CN102890343B - The method of using the output beam of the optical wedge adjustment magnification system - Google Patents

The method of using the output beam of the optical wedge adjustment magnification system Download PDF

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CN102890343B
CN102890343B CN201210349714.4A CN201210349714A CN102890343B CN 102890343 B CN102890343 B CN 102890343B CN 201210349714 A CN201210349714 A CN 201210349714A CN 102890343 B CN102890343 B CN 102890343B
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wedge
beam
optical
surface
optical wedge
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CN102890343A (en
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李韦韦
陈力
陈伟
胡丽丽
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中国科学院上海光学精密机械研究所
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Abstract

一种采用光楔对调整变倍系统输出光束的方法,其特征在于,该方法包括下列步骤:①在变倍系统之前、之中或之后垂直于光束主光轴放置一组或者多组光楔对,每组光楔对的两个光楔的斜面相对地共轴放置;②沿光楔对的光楔的斜面的倾斜方向相对移动两个光楔,以补赏由于光束经过变倍系统引起的光束发散角和光束光斑尺寸的变化。 A method for outputting an optical wedge beam magnification adjustment system employed, wherein the method comprises the steps of: ① in the zoom system before placing a wedge or more sets or after the beam is perpendicular to the main optical axis for each set of two wedge ramps of the optical wedge is placed coaxially opposite; ② the optical wedge along an optical wedge inclined surface is inclined to the direction of relative movement of the two wedges to fill since the reward system caused through the variator beam change in beam divergence angle and beam spot size. 本发明可实现光束发散角及光束光斑尺寸的精密控制,具有调整结构简单,调整方便的特点。 The present invention can realize precise control of beam divergence and beam spot size, it has a simple structure to adjust, easy to adjust the characteristics.

Description

采用光楔对调整变倍系统输出光束的方法 The method of using the output beam of the optical wedge adjustment magnification system

技术领域 FIELD

[0001 ]本发明涉及变倍系统,特别是一种采用光楔对调整变倍系统输出光束的方法。 [0001] The present invention relates to a zoom system, in particular a method for outputting an optical wedge beam magnification adjustment system employed.

背景技术 Background technique

[0002] 在激光应用中,变倍光学系统是一种常用的光学系统,通过变倍,不仅能够改变激光光束直径,实现光束光斑尺寸的匹配要求,而且可以改变发散角,有利于控制光束光斑尺寸、光束发散角和能量密度。 [0002] In laser applications, the variable power optical system is a common optical system, by magnification, not only to change the laser beam diameter, the beam spot size to achieve matching requirements, and can change the divergence angle of the beam spot help control size, beam divergence angle and energy density.

[0003] 对于一个变倍倍率为Μ倍的变倍系统,根据拉氏不变量(Lagrange)定理: [0003] For the zoom magnification of a zooming system Μ times, according to the Lagrange invariant (LAGRANGE) Theorem:

[0004] J = nD0=n/D,9, [0004] J = nD0 = n / D, 9,

[0005] 其中:η和η'表示光学系统在介质中的折射率,当介质为空气时,和D'表示光学系统的入瞳直径和出瞳直径;Θ和Μ表示入射光的视场角和出射光的视场角,当视场角很小时,可以用弧度表示,由上式可见,当变倍倍率为Μ时, [0005] wherein: η and η 'denotes a refractive index of the optical system in a medium, when the medium is air, and D' represents the entrance pupil diameter of the optical system and the exit pupil diameter; [Theta] represented Μ and the viewing angle of incident light and an exit angle of the light field, when the field angle is small, can be expressed in radians, seen from the above equation, when the zoom magnification when Μ,

Figure CN102890343BD00031

即若经过变倍系统扩束Μ倍后,出射激光束光斑直径与扩束前相比扩大了Μ倍,同时扩束后的光束发散角与未被扩束的激光光束相比,发散角缩小了Μ倍。 I.e., if the elapsed times Μ zoom beam expander system, the outgoing laser beam spot diameter of the beam compared to pre-expanded expanded Μ times, while the beam divergence angle of the beam expander of the laser beam as compared with non-expanded beam divergence angle reduction the Μ times.

