CN102978698B - 一种硼镓共掺的重掺p型单晶硅的生长及掺杂方法 - Google Patents
一种硼镓共掺的重掺p型单晶硅的生长及掺杂方法 Download PDFInfo
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CN104514031A (zh) * | 2013-12-02 | 2015-04-15 | 浙江长兴众成电子有限公司 | 一种直拉单晶硅的掺杂装置及使用方法 |
US10724148B2 (en) | 2014-01-21 | 2020-07-28 | Infineon Technologies Ag | Silicon ingot and method of manufacturing a silicon ingot |
US10337117B2 (en) | 2014-11-07 | 2019-07-02 | Infineon Technologies Ag | Method of manufacturing a silicon ingot and silicon ingot |
CN105002557A (zh) * | 2015-08-12 | 2015-10-28 | 常州天合光能有限公司 | 一种镓锗硼共掺多晶硅及其制备方法 |
CN105063750A (zh) * | 2015-08-12 | 2015-11-18 | 常州天合光能有限公司 | 一种镓锗硼共掺单晶硅及其制备方法 |
CN106757313A (zh) * | 2016-12-29 | 2017-05-31 | 上海合晶硅材料有限公司 | 超重掺砷晶棒拉制方法 |
CN112760704B (zh) * | 2020-12-28 | 2023-03-17 | 晶澳太阳能有限公司 | 硼-镓共掺单晶制备设备及其制备方法 |
CN115233292A (zh) * | 2022-07-25 | 2022-10-25 | 北京麦竹吉科技有限公司 | 一种低电阻率硅单晶及其制备方法 |
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CN101597788A (zh) * | 2009-06-24 | 2009-12-09 | 浙江大学 | 在氮气下融化多晶硅制备掺氮铸造单晶硅的方法 |
CN102400219A (zh) * | 2011-11-30 | 2012-04-04 | 东海晶澳太阳能科技有限公司 | 一种硼-镓共掺准单晶硅及其制备方法 |
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JP2002083981A (ja) * | 2000-09-07 | 2002-03-22 | Shin Etsu Handotai Co Ltd | 太陽電池セルおよびその製造方法 |
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CN101597788A (zh) * | 2009-06-24 | 2009-12-09 | 浙江大学 | 在氮气下融化多晶硅制备掺氮铸造单晶硅的方法 |
CN102400219A (zh) * | 2011-11-30 | 2012-04-04 | 东海晶澳太阳能科技有限公司 | 一种硼-镓共掺准单晶硅及其制备方法 |
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