CN102765600A - Semiconductor element transferring device with gap being adjustable and detection machine table provided with semiconductor element transferring device with gap being adjustable - Google Patents
Semiconductor element transferring device with gap being adjustable and detection machine table provided with semiconductor element transferring device with gap being adjustable Download PDFInfo
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- CN102765600A CN102765600A CN2011101131976A CN201110113197A CN102765600A CN 102765600 A CN102765600 A CN 102765600A CN 2011101131976 A CN2011101131976 A CN 2011101131976A CN 201110113197 A CN201110113197 A CN 201110113197A CN 102765600 A CN102765600 A CN 102765600A
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- semiconductor element
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- spacing
- shifting apparatus
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 133
- 238000001514 detection method Methods 0.000 title claims abstract description 9
- 239000000463 material Substances 0.000 claims description 28
- 230000001360 synchronised Effects 0.000 claims description 7
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 230000000875 corresponding Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000003247 decreasing Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 238000007599 discharging Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 230000001737 promoting Effects 0.000 description 1
- 230000001105 regulatory Effects 0.000 description 1
Abstract
The invention relates to a semiconductor element transferring device with a gap being adjustable and a detection machine table provided with the semiconductor element transferring device with the gap being adjustable, wherein the semiconductor element transferring device with the gap being adjustable comprises an actuator and a connecting rod assembly driven by the actuator; the connecting rod assembly further comprises a plurality of connecting rods and a plurality of transferring arms; the connecting rods are pivoted with one another and are driven synchronously by the actuator to change included angles formed by adjacent connecting rods; the transferring arms are arranged on mutually-different connecting rods, thereby moving with the connecting rods, so that distance between every adjacent two transferring arms is changed in a way of keeping a same gap; therefore, when the detection machine table needs to change a detected semiconductor element, the gaps of the transferring arms can be simply and accurately changed according to the size of a semiconductor element to be detected; and in the way, not only is the manufacturing cost for the machine table decreased, but also the transferring work can be performed more smoothly.
Description
[technical field]
The invention relates to a kind of semiconductor element shifting apparatus, the semiconductor element shifting apparatus that especially a kind of spacing is adjustable and have this Device Testing board.
[background technology]
The method of present measuring semiconductor element; Mainly can be divided into the test of virtual test and real border; Whether unpredictably wherein virtual test is meant to the different qualities of each semiconductor element, writes out specific test software according to predetermined circuit layout, use and for example confirm the short circuit or open circuit and whether meet predetermined logical relation of pin interdigit; The test of real border then is by the public plate that has complete effect; Only stay semiconductor element to be measured position white; Each semiconductor element to be measured is mended this blank position in turn; Test this moment, whether public plate can normal operation, thereby the function of confirming this semiconductor element to be measured is normal, and according to test result as The classification basis.In the time will testing different semiconductor element, the software that only need replace different public plates and test gets final product.
For promoting efficient; At present tester table is carried and measured all automations of semiconductor element process to be measured, and is as shown in Figure 1, and tester table carries out semiconductor element 1 when carrying out the transfer operation; Mainly accomplish by shifting apparatus 2; A kind of common shifting apparatus 2 comprises a plurality of transporting arms 21 and is separately positioned on the many groups suction nozzle 22 on each transporting arms 21, sees through each suction nozzle 22 and draws a semiconductor element 1 to be measured respectively, transfer load to preposition by transporting arms 21 again after; Suction nozzle 22 just discharges semiconductor element 1, and carries out the absorption transfer operation of next echelon.
Yet it is as shown in Figure 2; Semiconductor element 1 has different size dimensions; And each have cooresponding material casket; Also because semiconductor element 1 size difference, the storage tank spacing in 1 materials casket of large-sized semiconductor element, different with the material casket storage tank spacing of undersized semiconductor element 1 again naturally.If in the time of will detecting the semiconductor element of different size, being subject to known suction nozzle is to be fixed on the transporting arms, the distance between each suction nozzle must regulate, change relevant tool with manpower and could accomplish.This kind adjusting is not only consuming time takes a lot of work, and drags slow production efficiency, and manual operation is more frequent; The probability of makeing mistakes is higher, in case the operating personal leakage wherein a ring do not lock or regulate, will cause the transfer failure or draw problem such as positional fault; As shown in Figure 3, in case the semiconductor element of being placed has crooked situation, not only can cause this semiconductor element when pressurized, to damage; Also will make tester table by forced-stopping machine, and remove with manpower once again and damage element and cleaning board.So, output efficiency is reduced, also make cost thereby meaningless raising.