[0006] 对于具有不同倍率的变倍光学系统,不同倍率的光束具有不同的发散角,常用的调整发散角的方法为在变倍系统中选择一片或者一组透镜作为调整镜组,调整镜组根据需要沿光轴方向前后进行移动,用来实现光束发散角的调整。 [0006] For the variable power optical system having different magnifications, of different magnifications beams having different divergence angles, the method used to adjust the divergence angle of the selected one or a set of lenses in the zoom lens system as a set of adjustment, adjustment lens group back and forth along the optical axis direction to move as needed, to achieve the adjustment of the beam divergence angle. 这种调整方法具有一定的局限性,在沿光轴方向移动调整镜组时,可能会引起光束倾斜或者离轴,从而改变光束的方向。 This adjustment method has some limitations, adjustment lens group is moved in the optical axis direction, it may cause the beam to tilt or off-axis, thereby changing the direction of the beam.

发明内容 SUMMARY

[0007] 本发明的目的是提供一种采用光楔对调整变倍系统输出光束的方法,使激光光束经过变倍光学系统后光束发散角和光束的能量密度分布不变。 [0007] The object of the present invention is to provide a method for outputting an optical wedge beam magnification adjustment system using the laser beam passes through the variable power optical system and the beam divergence angle of the beam energy density distribution constant.

[0008] 为实现上述目的,本发明的技术解决方案如下: [0008] To achieve the above object, the technical solution of the present invention are as follows:

[0009] -种采用光楔对调整变倍系统输出光束的方法,其特点在于,该方法包括下列步骤: [0009] - seed method using an optical wedge adjustment system variator output beam, characterized in that, the method comprising the steps of:

[0010] ①在变倍系统之前、之中或之后垂直于光束主光轴放置一组或者多组光楔对,每组光楔对的两个光楔的斜面相对地共轴放置; [0010] ① zoom system before, during or after the optical axis perpendicular to the main beam is placed a wedge or more sets of two optical wedges of each wedge bevel of coaxially disposed oppositely;

[0011] ②沿光楔对的光楔的斜面的倾斜方向相对移动两个光楔,以补赏由于光束经过变倍系统引起的光束发散角和光束光斑尺寸的变化。 [0011] ② slope in an oblique direction of an optical wedge of the wedge relative movement of the two wedges, to make changes in beam divergence angle reward zooming system the beam passes through the beam and spot size caused due.

[0012] 所述的变倍系统为伽利略型、开普勒型、折反射式和反射式变倍光学系统。 Zoom system [0012] of the Galileo type, Kepler type, reflection-type and catadioptric type variable magnification optical system.

[0013] 所述的光楔对的入射面和出射面是平面。 [0013] The light incident surface of the wedge and the exit surface is a plane.

[0014] 所述的光楔对的入射面和出射面为曲面面型,包括二次曲面、三次曲面、有理函数曲面、开方函数曲面、指数函数曲面、对数函数曲面、幂函数曲面、周期函数曲面、或高斯函数曲面。 Wedge of light incident surface and the exit surface [0014] of the curved face, including quadric, cubic surfaces, surfaces rational functions, square root function surface, curved exponential function, logarithmic function surface, the surface power function, periodic function surface, a curved surface or a Gaussian function.

[0015] 本发明的调整发散角方法简单:采用一组或者多组光楔对,通过相对移动两个光楔来实现光束发散角及光束光斑尺寸的调整,调整方式简单。 [0015] The method of the present invention to adjust the divergence angle of simplicity: using one or more sets of wedge pairs is achieved adjust the beam divergence angle and beam spot size by the relative movement of the two wedges, a simple adjustment mode.

附图说明 BRIEF DESCRIPTION

[0016] 图1是本发明采用光楔对调整扫描激光光束的方法的原理图; [0016] FIG. 1 is a principle of the present invention uses an optical wedge of FIG method for adjusting the scanning laser beam;

[0017] 图2是本发明光束经分开的光楔对偏移原理图; [0017] FIG. 2 is a light beam through an optical wedge of the present invention is divided schematic diagram of the offset;

[0018] 图3是本发明光楔对放置在变倍系统之前的原理图; [0018] FIG. 3 is an optical wedge of the present invention is placed before the variator schematic diagram of the system;

