CN102954950A - Biological sensor based on periodical nano medium particles and preparation method of sensor - Google Patents
Biological sensor based on periodical nano medium particles and preparation method of sensor Download PDFInfo
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- CN102954950A CN102954950A CN2011102547156A CN201110254715A CN102954950A CN 102954950 A CN102954950 A CN 102954950A CN 2011102547156 A CN2011102547156 A CN 2011102547156A CN 201110254715 A CN201110254715 A CN 201110254715A CN 102954950 A CN102954950 A CN 102954950A
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Abstract
The invention relates to a biological sensor based on periodical nano medium particles and a preparation method of the sensor. The biological sensor is a surface plasma resonance biological sensor and comprises a substrate, a noble metal thin film and a plurality of periodically arranged nano medium particles, wherein the noble metal thin film is arranged on the substrate; the plurality of periodically arranged nano medium particles are arranged on the noble metal thin film; and the plurality of nano medium particles are in bidimensional array-type periodical arrangement and are used for supplying wave vector matching required for exciting surface plasmas. By the biological sensor based on the periodical nano medium particles, the shortcoming of large volume of the conventional biological sensor is overcome; the wave vector matching required for exciting the surface plasmas can be provided; all manufacturing processes are compatible with a standard semiconductor process; the manufacturing processes are simple; the size is relatively small; and the biological sensor is easy to integrate.
Description
Technical field
The present invention relates to a kind of biology sensor, relate in particular to a kind of biology sensor based on periodicity nanometer media particle and preparation method thereof.
Background technology
Surface plasma is a kind of electromagnetic wave of propagating at metal and medium interface, is produced by incident field and metal surface electron interaction.The resonant condition of surface plasma is very responsive to the refractive index subtle change of metal surface medium.Surface plasma resonance biosensor is the main tool of characterising biological interaction of molecules.The ultimate principle of surface plasma resonance biosensor is the variation by recording surface plasma resonance angle or resonant wavelength, realizes the detection of effects on surface test analyte refractive index.Compare with the biology sensor of other type, biology sensor based on surface plasma body resonant vibration comes recognition sample by the change that detects the sample refractive index, do not need fluorescence labels or other labels, can carry out original position, harmless and unmarked detection to biological sample, so the surface plasma biology sensor is free of contamination high-sensitivity biological sensor.
Biology sensor based on surface plasma generally adopts the Kretschmann prism structure at present, and the p polarized light incides the interface of prism and metal film at a certain angle through prism.For certain incident angle and optical wavelength, prism provides the coupling of the wave vector between incident electromagnetic wave and the surface plasma.Yet Kretschmann prism structure volume is not huge, and is easy of integration and carry.
Summary of the invention
The present invention is directed at present the Kretschmann prism structure above shortcomings that the biology sensor based on surface plasma adopts, a kind of surface plasma resonance biosensor based on periodicity nanometer media particle and preparation method thereof is provided.
The technical scheme that the present invention solves the problems of the technologies described above is as follows: a kind of biology sensor based on periodicity nanometer media particle is surface plasma resonance biosensor, it comprises a plurality of nanometer media particles of substrate, noble metal film and periodic arrangement, described noble metal film is arranged on the substrate, and a plurality of nanometer media particles of described periodic arrangement are arranged on the noble metal film; Described a plurality of nanometer media particle is two-dimensional array formula periodic arrangement, and a plurality of nanometer media particles of described periodic arrangement are used for providing the required wave vector of excitating surface plasma to mate.
On the basis of technique scheme, the present invention can also do following improvement.
Further, the composition of described nanometer media particle is electron sensitive resist Zep520A or PMMA.
Further, described two-dimensional array formula periodic arrangement comprises multirow equidistantly and the nanometer media particle array structure that is parallel to each other, and each nanometer media particle array structure comprises the nanometer media particle of a plurality of equidistant distributions.
Further, described nanometer media particle is shaped as disk or cuboid.
Further, the diameter of described nanometer media particle or the length of side are 100 nanometers～600 nanometers, highly are 100 nanometers～700 nanometers, and the spacing between adjacent two nanometer media particles is 400 nanometers～800 nanometers.
Further, described substrate is solid material, organic self-supporting film or inorganic self-supporting film.
