CN102820867A - Method for producing titanium dioxide doped copper phthalocyanine sensitive membrane of acoustic surface wave sensor - Google Patents
Method for producing titanium dioxide doped copper phthalocyanine sensitive membrane of acoustic surface wave sensor Download PDFInfo
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- CN102820867A CN102820867A CN201110155259XA CN201110155259A CN102820867A CN 102820867 A CN102820867 A CN 102820867A CN 201110155259X A CN201110155259X A CN 201110155259XA CN 201110155259 A CN201110155259 A CN 201110155259A CN 102820867 A CN102820867 A CN 102820867A
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- cupc
- sensitive membrane
- tio
- titanium dioxide
- composite material
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Abstract
The invention discloses a method for producing a titanium dioxide (TiO2) doped copper phthalocyanine (CuPc) sensitive membrane of an acoustic surface wave sensor. The method includes that TiO2 doped CuPc is used as a sensitive material and subjected to mixing and pressing to form a TiO2 and CuPc mixed material, and the TiO2 and CuPc mixed material is subjected to evaporation by electron beams and then photoresist stripping to form the TiO2 doped CuPc sensitive membrane. According to the method for producing the TiO2 doped CuPc sensitive membrane of the acoustic surface wave sensor, TiO2 is added into CuPc to produce the polymerized sensitive membrane, so that the possibility that a phthalocyanine material is used for detecting a nitrogen dioxide (NO2) gas at a normal temperature is achieved, and compared with sensors with pure CuPc sensitive membranes, the sensor with the TiO2 doped CuPc sensitive membrane is greatly improved in selectivity, sensitivity and detection qualities when the lower-concentration NO2 gas is detected.
Description
Technical field
The present invention relates to the sonic surface wave gas sensors technical field, particularly a kind of through electron beam evaporation titanium dioxide (TiO
2) make the method for surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane with CuPc (CuPc) composite material.
Background technology
Since the eighties, the development work of surface acoustic wave (SAW) gas sensor is risen gradually, can detect H at present
2S, NO
2, SO
2, NH
3Etc. multiple gases, the transducer that the utilization surface acoustic wave techniques is developed into can directly be exported digital signal, thereby has advantageous superiority.The SAW gas sensor has been compared a lot of excellent characteristic with the transducer of other types, has that volume is little, in light weight, precision is high, resolution is high, antijamming capability is strong, numerous characteristics such as highly sensitive, valid analysing range good linearity.
The basic functional principle of SAW gas sensor is the variation that causes SAW sensor electrical conductance and quality through the absorption that the surperficial sensitive membrane that is covered of SAW gas sensor is treated side gas; Thereby cause the change of the frequency of oscillation of SAW oscillator, realize monitoring and measurement gas with this.Therefore want to produce the surface acoustic wave sensor device of high sensitivity and quality, wherein the special key of design and fabrication part of sensitive membrane.
Along with improving constantly of sociometric technique and people's living standard, people more and more pay attention to the pollution of living environment, and the burning of commercial production and mineral matter often produces a large amount of SO
2, NO
2Etc. poisonous and hazardous gas, the volume fraction of the atmosphere pollution of on-site real-time monitoring often is low to moderate 10
-6Even 1O
-9Level, this transducer that just requires to monitor dusty gas will have enough sensitivity and selectivity.
Main being used to of phthalocyanine material detects NO in the surface acoustic wave sensor field
2, the SAW device selectivity that independent CuPc produces as sensitive thin-film material is low, and working temperature is high, and applied value is not high.Selectivity characteristic and high temperature not only influence the stablizing effect of sensor measurement; And can bring extra problems such as power loss; Seem special important so can produce the gas sensor of quick at normal temperatures, sensitive detection low concentration, this has higher requirement also for the making of film.
Because CuPc is as several frequently seen detection NO
2Sensitive membrane material in the gas sensor is at high temperature to the NO of low concentration
2The gas response ratio is bigger, and sensitivity is higher.TiO
2Be a kind of weak n type metal oxide semiconductor, higher reaction sensitivity and response time faster arranged, existingly use more widely as gas sensor.With CuPc doped Ti O
2The sensitive membrane of producing through polymerization can make pure CuPc to NO
2Gas has bigger response, accomplishes low concentration of NO at normal temperatures with expectation
2Gas carries out high-quality, sensitivity and accurate the detection.
Summary of the invention
The technical problem that (one) will solve
In view of this, main purpose of the present invention is to provide a kind of method of making surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane, to realize at normal temperatures to low concentration of NO
2Gas carries out high-quality, sensitivity and accurate the detection.