[0019] 图4是本发明两个光楔相对移动时原理图一; [0019] FIG. 4 is a two wedge movement relative to the present invention a schematic diagram;

[0020]图5是本发明两个光楔相对移动时原理图二; [0020] FIG. 5 is an optical wedge of the present invention, two relatively movable Schematic II;

[0021 ]图6是本发明光楔对放置在变倍系统之中的原理图; [0021] FIG. 6 is an optical wedge of the present invention is placed in the zoom system diagram;

[0022]图7是本发明实施例1光路图; [0022] FIG. 7 is an optical path diagram of Example 1 of the present embodiment of the invention;

[0023]图8是本发明实施例2光路图; [0023] FIG. 8 is an optical path diagram of Example 2 of the present embodiment of the invention;

[0024]图9是本发明实施例3光路图; [0024] FIG. 9 is an optical path diagram in Example 3 of the present embodiment of the invention;

[0025] 图10是本发明实施例4光路图。 [0025] FIG. 10 is an optical path diagram in Example 4 of the present embodiment of the invention.

具体实施方式 Detailed ways

[0026] 下面结合附图和实施例对本发明作进一步说明,但不应以此限制本发明的保护范围。 [0026] The following embodiments in conjunction with the drawings and embodiments of the present invention is further illustrated, but should not be used to limit the scope of the present invention.

[0027] 本发明的工作原理如下: [0027] The working principle of the present invention is as follows:

[0028] 将一组或多组光楔对置于变倍系统,如图1所示在变倍系统之中放置光楔对,其中光楔对入射面和出射面为平面,光束经过光楔对使光束发生偏移,光束偏移使光束与光轴交点和变倍后组的焦点发生偏移,从而使变倍系统出射光束的发散角和光束光斑尺寸的变化。 [0028] The one or more sets of optical wedge placed zoom system shown in Figure 1 to an optical wedge placed in the zoom system, wherein the light incident surface of the wedge and the exit surface is a plane, the beam passes through an optical wedge shifted on the beam, beam displacement and beam axis intersection of the focal point and the rear zoom group shifted, so that the zoom system changes the divergence angle of the emitted beam and the beam spot size. 通过光楔对沿斜面倾斜方向相对移动,改变光楔对入射面到出射面的厚度,使光束偏移量发生变化,实现光束与光轴交点沿轴向的前后移动,从而补偿所述的变倍系统引起的光束发散角及光束光斑尺寸的变化,实现光束发散角及光束光斑尺寸的精密控制。 Through an optical wedge for relative movement along the ramp oblique direction, changing a light incident surface of the wedge having a thickness of the exit surface, the beam offset changes, for mobile longitudinal beam intersection with the optical axis in the axial direction, so as to compensate for the variations beam divergence angle and beam spot size times the system changes due, for precision control of the beam divergence angle and the beam spot size.

[0029] 对于贴合放置的光楔对,即两个光楔之间空气厚度为0mm,如图1所示光束经过一对光楔后光束发生偏移,沿光轴方向的偏移量△ L为: [0029] For an optical wedge placed bonded pair, ie the thickness of the air between the two wedge is 0mm, a light beam shown in Figure 1 after a wedge of light beam generating offset, the offset of the optical axis direction △ L is:

Figure CN102890343BD00041

垂直于光轴方向的偏移量Δ h为:Δ h=d(tan9-tani),其中sin9=nsini。 Perpendicular to the optical axis shift amount of Δ h: Δ h = d (tan9-tani), wherein sin9 = nsini.

[0030] 其中:d为光楔对入射面到出射面的厚度,η为光楔的材料折射率,Θ为光束入射到光楔的入射角,i为折射角。 [0030] where: d is the light incident surface of the wedge having a thickness of the exit surface, η is the refractive index of the wedge, Θ is the incident angle of the light beam incident optical wedge, i is the angle of refraction. 根据透镜成像原理 The principle of the imaging lens

Figure CN102890343BD00042

当光束经过光楔对有一轴向偏移量AL时,则后透镜组物距为f- △ L,则 When the beam passes through an optical wedge for an axial offset when AL, the rear lens group object distance f- △ L, then

Figure CN102890343BD00043

•所以轴向偏移量引起发散角的变化为 • causes the axial offset of the divergence angle changes

Figure CN102890343BD00044

)为出射光束直径。 ) For the exit beam diameter.