Also have the dealer that the manual shift chute is set on tool, use and reduce operating personal and change bothering of tool, but so design still must manual operation, and regulate increased frequency, the careless omission chance improves relatively; Other has the people to be directed against each transporting arms and suction nozzle, and independently control apparatus is set respectively; Yet these designs certainly will increase the board cost, and the synchronism of each control apparatus can't guarantee that in case differ apart from regulating step to each other, puzzlement that is caused and infringement possibly more be far more than traditional board.Therefore, how reaching rapidly and accurately and regulate, reduce leakage, make to detect and regulate full automation, is emphasis of the present invention.
[summary of the invention]
One of the present invention purpose is to provide a kind of and has a plurality of connecting rods that articulate each other, and can drive the adjustable semiconductor element shifting apparatus of spacing of the angle synchronous change of each connecting rod and adjacent connecting rod.
Another object of the present invention is to provide a kind of adjustable semiconductor element shifting apparatus of spacing that the transporting arms of being located on the different connecting rod can keep identical distance to change synchronously that has.
A purpose more of the present invention is to provide a kind of can and change to each other angle of connecting rod according to semiconductor element spread length, driving, make transporting arms distance to each other change and meet the adjustable semiconductor element shifting apparatus of spacing of semiconductor element spread length.
Another purpose of the present invention be to provide a kind of can be according to the semiconductor component detecting machine platform with the adjustable semiconductor element shifting apparatus of spacing of the spread length adjustment of semiconductor element.
Another purpose of the present invention is to provide a kind of probability of hang-up can significantly to be reduced the semiconductor component detecting machine platform with the adjustable semiconductor element shifting apparatus of spacing that output efficiency is promoted.
The adjustable semiconductor element shifting apparatus of spacing of a kind of semiconductor element that discloses according to the present invention supplies transfer simultaneously a plurality of to each other apart from identical semiconductor element, and wherein this spacing adjustment shifting apparatus comprises: an actuator; And one group of connecting rod assembly that receives this driver drives, comprising: many have the pivot end that two confessions and neighbor articulate respectively and receive the connecting rod of the adjacent angle between the two of this actuator driven in synchronism change; Wherein, this two pivot ends spacing of aforementioned each connecting rod is all identical; And the above-mentioned semiconductor element of the equidirectional absorption of a plurality of confessions, and be separately positioned on the transporting arms of different each other above-mentioned connecting rod each other with uniform distances.
And a kind of semiconductor component detecting machine platform with the adjustable semiconductor element shifting apparatus of spacing according to the present invention discloses supplies a plurality of semiconductor elements of synchronous detection, and this detection board comprises: a pedestal; One is formed at this pedestal, supplies to put the material feeding region of going into charging tray that at least one is formed with a plurality of semiconductor elements to be measured of confession carrying; One is formed at this pedestal, supplies to put a plurality of discharge zones that are formed with the discharge port plate that supplies a plurality of intact survey semiconductor elements of carrying; One group has a plurality of test benches and is arranged at the detecting device on this pedestal; And one group this material feeding region, this detecting device, and this discharge zone between move the adjustable semiconductor element shifting apparatus of spacing of above-mentioned semiconductor element, comprising: an actuator; One group of connecting rod assembly that receives this driver drives has: many have the pivot end that two confessions and neighbor articulate respectively and receive this actuator driven in synchronism to change the connecting rod of adjacent angle between the two; Wherein, this two pivot ends spacing of aforementioned each connecting rod is all identical; And the above-mentioned semiconductor element of the equidirectional absorption of a plurality of confessions, and be separately positioned on the transporting arms of different each other above-mentioned connecting rod each other with uniform distances.
Because the semiconductor element shifting apparatus that the spacing of semiconductor element that this case discloses is adjustable and detect board is through driver drives, make angle change between each connecting rod and adjacent connecting rod; And transporting arms likewise receives interlock, the distance between the synchronous change transporting arms, therefore; The semiconductor element shifting apparatus that this case spacing is adjustable can adjust according to the distance that semiconductor element is arranged; Let the semi-conductive transfer operation can be more smooth, and the distance between the adjustment transporting arms adjust synchronously, so distance to each other is all identical; Can error not arranged and make semiconductor element be drawn into position improperly because of transporting arms spacing each other; Make the transfer operation can be convenient and efficient, output efficiency and yield rate thereby lifting, and reach all above-mentioned purposes.