(2) technical scheme
For achieving the above object, the invention provides a kind of method of making surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane, this method is by TiO
2Doped with Cu Pc is as sensitive material, through mixing and compacting formation TiO
2With the CuPc composite material, this TiO of electron beam evaporation
2With the CuPc composite material, and stripping photoresist forms titanium dioxide doping CuPc sensitive membrane.
In the such scheme, said through mixing and compacting formation TiO
2With the CuPc composite material, comprising: with 1: 1 TiO of mass ratio
2Mix at normal temperatures with CuPc, make TiO
2With the CuPc composite material; And with machine with TiO
2With the compression moulding of CuPc composite material.
In the such scheme, this TiO of said electron beam evaporation
2With the CuPc composite material, and stripping photoresist formation titanium dioxide doping CuPc sensitive membrane, comprising: resist coating on substrate; The TiO that electron beam evaporation suppresses on photoresist
2With the CuPc composite material, with block TiO
2The target of being used as electron beam evaporation with the CuPc composite material evaporates; And substrate bubble made the photoresist dissolving in chemical reagent, thereby stripping photoresist forms titanium dioxide doping CuPc sensitive membrane.
(3) beneficial effect
The method of this making surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane provided by the invention is in the manufacture process of sonic surface wave gas sensors, on a delay line of two delay line type oscillators, passes through electron beam evaporation TiO
2Make surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane with the composite material of CuPc.The present invention passes through TiO
2Add and make the polymerization sensitive membrane among the CuPc, make and use the phthalocyanine material to remove to detect NO under the normal temperature
2Gas becomes possibility, and the transducer with this titanium dioxide doping CuPc sensitive membrane compares with the transducer of simple CuPc sensitive membrane, detects low concentration of NO
2In selectivity, sensitivity and detection quality significantly raising is arranged all during gas.
Description of drawings
Fig. 1 makes the method flow diagram of surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane for the present invention;
Fig. 2 makes the process chart of surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane for the present invention;
Among Fig. 2: 1 is piezoelectric base unit (piezoelectric monocrystal or film), and 2 is interdigital transducer IDT (Au or Pt), and 3 is the metallic film (Au or Pt etc.) on the propagation path, and 4 is photoresist, and 5 is sensitive membrane.
Embodiment
For making the object of the invention, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, to further explain of the present invention.
The method of this making surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane provided by the invention is in the manufacture process of sonic surface wave gas sensors, on a delay line of two delay line type oscillators, passes through electron beam evaporation TiO
2Make surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane with the composite material of CuPc.This titanium dioxide doping CuPc sensitive membrane be by TiO2 doped with Cu Pc as sensitive material, and form through mixing, compacting, electron beam evaporation and stripping photoresist.
As shown in Figure 1, Fig. 1 makes the method flow diagram of surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane for the present invention.This method is by TiO
2Doped with Cu Pc is as sensitive material, through mixing and compacting formation TiO
2With the CuPc composite material, this TiO of electron beam evaporation
2With the CuPc composite material, and stripping photoresist forms titanium dioxide doping CuPc sensitive membrane.。
It is as shown in Figure 2 that the present invention makes the concrete technology of surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane, comprising:
Step 1: with 1: 1 TiO of 1 gram left and right sides mass ratio
2Mix at normal temperatures with CuPc, make TiO
2Composite material with CuPc;
Step 2: with machine with TiO
2Composite material compression moulding with CuPc;
Step 3: resist coating on substrate;
Step 4: the TiO that electron beam evaporation suppresses on photoresist
2With the CuPc composite material, with block TiO
2The target of being used as electron beam evaporation with the CuPc composite material evaporates.
Step 5: in chemical reagent, make photoresist dissolve the substrate bubble, thereby stripping photoresist forms titanium dioxide doping CuPc sensitive membrane.
The present invention is through electron beam evaporation TiO on a delay line of two delay line type oscillators
2With the composite material of CuPc, and stripping photoresist and form titanium dioxide doping CuPc sensitive membrane, NO detected as making
2The sonic surface wave gas sensors sensitive membrane of gas.
Embodiment
A kind of method of making surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane, this method comprises: with 1: 1 TiO of 1 gram left and right sides mass ratio
2Mix at normal temperatures with CuPc, make TiO
2With the composite material of CuPc, then with machine with TiO
2Composite material compression moulding with CuPc; With the film about the about 50nm to 200nm of composite material process electron-beam evaporation of compression moulding; At acetone or alcohol solution stripping photoresist, can form titanium dioxide doping CuPc sensitive membrane under the normal temperature behind the vacuum drying again.