[0031] 而随着两个光楔相对移动,使光楔对入射面到出射面之间厚度发生变化 [0031] With the two relatively movable wedge, the wedge of the light incident surface to a thickness between an exit surface is changed

Figure CN102890343BD00045

其中:d '为光楔对相对移动后入射面到出射面的厚度,r为光楔半径,h为光楔沿斜面移动量,α为光楔楔角。 Wherein: d 'of the optical wedge is moved relative to the thickness of the incident surface of the exit surface, r is the radius of the optical wedge, h is the amount of movement of the wedge along the ramp, α the wedge angle of the wedge. 随着光楔对入射面到出射面的厚度的变化,光束与光轴的交点将沿轴向前后移动,从而补偿所述的变倍系统引起的光束发散角及光束光斑尺寸的变化。 As the light incident surface of the wedge to a change in the thickness of the emitting surface, the intersection of the optical axis of the light beam moves back and forth along the axial direction, thereby compensating for changes in beam divergence angle caused by the zooming system and the beam spot size.

[0032]对于分开放置的光楔对,即两个光楔之间空气厚度为tmm,如图2所示光束经过光楔对后光束发生偏移,轴向偏移量为: [0032] For separately disposed on an optical wedge, i.e. the thickness of the air between the two wedges of TMM, as shown in FIG beam passes through an optical wedge to light after shifted, axially offset:

Figure CN102890343BD00051

[0035] 其中:Sin0=nsini,L()为光楔的中心厚度,η为光楔折射率,Θ为光线入射到光楔的入射角,i为折射角,h为光线入射到光楔时的初始高度,t为两个光楔之间空气的厚度,α为光楔楔角。 When Sin0 = nsini, L () is the center thickness of the wedge, η is the refractive index of the optical wedge, Θ is the incident angle of the light incident on the optical wedges, i is the angle of refraction, h is the light incident to the optical wedge: [0035] wherein initial height, t is the wedge angle of the wedge is an air wedge between the two thicknesses, α. 同样可根据轴向偏移量计算发散角的变化 Similarly variation in divergence angle can be calculated according to the amount of axial offset

Figure CN102890343BD00052

随着光楔对的相对移动,使光楔对入射面到出射面的厚度发生变化,随着光楔对入射面到出射面的厚度的变化, 光束与光轴交点实现沿轴向的前后移动,从而实现光束发散角及光束光斑尺寸的调整。 As the relative movement of the wedge, the wedge on the light incident surface to the exit surface of the thickness change, as the light incident surface of the wedge to a change in the thickness of the exit surface of the beam intersection with the optical axis move back and forth in the axial direction to achieve in order to achieve and adjust the beam divergence angle of the beam spot size. 然而,对于分开放置的光楔对,由于中间有一空气棱柱,所以光束经过光楔对后会有一侧向偏移,即光束偏离光轴。 However, for the separate placement of an optical wedge, since the intermediate has an air prism, the light beam through an optical wedge on the side to be shifted, i.e. the beam off the optical axis. 因此,用光楔对进行调整光束发散角及光束光斑尺寸时,紧密贴合放置的光楔对无偏轴效应,但相对位移的问题是表面擦伤,具体应用应具体设计。 Thus, light wedge for adjusting the beam divergence angle and the beam spot size, the optical wedge is placed in close contact with the off-axis without effect, but the problem is that the relative displacement mar, should the particular design of the particular application.

[0036] 在变倍系统之前放置光楔对,如图2所示,若光楔对入射面和出射面均为平面,则光楔对组成平行平板,光线经过光楔对组成的平行平板时会发生偏移,垂直于光轴的偏移量为△ D= △ Ltan0,随着光楔对相对移动,光楔对入射面到出射面的厚度发生变化,随着所述厚度的变化,光束垂直于光轴的偏移量发生变化,即可实现光束光斑尺寸的调整。 [0036] Before placing an optical wedge of the system magnification, as shown, when the wedge of light incident surface and the exit surface are flat, while the two pairs of optical wedge into parallel plates, the parallel light through an optical wedge plate composed of shift will occur perpendicular to the optical axis is offset △ D = △ Ltan0, the thickness of the light emitting surface of the wedge with the relative movement, the light incident surface of the wedge to a change with the change of the thickness, the beam changes the optical axis perpendicular to the offset, to achieve the adjustment of the beam spot size.

