressurized tank (18), wherein:
Link to each other by described filter front pump (16) between described second level sedimentation basin (12) and the described filter (13), the input of described filter front pump (16) links to each other with described second level sedimentation basin (12), and the output of described filter front pump (16) links to each other with described filter (13);
Aqua storage tank (19) after the described filter is set between described filter (13) and the described pressurized tank (18), and aqua storage tank is used for storing the water after described filter (13) filters after the described filter;
Link to each other by described booster pump (17) between aqua storage tank after the described filter (19) and the described pressurized tank (18), the input of described booster pump (17) links to each other with aqua storage tank (19) after the described filter, and the output of described booster pump (17) links to each other with the input of described pressurized tank (18);
The output of described pressurized tank (18) and described medium water quality water link link to each other with the water supply input of the described water quality water link such as low.
8. system according to claim 7, it is characterized in that, also comprise controller, be provided with from high to low liquid level sensor (192) and first low (193) three liquid level sensors of liquid level sensor in the first high liquid level sensor (191), first in the aqua storage tank after the described filter (19), wherein
Described controller links to each other with described filter front pump (16) with the described first high liquid level sensor (191) respectively, is used for stopping when liquid level reaches the described first high liquid level sensor (191) described filter front pump (16);
Described controller respectively with described first in liquid level sensor (192) link to each other with described booster pump (17), be used for when liquid level reaches described the first liquid level sensor (192), starting described booster pump (17);
Described controller links to each other with described booster pump (17) with the described first low liquid level sensor (193) respectively, is used for being lower than the described first low liquid level sensor (193) in liquid level and stops described booster pump (17).
9. system according to claim 7, it is characterized in that, also comprise the first triple valve (132), described booster pump (17) and described pressurized tank (18) are connected to respectively the two ends of described the first triple valve (132), and the 3rd end of this first triple valve (132) is connected with the backwash water route (131) of described filter (13); The backwash blowdown outlet of described filter (13) is connected with the entrance of described first order sedimentation basin (11).
10. system according to claim 7 is characterized in that, also comprises the second triple valve (111), the front aqua storage tank (15) of filter and controller, wherein,
The first end of described the second triple valve (111) and described medium water quality water link be connected the wastewater outlet (A) of the water quality water link such as low and be connected, the second end is connected with sewage network (W), the 3rd end is connected with the entrance of described the first sedimentation basin (11);
Aqua storage tank (15) is connected by downflow weir (151) with described second level sedimentation basin (12) before the described filter, be provided with from high to low liquid level sensor (153) and the second low liquid level sensor (154) in the second high liquid level sensor (152), second before the described filter in the aqua storage tank (15), wherein
Described controller links to each other with described the second triple valve (111) with the described second high liquid level sensor (152) respectively, is used for controlling described the second triple valve (111) when liquid level reaches the described second high liquid level sensor (152) waste water of described medium water quality water link and the described water quality water link such as low is switched between the entrance of sewage network (W) and described first order sedimentation basin (11);
Described controller respectively with described second in liquid level sensor (153) link to each other with described filter front pump (16), be used for when liquid level reaches described the second liquid level sensor (153), starting described filter front pump (16);
Described controller links to each other with described filter front pump (16) with the described second low liquid level sensor (154) respectively, is used for stopping when liquid level is lower than the described second low liquid level sensor (154) described filter front pump (16);
Described downflow weir has through hole on (151), valve (155) is installed on this through hole, and the height of liquid level sensor (153) is identical or be lower than the height of liquid level sensor in described second (153) in described second before the height of described through hole and the described filter in the aqua storage tank (15).
CN201210594622.2A 2012-12-31 2012-12-31 Wastewater recycling method and system Active CN103055600B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210594622.2A CN103055600B (en) 2012-12-31 2012-12-31 Wastewater recycling method and system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210594622.2A CN103055600B (en) 2012-12-31 2012-12-31 Wastewater recycling method and system

Publications (2)

Publication Number Publication Date
CN103055600A true CN103055600A (en) 2013-04-24
CN103055600B CN103055600B (en) 2015-03-11

Family

ID=48098676

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210594622.2A Active CN103055600B (en) 2012-12-31 2012-12-31 Wastewater recycling method and system

Country Status (1)

