CN102808175B - Novel large-area double-side superconductive film substrate clamp and application thereof - Google Patents
Novel large-area double-side superconductive film substrate clamp and application thereof Download PDFInfo
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- CN102808175B CN102808175B CN201210257912.8A CN201210257912A CN102808175B CN 102808175 B CN102808175 B CN 102808175B CN 201210257912 A CN201210257912 A CN 201210257912A CN 102808175 B CN102808175 B CN 102808175B
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- 239000000758 substrate Substances 0.000 title claims abstract description 51
- 239000000463 material Substances 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 230000033001 locomotion Effects 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 210000000078 claw Anatomy 0.000 abstract 6
- 239000010409 thin film Substances 0.000 description 26
- 239000010408 film Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- 239000000126 substance Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- -1 quartzy Substances 0.000 description 2
- 239000002887 superconductor Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000037237 body shape Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
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- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
The invention discloses a novel large-area double-side superconductive film substrate clamp, which consists of a main clamp and a secondary clamp. The main clamp consists of a circular clamp and a cylindrical supporting rod A, wherein two pairs of fixing claws A are arranged at the inner ring edge of the upper half circle of the circular clamp, the lower half circle of the circular clamp is thinner than the upper half circle, and two single fixing claws B are arranged at the inner ring edge of the lower half circle. Two fixing claws C are arranged at the inner ring edge of a semicircular groove of the secondary clamp; and the cylindrical supporting rod A is inserted into a cylindrical supporting rod B, and the fixing claws B and the fixing claws C form a pair of fixing claws. Meanwhile, the circular clamp is completely fixed in the semicircular groove. Fixing holes A and fixing holes B at the tail ends of the cylindrical supporting rod A and the cylindrical supporting rod B are respectively superposed, and the clamp is fixed on a motor through the two pairs of fixing holes. The clamp is easy to manufacture and convenient to disassemble and assemble, a substrate can be clamped stably in reciprocating and rotating motion, and the substrate is difficult to damage due to small movement and low stress in the clamp.
Description
Technical field
The present invention relates to a kind of substrate fixture that large area two-side superconducting thin film is used of preparing, be specifically related to a kind of large area substrates fixture that chemical solution method is prepared large area two-side superconducting thin film that is applicable to.
Background technology
Because the microwave surface resistance of high-temperature superconducting thin film is lower two more than the order of magnitude than plain metal, so the Superconducting Microwave device that application superconducting thin film is made has utmost point low-loss and extremely low noise good characteristic.Because large size superconducting thin film is convenient to the integrated of circuit, be the requisite basic raw material in microwave electronic device field, countries in the world are that production big area (51mm or larger diameter) high-temperature superconducting thin film has been paid huge effort.Up to the present, more ripe superconducting thin film technology of preparing mainly contains three kinds: a kind of is magnetron sputtering technique; A kind of is laser deposition technique; A kind of is electron beam evaporation technique.These three kinds of methods of preparing superconducting thin film, all need expensive vacuum apparatus, and not only production cost is high, and production efficiency is low, is difficult to realize extensive commercial application.In recent years, the adopting non-vacuum process such as chemical solution method because preparation cost is cheap, rapidly and efficiently, and foreign matter content is few, composition is even, preparation temperature is lower, be conducive to the features such as big area film forming and batch industrialization production, has caused interest and research widely in world wide.
Adopt chemical solution method to prepare large area two-side high-temperature superconducting thin film, generally need in the equipment for Heating Processing of particular design, carry out.Whole preparation process generally need to be reacted several hours under the hot environment of 600-900 ℃, will allow as required in the meantime different air-flows blow at a certain angle superconducting thin film, also needs air-flow to add wet treatment simultaneously.In order to prepare performance, composition, even structure, the good large area two-side superconducting thin film of two sides consistence, need to a kind ofly can firmly clamp thin slice sample and remain the fixture that sample at the uniform velocity rotates around its axis, and the non-volatile pollution of fixture, otherwise will have a strong impact on or reduce the superconductivity of superconducting thin film.
On the other hand, prepare large area two-side superconducting thin film substrate for use and mostly be LaAlO
3, MgO etc., expensive, again due to thinner thickness, stressed a little easy breakage in rotatablely moving, therefore requires substrate fixture clamping appropriateness, facilitates installing/dismounting sample, in motion and handling, is difficult for causing sample to damage.