[description of drawings]
Fig. 1 is the scheme drawing of the shifting apparatus of known semiconductor element test board;
Fig. 2 is that the semiconductor element of different size is arranged in the scheme drawing in the exclusive material casket respectively;
Fig. 3 is that the known shifting apparatus transfer of Fig. 1 semiconductor element presses down the scheme drawing that damages in the test process;
Fig. 4 is the scheme drawing of the preferred embodiment of the adjustable semiconductor element shifting apparatus of the spacing of this case semiconductor element;
Fig. 5 is the scheme drawing after the adjustable semiconductor element shifting apparatus of Fig. 4 spacing is adjusted spacing;
Fig. 6 is the birds-eye view of board of first preferred embodiment of the semiconductor component detecting machine platform of this case;
Fig. 7 is the front elevation of the board of Fig. 6;
Fig. 8 is the birds-eye view of the board of Fig. 6, is that the explanation shuttle car receives to drive the correspondence that moves to right and moves to switch, draws the semiconductor element to be measured that shuttle car carries by the transporting arms corresponding to the test shifting apparatus of switch
Fig. 9 is the birds-eye view of the board of Fig. 6; Be after explanation semiconductor element to be measured is transferred load to the test position of test bench by shuttle car; The transporting arms of test shifting apparatus descends and to draw semiconductor element to be measured, and is compressed on the test bench and tests, and will survey semiconductor element and retract on the shuttle car;
Figure 10 is the birds-eye view of the board of Fig. 6, is that the explanation shuttle car is moved to right to discharge zone by driving, and the semiconductor element of survey that draws the shuttle car carrying to the transporting arms of discharging shifting apparatus is provided, and be released into cooresponding classification material casket.
[main element nomenclature]
1 semiconductor element
11 semiconductor elements to be measured
12 have surveyed semiconductor element
2 shifting apparatus
21,322,322
1, 322
2, 322
3Transporting arms
22,3221,3221
1, 3221
2, 3221
3Suction nozzle
3220
1The adjustment part
31 actuators
311 axle drive shafts
32 connecting rod assemblies
321 connecting rods
3211 pivot ends
The semiconductor element shifting apparatus that 3 spacings are adjustable
3
1The test shifting apparatus
3
2The pan feeding shifting apparatus
3
3The discharging shifting apparatus
4 pedestals
5 material feeding regions
51 go into charging tray
6 discharge zones
61 classification charging trays
7 detecting devices
71 test benches
8 shuttle cars
80 load bearing seats
9 treatment classification devices
[specific embodiment]
About aforementioned and other technology contents, characteristics and effect of the present invention, in the detailed description of the preferred embodiment of following cooperation Figure of description, can clearly appear.
The preferred embodiment of the semiconductor element shifting apparatus that the spacing of this case semiconductor element is adjustable; As shown in Figure 4, include actuator 31 and connecting rod assembly 32, wherein connecting rod assembly 32 more includes many connecting rods 321 and a plurality of transporting arms 322; And each connecting rod 321 has the pivot end 3211 that two confessions and adjacent connecting rod 321 articulate respectively; Spacing between every connecting rod 321 pivot end 3211 is all identical, and transporting arms 322 then is different each other respectively being arranged on the connecting rod 321, and is keeping identical spacing to each other; 31 of actuators more comprise an axle drive shaft 311 in this example; For drive link assembly 32, make the angle of 321 on each connecting rod 321 and adjacent connecting rod be able to synchronous change, and this routine transporting arms 322 have a suction nozzle 3221 that supplies attraction/release semiconductor element more respectively.
When the adjustable semiconductor element shifting apparatus of spacing that uses this case is positioned over the transfer operation of expecting the semiconductor element in the casket; Can be according to the size adjustment transporting arms distance to each other of semiconductor elements all in the material casket; In the lump with reference to shown in Figure 5; At first be connected to the axle drive shaft 311 of connecting rod assembly 32, make that each connecting rod 321 is affected and synchronous change angle to each other, and also keep moving of equidistance between each transporting arms 322 by the driving of actuator 31; Make the adjustable semiconductor element shifting apparatus of spacing of this case to adjust, make the transfer operation more convenient according to the distance that semiconductor element is arranged.
Though use suction nozzle to draw semiconductor element in this example with negative pressure/release negative pressure mode, be familiar with present technique person and also can use modes such as for example clamping to carry out transfer, all do not hinder enforcement in this case.