Further, described solid material is fused quartz, simple glass, organic glass or silicon, and described organic self-supporting film is Kapton, and described inorganic self-supporting film is carborundum films or silicon nitride film.
Further, the material of described noble metal film is gold, silver or aluminium, and the thickness of described noble metal film is 25 nanometers～75 nanometers.
The present invention also provides a kind of technical scheme that solves the problems of the technologies described above as follows: a kind of preparation method of the biology sensor based on periodicity nanometer media particle may further comprise the steps:
Step 1: utilizing electron beam evaporation to form noble metal film through the substrate after the cleaning;
Step 2: at described noble metal film surface spin coating electron sensitive resist, thereby after heat treatment carry out again a plurality of nanometer media particles that electron-beam direct writing forms periodic arrangement.
Further, after described noble metal film applies electron sensitive resist Zep520A or PMMA, through heat treatment for solidification, the recycling electron-beam direct writing obtains the resist periodic pattern, obtains a plurality of nanometer media particles of periodic arrangement finally by crossing development, photographic fixing and thermal treatment.
The invention has the beneficial effects as follows: the present invention is based on periodically, the biology sensor of nanometer media particle can overcome the bulky shortcoming of conventional biosensor, provide excitating surface plasma required wave vector coupling, and all manufacture crafts are compatible with the semiconductor technology of standard, manufacture craft is simple, small volume and be easy to integrated.
Description of drawings
Fig. 1 is that the embodiment of the invention is based on the structural representation of the biology sensor of periodicity nanometer media particle;
Fig. 2 is the periodically structural representation of nanometer media particle of the embodiment of the invention;
Reflection characteristic figure when Fig. 3 is embodiment of the invention periodicity nanometer media particle different cycles size;
Reflection characteristic figure when Fig. 4 is embodiment of the invention periodicity nanometer media particle different-thickness size;
Fig. 5 the present invention is based on the periodically biology sensor preparation method's of nanometer media particle schematic flow sheet.
Embodiment
Below in conjunction with accompanying drawing principle of the present invention and feature are described, institute gives an actual example and only is used for explaining the present invention, is not be used to limiting scope of the present invention.
As shown in Figure 1, described biology sensor based on periodicity nanometer media particle surface plasma body resonant vibration comprises a plurality of nanometer media particles 3 of substrate 1, noble metal film 2 and periodic arrangement.Described noble metal film 2 is arranged on the substrate 1, and a plurality of nanometer media particles 3 of described periodic arrangement are arranged on the noble metal film 2.Described substrate 1 can be fused quartz, simple glass, organic glass or silicon, also can comprise Kapton, carborundum films, silicon nitride film etc. for organic or inorganic self-supporting film.The composition of described noble metal film can be the metals such as gold, silver, aluminium.Described biology sensor based on periodicity nanometer media particle surface plasma body resonant vibration in use, testing liquid 4 is placed on a plurality of nanometer media particles 3 of periodic arrangement, light source 5 and half-reflecting half mirror 7 are arranged at the top of biology sensor, light source 5 and half-reflecting half mirror 7 are positioned on the same level, spectrometer 6 be arranged at half-reflecting half mirror 7 directly over.The detection light that light source 5 sends impinges perpendicularly on a plurality of nanometer media particles 3 of periodic arrangement; Because a plurality of nanometer media particles are periodic distribution, so that survey a plurality of nanometer media particles that light impinges perpendicularly on periodic arrangement.Measuring process is: the detection illumination that light source 5 sends is mapped on the half-reflecting half mirror 7, reflection through 7 vertically shines in the testing liquid 4 above a plurality of nanometer media particles 3 of periodic arrangement, the light that reflects from testing liquid 4 is received by spectrometer 6 through half-reflecting half mirror 7, obtain spectral results to be measured, compare with the spectral results of not placing liquid to be measured with this result, obtain the refractive index of liquid to be measured.
As shown in Figure 2, described a plurality of nanometer media particle is two-dimensional array formula periodic arrangement, a plurality of nanometer media particles of described periodic arrangement are used for providing the required wave vector of excitating surface plasma to mate, described two-dimensional array formula periodic arrangement comprises multirow equidistantly and the nanometer media particle array structure that is parallel to each other, each nanometer media particle array structure comprises the nanometer media particle of a plurality of equidistant distributions, described nanometer media particle be shaped as disk or cuboid, the diameter of described nanometer media particle or the length of side are 100 nanometers～600 nanometers, highly be 100 nanometers～700 nanometers, the spacing between adjacent two nanometer media particles is 400 nanometers～800 nanometers.