Granted publication number is the utility model patent of CN2720624Y, discloses a kind of large area two-side superconducting thin film substrate fixture, the structure that adopts upper cover and base matrix to fasten, and the mode coordinating with screw and pin-and-hole fits together.Because used screw and pin-and-hole fit structure in fixture, so being applicable to making the material of fixture is the metallic substance such as high temperature resistant stainless steel, nickel-base alloy or titanium alloy, these metallic substance are more oxidized than being easier under the hot environment of 600-900 ℃ and logical oxygen, also than being easier to distortion, screw even can be difficult to dismounting with pin-and-hole together with being sintered.As everyone knows, the material such as quartzy, ceramic is compared with metallic substance such as high temperature resistant stainless steel, nickel-base alloys, more high temperature resistant and more stable under hot environment, more being difficult for producing volatilization and polluting, is therefore the material of preparing fixture that chemical solution method is prepared preferential choice for use in large area superconducting film.At present, also not seeing the chemical solution method that is applicable to being made into the material such as quartzy, ceramic prepares the substrate fixture of large area high temperature superconductive film and was in the news.
Summary of the invention
The object of this invention is to provide a kind ofly clamp appropriateness, be easy to dismounting, high temperature resistant indeformable, non-volatile pollution can keep sample evenly around the large area superconducting film substrate fixture of its axis rotation under driven by motor.
A kind of New Type Large Area double sided superconducting film of the present invention substrate fixture, consists of main clamp and sub-folder tool.
Described main clamp consists of circular clamp and round shape pressure pin A, wherein on the interior ring edge of circular clamp upper semi-circle, is laid with two couples of fixed jaw A, and the size of every couple of fixed jaw A, thickness, shape is identical and upper and lower symmetry arrangement.The Thickness Ratio upper semi-circle of circular clamp lower half circle is thinner, is laid with the fixed jaw B of two Cheng Dan in it on annulus edge, and these two fixed jaw B are identical with the fixed jaw A size shape on upper semi-circle, in the side of lower half circle, are provided with groove.
Described sub-folder tool, consists of semi-circular groove and round shape pressure pin B.In semi-circular groove, on annulus edge, be laid with two fixed jaw C, these two fixed jaw C are identical with fixed jaw A size, thickness, shape in main clamp.
The internal diameter of round shape pressure pin B in described sub-folder tool is slightly larger than the external diameter of round shape pressure pin A in described main clamp.
In the present invention a kind of main clamp of New Type Large Area double sided superconducting film substrate fixture and sub-folder tool be combined into like this one whole: the round shape pressure pin B that the round shape pressure pin A of main clamp is inserted to sub-folder tool is inner, the position of the semi-circular groove of the circular clamp of careful adjusting main clamp and sub-folder tool, the partner fixed jaw of upper and lower full symmetric of the fixed jaw C in the fixed jaw B that guarantees to become single in main clamp in circular clamp lower half circle and sub-folder tool on the interior annulus edge of semi-circular groove.Meanwhile, main clamp circular clamp is fixed in the semi-circular groove of sub-folder tool completely.Fixed via A and the fixed via B of round shape pressure pin A and round shape pressure pin B end overlap respectively, by these two pairs of fixed vias, fixture are fixed on motor, by driven by motor fixture, around its axis, are at the uniform velocity rotated or move reciprocatingly.
In the present invention, a kind of New Type Large Area double sided superconducting film substrate fixture is to clamp like this superconducting thin film substrate: first main clamp is pulled out from sub-folder tool to certain distance, with tweezers clamping substrate, by the groove on main clamp, be put in the circular clamp of main clamp, again the lower half circle of main clamp is shifted onto in the semi-circular groove of sub-folder tool, the position of the semi-circular groove of the circular clamp of careful adjusting main clamp and sub-folder tool, in the fixed jaw B that guarantees to become single in main clamp in circular clamp lower half circle and sub-folder tool, in semi-circular groove, the fixed jaw C(on annulus edge duplicates later) fixed jaw of the upper and lower full symmetric that partners.Meanwhile, main clamp circular clamp is fixed in the semi-circular groove of sub-folder tool completely.The fixed via of main clamp and sub-folder tool round shape pressure pin end overlaps respectively, by these two pairs of holes, fixture is fixed on motor, by driven by motor fixture, around its axis, is at the uniform velocity rotated or moves reciprocatingly.
In a kind of New Type Large Area double sided superconducting film of the present invention substrate fixture, described substrate and fixture are high temperature material and make, and as quartz, pottery, high temperature resistant stainless steel etc., and are not limited to above-mentioned materials.
A kind of New Type Large Area double sided superconducting film of the present invention substrate fixture is made simple, and easy accessibility can make substrate clamping in reciprocal and rotary movement firm, and substrate is mobile little in fixture, and stressed little difficult generation is damaged.