Please in the lump with reference to figure 6 and shown in Figure 7, first preferred embodiment for the semiconductor component detecting machine platform of this case comprises pedestal 4, semiconductor element shifting apparatus 3, material feeding region 5, discharge zone 6, detecting device 7, shuttle car 8 and treatment classification device 9 that spacing is adjustable.Wherein, be formed with the material feeding region 5 and the discharge zone 6 that supply to put the material casket on the pedestal, wherein in the material casket at material feeding region 5 places; Carry in advance and be placed with a plurality of semiconductor elements to be measured 11, so name this to locate to be material feeding region, discharge zone 6 then is to supply to put a plurality of material caskets respectively; Each material casket is corresponding respectively to be carried and has the semiconductor element that certain specific electrical properties and classification to be tested finish; For ease of explanation, the material casket that is positioned at material feeding region 5 in this definition is for going into charging tray 51, and in this example; Going into charging tray 51 is to be placed in material feeding region 5 with the mode of stacking, and a plurality of material caskets that are positioned at discharge zone 6 are classification charging tray 61.
In this example; The detecting device 7 that is arranged on the pedestal 4 comprises a treatment classification device 9 and four test benches 71; And an exclusive adjustable semiconductor element shifting apparatus of being responsible for 3 of spacing is set, confession moves into test bench 71 with semiconductor element or oppositely shifts out, for ease of explanation; The semiconductor element shifting apparatus 3 adjustable in the spacing at this this place of definition is test shifting apparatus 31, and can see through suction nozzle 3221
1Apply vacuum suction/release negative pressure mode and draw/discharge semiconductor element 11 to be measured, and each suction nozzle 3221 of testing of responsible transfer
1More set up an adjustment part 3220
1, adjustment part 3220
1Then can carry out adjustment according to demand; Especially when carrying out semiconductor element test; Keep semiconductor element 11 to be measured to be in a predetermined temperature, to test out semiconductor element whether can also normal operation under hot environment that simulates or low temperature state.And test result can reach treatment classification device 9 as The classification basis.
And the material feeding region 5 of this routine pedestal 4 and discharge zone 6 respectively are respectively equipped with a semiconductor element shifting apparatus 3 that spacing is adjustable.For ease of explanation, the adjustable semiconductor element shifting apparatus 3 of spacing that is positioned at material feeding region 5 in this definition is pan feeding shifting apparatus 3
2, be discharging shifting apparatus 33 and be positioned at the spacing of discharge zone 6 adjustable semiconductor element shifting apparatus 3, and a shuttle car 8 then be set in the material feeding region 5 and 6 of the discharge zones of pedestal 4, and shuttle car 8 part of pass through just in time can intersection to testing shifting apparatus 3
1Draw or discharge the switch of semiconductor element from shuttle car 8, can correspond to test bench 71 when making shuttle car 8 be positioned at switch.Therefore, the mobile approach of the shuttle car in this example 8 on board is to run through above-mentioned material feeding region, switch, reach discharge zone and come and go mobile.
Flow process such as Fig. 6 of carrying out the transfer operation are extremely shown in Figure 10, at first with each transporting arms 322
1, 322
2, 322
3The spacing of arranging according to semiconductor element 11 to be measured adjusts, again with pan feeding shifting apparatus 3
2Transporting arms 322
2Move to correspondence and go into the position of charging tray 51, by suction nozzle 3221
2From go into charging tray 51, draw semiconductor element 11 to be measured; Transfer also is in place on the load bearing seat 80 of the shuttle car 8 of material feeding region 5; The shuttle car 8 of Fig. 6 can move to position as shown in Figure 8 subsequently; Move to right when shuttle car 8 receives to drive, make load bearing seat 80 correspondences move to switch, by test shifting apparatus 3 corresponding to switch
1Transporting arms 322
1With the semiconductor element to be measured 11 that is carried on the load bearing seat 80 by suction nozzle 3221
1Draw.Next the semiconductor element to be measured 11 of Fig. 8 can be moved into position as shown in Figure 9, after semiconductor element 11 to be measured is transferred load to the test position of test bench 71, and transporting arms 322 shown in Figure 7
1To descend, make by suction nozzle 3221
1The semiconductor element to be measured 11 that draws is compressed on the test bench 71 to be tested, and simulates specific environment simultaneously, by adjustment part 3220
1Adjustment applies predetermined temperature to semiconductor element 11 to be measured, and test result is transferred to treatment classification device 9, then again by transporting arms 322
1To survey semiconductor element 12 and move back to switch and discharge, and make and survey semiconductor element 12 and drop on the load bearing seat 80.