As shown in Figure 3, be the Reflective Spectrum Characteristics figure of the periodicity nanometer media particle of choosing the different cycles size in the embodiment of the invention.Golden film thickness is 50 nanometers in the used surface plasma resonance biosensor structure, periodically the thickness of nanometer media particle is 200 nanometers, the nanometer media particle be shaped as cuboid, the length of side of cuboid nanometer media particle is 300 nanometers, distance P between adjacent two cuboid nanometer media particles is respectively 550,600,650 and 700 nanometers.As can be seen from Figure 3, increase the surface plasma body resonant vibration red shift of wavelength with the cycle.This specific character of cycle nanometer dielectric structure makes us can make as required the nanometer media particle of different cycles size, satisfies the measurement in the different wave length situation.
As shown in Figure 4, be the Reflective Spectrum Characteristics figure of the periodicity nanometer media particle of choosing the different-thickness size in the embodiment of the invention.Golden film thickness is 50 nanometers in the used surface plasma resonance sensor structure, and the thickness of nanometer media particle is respectively 200 and 400 nanometers, media particle be shaped as cuboid, its length of side is 300 nanometers, periodic arrangement, the cycle is 600 and 650 nanometers, determinand refractive index 1.As can be seen from Figure 4, increase along with nanometer media particle thickness, the surface plasma body resonant vibration absorption peak narrows down, this illustrates that designed structure also might be applied in the future on wave filter, and this surface plasma resonance sensor structure requires lower to processing technology, and is compatible with traditional semiconductor technology.
As shown in Figure 5, Fig. 5 is the method for making process flow diagram of biology sensor in the embodiment of the invention:
1) utilize electron beam evaporation 20 nanometers to the noble metal film of 70 nanometers in the good solid substrate of cleaning;
2) apply one deck electron sensitive resist Zep520A or PMMA at described noble metal film, through heat treatment for solidification, cycle hole pattern on the recycling electron-beam direct writing electron sensitive resist is developed at last, and photographic fixing, thermal treatment obtain periodically nanometer media particle.
The above only is preferred embodiment of the present invention, and is in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. biology sensor based on periodicity nanometer media particle, it is characterized in that, described biology sensor is surface plasma resonance biosensor, it comprises a plurality of nanometer media particles of substrate, noble metal film and periodic arrangement, described noble metal film is arranged on the substrate, and a plurality of nanometer media particles of described periodic arrangement are arranged on the noble metal film; Described a plurality of nanometer media particle is two-dimensional array formula periodic arrangement, and a plurality of nanometer media particles of described periodic arrangement are used for providing the required wave vector of excitating surface plasma to mate.
2. the biology sensor based on periodicity nanometer media particle according to claim 1 is characterized in that, the composition of described nanometer media particle is electron sensitive resist Zep520A or PMMA.
3. the biology sensor based on periodicity nanometer media particle according to claim 1, it is characterized in that, described two-dimensional array formula periodic arrangement comprises multirow equidistantly and the nanometer media particle array structure that is parallel to each other, and each nanometer media particle array structure comprises the nanometer media particle of a plurality of equidistant distributions.
4. the biology sensor based on periodicity nanometer media particle according to claim 3 is characterized in that, described nanometer media particle be shaped as disk or cuboid.
5. the biology sensor based on periodicity nanometer media particle according to claim 4, it is characterized in that, the diameter of described nanometer media particle or the length of side are 100 nanometers～600 nanometers, highly be 100 nanometers～700 nanometers, the spacing between adjacent two nanometer media particles is 400 nanometers～800 nanometers.
6. the biology sensor based on periodicity nanometer media particle according to claim 1 is characterized in that, described substrate is solid material, organic self-supporting film or inorganic self-supporting film.
7. the biology sensor based on periodicity nanometer media particle according to claim 6, it is characterized in that, described solid material is fused quartz, simple glass, organic glass or silicon, described organic self-supporting film is Kapton, and described inorganic self-supporting film is carborundum films or silicon nitride film.