Above-described specific embodiment; The object of the invention, technical scheme and beneficial effect have been carried out further explain, and institute it should be understood that the above is merely specific embodiment of the present invention; Be not limited to the present invention; All within spirit of the present invention and principle, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (3)
1. a method of making surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane is characterized in that this method is by TiO
2Doped with Cu Pc is as sensitive material, through mixing and compacting formation TiO
2With the CuPc composite material, this TiO of electron beam evaporation
2With the CuPc composite material, and stripping photoresist forms titanium dioxide doping CuPc sensitive membrane.
2. the method for making surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane according to claim 1 is characterized in that, and is said through mixing and compacting formation TiO
2With the CuPc composite material, comprising:
With 1: 1 TiO of mass ratio
2Mix at normal temperatures with CuPc, make TiO
2With the CuPc composite material; And
With machine with TiO
2With the compression moulding of CuPc composite material.
3. the method for making surface acoustic wave sensor titanium dioxide doping CuPc sensitive membrane according to claim 1 is characterized in that this TiO of said electron beam evaporation
2With the CuPc composite material, and stripping photoresist formation titanium dioxide doping CuPc sensitive membrane, comprising:
Resist coating on substrate;
The TiO that electron beam evaporation suppresses on photoresist
2With the CuPc composite material, with block TiO
2The target of being used as electron beam evaporation with the CuPc composite material evaporates; And
In chemical reagent, make photoresist dissolve the substrate bubble, thereby stripping photoresist form titanium dioxide doping CuPc sensitive membrane.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110155259XA CN102820867A (en) | 2011-06-10 | 2011-06-10 | Method for producing titanium dioxide doped copper phthalocyanine sensitive membrane of acoustic surface wave sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110155259XA CN102820867A (en) | 2011-06-10 | 2011-06-10 | Method for producing titanium dioxide doped copper phthalocyanine sensitive membrane of acoustic surface wave sensor |
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|---|---|
| CN102820867A true CN102820867A (en) | 2012-12-12 |
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|---|---|---|---|
| CN201110155259XA Pending CN102820867A (en) | 2011-06-10 | 2011-06-10 | Method for producing titanium dioxide doped copper phthalocyanine sensitive membrane of acoustic surface wave sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770470A (en) * | 2017-01-05 | 2017-05-31 | 中国科学院合肥物质科学研究院 | CuPc cuprous oxide composite gas sensor and preparation method thereof |
Citations (3)
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|---|---|---|---|---|
| US20100174168A1 (en) * | 2003-08-01 | 2010-07-08 | Dexcom, Inc. | System and methods for processing analyte sensor data |
| CN101865815A (en) * | 2010-06-11 | 2010-10-20 | 武汉理工大学 | Monitoring method and sensor thereof based on rust etching of grating metal plated with sensitive film |
| CN101975765A (en) * | 2010-09-03 | 2011-02-16 | 吉林大学 | Surface plasmon resonance sensing element and manufacturing method thereof |
-
2011
- 2011-06-10 CN CN201110155259XA patent/CN102820867A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100174168A1 (en) * | 2003-08-01 | 2010-07-08 | Dexcom, Inc. | System and methods for processing analyte sensor data |
| CN101865815A (en) * | 2010-06-11 | 2010-10-20 | 武汉理工大学 | Monitoring method and sensor thereof based on rust etching of grating metal plated with sensitive film |
| CN101975765A (en) * | 2010-09-03 | 2011-02-16 | 吉林大学 | Surface plasmon resonance sensing element and manufacturing method thereof |
Non-Patent Citations (3)
| Title |
|---|
| 于海燕等: "导电聚合物薄膜声表面波传感器敏感特性研究", 《传感器与微系统》, vol. 26, no. 2, 28 February 2007 (2007-02-28) * |
| 冯庆等: "TiO2-WO3复合薄膜型气敏传感器性质研究", 《真空科学与技术学报》, vol. 27, no. 4, 31 August 2007 (2007-08-31) * |
| 李月: "酞菁有机半导体气体传感器的研究", 《万方学位论文》, 7 August 2007 (2007-08-07) * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770470A (en) * | 2017-01-05 | 2017-05-31 | 中国科学院合肥物质科学研究院 | CuPc cuprous oxide composite gas sensor and preparation method thereof |
| CN106770470B (en) * | 2017-01-05 | 2019-02-26 | 中国科学院合肥物质科学研究院 | CuPc-cuprous oxide composite gas sensor and preparation method thereof |
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Application publication date: 20121212 |