Shown in figure 10 at last, shuttle car 8 receives to drive and moves to right to discharge zone 6, and provides to discharging shifting apparatus 3
3Transporting arms 322
3According to the instruction of treatment classification device 9, by suction nozzle 3221
3Draw and survey semiconductor element 12 and be released in the cooresponding classification charging tray 61 pan feeding shifting apparatus 3
2Transporting arms 322
2Move to correspondence again and go into the position of charging tray 51, and proceed to detect and the transfer operation
Via the said structure design, when the transfer of carrying out semiconductor element and detection operation, can adjust according to the distance that semiconductor element is arranged; See through driver drives and change folded angle between each connecting rod and adjacent connecting rod; Therefore transporting arms also can receive interlock and synchronous change, no matter so transporting arms distance to each other be to adjust how many distances, it is identical that spacing each other all keeps; Make when drawing semiconductor element; Can draw smoothly, can error not arranged and draw semiconductor element in the position improperly, cause absorption unstable because of transporting arms spacing each other in deflection; Also therefore; Further make the semiconductor element transfer press down to the desired location when placing, be difficult for dropping halfway or the deflection storing, avoid causing compressing to damage semiconductor element; Therefore more significantly reduce the probability that Suspend Job is handled ruined semiconductor element; Make the automation testing process not hinder, carry out synchronously efficiently semiconductor element transfer, test, with classification, promote the purpose of detection efficiency and output efficiency.
The above; Preferred embodiment only of the present invention; When can not limiting the scope that the present invention implements with this, promptly everyly change and modification according to claims of the present invention and description of the invention simple equivalent that content is done, all still belong in the scope that patent of the present invention contains.
Claims (7)
1. the semiconductor element shifting apparatus that spacing is adjustable is characterized in that, supplies transfer simultaneously a plurality of to each other apart from identical semiconductor element, and wherein this shifting apparatus comprises:
Actuator; And
Receive the connecting rod assembly of this driver drives, comprising:
Many have the pivot end that two confessions and neighbor articulate respectively and receive this actuator driven in synchronism to change the connecting rod of adjacent angle between the two; Wherein, this two pivot ends spacing of aforementioned each connecting rod is all identical; And
The above-mentioned semiconductor element of the equidirectional absorption of a plurality of confessions, and be separately positioned on the transporting arms of different each other above-mentioned connecting rod each other with uniform distances.
2. the semiconductor element shifting apparatus that spacing as claimed in claim 1 is adjustable is characterized in that, wherein this actuator has an axle drive shaft that pushes away/draw this connecting rod assembly.
3. the semiconductor element shifting apparatus that spacing as claimed in claim 1 is adjustable is characterized in that, wherein above-mentioned transporting arms has the suction nozzle of the above-mentioned semiconductor element of one group of attraction/release respectively.
4. the semiconductor element shifting apparatus that spacing as claimed in claim 3 is adjustable is characterized in that, wherein above-mentioned suction nozzle has at least one confession and applies the adjustment part that a predetermined temperature is given above-mentioned semiconductor element.
5. a semiconductor component detecting machine platform supplies a plurality of semiconductor elements of synchronous detection, it is characterized in that this detection board comprises:
A pedestal;
Be formed at this pedestal, supply to put the material feeding region of going into charging tray that at least one is formed with a plurality of semiconductor elements to be measured of confession carrying;
Be formed at this pedestal, supply to put a plurality of discharge zones that are formed with the discharge port plate that supplies a plurality of intact survey semiconductor elements of carrying;
Have a plurality of test benches and be arranged at the detecting device on this pedestal; And
This material feeding region, this detecting device, and this discharge zone between move the adjustable semiconductor element shifting apparatus of spacing of above-mentioned semiconductor element, comprising:
Actuator; And
Receive the connecting rod assembly of this driver drives, have:
Many have the pivot end that two confessions and neighbor articulate respectively and receive this actuator driven in synchronism to change the connecting rod of adjacent angle between the two; Wherein, this two pivot ends spacing of aforementioned each connecting rod is all identical; And
The above-mentioned semiconductor element of the equidirectional absorption of a plurality of confessions, and be separately positioned on the transporting arms of different each other above-mentioned connecting rod each other with uniform distances.
6. semiconductor component detecting machine platform as claimed in claim 5 is characterized in that, more comprises corresponding above-mentioned test bench, also supplies to carry above-mentioned semiconductor element to be measured to this detecting device and carry the shuttle car from the intact survey semiconductor element of this detecting device outside.