[0037] 如图3所示,光楔对的入射面和出射面为曲面,曲面为在YZ面上构造的一条圆弧沿一平行于X轴的直线滑动形成的曲面,而光楔斜面垂直于YZ面与X轴有一夹角,光线经过光楔对时,在Y轴方向会发生偏移且发散角会发生变化,在X轴方向光线发散角保持不变,根据圆弧的曲率半径和光楔对的厚度即可计算类透镜的焦距 [0037] As shown in FIG. 3, the light incident surface of the wedge and the exit surface is a curved surface is configured in an arc YZ curved surface along a straight line parallel to the X-axis slide is formed, and the wedge inclined surface perpendicular to in the YZ plane makes an angle with the X axis, when light passes through an optical wedge pairs in the Y-axis direction and the divergence angle deviation will vary occur, the light divergence angle in the X-axis direction remains unchanged, and light according to the radius of curvature of the circular arc the thickness of the focal length of the lens can be calculated based on the wedge

Figure CN102890343BD00053

:,然后可根据拉氏不变量(Lagrange)定理:JznDQzr/ D' 9/确定光束经过光楔对时光斑尺寸大小和光束发散角。 :, Then according to Lagrange invariant (LAGRANGE) Theorem: JznDQzr / D '9 / is determined when the beam passes through an optical wedge of the spot size and beam divergence angle. 沿光楔斜面倾斜方向相对移动两个光楔,通过改变光楔对入射面到出射面的厚度可控制类透镜的焦距,从而实现经过光楔对后光束发散角及光束光斑尺寸的调整。 Along the wedge inclined surface is inclined relative to the direction of movement of the two wedges, the wedge for by changing the light incident surface to the exit surface of the lens-thickness control of the focal length, thereby achieving an optical wedge for adjusting the beam divergence angle and beam spot size elapsed. 在变倍系统前放置两组光楔对即可实现在二维方向上的光束发散角及光束光斑尺寸的调整。 Before placing the two wedge system magnification adjustments can be achieved and the beam divergence angle of the beam spot size in two-dimensional directions.

[0038] 当光楔对放置在变倍系统之后时,同样的原理可以实现光束发散角及光束光斑尺寸的调整。 [0038] When an optical wedge is placed after the time of the zoom system, the same principles may be implemented to adjust the beam divergence angle and the beam spot size. 且光楔对的入射面和出射面可以是平面,也可以是曲面,或者一个为平面一个为曲面。 And the incident surface and the light exit surface of the wedge may be flat, or may be a curved surface, a flat or a curved surface. 而曲面可以根据入射光束的面型和激光应用系统所需光斑的要求设计面型,且要注意对称性和补偿性。 And the surface can be designed to a desired spot in light of the plane type surface and the incident beam of laser applications, and to pay attention to the symmetry and compensatory. 曲面面型可以是代数函数曲面,包括二次曲面、三次曲面、有理函数曲面、开方函数曲面等,也可以是超越函数曲面,包括指数函数曲面、对数函数曲面、幂函数曲面、周期函数曲面、高斯函数曲面等。 Curved surface algebraic function type may be a curved surface, comprising a quadratic surface, three surfaces, rational function surface, like square root function surface, may be curved transcendental function, an exponential function including curved, curved logarithmic function, a power function surface, periodic function curved surfaces, and a Gaussian function.