8. the biology sensor based on periodicity nanometer media particle according to claim 1 is characterized in that, the material of described noble metal film is gold, silver or aluminium, and the thickness of described noble metal film is 25 nanometers～75 nanometers.
9. the preparation method based on the biology sensor of periodicity nanometer media particle is characterized in that, described preparation method may further comprise the steps:
Step 1: utilizing electron beam evaporation to form noble metal film through the substrate after the cleaning;
Step 2: at described noble metal film surface spin coating electron sensitive resist, thereby after heat treatment carry out again a plurality of nanometer media particles that electron-beam direct writing forms periodic arrangement.
10. the preparation method of the biology sensor based on periodicity nanometer media particle according to claim 9, it is characterized in that, after described noble metal film applies electron sensitive resist Zep520A or PMMA, through heat treatment for solidification, the recycling electron-beam direct writing obtains the resist periodic pattern, obtains a plurality of nanometer media particles of periodic arrangement finally by crossing development, photographic fixing and thermal treatment.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109030423A (en) * | 2018-07-25 | 2018-12-18 | 昆山复锶科纳米光学科技有限公司 | Metal nano slot two-dimensional grating sensor chip and its application in biochemical test |
| CN110307921A (en) * | 2019-07-02 | 2019-10-08 | 运城学院 | A kind of pressure sensor |
| CN110703371A (en) * | 2019-10-14 | 2020-01-17 | 江西师范大学 | Semiconductor super-surface electromagnetic wave absorber and preparation method thereof |
| CN114076739A (en) * | 2020-08-21 | 2022-02-22 | 广东工业大学 | RCLED-based sensor and manufacturing method thereof |
| CN115249432A (en) * | 2021-04-28 | 2022-10-28 | 中国科学院微电子研究所 | Anti-counterfeiting color label and manufacturing method thereof and preparation method of printed matter |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6782179B2 (en) * | 2000-07-21 | 2004-08-24 | Micro Managed Photons A/S | Surface plasmon polariton band gap structures |
| US20060072114A1 (en) * | 2004-10-06 | 2006-04-06 | Sigalas Mihail M | Apparatus and mehod for sensing with metal optical filters |
| CN101339128A (en) * | 2008-08-27 | 2009-01-07 | 中国科学院光电技术研究所 | Surface plasma resonance image-forming nanostructure array chip preparation method |
| CN101933116A (en) * | 2008-02-05 | 2010-12-29 | 尼尔技术有限责任公司 | A method for performing electron beam lithography |
-
2011
- 2011-08-31 CN CN2011102547156A patent/CN102954950A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6782179B2 (en) * | 2000-07-21 | 2004-08-24 | Micro Managed Photons A/S | Surface plasmon polariton band gap structures |
| US20060072114A1 (en) * | 2004-10-06 | 2006-04-06 | Sigalas Mihail M | Apparatus and mehod for sensing with metal optical filters |
| CN101933116A (en) * | 2008-02-05 | 2010-12-29 | 尼尔技术有限责任公司 | A method for performing electron beam lithography |
| CN101339128A (en) * | 2008-08-27 | 2009-01-07 | 中国科学院光电技术研究所 | Surface plasma resonance image-forming nanostructure array chip preparation method |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109030423A (en) * | 2018-07-25 | 2018-12-18 | 昆山复锶科纳米光学科技有限公司 | Metal nano slot two-dimensional grating sensor chip and its application in biochemical test |
| CN110307921A (en) * | 2019-07-02 | 2019-10-08 | 运城学院 | A kind of pressure sensor |
| CN110703371A (en) * | 2019-10-14 | 2020-01-17 | 江西师范大学 | Semiconductor super-surface electromagnetic wave absorber and preparation method thereof |
| CN114076739A (en) * | 2020-08-21 | 2022-02-22 | 广东工业大学 | RCLED-based sensor and manufacturing method thereof |
| CN114076739B (en) * | 2020-08-21 | 2023-09-12 | 广东工业大学 | RCLED-based sensor and manufacturing method thereof |
| CN115249432A (en) * | 2021-04-28 | 2022-10-28 | 中国科学院微电子研究所 | Anti-counterfeiting color label and manufacturing method thereof and preparation method of printed matter |
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Application publication date: 20130306 |