Therefore a kind of New Type Large Area double sided superconducting film of the present invention substrate fixture is not used any dog screw, can adopt multiple high temperature material to make, the material of high temperature resistant, the non-volatile pollution such as especially quartzy, ceramic.
Accompanying drawing explanation
Fig. 1 is the structural representation of main clamp in fixture provided by the invention;
Fig. 2 is the structural representation of sub-folder tool in fixture provided by the invention;
Fig. 3 is the one-piece construction schematic diagram of fixture provided by the invention;
Fig. 4 is the structural representation of fixture assembling provided by the invention and application process.
Embodiment
As shown in Fig. 1~4, a kind of New Type Large Area double sided superconducting film of the present invention substrate fixture, consists of main clamp and sub-folder tool.
Described main clamp as shown in Figure 1, consists of circular clamp 1 and round shape pressure pin A2, and the two is fixedly connected with.Wherein circular clamp 1 is comprised of upper semi-circle and lower half circle two portions, on the interior annulus edge of upper semi-circle, is laid with two couples of fixed jaw A3, and the size shape of every couple of fixed jaw A is identical and be upper and lower symmetry arrangement at upper semi-circle thickness direction.The Thickness Ratio upper semi-circle of circular clamp lower half circle is thinner, and the place that upper semi-circle is connected with lower half circle forms step.On the interior annulus edge of lower half circle, be laid with the fixed jaw B4 of two Cheng Dan, fixed jaw B4 and fixed jaw A3 size, thickness, shape are identical, and the upper plane of the upper plane of fixed jaw B4 and the fixed jaw of the below on fixed jaw A3 is positioned at same plane, like this, when two middle clampings of fixed jaws up and down that fixed jaw A3 is put in one end of substrate, can be held by fixed jaw B4 simultaneously.On circular clamp lower half circle side, there is a groove 5, be convenient to pick and place superconductor substrate with tweezers.The tip designs growth square body shape of described round shape pressure pin A2 has two fixed via A6 on cylinder.Main clamp is fixed on motor by fixed via A6.The direction of described fixed via A6 is vertical with the circular flat of circular clamp 1.Distance between paired two fixed jaw A3 of every couple is a bit larger tham the thickness of the substrate that needs fixed clamp, so that substrate is realized clamping in the middle of can putting into fixed jaw.
Described sub-folder tool, as shown in Figure 2, consists of semi-circular groove 7 and round shape pressure pin B8, between the two for being fixedly connected with.On the interior annulus edge of semi-circular groove 7, be laid with two fixed jaw C9, described fixed jaw C9 and the fixed jaw A3 in main clamp, the size of fixed jaw B4, thickness, shape are identical after main clamp and the assembling of sub-folder tool, described fixed jaw C9 can form the fixed jaw pair identical with fixed jaw A3 with fixed jaw B4, realizes gripping substrate.The end of described round shape pressure pin B8 has a fixed via B10, and the both sides of fixed via B10 (along round shape pressure pin, B8 is axial) is provided with two identical rectangular parallelepiped columns 11.Sub-folder tool is fixed on motor by fixed via B10, by rectangular parallelepiped column 11, is mounted in the pickup groove on motor, guarantees sub-folder tool under driven by motor and motor synchronous rotary.
The internal diameter of round shape pressure pin B8 in described sub-folder tool is slightly larger than the external diameter of the round shape pressure pin A2 described in main clamp.
The main clamp of a kind of New Type Large Area double sided superconducting film of the present invention substrate fixture and sub-folder tool be combined into like this one whole: as shown in Figure 4, the round shape pressure pin A2 of main clamp is inserted to round shape pressure pin 8 inside of sub-folder tool from the inner side of semi-circular groove 7, the position of circular clamp 1 and first circular groove 7 of sub-folder tool on careful adjusting main clamp, make the upside of sub-folder tool semi-circular groove 7 overlap completely with the lower half circle of main clamp circular clamp 1, guarantee the upper side plane of semi-circular groove 7 and the upper plane of circular clamp 1 upper semi-circle at grade simultaneously; On main clamp, in circular clamp 1 lower half circle, become the partner fixed jaw of upper and lower full symmetric of single fixed jaw B4 and the fixed jaw C9 on sub-folder tool semicircular ring inner edge, and the fixed jaw of fixed jaw A3(upside in the upper plane of fixed jaw C9 and circular clamp 1) upper plane in the same plane.Meanwhile, on main clamp, circular clamp 1 is fixed in the semi-circular groove 7 of sub-folder tool completely, can guarantee that like this main clamp and sub-folder tool coordinate the steadiness of clamping superconductor substrate, guarantee that both do synchronous rotary or to-and-fro movement under driven by motor simultaneously.On main clamp, the fixed via B10 of the fixed via A6 of round shape pressure pin A2 end and sub-folder tool round shape pressure pin B8 end overlaps respectively, by these two pairs of fixed vias, whole fixture is fixed on motor, by rectangular parallelepiped column 11, be mounted in the pickup groove on motor simultaneously, further guarantee that whole fixture does at the uniform velocity rotation or to-and-fro movement by driven by motor around its axis.