[0039] 实施例 [0039] Example

[0040]本发明采用光楔对调整变倍系统输出光束,如图1所示为光楔对放置在变倍光学系统之中的原理图,该光学系统自左而右依次同轴设置有第一透镜1、第一光楔A、第二光楔B、第二透镜2、第三透镜3和探测器4,由第一光楔A、第二光楔B的斜面相对平行放置构成一个光楔对。 [0040] The present invention uses an optical wedge to adjust the output beam magnification system, as shown in Figure 1 the principle of an optical wedge placed in the variable power optical system of FIG., The optical system from left to right are sequentially disposed coaxially with a first a lens 1, a first optical wedge a, B the second wedge, a second lens 2, the third lens 3 and the detector 4, the first wedge a, B of the inclined surface of the second optical wedge placed in parallel to form a relatively light wedge right. 两个直角光楔斜面相对地共轴放置,该光楔对入射面到出射面的厚度为d;当第一光楔A向上移动而第二光楔B向下移动时,该光楔对入射面到出射面的厚度变为dl,如图4 所示;当第一光楔A向下移动而第二光楔B向上移动时,光楔对入射面到出射面的厚度变为d2,如图5所示。 Two right-angled wedge inclined surface disposed coaxially opposite to the light incident surface of the wedge having a thickness of the exit surface is D; A when the first wedge and the second wedge B is moved upward is moved downward, the incident optical wedge the thickness of the surface to the exit surface becomes dl, shown in Figure 4; when a first wedge is moved upward downward movement of the second wedge B, the light incident surface of the wedge having a thickness of the exit surface becomes d2, as Figure 5. 因此,随着光楔对入射面到出射面的厚度的变化,使光束经过光楔对后的光束偏移量发生变化,从而实现变倍系统出射光光束发散角及光束光斑尺寸的调整。 Thus, as the light incident surface of the wedge to a change in the thickness of the exit surface, the light beam through the beam offset of the optical wedge to vary, enabling the system to adjust the variator output light beam divergence angle and the beam spot size. 对于光楔对放置在变倍系统之中时,所述的光楔对也可以放置在第二透镜2和第三透镜3之间来实现光束发散角及光束光斑尺寸的调整,如图6。 For an optical wedge placed in the time of zooming system of the optical wedge may be disposed between the second lens 2 and the third lens 3 is achieved adjust the beam divergence angle and the beam spot size, as shown in FIG 6.

[0041]在光楔对放置在变倍光学系统之前或者之后时,同样相对移动两个光楔,通过改变光楔对入射面到出射面的厚度实现光束发散角及光束光斑尺寸的调整。 [0041] When an optical wedge is placed in front of or after the variable power optical system, likewise a relative movement of the two wedges, the thickness of the incident surface to the exit surface of the beam divergence angle and achieve the adjustment of the beam spot size by changing the wedge. 对于变倍光学系统,包括伽利略型、开普勒型、折反射式和反射式等变倍系统。 For variable power optical system, comprising a Galileo type, Kepler type, reflection-type and catadioptric systems like zoom.

[0042]为使熟悉本领域的技术人员能清楚地理解本发明的技术内容,特举以下实施例加以具体说明,但不应以此限制本发明的保护范围。 [0042] to enable those skilled in the art can clearly understand the technical content, several of the present invention are specifically exemplified the following examples, but should not be used to limit the scope of the present invention.

[0043] 实施例一:光楔对放置在变倍系统之中 [0043] Example a: an optical wedge placed in the magnification of the system

[0044] 请参阅图7,为变倍扩束系统,系统由第一透镜组L1、第二透镜组L2、第三透镜组L3 三个透镜组构成,适用波长:λ=632·8ηπι发散角:30mrad入射直径:5mm变倍范围:4 X-6X,其中扩束倍数与透镜组间隔d4、d8之间关系如下: 「00451 [0044] Referring to FIG. 7, is a zoom beam expander system, the system of the first lens group L1, a second lens group L2, the third lens group L3 group consisting of three lenses, suitable wavelength: λ = 632 · 8ηπι divergence angle : 30 Mrad incidence diameter: 5mm zoom range: 4 X-6X, wherein the multiple beam expanding lens group spacing d4, d8 relationship between follows: "00451

Figure CN102890343BD00061

[0046] 如图7所示在第一透镜组和第二透镜组之间插入分开的光楔对,光楔直径40mm,楔角为10°,光楔中心厚度为5mm,两个光楔中间空气厚度为3mm。 [0046] FIG between the first lens group and the second lens group on an optical wedge inserted into separate FIG. 7, wedge diameter 40mm, a wedge angle of 10 °, the center wedge thickness of 5mm, two intermediate wedge an air thickness of 3mm. 通过相对移动两个光楔,使光束通过光楔对入射面到出射面的厚度d发生变化调整发散角,其中光楔移动量Δ1与发散角的关系如下: By the relative movement of the two wedges, the light beam incident through an optical wedge surface to the exit surface of the thickness d is changed to adjust the divergence angle, wherein the optical wedge movement amount Δ1 divergence angle following relationship:

[0047] [0047]

Figure CN102890343BD00062

[0048] 如图8所示贴合的光楔对放置在第一透镜组和第二透镜组之间,光楔直径40mm,楔角为10°,光楔中心厚度为5mm,两个光楔中间空气厚度为0mm。 [0048] Figure 8 is bonded to the optical wedge is placed between the first lens group and the second lens group, an optical wedge diameter 40mm, a wedge angle of 10 °, the center wedge thickness of 5mm, two wedge The thickness of the intermediate air 0mm. 通过相对移动两个光楔,使光束通过光楔对入射面到出射面的厚度d发生变化调整发散角,其中光楔移动量Δ1与发散角的关系如下: 「00491 By the relative movement of the two wedges, the light beam incident through an optical wedge surface to the exit surface of the thickness d is changed to adjust the divergence angle, wherein the optical wedge movement amount Δ1 divergence angle following relationship: "00491

Figure CN102890343BD00063

[0050] 如图9所示贴合的光楔对放置在第二透镜组和第三透镜组之间,本实施例由于在扩束4.282倍时第二透镜组和第三透镜组之间间距为5mm,比较小,在此就不考虑。 [0050] The wedge bonded to 9 disposed between the second lens group and the third lens group, In the present embodiment, since the beam expander 4.282 times the distance between the second lens group and the third lens group of 5mm, is relatively small, this is not taken into account. 考虑扩束倍数分别为5.02倍和5.97倍的情况,在第二透镜组和第三透镜组之间插入双光楔,光楔直径40mm,楔角为10°,光楔中心厚度为5mm,两个光楔中间空气厚度为0mm。 Consider a beam expander multiple was 5.02-fold and 5.97-fold, the double optical wedge is inserted between the second lens group and the third lens group, an optical wedge diameter 40mm, a wedge angle of 10 °, the center wedge thickness of 5mm, two a wedge having a thickness of the intermediate air 0mm. 通过相对移动两个光楔,使光束通过光楔对入射面到出射面的厚度d发生变化调整发散角,其中光楔移动量Δ 1与发散角的关系如下: By the relative movement of the two wedges, the light beam incident through an optical wedge surface to the exit surface of the thickness d is changed to adjust the divergence angle, wherein the optical wedge 1 and the relationship between the movement amount Δ divergence angle is as follows:

[0051] [0051]

Figure CN102890343BD00071

[0052]把上述扩束系统倒置为缩束系统,采用一组或者多组光楔对调整光束发散角及光束光斑尺寸的方法同样适用于缩束系统。 [0052] The beam expander described above is inverted attenuator system, using a wedge or more sets of the method for adjusting the beam divergence angle and beam spot size is equally applicable to systems attenuator. 如图10所示为缩束光学系统。 Beam condensing optical system shown in FIG. 10.

[0053] 实施例二:光楔对放置在变倍系统之前或之后 Two [0053] Example: After an optical wedge placed in front of the zoom system, or

[0054] 如图3所示一组光楔对放置在变倍系统之前或之后,本实施例光楔对的入射面和出射面均为曲面,曲面为在YZ面上构造的一条圆弧沿一平行于X轴的直线滑动形成的曲面, 圆弧的曲率半径为300mm,光楔楔角为15°,光楔中心厚度为3mm,双光楔紧贴放置,即中间空气厚度为〇mm,光束发散角:30mrad,入射光束直径:10mm,距光楔入射面距离为10mm。 [0054] As shown in Figure 3 a set of optical wedge is placed after or before the zoom system, an optical wedge of the embodiment according to the present embodiment the incident surface and the exit surface are curved in an arc along the curved configuration of the YZ plane a curved line parallel to the X-axis slide is formed, the radius of curvature of the arc is 300mm, the wedge angle of the wedge is 15 °, the center wedge thickness of 3mm, a double optical wedge is placed in close contact, i.e., a thickness of the intermediate air 〇mm, beam divergence: 30mrad, the incident beam diameter: 10mm, distance from the light emitting surface of the wedging 10mm. 沿光楔对斜面倾斜方向相对移动两个光楔,通过改变光楔对的厚度可控制类透镜的焦距: Along the inclined surface of the wedge is inclined relative to the direction movement of the two wedges, by varying the thickness of an optical wedge may be controlling the focal length of the lens-like:

Figure CN102890343BD00072

然后可根据拉氏不变量(Lagrange)定理:JznDQzr/D' θ'确定光束经过光楔对时光斑尺寸大小和光束发散角。 Then according to the Lagrange invariant (LAGRANGE) Theorem: JznDQzr / D 'θ' is determined when the beam passes through an optical wedge of the spot size and beam divergence angle. 其中光楔相对移动量A 1与经过光楔对后Υ方向发散角及出射面光斑尺寸D的关系如下: Wherein the relative movement amount of the optical wedge relationship A 1 through an optical wedge after the divergent angle Υ direction and an exit surface and the spot size D is as follows:

[0055] [0055]

Figure CN102890343BD00073

[0056] 在变倍系统之前或者之后放置两组光楔对即可实现在二维方向上的光束发散角及光束光斑尺寸的调整。 [0056] Before or after placement of the two zoom optical system to adjust the beam divergence angle wedge and the beam spot size can be achieved in two-dimensional directions.

[0057]故在设计变倍光学系统时,可在变倍系统之前、之中、之后三个位置垂直于主光轴放置一组或者多组光楔对,当沿光楔对斜面倾斜方向相对移动两个光楔时,光楔对入射面到出射面是厚度发生变化,随着光楔对入射面到出射面的厚度的变化,使光束的光斑及光束发散角发生变化,从而实现激光光束扫描时光束发散角及光束光斑尺寸的精密控制。 [0057] Therefore, when designing a variable magnification optical system, zoom system may be prior to, during, and after three positions placed vertically or more sets of a wedge of light in the main optical axis, when an optical wedge along the ramp oblique direction relative to the when moving the two wedges, the wedge for the incident surface to the exit surface is to change the thickness, with an optical wedge of the incident plane to a change in the exit plane of the thickness of the light spot, and beam divergence angle of the beam is changed, thereby realizing the laser beam precise control of beam divergence angle and beam spot size during scanning.

Claims (1)

1. 一种采用多组光楔对调整变倍系统输出光束的方法,其特征在于,该方法包括下列步骤: ① 在变倍系统之前、之中或之后垂直于光束主光轴放置多组光楔对,每组光楔对的两个光楔的斜面相对地共轴放置; ② 沿光楔对的光楔的斜面的倾斜方向相对移动两个光楔,以补偿由于光束经过变倍系统引起的光束发散角和光束光斑尺寸的变化,而带来的能量密度分布的变化,并可对径向不同部分的光束进行不同程度的光束发散角的增大或减少,从而调整光束中能量密度的再分布; 所述的光楔对以帖合或者分开的形式垂直于主光轴放置; 所述的光楔对的入射面和出射面为曲面面型,包括二次曲面、三次曲面、有理函数曲面、开方函数曲面、指数函数曲面、对数函数曲面、幂函数曲面、周期函数曲面、或高斯函数曲面; 所述的变倍系统为伽利略型、开普勒 A method of using a plurality of sets of output light beams an optical wedge magnification adjustment system, characterized in that the method comprises the steps of: ① in the zoom system before placing a plurality of sets of light during or after the beam is perpendicular to the main optical axis wedge pairs, each of two wedge ramps of the optical wedge is placed coaxially opposite; ② the optical wedge along an optical wedge inclined surface is inclined to the direction of relative movement of the two optical wedges to compensate for zooming system caused through the beam varying beam divergence angle and beam spot size changes brought energy density distribution, the light beam may be radially different portions of different degrees of reduction or increase in beam divergence angle, to adjust the beam energy density redistribution; optical wedge on said post to form together or separately disposed perpendicular to the main optical axis; light incident surface of the wedge and the exit surface of the curved face type, including quadric, cubic surfaces, rational function curved, square root function surface, curved exponential function, logarithmic function surface, the surface power function, periodic function surface, a curved surface or a Gaussian function; the Galileo system type zoom, Kepler 型、折反射式或反射式变倍光学系统。 Type, catadioptric or reflective variable power optical system.
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