7. semiconductor component detecting machine platform as claimed in claim 5; It is characterized in that; More comprise one group in order to receive this test bench test result; And drive the adjustable semiconductor element shifting apparatus of this spacing above-mentioned test is finished semiconductor element by this discharge zone, be released into the treatment classification device of aforementioned corresponding discharge port plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101131976A CN102765600A (en) | 2011-05-03 | 2011-05-03 | Semiconductor element transferring device with gap being adjustable and detection machine table provided with semiconductor element transferring device with gap being adjustable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101131976A CN102765600A (en) | 2011-05-03 | 2011-05-03 | Semiconductor element transferring device with gap being adjustable and detection machine table provided with semiconductor element transferring device with gap being adjustable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102765600A true CN102765600A (en) | 2012-11-07 |
Family
ID=47093221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101131976A Pending CN102765600A (en) | 2011-05-03 | 2011-05-03 | Semiconductor element transferring device with gap being adjustable and detection machine table provided with semiconductor element transferring device with gap being adjustable |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102765600A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103112006A (en) * | 2013-01-02 | 2013-05-22 | 北京工业大学 | Single-driving equal-interval synchronous extending mechanism |
| CN105479487A (en) * | 2014-09-15 | 2016-04-13 | 鸿富锦精密工业（深圳）有限公司 | Variable-pitch device |
| CN105523378A (en) * | 2016-02-04 | 2016-04-27 | 哈尔滨新智达自动化成套装备有限公司 | Mechanism for grabbing and placing massive objects |
| CN106144578A (en) * | 2016-08-18 | 2016-11-23 | 中电智能卡有限责任公司 | A kind of chip module adsorbent equipment and Intelligent card package production line |
| CN106219221A (en) * | 2016-08-30 | 2016-12-14 | 吴中区横泾嘉运模具厂 | Lifting loading assemblies every magnetic lever bracket dish feed mechanism |
| CN107324256A (en) * | 2017-07-28 | 2017-11-07 | 泉州华硕实业有限公司 | Packing device for pump head to be automatically put into bottle |
| CN111547500A (en) * | 2019-01-18 | 2020-08-18 | 鸿劲精密股份有限公司 | Electronic component pitch changing device and operation classification equipment applying same |
| CN112520413A (en) * | 2020-12-11 | 2021-03-19 | 苏州乾鸣自动化科技有限公司 | Full-automatic aging test loading and unloading system and method |
| CN113533802A (en) * | 2021-09-17 | 2021-10-22 | 山东昊特自动化仪表有限公司 | Power-on test device for semiconductor manufacturing |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103112006B (en) * | 2013-01-02 | 2015-01-14 | 北京工业大学 | Single-driving equal-interval synchronous extending mechanism |
| CN103112006A (en) * | 2013-01-02 | 2013-05-22 | 北京工业大学 | Single-driving equal-interval synchronous extending mechanism |
| CN105479487A (en) * | 2014-09-15 | 2016-04-13 | 鸿富锦精密工业（深圳）有限公司 | Variable-pitch device |
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| CN106219221B (en) * | 2016-08-30 | 2018-07-17 | 朱洋 | Every the lifting loading assemblies of magnetic lever bracket disk feed mechanism |
| CN107324256A (en) * | 2017-07-28 | 2017-11-07 | 泉州华硕实业有限公司 | Packing device for pump head to be automatically put into bottle |
| CN111547500A (en) * | 2019-01-18 | 2020-08-18 | 鸿劲精密股份有限公司 | Electronic component pitch changing device and operation classification equipment applying same |
| CN111547500B (en) * | 2019-01-18 | 2022-01-04 | 鸿劲精密股份有限公司 | Electronic component pitch changing device and operation classification equipment applying same |
| CN112520413A (en) * | 2020-12-11 | 2021-03-19 | 苏州乾鸣自动化科技有限公司 | Full-automatic aging test loading and unloading system and method |
| CN112520413B (en) * | 2020-12-11 | 2022-04-22 | 苏州乾鸣半导体设备有限公司 | Full-automatic aging test loading and unloading system and method |
| CN113533802A (en) * | 2021-09-17 | 2021-10-22 | 山东昊特自动化仪表有限公司 | Power-on test device for semiconductor manufacturing |
| CN113533802B (en) * | 2021-09-17 | 2022-01-21 | 山东昊特自动化仪表有限公司 | Power-on test device for semiconductor manufacturing |
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Application publication date: 20121107 |