A kind of New Type Large Area double sided superconducting film of the present invention substrate fixture is to clamp like this superconducting thin film substrate: first main clamp is pulled out from sub-folder tool to certain distance, with tweezers clamping substrate, by the groove 5 on main clamp, be put in the circular clamp 1 on main clamp, guarantee that substrate is put between the fixed jaw A3 of circular clamp 1 and the pawl B4 that is fixed holds simultaneously, again main clamp is shifted onto in the semi-circular groove 7 of sub-folder tool, the position of careful adjusting main clamp circular clamp 1 and sub-folder tool semi-circular groove 7, make the upside of sub-folder tool semi-circular groove 7 overlap completely with the lower half circle of main clamp circular clamp 1, guarantee the upper side plane of semi-circular groove 7 and the upper plane of circular clamp 1 upper semi-circle at grade simultaneously, in main clamp circular clamp 1 lower half circle, become the partner fixed jaw of upper and lower full symmetric of single fixed jaw B4 and the fixed jaw C9 on sub-folder tool semicircular ring inner edge, and the fixed jaw of fixed jaw A3(upside in the upper plane of fixed jaw C9 and circular clamp 1) upper plane in the same plane.The fixed via B10 of the fixed via A6 of main clamp pressure pin A2 end and sub-folder tool round shape pressure pin B8 end overlaps respectively, by these two pairs of fixed vias, fixture is fixed on motor, by rectangular parallelepiped column 11, be mounted in the pickup groove on motor, by driven by motor fixture, around its axis, at the uniform velocity rotated or to-and-fro movement.
While taking out sample, first main clamp is pulled out from sub-folder tool to certain distance, with tweezers, by groove 5, substrate is pressed from both sides out.Embodiment mono-:
The substrate that scribbles superconducting thin film is packed in superconducting thin film substrate fixture provided by the invention, at chemical solution method, prepare in the required heat treatment furnace of superconducting thin film, 600-900 ℃ of warm area, by driven by motor fixture around its axis continuous rotation 60 hours at the uniform velocity, superconducting thin film substrate is excellent, and the superconducting thin film superconductivity of preparing is good.
Embodiment bis-:
The substrate that scribbles superconducting thin film is packed in superconducting thin film substrate fixture provided by the invention, at chemical solution method, prepare in the required heat treatment furnace of superconducting thin film, 600-900 ℃ of warm area, by driven by motor substrate fixture to-and-fro movement 60 hours, superconducting thin film substrate is excellent, and the superconducting thin film superconductivity of preparing is good.
Claims (6)
1. a New Type Large Area double sided superconducting film substrate fixture, is characterized in that: main clamp and sub-folder tool, consist of;
Described main clamp consists of circular clamp and round shape pressure pin A, and the two is fixedly connected with; Wherein on the interior ring edge of circular clamp upper semi-circle, be laid with two couples of paired fixed jaw A; The Thickness Ratio upper semi-circle of circular clamp lower half circle is thin, is laid with the fixed jaw B of two Cheng Dan in lower half circle on annulus edge, has a groove on lower half circle side; Described sub-folder tool consists of semi-circular groove and round shape pressure pin B, and the two is fixedly connected with; In semi-circular groove, on annulus edge, be laid with two fixed jaw C;
The internal diameter of described round shape pressure pin B is larger than the external diameter of round shape pressure pin A; When described round shape pressure pin A inserts in round shape pressure pin B from semi-circular groove end, the lower half circle of described circular clamp just embeds in the semi-circular groove of sub-folder tool, becomes in single fixed jaw B and sub-folder tool the partner fixed jaw of upper and lower full symmetric of the fixed jaw C on annulus edge in semi-circular groove in main clamp in circular clamp lower half circle; Fixed via B on fixed via A on round shape pressure pin A and round shape pressure pin B overlaps.
2. a kind of New Type Large Area double sided superconducting film substrate fixture according to claim 1, it is characterized in that: described main clamp and sub-folder tool are fixed on motor by fixed via A and fixed via B, by driven by motor fixture, around its axis, are at the uniform velocity rotated or move reciprocatingly.