Country Link
CN (1) CN103055600B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103418565A (en) * 2013-07-24 2013-12-04 镇江大成新能源有限公司 Water cleaning system for silicon wafer cutting
CN103432820A (en) * 2013-09-04 2013-12-11 常州友达环保科技有限公司 Efficient suction filtration settling pond
CN103466871A (en) * 2013-08-22 2013-12-25 苏州苏净环保工程有限公司 Treatment method and recycling system for industrial wastewater of polycrystalline silicon batteries
CN105521674A (en) * 2014-10-21 2016-04-27 富鼎电子科技(嘉善)有限公司 Purification device
CN107777736A (en) * 2016-08-25 2018-03-09 武汉澜溪谷科技发展有限公司 A kind of automobile washing water circulation treatment device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2160454Y (en) * 1992-11-05 1994-04-06 冶金工业部重庆钢铁设计研究院 Device for recovering quenching cool water
JPH06134469A (en) * 1992-10-22 1994-05-17 Sumitomo Sitix Corp Method for treating silicon cutting waste liquid
CN2507857Y (en) * 2001-11-05 2002-08-28 王代寿 Domestic waste water circulation treating device
CN102615077A (en) * 2012-04-13 2012-08-01 保定天威英利新能源有限公司 Solar battery silicon chip cleaning machine and control method thereof
CN202376811U (en) * 2011-12-10 2012-08-15 平顶山市恒基混凝土有限公司 Waste water recycling device for commercial concrete mixing plant
CN202506224U (en) * 2012-05-01 2012-10-31 金华市捷晨建材科技有限公司 Wastewater and sludge recycling system
CN203007053U (en) * 2012-12-31 2013-06-19 英利集团有限公司 Wastewater recycling system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06134469A (en) * 1992-10-22 1994-05-17 Sumitomo Sitix Corp Method for treating silicon cutting waste liquid
CN2160454Y (en) * 1992-11-05 1994-04-06 冶金工业部重庆钢铁设计研究院 Device for recovering quenching cool water
CN2507857Y (en) * 2001-11-05 2002-08-28 王代寿 Domestic waste water circulation treating device
CN202376811U (en) * 2011-12-10 2012-08-15 平顶山市恒基混凝土有限公司 Waste water recycling device for commercial concrete mixing plant
CN102615077A (en) * 2012-04-13 2012-08-01 保定天威英利新能源有限公司 Solar battery silicon chip cleaning machine and control method thereof
CN202506224U (en) * 2012-05-01 2012-10-31 金华市捷晨建材科技有限公司 Wastewater and sludge recycling system
CN203007053U (en) * 2012-12-31 2013-06-19 英利集团有限公司 Wastewater recycling system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103418565A (en) * 2013-07-24 2013-12-04 镇江大成新能源有限公司 Water cleaning system for silicon wafer cutting
CN103466871A (en) * 2013-08-22 2013-12-25 苏州苏净环保工程有限公司 Treatment method and recycling system for industrial wastewater of polycrystalline silicon batteries
CN103466871B (en) * 2013-08-22 2014-09-10 苏州苏净环保工程有限公司 Treatment method and recycling system for industrial wastewater of polycrystalline silicon batteries
CN103432820A (en) * 2013-09-04 2013-12-11 常州友达环保科技有限公司 Efficient suction filtration settling pond
CN105521674A (en) * 2014-10-21 2016-04-27 富鼎电子科技(嘉善)有限公司 Purification device
CN107777736A (en) * 2016-08-25 2018-03-09 武汉澜溪谷科技发展有限公司 A kind of automobile washing water circulation treatment device
CN107777736B (en) * 2016-08-25 2021-05-11 武汉澜溪谷科技发展有限公司 Water circulation treatment device for automobile cleaning

Also Published As

Publication number Publication date
CN103055600B (en) 2015-03-11

Similar Documents

Publication Publication Date Title
CN103055600B (en) Wastewater recycling method and system
CN102063115B (en) Real-time automatically back-flushing control system of denitrification filter pool and running method
CN101773915A (en) Multilevel circulating cleaning equipment for solar cell silicon wafers
CN105254065A (en) Multi-path low-energy-consumption recycling system for steel wastewater
CN103395946A (en) Low-energy-consumption wastewater treatment technological process
CN201586649U (en) Multistage circulating cleaning equipment for solar cell silicon chip
CN104436845B (en) A kind of plate and frame filter press filtrate water processing system and processing method
CN103215985B (en) Community rainwater utilization system based on secondary split-flow of rainwater and sewage
CN203007053U (en) Wastewater recycling system
CN202688121U (en) Waste muddy water recycling system
CN203346197U (en) Integrated water purification device
CN107416957A (en) Water circulation system in processing of stone
CN201524479U (en) Filter system for active sand
CN201338971Y (en) Iron and steel integrated waste water treating and reusing equipment
CN212998577U (en) Novel stone material recycling water advanced treatment equipment
CN203845889U (en) Steel plant wastewater advanced treatment recycling system
CN208234664U (en) A kind of effluent cycle system
CN102284211A (en) Multilayer structured pressure type water purification treatment equipment with drainage caps in filter region
RU125993U1 (en) Compact water treatment plant for treating natural and waste waters
CN209378603U (en) The device of efficient sewerage processing
CN208234636U (en) A kind of high density polyethylene pipeline production line cooling water purification apparatus
CN102294133B (en) Multifunctional pressure type chemical purification equipment for oily sewage
CN208132558U (en) A kind of machine chip liquid processing device
CN202105512U (en) Oil removal and sewage treatment equipment with drainage caps
CN207891178U (en) A kind of novel production wastewater treatment device

Legal Events

Date Code Title Description
PB01 Publication
C06 Publication
SE01 Entry into force of request for substantive examination
C10 Entry into substantive examination
GR01 Patent grant
C14 Grant of patent or utility model