3. a kind of New Type Large Area double sided superconducting film substrate fixture according to claim 1, it is characterized in that: the fixed via B on described round shape pressure pin B, both sides at the fixed via B of a side are provided with two identical rectangular parallelepiped columns, main clamp and sub-folder tool are arranged on motor, and rectangular parallelepiped column is mounted in the pickup groove on motor.
4. a kind of New Type Large Area double sided superconducting film substrate fixture according to claim 1, is characterized in that: the size shape of the fixed jaw B of two described Cheng Dan and described paired fixed jaw A is identical; Identical and the upper and lower symmetry arrangement of two fixed jaw size shape in paired fixed jaw A; Two fixed jaw C on sub-folder tool are identical with fixed jaw B size shape with the fixed jaw A in main clamp, and the upper plane of the upper plane of fixed jaw B and the fixed jaw of the below on fixed jaw A is positioned at same plane, and in the upper plane of fixed jaw C and circular clamp, the upper plane of the fixed jaw of fixed jaw A upside is in the same plane.
5. a kind of New Type Large Area double sided superconducting film substrate fixture according to claim 1, is characterized in that: described substrate and fixture are resistant to elevated temperatures quartz, pottery and high temperature resistant stainless steel material.
6. the application of a kind of New Type Large Area double sided superconducting film substrate fixture according to claim 1, it is characterized in that: first main clamp is pulled out from sub-folder tool to certain distance, with tweezers clamping substrate, by the groove on main clamp, be put in the circular clamp of main clamp, again the lower half circle of main clamp is shifted onto in the semi-circular groove of sub-folder tool, regulate the position of the circular clamp of main clamp and the semi-circular groove of sub-folder tool, the partner fixed jaw of upper and lower full symmetric of fixed jaw C in the fixed jaw B that guarantees to become single in main clamp in circular clamp lower half circle and sub-folder tool on the interior annulus edge of semi-circular groove, meanwhile, main clamp circular clamp is fixed in the semi-circular groove of sub-folder tool completely, fixed via A and the B of main clamp and sub-folder tool round shape pressure pin end overlap respectively, by these two pairs of fixed vias, fixture are fixed on motor, by driven by motor fixture, around its axis, are at the uniform velocity rotated or move reciprocatingly.
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CN201210257912.8A CN102808175B (en) | 2012-07-24 | 2012-07-24 | Novel large-area double-side superconductive film substrate clamp and application thereof |
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CN201210257912.8A CN102808175B (en) | 2012-07-24 | 2012-07-24 | Novel large-area double-side superconductive film substrate clamp and application thereof |
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CN103117170B (en) * | 2013-02-01 | 2015-04-22 | 中国科学院电工研究所 | Axial forcing device and adjustment method for winding displacement of superconducting coil |
CN105734564B (en) * | 2016-03-28 | 2018-06-26 | 北京鼎臣世纪超导科技有限公司 | Multi-disc large area single or double superconducting thin film substrate fixture |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2150290Y (en) * | 1993-03-29 | 1993-12-22 | 陈哲谋 | Handcuffs with improved structure |
JP2005180933A (en) * | 2003-12-16 | 2005-07-07 | Topcon Corp | Surface inspection device |
CN2720624Y (en) * | 2004-08-17 | 2005-08-24 | 北京有色金属研究总院 | Large-area double-side supercnoductive film base-piece clamp |
CN101661769A (en) * | 2008-08-27 | 2010-03-03 | 广明光电股份有限公司 | Disc clamping device |
CN201437371U (en) * | 2009-06-03 | 2010-04-14 | 富奥汽车零部件股份有限公司 | Steering gear fixing jaw |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4866020B2 (en) * | 2005-05-02 | 2012-02-01 | 大日本スクリーン製造株式会社 | Heat treatment equipment |
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2012
- 2012-07-24 CN CN201210257912.8A patent/CN102808175B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2150290Y (en) * | 1993-03-29 | 1993-12-22 | 陈哲谋 | Handcuffs with improved structure |
JP2005180933A (en) * | 2003-12-16 | 2005-07-07 | Topcon Corp | Surface inspection device |
CN2720624Y (en) * | 2004-08-17 | 2005-08-24 | 北京有色金属研究总院 | Large-area double-side supercnoductive film base-piece clamp |
CN101661769A (en) * | 2008-08-27 | 2010-03-03 | 广明光电股份有限公司 | Disc clamping device |
CN201437371U (en) * | 2009-06-03 | 2010-04-14 | 富奥汽车零部件股份有限公司 | Steering gear fixing jaw |
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